• Title/Summary/Keyword: thinning process

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A Study on thinning of SDB SOI by electrochemical etch-stop (전기화학적 식각정지에 의한 SDB SOI의 박막화에 관한 연구)

  • 김일명;이승준;강경두;정수태;주병권;정귀상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1999.11a
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    • pp.362-365
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    • 1999
  • This paper describes on thinning SDB SOI substrates by SDB technology and electrochemical etch-stop. The surface of the fabricated SDB SOI substrates is more uniform than that grinding or polishing by mechanical method, and this process is possible to accurate SOI thickness control. During Electrochemical etch-stop, leakage current versus voltage curves were measured for analysis of the open current potential (OCP) point and the passivation potential (PP) poin and determinated to anodic substrates were analyzed by using AFM and SEM, respectivelv.

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Thin CNTs nanoliquid film development over a rough rotating disk

  • Swatilekha Nag;Susanta Maity;Sanjeev K. Metya
    • Advances in nano research
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    • v.15 no.2
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    • pp.91-104
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    • 2023
  • Development of thin carbon nanotubes (CNTs) nanoliquid film over the rough surface of a horizontal rotating disk is investigated by considering symmetric roughness either along the azimuthal or radial directions. The disk surface is either heated or cooled axisymmetrically from below. The effects of single-walled carbon nanotubes (SWCNTs), multi-walled carbon nanotubes (MWCNTs) are analyzed on the film thinning process with different types of base liquids. Closed form solutions for velocity and temperature field are obtained for small values of Reynolds number whereas the numerical solution is derived for moderate values of Reynolds number. It is found that fluid retention / depletion takes place when the roughness is symmetric along the azimuthal / radial directions. It is also seen that the film thinning rate enhances for MWCNTs compare to SWCNTs. Further it is found that two different heat transfer regions exits within the flow domain depending on the fact that heat is transferred from disk to liquid film and vice-versa.

Extraction of Skeletons from Handwritten Hangul Characters using Shape Decomposition (모양 분해를 이용한 필기 한글 문자의 골격선 추출)

  • Hong, Ki-Cheon;Oh, Il-Seok
    • Journal of KIISE:Software and Applications
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    • v.27 no.6
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    • pp.583-594
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    • 2000
  • The thinning process which is commonly used in extracting skeletons from handwritten Hangul characters has a problem of distorting the original pattern shapes. This paper proposes a method of skeleton extraction using a shape decomposition algorithm. We decompose the character pattern into a set of near convex parts using a shape decomposition algorithm. From the shape-decomposed pattern, we detect the joint parts and extract the skeletons from the parts incident to the joint parts. Then the skeletons not incident to the joint parts are extracted. Finally, the process of skeleton extension is performed to ensure the connectivity. We setup five criteria for the comparison of quality of skeletons extracted by our method and the thinning based method. The comparison shows the superiority of our method in terms of several criteria.

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Hydroforming Simulation of High-strength Steel Cross-members in an Automotive Rear Subframe

  • Kim, Kee-Joo;Sung, Chang-Won;Baik, Young-Nam;Lee, Yong-Heon;Bae, Dae-Sung;Kim, Keun-Hwan;Won, Si-Tae
    • International Journal of Precision Engineering and Manufacturing
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    • v.9 no.3
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    • pp.55-58
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    • 2008
  • Hydroforming is a forming technology in which a steel tube is set in a die and formed to fit a specified shape by applying hydraulic pressure from inside the tube while also applying force in the tube axial direction (axial feed). In present study, the entire design process chain for an automotive cross-member was simulated and developed using hydroforming technology on high-strength steel. The part design stage required a feasibility study. The process was designed using computer-aided design techniques to confirm the actual hydroformability of the part in detail. The possibility of using hydroformable cross-member parts was examined using cross-sectional analyses, which were essential to ensure the formability of the tube material for each forming step, including pre-bending and hydroforming. The die design stage included all the components of a prototyping tool. Press interference was investigated in terms of geometry and thinning.

A Study on the Evaluation of Oxidation Resistance of Nitride Films in DRAM Capacitors (DRAM 커패시터의 질화막 내산화성 평가에 관한 연구)

  • Chung, Yeun-Gun;Kang, Seong-Jun;Joung, Yang-Hee
    • The Journal of the Korea institute of electronic communication sciences
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    • v.16 no.3
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    • pp.451-456
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    • 2021
  • In order to improve the cell capacitance and scale down in capacitors of semiconductor memory devices, a stacked ONO structure has been introduced as a dielectric layer and thinning of these layers has been attempted continuously. However, many problems have emerged in the manufacturing process. In this study, L/L LPCVD system was used to suppress the growth of natural oxide film of about 10 Å, which was able to secure the capacitance of 3fF / cell. In addition, we investigated the effect of thinning of the dielectric film on the abnormal oxidation of the nitride film, and proposed a stable process control method for forming the dielectric film to ensure oxidation resistance.

Bootstrap Confidence Intervals for the INAR(p) Process

  • Kim, Hee-Young;Park, You-Sung
    • Communications for Statistical Applications and Methods
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    • v.13 no.2
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    • pp.343-358
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    • 2006
  • The distributional properties of forecasts in an integer-valued time series model have not been discovered yet mainly because of the complexity arising from the binomial thinning operator. We propose two bootstrap methods to obtain nonparametric prediction intervals for an integer-valued autoregressive model : one accommodates the variation of estimating parameters and the other does not. Contrary to the results of the continuous ARMA model, we show that the latter is better than the former in forecasting the future values of the integer-valued autoregressive model.

