• Title/Summary/Keyword: thermal mass flow sensor

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Design and Implementation of a Hybrid-Type Mass Flow Controller (하이브리드형 질량 유량 제어기의 설계 및 실현)

  • 이명의;정원철
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.4 no.2
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    • pp.63-70
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    • 2003
  • In this paper, an MFC (Mass Flow Controller) which is widely used in many semiconductor manufacturing processes for controlling the mass flow rate of a gas is designed and implemented using the PIC 16F876 of Microchip, Inc. The MFC implemented in this thesis has the form of hybrid-type, i.e., the mixed-type of the analog-type MFC, which has many problems such as low accurary, and digital-type MFC, which use an expensive DSP (Digital Signal Processor) and an ADC (Analog to Digital Convertor) with high precision. The MFC is consists of the sensor unit, the control unit and the actuator unit, and it has used the automatic calibration algorithm and the reference table method for the improvement of the performance.

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Optimal Design of a Convective MEMS Accelerometer (열대류형 초소형 가속도계의 최적 설계)

  • Park, Byoung-Kyoo;Kim, Joon-Won;Moon, Il-Kwon;Kim, Dong-Sik
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.1951-1956
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    • 2008
  • Various MEMS accelerometers are used in engineering applications including automobiles, mobile phones, military systems, and electronic devices. Among them, the thermal accelerometer employing the temperature difference induced by the convective flow inside the micro cavity has been a topic of interest. As the convective sensor does not utilize a solid proof mass, it is compact, lightweight, inexpensive to manufacture, sensitive and highly endurable to mechanical shock. However, the complexity of the convective flow and various design constraints make optimization of a device a crucial step before fabrication. In this work, optimization of a 2-axis thermal convective MEMS accelerometer is conducted based on 3-dimensional numerical simulation. Parametric studies are performed by varying the several design variables such as the heater shape/size, the cavity size and types of the gas medium and the position of temperature probes in the sensor. The results of optimal design are presented.

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Development of thin-film liquid-level sensors using AC heating method (교류 가열법을 이용한 박막 액체 레벨 센서 개발)

  • Hong, Jong-Gan;Choi, Sun-Rock;Kim, Dong-Sik
    • Proceedings of the KSME Conference
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    • 2008.11a
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    • pp.1842-1846
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    • 2008
  • This work reports development of novel liquid-level sensors based on the $3{\omega}$ method. The sensors determine the liquid level by measuring the thermal response as in the conventional hot-wire technique. However the sensors employ an AC heating method to enhance the sensitivity, noise resistance and time response. Also, the microfabricated thin-film structure of the sensor provides mass-producibility as well as improved sensor performance owing to the increase in the surface-volume ratio of the sensor. Two different types of the sensor are developed: one for point detection of the fluid phase and the other for monitoring continuous variation of liquid level. Notable is that the performance of the sensor is not considerably affected by the liquid flow.

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Fabrication and Characterization of Silicon Devices for Flow Measurement (II) (흐름측정용 실리콘 소자의 제작 및 특성 평가 (II))

  • Ju, B.K.;Ko, C.G.;Kim, C.J.;Tchah, K.H.;Oh, M.H.
    • Journal of Sensor Science and Technology
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    • v.3 no.1
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    • pp.12-18
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    • 1994
  • In this study, we fabricated and characterized a calorimetric-type flow sensing element using a micromachined silicon substrate. The cooling and heating effects resulted from the gas flow were measured by two temperature sensors located at both sides of the heating resistor, and the insulator diaphragm was employed as a substrate in order to improve thermal isolation. The sensor generated $0{\sim}378.4mV$ output signal under 10V bridge-applied voltage when the nitrogen gas was passed on the sensor surface having a mass flow rate of $0{\sim}0.25grs/min$, and reached to the stable operating condition within 10 seconds.

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Recent Progress in Air-Conditioning and Refrigeration Research : A Review of Papers Published in the Korean Journal of Air-Conditioning and Refrigeration Engineering in 2013 (설비공학 분야의 최근 연구 동향 : 2013년 학회지 논문에 대한 종합적 고찰)

