• Title/Summary/Keyword: tio2

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Effect of Rapid Thermal Annealing on the Ti doped In2O3 Films Grown by Linear Facing Target Sputtering

  • Seo, Ki-Won;Kim, Han-Ki
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.342.1-342.1
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    • 2014
  • The electrical, optical and structural properties of Ti doped $In_2O_3$ (TIO) ohmic contacts to p-type GaN were investigated using linear facing target sputtering (LFTS) system. Sheet resistance and resistivity of TIO films are decreased with increasing rapid thermal annealing (RTA) temperature. Although the $400^{\circ}C$ and $500^{\circ}C$ annealed samples showed rectifying behavior, the $600^{\circ}C$ and $700^{\circ}C$ annealed samples showed linear I-V characteristics indicative of the formation of an ohmic contact between TIO and p-GaN. The annealing of the contact at $700^{\circ}C$ resulted in the lowest specific contact resistivity of $9.5{\times}10^{-4}{\Omega}cm^2$. Based on XPS depth profiling and synchrotron X-ray scattering analysis, we suggested a possible mechanism to explain the annealing dependence of the properties of TIO layer on rapid thermal annealing temperature.

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Influence of Deposition Rate on the Optoelectrical Properties of TIO Thin Films (증착율 변화에 따른 TIO 박막의 전기적, 광학적 특성 변화)

  • Moon, Hyun-Joo;Kim, Daeil
    • Journal of the Korean Society for Heat Treatment
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    • v.29 no.2
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    • pp.62-65
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    • 2016
  • TIO thin films were deposited on the poly-carbonate substrates with RF magnetron sputtering under different sputtering power condition to investigate the influence of deposition rate on the electrical and optical properties of the films. Although, all films have the similar carrier concentration, the films prepared at a lower deposition rate of 4 nm/min show a higher mobility of $5.96cm^2\;V^{-1}S^{-1}$ due to the low surface roughness. In addition, optical transmittance is also influenced by a deposition rate. Based on the figure of merit, it can be concluded that the lower deposition rate effectively enhances the opto-electrical performance of IGZO films for use as transparent conducting oxides in flexible display applications.

Influence of Rapid Thermal Annealing on the Opto-Electrical Performance of Ti-doped Indium Oxide Thin Films

  • Choe, Su-Hyeon;Kim, Daeil
    • Journal of the Korean institute of surface engineering
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    • v.52 no.6
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    • pp.306-309
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    • 2019
  • Titanium (Ti) doped indium oxide (In2O3) films were deposited on glass substrates by RF magnetron sputtering and the films were rapid thermal annealed at 100, 200, and 300℃, respectively to investigate the influence of the rapid annealing on the opto-electrical performance of the films. The grain size of In2O3 (222) plane increased with annealing temperatures and their electrical resistivity decreased to as low as 8.86×10-4 Ωcm at 300℃. The visible transmittance also improved from 77.1 to 79.5% when the annealing temperature increased. The optical band gap of the TIO films shifted from 4.010 to 4.087 eV with increases in annealing temperature from room temperature to 300℃. The figure of merit shows that the TIO films annealed at 300℃ had better optical and electrical performance than the other films prepared using lower-temperature or no annealing.

Direct Switch from Tiotropium to Indacaterol/Glycopyrronium in Chronic Obstructive Pulmonary Disease Patients in Korea

  • Lee, Sang Haak;Rhee, Chin Kook;Yoo, Kwangha;Park, Jeong Woong;Yong, Suk Joong;Kim, Jusang;Lee, Taehoon;Lim, Seong Yong;Lee, Ji-Hyun;Park, Hye Yun;Moon, Minyoung;Jung, Ki-Suck
    • Tuberculosis and Respiratory Diseases
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    • v.84 no.2
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    • pp.96-104
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    • 2021
  • Background: Many chronic obstructive pulmonary disease (COPD) patients receiving monotherapy continue to experience symptoms, exacerbations and poor quality of life. This study aimed to assess the efficacy and safety of direct switch from once-daily tiotropium (TIO) 18 ㎍ to indacaterol/glycopyrronium (IND/GLY) 110/50 ㎍ once daily in COPD patients in Korea. Methods: This was a randomized, open-label, parallel group, 12-week trial in mild-to-moderate COPD patients who received TIO 18 ㎍ once daily for ≥12 weeks prior to study initiation. Patients aged ≥40 years, with predicted post-bronchodilator forced expiratory volume in 1 second (FEV1) ≥50%, post-bronchodilator FEV1/forced vital capacity <0.7 and smoking history of ≥10 pack-years were included. Eligible patients were randomized in a 1:1 ratio to either IND/GLY or TIO. The primary objective was to demonstrate superiority of IND/GLY over TIO in pre-dose trough FEV1 at week 12. Secondary endpoints included transition dyspnea index (TDI) focal score, COPD assessment test (CAT) total score, and rescue medication use following the 12-week treatment, and safety assessment. Results: Of the 442 patients screened, 379 were randomized and 347 completed the study. IND/GLY demonstrated superiority in pre-dose trough FEV1 versus TIO at week 12 (least squares mean treatment difference [Δ], 50 mL; p=0.013). Also, numerical improvements were observed with IND/GLY in the TDI focal score (Δ, 0.31), CAT total score (Δ, -0.81), and rescue medication use (Δ, -0.09 puffs/day). Both treatments were well tolerated by patients. Conclusion: A direct switch from TIO to IND/GLY provided improvements in lung function and other patient-reported outcomes with an acceptable safety profile in patients with mild-to-moderate airflow limitation.

