The impact of Spacer on Short Channel Effect and device degradation in Tri-Gate MOSFET (Tri-Gate MOSFET에 SPACER가 단채널 및 열화특성에 미치는 영향)
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- Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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- 2014.10a
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- pp.749-752
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- 2014