  • Lee, Dae-Young;Kim, Sa Ryang;Kim, Hyun-Jung;Kim, Dong-Seon;Park, Jun-Seok;Ihm, Pyeong Chan
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.26 no.12
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    • pp.605-619
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    • 2014
  • This article reviews the papers published in the Korean Journal of Air-Conditioning and Refrigeration Engineering during 2013. It is intended to understand the status of current research in the areas of heating, cooling, ventilation, sanitation, and indoor environments of buildings and plant facilities. Conclusions are as follows. (1) The research works on the thermal and fluid engineering have been reviewed as groups of fluid machinery, pipes and relative parts including orifices, dampers and ducts, fuel cells and power plants, cooling and air-conditioning, heat and mass transfer, two phase flow, and the flow around buildings and structures. Research issues dealing with home appliances, flows around buildings, nuclear power plant, and manufacturing processes are newly added in thermal and fluid engineering research area. (2) Research works on heat transfer area have been reviewed in the categories of heat transfer characteristics, pool boiling and condensing heat transfer and industrial heat exchangers. Researches on heat transfer characteristics included the results for general analytical model for desiccant wheels, the effects of water absorption on the thermal conductivity of insulation materials, thermal properties of Octadecane/xGnP shape-stabilized phase change materials and $CO_2$ and $CO_2$-Hydrate mixture, effect of ground source heat pump system, the heat flux meter location for the performance test of a refrigerator vacuum insulation panel, a parallel flow evaporator for a heat pump dryer, the condensation risk assessment of vacuum multi-layer glass and triple glass, optimization of a forced convection type PCM refrigeration module, surface temperature sensor using fluorescent nanoporous thin film. In the area of pool boiling and condensing heat transfer, researches on ammonia inside horizontal smooth small tube, R1234yf on various enhanced surfaces, HFC32/HFC152a on a plain surface, spray cooling up to critical heat flux on a low-fin enhanced surface were actively carried out. In the area of industrial heat exchangers, researches on a fin tube type adsorber, the mass-transfer kinetics of a fin-tube-type adsorption bed, fin-and-tube heat exchangers having sine wave fins and oval tubes, louvered fin heat exchanger were performed. (3) In the field of refrigeration, studies are categorized into three groups namely refrigeration cycle, refrigerant and modeling and control. In the category of refrigeration cycle, studies were focused on the enhancement or optimization of experimental or commercial systems including a R410a VRF(Various Refrigerant Flow) heat pump, a R134a 2-stage screw heat pump and a R134a double-heat source automotive air-conditioner system. In the category of refrigerant, studies were carried out for the application of alternative refrigerants or refrigeration technologies including $CO_2$ water heaters, a R1234yf automotive air-conditioner, a R436b water cooler and a thermoelectric refrigerator. In the category of modeling and control, theoretical and experimental studies were carried out to predict the performance of various thermal and control systems including the long-term energy analysis of a geo-thermal heat pump system coupled to cast-in-place energy piles, the dynamic simulation of a water heater-coupled hybrid heat pump and the numerical simulation of an integral optimum regulating controller for a system heat pump. (4) In building mechanical system research fields, twenty one studies were conducted to achieve effective design of the mechanical systems, and also to maximize the energy efficiency of buildings. The topics of the studies included heating and cooling, HVAC system, ventilation, and renewable energies in the buildings. Proposed designs, performance tests using numerical methods and experiments provide useful information and key data which can improve the energy efficiency of the buildings. (5) The field of architectural environment is mostly focused on indoor environment and building energy. The main researches of indoor environment are related to infiltration, ventilation, leak flow and airtightness performance in residential building. The subjects of building energy are worked on energy saving, operation method and optimum operation of building energy systems. The remained studies are related to the special facility such as cleanroom, internet data center and biosafety laboratory. water supply and drain system, defining standard input variables of BIM (Building Information Modeling) for facility management system, estimating capability and providing operation guidelines of subway station as shelter for refuge and evaluation of pollutant emissions from furniture-like products.

An experimental study on the cooling performance and the phase shift between piston and displacer in the Stirling cryocooler

  • Park, S. J.;Y. J. Hong;Kim, H. B.;D. Y. Koh;B. K. Yu;Lee, K. B.
    • Progress in Superconductivity and Cryogenics
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    • v.5 no.1
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    • pp.111-117
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    • 2003
  • In the design of the split type free displacer Stilting cryocooler the motion of the displacer is very important to decide the cooling capacity, which depends upon the working gas pressure, the swept volume in the compression space and the expansion space, operating frequency, the phase shift between piston and displacer, etc. In this study, Stirling cryocooler actuated by the electric farce of the dual linear motor is designed and manufactured. Cool down characteristics of the cold end with laser displacement sensor in the expander of the Stilting cryocooler is evaluated. The charging pressure was 15kg$_{f}$/$\textrm{cm}^2$ and operating frequency was 50Hz. Input power and the lowest temperature were about 32W and 67K, respectively. And, displacement of the piston is measured by LVDTs (Linear Variable Differential Transformers), displacement of thedisplacer is measured by laser optic method, and phase shift between piston and displacer is discussed. As the peak-to-peak pressure of the compressor was increased, peak-to-peak displacement of the displacer was increased. The peak-to-peak displacement of the displacer increases in the range of 0 - 64.5Hz(resonant frequency of the displacer), but decreases steeply when the operating frequency is bigger than the resonant frequency. Finally when the phase shift between displacements of the Piston and displacer is 45。, operating frequency is optimum and is decided by resonant frequency of the expander, mass and cross section area of the displacer and constant by friction and flow resistance.e.