• Title/Summary/Keyword: thin-film type

검색결과 1,288건 처리시간 0.034초

Hydrogen shallow donors in ZnO and $SnO_2$ thin films prepared by sputtering methods

  • 김동호;김현범;김혜리;이건환;송풍근
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2010년도 제39회 하계학술대회 초록집
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    • pp.145-145
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    • 2010
  • In this paper, we report that the effects of hydrogen doping on the electrical and optical properties of typical transparent conducting oxide films such as ZnO and $SnO_2$ prepared by magnetron sputtering. Recently, density functional theory (DFT) calculations have shown strong evidence that hydrogen acts as a source of n-type conductivity in ZnO. In this work, the beneficial effect of hydrogen incorporation on Ga-doped ZnO thin films was demonstrated. It was found that hydrogen doping results a noticeable improvement of the conductivity mainly due to the increases in carrier concentration. Extent of the improvement was found to be quite dependent on the deposition temperature. A low resistivity of $4.0{\times}10^{-4}\;{\Omega}{\cdot}cm$ was obtained for the film grown at $160^{\circ}C$ with $H_2$ 10% in sputtering gas. However, the beneficial effect of hydrogen doping was not observed for the films deposited at $270^{\circ}C$. Variations of the electrical transport properties upon vacuum annealing showed that the difference is attributed to the thermal stability of interstitial hydrogen atoms in the films. Theoretical calculations also suggested that hydrogen forms a shallow-donor state in $SnO_2$, even though no experimental determination has yet been performed. We prepared undoped $SnO_2$ thin films by RF magnetron sputtering under various hydrogen contents in sputtering ambient and then exposed them to H-plasma. Our results clearly showed that the hydrogen incorporation in $SnO_2$ leads to the increase in carrier concentration. Our experimental observation supports the fact that hydrogen acting as a shallow donor seems to be a general feature of the TCOs.

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Optically transparent and electrically conductive indium-tin-oxide nanowires for transparent photodetectors

  • Kim, Hyunki;Park, Wanghee;Ban, Dongkyun;Kim, Hong-Sik;Patel, Malkeshkumar;Yadav, Pankaj;Kim, Joondong
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.390.2-390.2
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    • 2016
  • Single crystalline indium-tin-oxide (ITO) nanowires (NWs) were grown by sputtering method. A thin Ni film of 5 nm was coated before ITO sputtering. Thermal treatment forms Ni nanoparticles, which act as templates to diffuse Ni into the sputtered ITO layer to grow single crystalline ITO NWs. Highly optical transparent photoelectric devices were realized by using a transparent metal-oxide semiconductor heterojunction by combining of p-type NiO and n-type ZnO. A functional template of ITO nanowires was applied to this transparent heterojunction device to enlarge the light-reactive surface. The ITO NWs/n-ZnO/p-NiO heterojunction device provided a significant high rectification ratio of 275 with a considerably low reverse saturation current of 0.2 nA. The optical transparency was about 80% for visible wavelengths, however showed an excellent blocking UV light. The nanostructured transparent heterojunction devices were applied for UV photodetectors to show ultra fast photoresponses with a rise time of 8.3 mS and a fall time of 20 ms, respectively. We suggest this transparent and super-performing UV responser can practically applied in transparent electronics and smart window applications.

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화학 기계적 연마에서 마찰력 감소에 관한 연구 (A study on the decay of friction force during CMP)

  • 권대희;김형재;정해도
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 춘계학술대회 논문집
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    • pp.972-975
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    • 2002
  • An understanding of tribological behavior in CMP(Chemical Mechanical Polishing) is one of the most important things to reveal the mechanism of material removal. In CMP, the contact type is thought to be semi-direct, elastohydrodynamic contact type from the Stribeck diagram, which is a combination of solid-solid direct contact and hydrodynamic lubrication with thin liquid film. This study is focused on the decay of friction force during CMP from two points of view, one of which is change of the real contact area and the other is the decrease of the elastic modulus of the pad caused by the increase of the temperature during CMP Experiments are implemented with elastic modulus measuring system and tool dynamometer. Results show that the decay of friction force during CMP results from the decrease of the real contact pressure working on an abrasive, which is induced by the decrease of elastic modulus of pad caused by the increase of temperature. And, the phenomenon is thought to be happen specially in the case that the weight concentration of abrasive in slurry is small enough.

