• Journal of the Korean Vacuum Society
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• v.16 no.5
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• pp.348-352
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• 2007

In submicron processes, the feature size of ULSI devices is critical, and it is necessary both to reduce the RC time delay for device speed performance and to enable higher current densities without electromigration. In case of contacts between semiconductor and metal in semiconductor devices, it may be very unstable during the thermal annealing process. To prevent these problems, we deposited tungsten carbon nitride (W-C-N) ternary compound thin film as a diffusion barrier for preventing the interdiffusion between metal and semiconductor. The thickness of W-C-N thin film is $1,000{\AA}$ and the process pressure is 7mTorr during the deposition of thin film. In this work we studied the interface effects W-C-N diffusion barrier using the XRD and 4-point probe.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.305-305
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• 2010

It is known that a pulse of electrons of high kinetic energy (1-3 eV) in metals can be generated with the deposition of external energy to the surface such as in the absorption of light or in exothermic chemical processes. These energetic electrons are not in thermal equilibrium with the metal atoms and are called "hot electrons" The concept of photon energy conversion to hot electron flow was suggested by Eric McFarland and Tang who directly measured the photocurrent on gold thin film of metal-semiconductor ($TiO_2$) Schottky diodes [1]. In order to utilize this scheme, we have fabricated metal-semiconductor Schottky diodes that are made of Pt or Au as a metallic layer, Si or $TiO_2$ as a semiconducting substrate. The Pt/$TiO_2$ and Pt/Si Schottky diodes are made by PECVD (Plasma Enhanced Chemical Vapor Deposition) for $SiO_2$, magnetron sputtering process for $TiO_2$, e-beam evaporation for metallic layers. Metal shadow mask is made for device alignment in device fabrication process. We measured photocurrent on Pt/n-Si diodes under AM1.5G. The incident photon to current conversion efficiency (IPCE) at different wavelengths was measured on the diodes. We also show that the steady-state flow of hot electrons generated from photon absorption can be directly probed with $Pt/TiO_2$ Schottky diodes [2]. We will discuss possible approaches to improve the efficiency of photon energy conversion.

• Journal of Korean Society of Water and Wastewater
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• v.30 no.3
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• pp.271-278
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• 2016

Recently, reverse osmosis (RO) is the most common process for seawater desalination. A common problem in both RO and thermal processes is the high energy requirements for seawater desalination. The one energy saving method when utilizing the osmotic power is utilizing pressure retarded osmosis (PRO) process. The PRO process can be used to operate hydro turbines for electrical power production or can be used directly to supplement the energy required for RO desalination system. This study was carried out to evaluate the performance of both single-stage PRO process and two-stage PRO process using RO concentrate for a draw solution and RO permeate for a feed solution. The major results, were found that increase of the draw and feed solution flowrate lead to increase of the production of power density and water permeate. Also, comparison between CDCF and CDDF configuration showed that the CDDF was better than CDCF for stable operation of PRO process. In addition, power density of two-stage PRO was lower than the one of single-stage. However, net power of two-stage PRO was higher than the one of single-stage PRO.

• Journal of the Korean Society for Nondestructive Testing
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• v.20 no.5
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• pp.390-396
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• 2000

The dynamic elastic constants of the simulated weld HAZ (heat-affected zone) of SA 508 Class 3 reactor pressure vessel (RPV) steel were investigated by resonant ultrasound spectroscopy (RUS). The resonance frequencies of rectangular parallelepiped samples woe calculated from the initial estimates of elastic stiffness $c_{11},\;c_{12}\;and\;c_{44}$ with an assumption of isotropic property, dimension and density. Through the comparison of calculated resonant frequencies with the measured resonant frequencies by RUS, very accurate elastic constants of SA 508 Class 3 steel were determined by iteration and convergence processes. Clear differences of Youngs modulus and shear modulus were shown from samples with different thermal cycles and microstructures. Youngs modulus and shear modulus of samples with fine-grained bainite were higher than those with coarse-grained tempered martensite. This tendency was confirmed from other results such as micro-hardness test.

