• 제목/요약/키워드: transparent conducting oxide(TCO)

검색결과 142건 처리시간 0.03초

Indium Zinc Tin turnary Transparent Conducting Oxide에서의 dopant 첨가에 따른 전기적 특성 (Electrical properties of Indium Zinc Tin tummy Transparent Conducting Oxide which doped impurities)

  • 서한;박정호;최병현;지미정;김세기;주병권;홍성표
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
    • /
    • pp.183-183
    • /
    • 2009
  • 본 연구에선 ITO에 사용되는 Indium의 양을 줄이기 위해 ITO와 유사한 성질을 보이는 조성인 Indium - Zinc - Tin Turnary compound를 연구하였다. 각 조성은 Indium - Zinc - Tin Turnary compound를 기본으로 하여 Zinc site에 이종원소인 Al2O3와 Ga2O3를 doping함에 따라 변화되는 전기적 특성을 살며보았다. 분석에 사용한 Ceramic pellet은 일반적인 Ceramic process를 거쳐 제작되었다. 각 조성의 전기적 특성은 TCR meter와 Hall effect analyser를 이용하여 측정하였고, X-ray diffraction measurements(XRD), Scanning Electron microscope(SEM)를 이용하여 결정학적 특성을 분석하였다.

  • PDF

연성소자용 투명산화물 박막의 기계적 특성 평가 (Mechanical Properties Evaluation of the Transparent Oxide Thin films for flexible Devices)

  • 이성훈;윤정흠;조상현;정재혜;정유정;이건환
    • 한국표면공학회:학술대회논문집
    • /
    • 한국표면공학회 2009년도 춘계학술대회 논문집
    • /
    • pp.175-176
    • /
    • 2009
  • 연성 기판을 기초로 하는 플렉서블 디스플레이 등의 연성 소자에 적용되는 TCO, 투습방지막의 기계적 특성을 시험하였다. 실제 사용 환경에서의 기계적 특성을 평가하기 위하여 굽힘시험과 인장시험을 적용하였다. PET 기판위에 PE-CVD 공정으로 성장된 실리콘 산화물 ($SiO_x$) 박막과 그 위에 스퍼터링 공정으로 성장된 투명 전도성 산화물 (TCO, Transparent Conducting Oxide) 박막의 시험 결과, 균열 생성 임계 변형량은 TCO 박막에 의해서 결정됨을 알 수 있었다. 따라서 향상된 기계적 특성을 얻기 위해서는 TCO 박막의 특성 제어가 필요하다.

  • PDF

Al-doped ZnO 투명 전도성 박막(TCO)의 전기적 광학적 특성 (Electrical and Optical Properties of Al-doped ZnO Thin Films)

  • 홍윤정;이규만;김인우
    • 반도체디스플레이기술학회지
    • /
    • 제6권3호
    • /
    • pp.35-39
    • /
    • 2007
  • ITO(Indium Tin Oxide) is the most attractive TCO(Transparent Conducting Oxide) materials for LCD, PDP, OLEDs and solar cell, because of their high optical transparency and electrical conductivity. However due to the shortage of indium resource, hard processing at low temperature, and decrease of optical property during hydrogen plasma treatment, their applications to the display industries are limited. Thus, recently the Al-doped ZnO(AZO) has been studied to substitute ITO. In this study, we have investigated the effect of different substrate temperature(RT, $150^{\circ}C$, $225^{\circ}C$, $300^{\circ}C$) and working pressure(10 mTorr, 20 mTorr, 30 mTorr, 80 mTorr) on the characteristics of AZO(2 wt.% Al, 98 wt.% ZnO) films deposited by RF-magnetron sputtering. We have obtained AZO thin films deposited at low temperature and all the deposited AZO thin films are grown as colunmar. The average transmittance in the visible wavelength region is over 80% for all the films and transmittance improved with increasing substrate temperature. Electrical properties of the AZO films improved with increasing substrate temperature.

  • PDF

증착두께 및 산소도입속도가 IZO 필름의 전기 및 광학적 특성에 미치는 영향 (Effects of Deposition Thickness and Oxygen Introduction Flow Rate on Electrical and Optical Properties of IZO Films)

  • 박성환;하기룡
    • 공업화학
    • /
    • 제21권2호
    • /
    • pp.224-229
    • /
    • 2010
  • Transparent conducting oxide (TCO) 박막은 평판 디스플레이 산업에 널리 사용되고 있다. 화학적으로 우수한 투명전도성 Indium Zinc Oxide (IZO) 필름은 Indium Tin Oxide (ITO) 필름의 대체 물질로 관심을 끌고 있다. 본 연구에서는 90 : 10 wt%의 $In_2O_3$와 ZnO를 혼합하여 만든 타겟으로 전자빔 증착법을 이용하여 polynorbornene (PNB) 기판 위에 IZO 박막을 제조하였다. UV/Visible spectrophotometer, 4-Point Probe를 이용하여 증착 두께와 산소도입 속도에 따른 IZO 필름의 전기적 및 광학적 특성을 연구하였으며, SEM, XRD 및 XPS를 이용하여 증착된 IZO의 구조적 특성 및 표면조성비를 연구하였다.