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혐기성 토양에 서식하는 황산염환원세균에 의한 가스배관의 미생물부식 (CORROSION OF STEEL GAS PIPELINE INDUCED BY SULFATE-REDUCING BACTERIA IN ANAEROBIC SOIL)

  • 이선엽;전경수;고영태;강탁
    • 한국가스학회:학술대회논문집
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    • 한국가스학회 2001년도 추계학술발표회 논문집
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    • pp.58-68
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    • 2001
  • Microbiologically influenced corrosion (MIC) of carbon steel gas pipeline in soil environments was investigated at field and laboratory MIC is very severe corrosion and it is not easy to distinguish this corrosion from Inorganic corrosion because of its localized, pitting-type character Therefore, it is important to provide proper assessment techniques for the prediction, detection, monitoring and mitigation of MIC. It is possible to predict the MIC risk, i.e., the activity of sulfate-reducing bacteria (SRB) through the analysis of soil environments. Chemical, microbiological and surface analysis of corrosion products and metal attacked could reveal the possibility of the occurrence of MIC. Various electrochemical and surface analysis techniques could be used for the study of MIC. Among these techniques, thin-film electrical resistance (ER) type sensors are promising to obtain localized corrosion rate of MIC induced by SRB. It is also important to study the effect of cathodic protection (CP) on the MIC In case of coated pipeline, the relationship between coating disbondment and the activity of SRB beneath the disbanded coating is also important.

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KRISO 300K VLCC 이중모형선의 유동특성에 대한 풍동실험 연구 (Wind Tunnel Study on Flow Characteristics around KRISO 300K VLCC Double-body Model)

  • 김학록;이상준
    • 대한조선학회논문집
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    • 제36권3호
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    • pp.15-21
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    • 1999
  • KRISO 300K VLCC 이중모형선 주위의 유동특성을 풍동실험을 통해 연구하였다. 선체 선미 주위유동과 후류유동의 평균속도 성분, 난류강도, 레이놀즈 전단응력 및 난류 운동에너지 분포를 열선풍속계를 이용하여 측정하였다. 실험은 선미와 후류의 횡단면에서 수행하였으며, 선체 표면에서의 유동 패턴을 정성적으로 조사하기 위하여 유막법을 이용한 유동가시화도 수행하였다. 선미와 근접 후류영역은 매우 복잡한 3차원의 유동특성을 가지고 있으며, 특히 종방향 와류영역에서 고리 모양의 후류 구조를 볼 수 있었다. 그리고 중앙평행부에서의 얇은 경계층은 선미 영역을 지나며 점차 두꺼워지고 복잡한 3차원 난류후류로 발전하였다.

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강유전체 위상 변위기를 위한 Reactive Circuit 설계 및 구현 (Design and Implementation of Reactive Circuit for Ferroelectric Phase Shifter)

  • 김영태;문승언;이수재;김선형;박준석;조홍구
    • 한국정보통신설비학회:학술대회논문집
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    • 한국정보통신설비학회 2003년도 하계학술대회
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    • pp.286-288
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    • 2003
  • In this paper, in order to obtain a large differential phase shift with a little change in applied voltage, a ferroelectric reflective load circuit has been designed on top of barium strontium titanate $(Ba,Sr)TiO_3$ [BST] thin film. The design of the ferroelectric reflection-type phase shifter is based on a reflection theory of terminating circuit, which has a reflection-type analogue phase shifter with two ports terminated in symmetric phase-controllable reflective networks. To achieve large amounts of phase shift in low bias-voltage range, the effects of change of capacitance and transmission line connected with two coupled ports of a 3-dB $90^{\circ}$ branch-line hybrid coupler have been investigated. A large phase shift with a small capacitance change in the parallel terminating circuit has been demonstrated in the paper.

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사고전류 제한형 고온 초전도케이블의 한류부 특성평가 (Evaluation on the Properties of the Current Limiting Part for Fault-Current-Limiting Type HTS Cables)

  • 김태민;홍공현;한병성;두호익
    • 한국전기전자재료학회논문지
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    • 제28권3호
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    • pp.191-195
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    • 2015
  • Inside the existing superconducting cables, the superconducting wire carries a loss-free current, and the cable former (the stranded copper wire) bypasses the fault current to prevent damage and loss of the superconducting cable when the fault current is applied. The fault-current-limiting-type superconducting cable proposed in this paper usually carries a steady current; but in a fault state, the cable generates self-resistance that makes the fault current lower than a certain width. That is, the superconducting cable that transmitted only a low voltage and a large capacity power repetitively limits the fault current, as does a superconducting current limiter. To complete this structure, it is essential to investigate the mutual resistance relationship between the superconducting wires after applying a fault current. Therefore, in this paper, one kinds of superconducting wires (a wire without a stabilization layer) were connected parallel 4 tapes, respectively; and after applying a fault current, the current, voltage, resistance and thermal stability of the HTS thin-film wires were examined.

