• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1994년도 추계학술대회 논문집
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• pp.54-58
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• 1994

H$_2$ bake and GeH$_4$ clean are used as a in-situ pre-clean method in low temperature Si based epitaxial growth technology using rapid thermal processing chemical vapor deposition (RTPCVD). In this paper, the H$_2$ bake and GeH$_4$ clean processes are optimized for low surface defect density using Taguchi method. In H$_2$ bake process, the epitaxial growth temperature affects dominantly on the surface defect density, and the next affecting factors are H$_2$ bake temperature and rinse time in de-ionised water. In GeH$_4$ clean process, GeH$_4$ clean temperature affects most strongly on the surface defect density, and the minor factor is GeH$_4$flow rate. The optimum process conditions predicted fly Taguchi method agree well with tile experimental data in both in-situ clean processes.

• 한국전기전자재료학회논문지
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• 제16권10호
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• pp.859-864
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• 2003

We prepared SOI(silicon-on-insulator) wafer pairs of Si II SiO$_2$/Si$_3$N$_4$ II Si using wafer direct bonding with an electric furnace annealing(EFA), a fast linear annealing(FLA), and a rapid thermal annealing(RTA), respectively, by varying the annealing temperatures at a given annealing process. We measured the bonding area and the bonding strength with processes. EFA and FLA showed almost identical bonding area and theoretical bonding strength at the elevated temperature. RTA was not bonded at all due to warpage, We report that FLA process was superior to other annealing processes in aspects of surface temperature, annealing time, and bonding strength.

• International Journal of Fuzzy Logic and Intelligent Systems
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• 제3권2호
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• pp.146-156
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• 2003

Nonlinear dynamic system exist widely in many types of systems such as chemical processes, biomedical processes, and the main steam temperature control system of the thermal power plant. Up to the present time, PID Controllers have been used to operate these systems. However, it is very difficult to achieve an optimal PID gain with no experience, because of the interaction between loops and gain of the PID controller has to be manually tuned by trial and error. This paper suggests control approaches by immune fuzzy for the nonlinear control system inverted pendulum, through computer simulation. This paper defines relationship state variables $x,\dot{x},{\theta},\dot{\theta}$ using immune fuzzy and applied its results to stability.

• 한국정밀공학회지
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• 제19권9호
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• pp.90-97
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• 2002

Ceramics are being increasingly used in industry due to their outstanding physical and chemical properties. But these materials are difficult to machine by traditional machining processes, because they are hard and brittle. Recently, as one of various alternative processes, laser-beam machining is widely used in the cutting of ceramics. Although the use of lasers presents a number of advantages over other methods, one of the problems associated with this process is the uncertain formation of cracks that result from the thermal stresses. This paper presents a Bayesian probabilistic modeling of crack formation over thin alumina plates during laser cutting.

• 자원환경지질
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• 제27권4호
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• pp.397-409
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• 1994

지각의 두께에 따른 지열류량을 표시한 그림에서 나타나는 산만성은 다른 두개의 구조구를 전제하고 지구 동력학적 과정과 열적 감쇠현상을 적용하면 설명이 분명하게 된다. 높은 지열류량은 지각이 가늘게 확장되어 얇아진 열곡지역뿐만 아니라 트러스트 구조작용으로 지각이 두껍게 되고 지각의 열생산이 많은 조산대 지역의 특징이다. 지질학적 시간이 경과함에 따라서 지각평형작용에 의해 두꺼운 지각은 융기와 침식작용으로 얇게 되며 얇은 지각은 침강과 퇴적작용으로 두껍게 된다. 지열류량은 배경의 맨틀 지열류량과 평형을 이루는 값까지 감소하게 된다.

• Journal of Welding and Joining
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• 제18권5호
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• pp.112-116
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• 2000

The development of new spraying processes has increased the demand for high quality protective coatings. Many thermal spraying processes have been developed to obtain coatings for a wide spectrum of materials and substrates. The plasma spray process was used to deposit coatings of WC-12%Co powders on mild steel substrate, and the characteristics of as-sprayed and vacuum heat treated coatings have been investigated. The variations of microhardness and bond strength in WC-12%Co coatings after heat treatment under vacuum circumstance have been investigated. The effects of phases and morphologies of WC-12%Co coatings have been investigated by utilizing X-ray diffraction and scanning electron microscopy, respectively. The microhardness and bond strength of the coatings were increased with increasing the temperature in the temperature range of $700^{circ}C~1000^{\circ}C$. The bond strength was obtained 49 MPa after vacuum heat treatment at $1000^{\circ}C$.

• Journal of Astronomy and Space Sciences
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• 제29권2호
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• pp.145-149
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• 2012

I describe a series of processes, including hierarchical fragmentation, gravitational scattering, Kozai cycles within triple systems, tidal friction and magnetic braking, that I believe are responsible for producing the modest but significant fraction of stars that are observed as contact binaries. I also discuss further processes, namely heat transport, mass transport, nuclear evolution, thermal relaxation oscillations, and further magnetic braking with tidal friction, that influence the evolution during contact. The endpoint, for contact, is that the two components merge into a single star, as recently was observed in the remarkable system V1309 Sco. The single star probably throws off some mass and rotates rapidly at first, and then slows by magnetic braking to become a rather inconspicuous but normal dwarf or subgiant. If however the contact binary was part of a triple system originally-as I suggested above was rather likely-then the result could be a $widish$ binary with apparently non-coeval components. There are several such known.

• International Journal of Fuzzy Logic and Intelligent Systems
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• 제3권1호
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• pp.78-86
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• 2003

Multivariable control system exist widely in many types of systems such as chemical processes, biomedical processes, and the main steam temperature control system of the thermal power plant. Up to the present time, Pill Controllers have been used to operate these systems. However, it is very difficult to achieve an optimal PID gain with no experience, because of the interaction between loops and gain of the Pill controller has to be manually tuned by trial and error. This paper suggests a tuning method of the Pill Controller for the multivariable power plant using an immune algorithm, through computer simulation. Tuning results by immune algorithms based neural network are compared with the results of genetic algorithm.

• 한국표면공학회지
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• 제50권2호
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• pp.55-71
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• 2017

Transparent Conductive Oxide (TCO), especially Indium Tin Oxide (ITO) films are almost prepared by DC magnetron sputtering because of the advantage of obtaining homogeneous large area coatings with high reproducibility. The purpose of this report is describe a detailed investigation of key factors dominating electrical and structural properties of sputtered ITO films. It was confirmed that crystallinity and electrical properties of ITO films were strongly depend on the sputtering pressure and kinetic energy of sputtered particles which are expected to have a close relation with the transport processes between target and substrate. And also, nodule formation on the ITO target was suppressed by both $CaCO_3$ addition and decreasing micro-pore in the target. On the other hand, we focused on the characteristics of amorphous TCO film to use as transparent electrode for various applications. To realize high thermoelectric performance, it was tried to control both high electrical conductivity and low thermal conductivity for the amorphous IZO:Sn films.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 추계학술대회 논문집 Vol.16
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• pp.42-45
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• 2003

Inorganic polymer based hybrid membranes consisting of zirconium oxide and polydimethylsiloxane (PDMS) have been synthesized by sol-gel processes. The hybrid membranes showed thermal stability and flexibility up to $300^{\circ}C$. The membrane becomes proton conducting polymer electrolyte when added with 12-phosphotungstic acid (PWA). The conductivity of the membranes was measured in the temperature range from room temperature to $150^{\circ}C$ under saturated humidity and a maximum conductivity of $5{\times}10^{-5}\;Sm^{-1}$ was obtained at $150^{\circ}C$.