• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1364-1369
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• 2004

New method for the design, fabrication, and calibration of micro-machined heat flux sensor has been developed. Two types of micro-machined heat flux sensor having different thicknesses of the thermal-resistance layer are fabricated using the MEMS technique. Photo-resist patterning using a chrome mask, bulk-etching and copper-nickel sputtering using a shadow mask are applied to make heat flux sensors, which are calibrated in the convection-type heat flux calibration facility. The sensitivity of the device varies with thermal-resistance layer, and hence can be used to measure the heat flux in heat-transfer phenomena.

• Proceedings of the IEEK Conference
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• 2002.06a
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• pp.439-442
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• 2002

We present in this Paper a microwave Power sensor fabricated by a standard CMOS process and a bulk micromachining process. The sensor consists of a CPW transmission line, a resistor as a healer, and thermocouple arrays. An input microwave heater, the resistor so that the temperature rises proportionally to the microwave power and tile thermocouple arrays convert it to an electrical signal. The sensor uses air bridged 8round of CPW realized by wire bonding to reduce tile device size and cost and to improve the thermal impedance. Al/poly-Si junctions are used for the thermocouples. Poly-Si is used for tile resister and Aluminium is for transmission line. The resistor and hot junctions of the thermocouples are placed on a low stress silicon nitride diaphragm to minimize a thermal loss. The fabricated device operates properly from 1㎼ to 100㎽\ulcorner of input power. The sensitivity was measured to be ,3.2～4.7 V/W.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.313-314
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• 2012

• Journal of Sensor Science and Technology
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• v.12 no.3
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• pp.103-111
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• 2003

A chromel-alumel thermoelectric flow sensor using $Si_3N_4/SiO_2/Si_3N_4$ thermal isolation membrane was fabricated. Temperature coefficient of resistance of thin film Pt-heater was about $0.00397/^{\circ}C$, and Seebeck coefficient of chromel-alumel thermocouple was about $36\;{\mu}V/K$. The sensor showed that thermoelectric voltage decreased as thermal conductivity of gas increased, and $N_2$-flow sensitivity increased as heater voltage increased or the distance between heater and thermocouple decreased. When heater voltage was about 2.5 V, $N_2$-flow sensitivity and thermal response time of the sensor were about $1.5\;mV/sccm^{1/2}$ and 0.18 sec., respectively. Linear range in flow sensitivity of the flow sensor was wider than that of Bi-Sb flow sensor.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.827-828
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• 2012

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• v.9 no.1
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• pp.363-366
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• 2005

A micro flow sensor on silicon substrate allows the fabrication of small components where many different functions can be integrated so that the functionality of the sensors can be increased. Further more, due to the small size of the elements the sensors can be quite fast. A thermal mass flow sensor measures the asymmetry of temperature profile around the heater which is modulated by the fluid flow. In normal, a mass flow sensor is composed of a central heater and a pair of temperature sensing elements around the heater. A new 2-D wide range micro flow sensor structure with three pairs of temperature sensors and a central heater was proposed and numerically simulated by the Finite difference formulation to confirm the feasibility of the flow sensor structure.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.611-612
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• 2011

• Journal of the Institute of Electronics and Information Engineers
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• v.49 no.12
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• pp.164-170
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• 2012

A Virtual Reality Modeling Language (VRML) database access in remote virtual reality control platform for dyeing enterprise $MiWi^{TM}$ thermal sensor network is presented in this paper. The VRML-ASP framework is introduced for 3D real-time data plotting in this application. The activities of thermal sensor nodes and sensor area are analyzed. The database access framework is optimized for $MiWi^{TM}$ wireless sensor networks. The experimental results show that VRML-ASP database access framework could be a reliable and competitive data-manage candidate for targeted virtual reality remote industrial visualization application.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.7
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• pp.709-716
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• 2009

Thermal condition according to the operation attitude of a satellite in orbit would be essential to be known because the orbit attitude is a dominant factor to affect satellite thermal design. In this paper, the change in space thermal environment and the thermal effect in thermal design are studied for a low earth orbit satellite according to the yaw motion. The present satellite retains sun-pointing attitude during daylight due to the fixed type solar arrays. And it also moves along the orbit with constant yaw motion in a longitudinal axis so that a star tracker which is a star sensor for satellite's attitude control always looks into the deep space. This attitude is considered in its better visibility to the stars for a successful mission operation. Also, it is required to access the corresponding thermal effects due to the yaw motion. Therefore, we try to verify these by the thermal analysis for the satellite thermal model with the yaw motion.

• Journal of Sensor Science and Technology
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• v.32 no.1
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• pp.39-43
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• 2023

Microscale thermophysical property measurements of liquids have been developed considering the increasing interest in the thermal management of cooling systems and energy storage/transportation systems. To accurately predict the heat transfer performance, information on the thermal conductivity, heat capacity, and density is required. However, a simultaneous analysis of the thermophysical properties of small-volume liquids has rarely been considered. Recently, we proposed a new methodology to simultaneously analyze the aforementioned three intrinsic properties using heater-integrated fluidic resonators (HFRs) in an atmospheric pressure environment comprising a microchannel, resistive heater/thermometer, and mechanical resonator. Typically, the thermal conductivity and volumetric heat capacity are measured based on a temperature response resulting from heating using a resistive thermometer, and the specific heat capacity can be obtained from the volumetric heat capacity by using a resonance densitometer. In this study, we analyze methods to improve the thermophysical property measurement performance using HFRs, focusing on the effect of the ambience around the sensor. The analytical method is validated using a numerical analysis, whose results agree well with preliminary experimental results. In a vacuum environment, the thermal conductivity measurement performance is enhanced, except for the thermal conductivity range of most gases, and the sensitivity of the specific heat capacity measurement is enhanced owing to an increase in the time constant.