BCB를 이용한 High & Low$Z_0$전송선로 제작에 대한 연구 (Studies on the fabrication of transmission line with high and low $Z_0$ using BCB layer)

  • 한효종;이성대;전영훈;윤관기;김삼동;황인석;이진구;류기현
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2002년도 하계종합학술대회 논문집(2)
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    • pp.57-60
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    • 2002
  • In this paper, transmission lines with low and high characteristic impedance (Z$_{0}$) are fabricated and analyzed. The transmission lines are fabricated on the benzo-cyclo-butene (BCB) films of a low dielectric constant. For the low Z$_{0}$, two types of coplanar waveguide (CPW) structures are fabricated, which include bottom-ground and double-ground type. Measurement shows that Z$_{0}$ values for each CPW type are 7.3 and 9.4$\Omega$, respectively, at a signal line width of 100 #m. Whit the ratio between the spacing of bottom-ground and the signal line with becomes greater than 2.5, the Z$_{0}$ is nearly saturated. In addition, thin film microstrip lines fabricated using the BCB insertion layers show very low Z$_{0}$ of 25.5$\Omega$, and this impedance is ~64 % of the values obtained from the BCB-based CPW structures of the same line width. Measurement result of CPW on BCB layer is 100.5 Ω.s 100.5 Ω.

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LB법을 이용한 Hexadecyl Dipyridinium-$(TCNQ^-)_2$의 박막 제작과 물리적 특성 연구 (A study on the deposition conditions and physical properties of the Hexadecyl Dipyridinium-$(TCNQ^-)_2$ thin films with Langmuir-Blodgett technique)

  • 이용수;신동명;김태완;깅도열
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1996년도 하계학술대회 논문집 C
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    • pp.1722-1724
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    • 1996
  • Enhancing the electrical conductivity of the ultrathin organic films is one of the important factors for the development of molecular electronic devices. The Langmuir-Blodgett(LB) technique has recently been attracted as out of the ways of deposition ultrathin films. We have studied manufacturing conditions and physical properties of Hexadecyl Dipyridinium-$(TCNQ^-)_2$ LB films made by Kuhn type apparatus. A ${\pi}-A$ isotherm shows that a limiting area is around $180{\AA}^2/molecule$ and a proper surface pressure for a deposition is around 22mN/m. A transfer ratio shows that Hexadecyl Dipyridinium-$(TCNQ^-)_2$ is able to be deposited as an Y-type. UV /visible absorption spectra shows that TCNQ dimer peak is apeared at about 600nm in LB films. In solution, $TCNQ^-$ peak is observed at about 400nm and charge transfer band at $830{\sim}900nm$. A horizontal conductivity of the Hexadecyl Dipyridinium-$(TCNQ^-)_2$ LB film is about $10^{-7}(S/cm)$.

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스테인레스 봉입형 반도체 압력센서의 제작 및 그 특성 (Construction and Characterization of the Stainless Steel Isolated Type Semiconductor Pressure Sensor)

  • 김우정;조용수;황정훈;최시영
    • 센서학회지
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    • 제11권3호
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    • pp.138-144
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    • 2002
  • 스테인레스 봉입형 압력센서를 제작하기 위하여 먼저 반도체 제조 및 식각 공정을 통하여 반도체 압력센서를 제작하였다 그리고 이를 glass molding된 스테인레스 housing에 올려놓고 $50\;{\mu}m$ 두께의 스테인레스 박판을 용접한 후 실리콘 오일을 채워 넣고 봉입하여 압력 범위 10 bar 센서를 완성하였다. 이와 같이 제작한 센서와 XTR105 발신기 전용 회로를 결합하여 $4{\sim}20\;mA$ 출력의 압력 발신기를 제작하고 그 특성을 조사하였다. 온도 보상 전 정확도는 ${\pm}5%$ FS이었으나 보상 후 정확도 ${\pm}1%$ FS로 개선되었다.