Hydro-forming Process of Automotive Engine Cradle by Computer Aided Engineering (CAE) (컴퓨터 시뮬레이션(CAE)을 이용한 자동차용 엔진 크레들의 하이드로-포밍 공정 연구)

  • Kim, Kee-Joo;Choi, Byung-Ik;Sung, Chang-Won
    • Transactions of the Korean Society of Automotive Engineers
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    • v.16 no.1
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    • pp.86-92
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    • 2008
  • Recently, the use of tubes in the manufacturing of the automobile parts has increased and therefore many automotive manufactures have tried to use hydro-forming technology. The hydro-forming technology may cause many advantages to automotive applications in terms of better structural integrity of the parts, lower cost from fewer part count, material saving, weight reduction, lower spring-back, improved strength and durability and design flexibility. In this study, the whole process of front engine cradle (or front sub-frame) parts development by tube hydro-forming using steel material having tensile strength of 440MPa grade is presented. At the part design stage, it requires feasibility study and process design aided by CAE (Computer Aided Design) to confirm hydro-formability in details. Effects of parameters such as internal pressure, axial feeding and geometry shape on automotive sub-frame by hydro-forming process were carefully investigated. Overall possibility of hydro-formable sub-frame parts could be examined by cross sectional analyses. Moreover, it is essential to ensure the formability of tube material on every forming step such as pre-bending, preforming and hydro-forming. At the die design stage, all the components of prototyping tools are designed and interference with press is examined from the point of geometry and thinning.

Development of Cu CMP process for Cu-to-Cu wafer stacking (Cu-to-Cu 웨이퍼 적층을 위한 Cu CMP 특성 분석)

  • Song, Inhyeop;Lee, Minjae;Kim, Sungdong;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.20 no.4
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    • pp.81-85
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    • 2013
  • Wafer stacking technology becomes more important for the next generation IC technology. It requires new process development such as TSV, wafer bonding, and wafer thinning and also needs to resolve wafer warpage, power delivery, and thermo-mechanical reliability for high volume manufacturing. In this study, Cu CMP which is the key process for wafer bonding has been studied using Cu CMP and oxide CMP processes. Wafer samples were fabricated on 8" Si wafer using a damascene process. Cu dishing after Cu CMP and oxide CMP was $180{\AA}$ in average and the total height from wafer surface to bump surface was approximately $2000{\AA}$.

Hydro-forming Process of Automotive Rear Sub-frame by Computer Simulation (CAE) (컴퓨터 시뮬레이션(CAE)을 이용한 자동차용 리어 서브-프레임의 하이드로-포밍 공정 개발)

  • Kim, Kee-Joo;Sung, Chang-Won;Baik, Young-Nam;Lee, Yong-Heon;Bae, Tae-Sung;Sohn, Il-Seon
    • Transactions of the Korean Society of Automotive Engineers
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    • v.16 no.3
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    • pp.38-43
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    • 2008
  • The hydroforming technology has been spreaded dramatically in automotive industry last 10 years. Itmay cause many advantages to automotive applications in terms of better structural integrity of the parts, lower cost from fewer part count, material saving, weight reduction, lower springback, improved strength and durability and design flexibility. In this study, the whole process of rear sub-frame parts development by tube hydroforming using steel material having tensile strength of 440MPa grade is presented. At the part design stage, it requires feasibility study and process design aided by CAE (Computer Aided Design) to confirm hydroformability in details. Effects of parameters such as internal pressure, axial feeding and geometry shape in automotive rear sub-frame by hydroforming process were carefully investigated. Overall possibility of hydroformable sub-frame parts could be examined by cross sectional analyses. Moreover, it is essential to ensure the formability of tube material on every forming step such as pre-bending, preforming and hydroforming. In addition, all the components of prototyping tool are designed and interference with press is examined from the point of geometry and thinning.

The Study on the Rheological Properties of Polymer Matrix for MIF (Molded-In Foaming) Process (MIF (Molded-In Foaming) 공정에 적합한 고분자 기재의 유변학적 특성 연구)

  • Kim, Mingeun;Song, Hyeong Yong;Kim, Dong Gun;Kim, Hyo Jun;Park, Geon Uk;Yu, Jae Keun;Hyun, Kyu
    • Elastomers and Composites
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    • v.49 no.4
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    • pp.323-329
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    • 2014
  • In order to select polymer matrix for MIF (Molded-In Foaming) process, in this study, we investigated rheological properties of commercial polymers, SBC (Styrene-Butadiene Copolymers, K-resin KK38) and SBS (Styrene- Butadiene-Styrene, KTR 101 and KTR 301). In time sweep test, the rheological properties ($G^{\prime}$, $G^{{\prime}{\prime}}$, ${\eta}^*$) of SBS at 155 and $170^{\circ}C$ display almost constant value as a function of time from 0 s to 1800 s. On contrast, the rheological properties of SBS at 185 and $200^{\circ}C$ exponentially increase as a function of time. It could be due to gelation of SBS at high temperature conditions. These increment of rheological properties are not observed in SBC. From LAOS (large amplitude oscillatory shear) test, the nonlinear rheological properties of SBS at 155 and $200^{\circ}C$ after 1800 s are compared. The nonlinear rheological properties at $155^{\circ}C$ show simple strain thinning behavior such as linear homopolymer, however, the nonlinear rheological properties at $200^{\circ}C$ show 2 times strain thinning behavior (Payne effect). It well match with the gelation of SBS at $200^{\circ}C$. From rheological studies, it is confirmed that the proper polymer matrix for MIF process (low rheological properties at initial time and high rheological properties after process) is SBS KTR 301.