Strength properties of Cement Mortar by the Nano admixture of dry process and wet process (건식 및 습식 나노 혼화재를 사용한 시멘트 모르타르의 강도 특성)

  • Kim, Yeon-Hee;Choi, Eung-Kyoo;Park, Jong-Keun
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.12 no.3
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    • pp.1452-1457
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    • 2011
  • Strength properties of cement mortar was carried out silica fume(SF) and Titanium Dioxide($TIO_2$) by nano admixture of dry process and wet process. Experimental parameters were Nano admixture as the dry process and wet process 5, 10, 15 or 20%. As a result, strength properties of cement mortar by silica fume(SF) and Titanium Dioxide($TIO_2$) were similar and in a comparative experiment of the dry process and wet process Nano admixture using wet process Nano admixture showed a greater strength properties.

Microwave Dielectric Properties of BaO-$(Nd,\;Bi)_2O_3-Tio_2$ Ceramic for Microwave Resonators (고주파 공진기용 BaO-$(Nd,\;Bi)_2O_3-Tio_2$계 세라믹스의 마이크로파 유전특성)

  • Yoon, Jung-Rag;Lee, Heun-Yong
    • Proceedings of the KIEE Conference
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    • 1997.11a
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    • pp.320-323
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    • 1997
  • The microwave dielectric properties of X Ba0-$0.15(Nd_{0.87}Bi_{0.13})_2O_3$-(0.85-X) $TiO_2$ ($X=0.13{\sim}0.17$) and 0.16Ba0-$0.15(Bi_xNd_{1-x})_2O_3-0.69TiO_2$ ($X=0.10{\sim}0.16$) ceramics were investigated. Dielectric constant, quality factor and temperature coefficient of resonant frequency of 0.16Ba0-$0.15(Nd_{0.87}Bi_{0.13})_2O_3-0.69TiO_2$ ceramics sintered at $1320^{\circ}C$ for 2 hours were 89.2, 1920(at 4GHz) and 5.2ppm/$^{\circ}C$, respectively.

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A Study on Photocatalytic Degradation Properties by Oxygen Partial Pressure for Tio2Thin Films Fabricated by DC Magnetron Sputtering (DC 마그네트론 스퍼터링법으로 제조된 Tio2 박막의 산소분압비에 따른 광분해 특성에 관한 연구)

  • Jeong, W.J.;Park, J.Y.;Park, G.C.
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.18 no.3
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    • pp.226-230
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    • 2005
  • This paper describes the photocatalytic degradation properties by oxygen partial pressure for TiO$_2$ thin films fabricated by dc magnetron reactive sputtering. And the structural, chemical, optical and photocatalytic properties were investigated at various analysis system. When TiO$_2$ thin film was made at deposition time of 120 min and Ar:O$_2$ ratio of 60:40, the best properties were obtained. That results were as follows: thickness; 360∼370 nm, gram size; 40 nm, optical energy band gap; 3.4 eV and Benzene conversion in the photocatalytic degradation; 11 %.

균일막 형성을 위한 항공기 부품용 타이타늄의 양극산화 최적 공정

  • Lee, Da-Yeong;Han, A-Yeong;Jeong, Na-Gyeom;Choe, Jin-Seop
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.66.2-66.2
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    • 2018
  • 금속의 양극산화 공정(anodizing)은 전해질 내 금속에 인위적으로 전위를 가해 금속 표면에 얇은 산화막(oxide layer)을 형성하여 금속의 내식성, 내마모성을 증가시키는 공정이다. 타이타늄은 가볍고 단단하여 산업분야에 유용하게 사용되며 이와 같은 양극산화 공정을 통해 내식성, 내마모성을 크게 높일 수 있다. 본 연구에서는 항공기 부품용 타이타늄의 최적 양극산화 조건을 찾기 위해 전압의 파형, 전해액의 조성에 따라 양극산화 실험을 진행하였다. SEM, AFM, EDS, 분광측색계, 색채색차계 등을 이용하여 각 조건에 해당하는 타이타늄의 산화막($Tio_2$)의 두께, crack 형태, pore 형태, 균일도, 표면 조도, 내전압, 색 수치를 분석하였다. 그 결과 전압 DC 140 V, 주성분이 KOH $Na_3PO_4{\cdot}12H_2O$인 전해액으로 이루어진 양극산화 조건에서 가장 균일하고 색 재현성이 우수한 타이타늄의 산화막($Tio_2$)을 형성하였다.

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