• Journal of Korean Society on Water Environment
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• v.36 no.1
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• pp.55-68
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• 2020

Because of the intensified environmental problems such as climate change and resource depletion, sewage treatment technology focused on energy management has recently attracted attention. The conversion of primary sludge from the primary sedimentation tank and excessive sludge from the secondary sedimentation tank into biogas is the key to energy-positive sewage treatment. In particular, the primary sedimentation tanks recover enriched biodegradable organic matter and anaerobic digestion process produces methane from the organic wastes for energy production. Such technologies for minimizing oxygen demand are leading the innovation regarding sewage treatment plants. However, sewage treatment facilities in Korea lack core technology and operational know-how. Actually, the energy potential of sewage is higher than sewage treatment energy consumption in the sewage treatment, but current processes are not adequately efficient in energy recovery. To improve this, it is possible to apply chemically enhanced primary treatment (CEPT), high-rate activated sludge (HRAS), and anaerobic membrane bioreactor (AnMBR) to the primary sedimentation tank. To maximize the methane production of sewage treatment plants, organic wastes such as food waste and livestock manure can be digested. Additionally, mechanical pretreatment, thermal hydrolysis, and chemical pretreatment would enhance the methane conversion of organic waste. Power generation systems based on internal combustion engines are susceptible to heat source losses, requiring breakthrough energy conversion systems such as fuel cells. To realize the energy positive sewage treatment plant, primary organic matter recovery from sewage, biogas pretreatment, and co-digestion should be optimized in the energy management system based on the knowledge-based operation.

• Journal of Korean Society of Water and Wastewater
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• v.30 no.4
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• pp.401-408
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• 2016

Desalination is getting more attention as an alternative to solve a global water shortage problem in the future. Especially, a desalination technology is being expected as a new growth engine of Korea's overseas plant business besides one of the solutions of domestic water shortage problem. In the past, a thermal evaporation technology was a predominant method in desalination market, but more than 75% of the current market is hold by a membrane-based reverse osmosis technology because of its lower energy consumption rate for desalination. In the future, it is expected to have more energy efficient desalination process. Accordingly, various processes are being developed to further enhance the desalination energy efficiency. One of the promising technologies is a desalination process combined with Pressure Retarded Osmosis (PRO) process. The PRO technology is able to generate energy by using osmotic pressure of seawater or desalination brine. And the other benefits are that it has no emission of $CO_2$ and the limited impact of external environmental factors. However, it is not commercialized yet because a high-performance PRO membrane and module, and a PRO system optimization technology is not sufficiently developed. In this paper, the recent research direction and progress of the SWRO-PRO hybrid desalination was discussed regarding a PRO membrane and module, an energy recovery system, pre-treatment and system optimization technologies, and so on.

• 한국신재생에너지학회:학술대회논문집
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• 2011.11a
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• pp.57.2-57.2
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• 2011

Dye-sensitized solar cells (DSSC) have recently been developed as a cost-effective photovoltaic system due to their low-cost materials and facile processing. The production of DSSC involves chemical and thermal processes but no vacuum is involved. Therefore, DSSC can be fabricated without using expensive equipment. The use of dyes and nanocrystalline $TiO_2$ is one of the most promising approaches to realize both high performance and low cost. The efficiency of the DSSC changes consequently in the particle size, morphology, crystallization and surface state of the $TiO_2$. Nanocrystalline $TiO_2$ materials have been widely used as a photo catalyst and an electron collector in DSSC. Front electrode in DSSC are required to have an extremely high porosity and surface area such that the dyes can be sufficiently adsorbed and be electronically interconnected, resulting in the efficient generation of photocurrent within cells. In this study, DSSC were fabricated by an screen printing for the $TiO_2$ thin film. $TiO_2$ nanoparticles characterized by X-ray diffractometer (XRD) and scanning electron microscope (SEM) and scanning auger microscopy (SAM) and zeta potential and electrochemical impedance spectroscopy(EIS).In addition, DSSC module was modeled and simulated using the SILVACO TCAD software program. Improve the efficiency of DSSC, the effect of $TiO_2$ thin film thickness and $TiO_2$ nanoparticle size was investigated by SILVACO TCAD software program.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.24 no.3
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• pp.272-280
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• 2014