Fabrication of transparent conductive thin films with Ag mesh shape using the polystyrene beads monolayer

  • Jung, Taeyoung;Choi, Eun Chang;Hong, Byungyou
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
    • /
    • pp.313-313
    • /
    • 2016
  • Transparent conductive oxide (TCO) films have many disadvantages, such as rarity, possible exhaustion, process temperature limitations, and brittleness on a flexible substrate. In particular, as display technology moves toward flexible displays, TCO will become completely unsuitable due to its brittleness. To address theses issue, many researchers have been studying TCO substitutes. In recent efforts, metal nanowires, conducting polymers, carbon nanotube networks, graphene films, hybrid thin films, and metal meshes/grids have been evaluated as candidates to replace TCO electrodes. In this study, we fabricated the TCO film with Ag meshes shape using polystyrene (PS) beads monolayer on the substrate. The PS beads were used as a template to create the mesh pattern. We fabricated the monolayer on the flexible substrate (PES) with the well-aligned PS beads. Electrodes with Ag mesh shape were formed using this patterned monolayer. We could fabricated the Ag mesh electrode with the sheet resistance with $8ohm{\Omega}/{\Box}$.

  • PDF

Improvement of hole transport from p-Si with interfacial layers for silicon solar cells

  • Oh, Gyujin;Kim, Eun Kyu
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
    • /
    • pp.239.2-239.2
    • /
    • 2016
  • Numerous studies and approaches have been performed for solar cells to improve their photoelectric conversion efficiencies. Among them, the study for electrode containing transparent conducting oxide (TCO) layers is one of issues as well as for the cell structure based on band theory. In this study, we focused on an interfacial layer between p-type silicon and indium tin oxide (ITO) well-known as TCO materials. According to current-voltage characteristics for the sample with the interfacial layers, the improvement of band alignment between p-type silicon and ITO was observed, and their ohmic properties were enhanced in the proper condition of deposition. To investigate cause of this improvement, spectroscopic ellipsometry and ultraviolet photoelectron spectroscopy were utilized. Using these techniques, band alignment and defect in the band gap were examined. The major materials of the interfacial layer are vanadium oxide and tungsten oxide, which are notable as a hole transfer layer in the organic solar cells. Finally, the interfacial layer was applied to silicon solar cells to see the actual behavior of carriers in the solar cells. In the case of vanadium oxide, we found 10% of improvement of photoelectric conversion efficiencies, compared to solar cells without interfacial layers.

  • PDF

표면 텍스쳐된 ZnO:Al 투명전도막 증착 및 특성 (The Deposition and Properties of Surface Textured ZnO:Al Films)

  • 유진수;이정철;김석기;윤경훈;박이준;이준신
    • 대한전기학회논문지:전기물성ㆍ응용부문C
    • /
    • 제52권9호
    • /
    • pp.378-382
    • /
    • 2003
  • Transparent conductive oxides (TCO) are necessary as front electrode for most thin film solar cell. In our paper, transparent conducting aluminum-doped Zinc oxide films (ZnO:Al) were prepared by rf magnetron sputtering on glass (Corning 1737) substrate as a variation of the deposition condition. After deposition, the smooth ZnO:Al films were etched in diluted HCI (0.5%) to examine the electrical and surface morphology properties as a variation of the time. The most important deposition condition of surface-textured ZnO films by chemical etching is the processing pressure md the substrate temperature. In low pressures (0.9mTorr) and high substrate temperatures ($\leq$$300^{\circ}C$), the surface morphology of films exhibits a more dense and compact film structure with effective light-trapping to apply the silicon thin film solar cells.

Surface Textured ZnO:Al 투명전도막 제작 및 특성 (The fabrication and properties of surface textured ZnO:Al films)

  • 유진수;이정철;강기환;김석기;윤경훈;송진수;박이준
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
    • /
    • pp.391-394
    • /
    • 2002
  • Transparent conductive oxides (TCO) are necessary as front electrode for most thin film solar cell. In our paper, transparent conducting aluminum-doped Zinc oxide films (ZnO:Al) were prepared by rf magnetron sputtering on glass (Corning 1737) substrate as a variation of the deposition condition. After deposition, the smooth ZnO:Al films were etched in diluted HCl (0.5%) to examine the electrical and surface morphology Properties as a variation of the time. The most important deposition condition of surface-textured ZnO films by chemical etching is the processing pressure and the substrate temperature. In low pressures (0.9 mTorr) and high substrate temperatures ($\leq$30$0^{\circ}C$), the surface morphology of films exhibits a more dense and compact film structure with effective light-trapping to apply the silicon thin film solar cells.

  • PDF

LED적용을 위한 AZO 투명전도 박막의 표면 texture 구조분석 (Analysis of the Texture Structure of Transparent Conductive AZO thin films for LED Applications.)

  • 김경민;김덕규;오상현;박춘배
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
    • /
    • pp.103-104
    • /
    • 2006
  • Transparent conductive oxide (TCO) are necessary as front electrode for increased efficiency of LED. In our paper, transparent conducting alminum-doped Zinc oxide films (AZO) were prepared by rf magnetron sputtering on glass (corning 1737) substrate, were then annealed at temperature $400^{\circ}C$ for 2hr. The smooth AZO films were etched in diluted HCL (0.5%) to examine the surface morphology properties as a variation of the time. The surface morphology of AZO films increased as a time. We observed texture structure of AZO thin film etched for 1min.

  • PDF