Objectives: The purpose of this study was to evaluate the characteristics of worker exposure to hazardous chemical substances and propose the direction of work environment management for protecting worker's health in the semiconductor assembly process. Methods: Four assembly lines at two semiconductor manufacturing companies were selected for this study. We investigated the types of chemicals that were used and generated during the assembly process, and evaluated the workers' exposure levels to hazardous chemicals such as benzene and formaldehyde and the current work environment management in the semiconductor assembly process. Results: Most of the chemicals used at the assembly process are complex mixtures with high molecular weight such as adhesives and epoxy molding compounds(EMCs). These complex mixtures are stable when they are used at room temperature. However workers can be exposed to volatile organic compounds(VOCs) such as benzene and formaldehyde when they are used at high temperature over $100^{\circ}C$. The concentration levels of benzene and formaldehyde in chip molding process were higher than other processes. The reason was that by-products were generated during the mold process due to thermal decomposition of EMC and machine cleaner at the process temperature($180^{\circ}C$). Conclusions: Most of the employees working at semiconductor assembly process are exposed directly or indirectly to various chemicals. Although the concentration levels are very lower than occupational exposure limits, workers can be exposed to carcinogens such as benzene and formaldehyde. Therefore, workers employed in the semiconductor assembly process should be informed of these exposure characteristics.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.162-162
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• 2011

Nanometer-sized noble metals can trap and guide sunlight for enhanced absorption of light based on surface plasmon that is beneficial for generation of hot electron flows. A pulse of high kinetic energy electrons (1-3 eV), or hot electrons, in metals can be generated after surface exposure to external energy, such as in the absorption of light or in exothermic chemical processes. These energetic electrons are not at thermal equilibrium with the metal atoms. It is highly probable that the correlation between hot electron generation and surface plasmon can offer a new guide for energy conversion systems [1-3]. We show that hot electron flow is generated on the modified gold thin film (<10 nm) of metal-semiconductor (TiO2) Schottky diodes by photon absorption, which is amplified by localized surface plasmon resonance. The short-circuit photocurrent obtained with low energy photons (lower than bandgap of TiO2, ~3.1-3.2 eV) is consistent with Fowler's law, confirming the presence of hot electron flows. The morphology of the metal thin film was modified to a connected gold island structure after heating to 120, 160, 200, and 240$^{\circ}C$. These connected island structures exhibit both a significant increase in hot electron flow and a localized surface plasmon with the peak energy at 550-570 nm, which was separately characterized with UV-Vis [4]. The result indicates a strong correlation between the hot electron flow and localized surface plasmon resonance with possible application in hot electron based solar cells and photodetectors.

• Proceedings of the Korean Powder Metallurgy Institute Conference
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• 1996.11a
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• pp.6-6
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• 1996

Ceramic based nanocomposite, in which nano-sized ceramics and metals were dispersed within matrix grains and/or at grain boundaries, were successfully fabricated in the ceramic/cerarnic and ceramic/metal composite systems such as $Al_2O_3$/SiC, $Al_2O_3$/$Si_3N_4$, MgO/SiC, mullite/SiC, $Si_3N_4/SiC, $Si_3N_4$/B, $Al_2O_3$/W, $Al_2O_3$/Mo, $Al_2O_3$/Ni and $ZrO_2$/Mo systems. In these systems, the ceramiclceramic composites were fabricated from homogeneously mixed powders, powders with thin coatings of the second phases and amorphous precursor composite powders by usual powder metallurgical methods. The ceramiclmetal nanocomposites were prepared by combination of H2 reduction of metal oxides in the early stage of sinterings and usual powder metallurgical processes. The transmission electron microscopic observation for the $Al_2O_3$/SiC nanocomposite indicated that the second phases less than 70nm were mainly located within matrix grains and the larger particles were dispersed at the grain boundaries. The similar observation was also identified for other cerarnic/ceramic and ceramiclmetal nanocornposites. The striking findings in these nanocomposites were that mechanical properties were significantly improved by the nano-sized dispersion from 5 to 10 vol% even at high temperatures. For example, the improvement in hcture strength by 2 to 5 times and in creep resistance by 2 to 4 orders was observed not only for the ceramidceramic nanocomposites but also for the ceramiclmetal nanocomposites with only 5~01%se cond phase. The newly developed silicon nitride/boron nitride nanocomposites, in which nano-sized hexagonal BN particulates with low Young's modulus and fracture strength were dispersed mainly within matrix grains, gave also the strong improvement in fracture strength and thermal shock fracture resistance. In presentation, the process-rnicro/nanostructure-properties relationship will be presented in detail. The special emphasis will be placed on the understanding of the roles of nano-sized dispersions on mechanical properties.