• 제목/요약/키워드: thermal isolation

검색결과 133건 처리시간 0.028초

오엘이디의 단열 소자분리 구조를 위한 이미지 라버셜 감광제 (Image Reversal Photoresist for the Single Isolation Structure of OLEDs)

  • 이승준;신윤수;채결여;임대우;최경희
    • 한국광학회:학술대회논문집
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    • 한국광학회 2009년도 동계학술발표회 논문집
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    • pp.541-542
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    • 2009
  • We have developed an image reversal photoresist with high thermal stability and electric insulating properties for the single isolation structure of OLEDs. The thermal stability and electric insulating properties are investigated and compared with those of conventional insulator and cathode separator materials. The single isolation structure using the image reversal photoresist reduces the fabrication process steps and cuts down the manufacturing cost.

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DRIE 식각을 이용한 대면적 실리콘 미세 구조물 부유 시 발생하는 열고립 현상 해석 (Numerical Analysis for Thermal Isolation on Plasma Etched silicon micro-structures)

  • 이용석;장윤호;김정무;김용권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2011년도 제42회 하계학술대회
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    • pp.1684-1685
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    • 2011
  • This paper presents a theoretical and numerical analysis for thermal isolation of silicon micro-structures, especially for a large size with poor thermal conductivity, as well as straightforward solution for such an issue. Additional metal patterns underneath the silicon structures effectively reduces the thermal isolation. Heat transfer mechanism is analyzed using an equivalent circuit of thermal network including plasma, a heat source, heat capacitors, and thermal resistances. The FEM simulation was carried out to investigate the temperature change of silicon micro-structures according to process time. The temperature of silicon micro-structures with 2 ${\mu}m$ thick chrome layer at a steady state is $86^{\circ}C$, an approximately 40% decrease from the silicon microstructure without thin metal ($122^{\circ}C$)

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Dislocation-Free Shallow Trench Isolation 공정 연구 (A study on the Dislocation-Free Shallow Trench Isolation (STI) Process)

  • 유해영;김남훈;김상용;이우선;장의구
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2005년도 추계학술대회 논문집 Vol.18
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    • pp.84-85
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    • 2005
  • Dislocations are often found at Shallow Trench Isolation (STI) process after repeated thermal cycles. The residual stress after STI process often leads defect like dislocation by post STI thermo-mechanical stress. Thermo-mechanical stress induced by STI process is difficult to remove perfectly by plastic deformation at previous thermal cycles. Embedded flash memory process is very weak in terms of post STI thermo-mechanical stress, because it requires more oxidation steps than other devices. Therefore, dislocation-free flash process should be optimized.

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바텀애시 재활용 인공토양 적용 옥상녹화 유니트 시스템의 열특성 (Thermal Property of the Roof Green Unit System Using Artificial Lightweight Soil Recycled with Bottom Ash)

  • 유종수;이종찬;오창원
    • 한국건설순환자원학회논문집
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    • 제8권1호
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    • pp.49-55
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    • 2020
  • 본 연구에서는 바텀애시 재활용 인공토양을 적용한 옥상녹화 유니트 시스템의 표면 온도변화를 계절별로 측정하여 바텀애시 재활용 인공토양의 열특성을 분석한 결과, 바텀애시 인공경량토양이 기존 토양보다 우수한 열차단 특성이 있음을 확인하였다. 또한, 기존 옥상녹화 유니트 시스템과 개발 옥상녹화 유니트 시스템의 열차단 효과를 분석하기 위해 계절별 일교차를 측정한 결과 기존 녹화 유니트 시스템은 현장 포설형 녹화시스템보다 열차단 효과가 낮은 반면 격막을 탈거하여 바텀애시 인공경량토양을 연속된 층으로 형성하는 개발 유니트 녹화 시스템은 기존 현장 포설형 녹화시스템과 유사한 열차단 효과를 갖는 것으로 분석되었다.

EXPERIMENTS ON THE PERFORMANCE SENSITIVITY OF THE PASSIVE RESIDUAL HEAT REMOVAL SYSTEM OF AN ADVANCED INTEGRAL TYPE REACTOR

  • Park, Hyun-Sik;Choi, Ki-Yong;Choi, Seok;Yi, Sung-Jae;Park, Choon-Kyung;Chung, Moon-Ki
    • Nuclear Engineering and Technology
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    • 제41권1호
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    • pp.53-62
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    • 2009
  • A set of experiments has been conducted on the performance sensitivity of the passive residual heat removal system (PRHRS) for an advanced integral type reactor, SMART, by using a high temperature and high pressure thermal-hydraulic test facility, the VISTA facility. In this paper the effects of the opening delay of the PRHRS bypass valves and the closing delay of the secondary system isolation valves, and the initial water level and the initial pressure of the compensating tank (CT) are investigated. During the reference test a stable flow occurs in a natural circulation loop that is composed of a steam generator secondary side, a secondary system, and a PRHRS; this is ascertained by a repetition test. When the PRHRS bypass valves are operated 10 seconds later than the secondary system isolation valves, the primary system is not properly cooled. When the secondary system isolation valves are operated 10 or 30 seconds later than the PRHRS bypass valves, the primary system is effectively cooled but the inventory of the PRHRS CT is drained earlier. As the initial water level of the CT is lowered to 16% of the full water level, the water is quickly drained and then nitrogen gas is introduced into the PRHRS, resulting in the deterioration of the PRHRS performance. When the initial pressure of the PRHRS is at 0.1MPa, the natural circulation is not performed properly. When the initial pressures of the PRHRS are 2.5 or 3.5 MPa, they show better performance than did the reference test.

복합재료를 이용한 시트형 차음재 개발 (Development of Sound Isolation Sheets with Compound Materials)

  • 이동훈;이태근;정성균;이희원;강문;김영배
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2000년도 추계학술대회논문집
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    • pp.415-420
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    • 2000
  • This paper describes a part of the results obtained in the process of the development of thin sound isolation sheets filled mineral compound powder with PVC. The raw materials used are pyrophillite, pottery stone and graphite. The physical properties such as the crystal structures, compositions, and specific gravities, etc. of raw materials are analyzed and discussed from a point of view of sound isolation material. From the analysis of experimental results, the particle size and the additive amount of mineral compound powder for manufacturing sample isolation sheets are decided. The resistant capability against fire of sound isolation sheets including mechanical, thermal and physical properties is tested. The transmission loss measuremenst of sound isolation sheets are performed using two-microphone method in an impedance tube. It is shown that the sound isolation capability of thin sheets has an excellent performance in excess of the object of development.

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위성광학탑재체 개발을 위한 나노급 방진장치 개념 설계 (Concept Design of Vibration Isolation System for Development of Optical Payload of Satellite)

  • 이상훈;조혁진;서희준;김영기;문귀원;문상무;김홍배
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2005년도 춘계학술대회논문집
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    • pp.949-952
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    • 2005
  • According to the national space program in Korea, is satellites will be launch into space up to 2015. Especially, KARI is going to develope of its own a high resolution camera of less than 1m to be mounted on next Multipurpose Satellite. When performing testing of large spacecraft or hardware that will be launched into orbit, it is necessary to conduct a testing with space-simulated environment. To achieve this requirement, thermal vacuum chamber is generally used. KARI has been developed a very Large Thermal Vacuum Chamber(LTVC) from 2003 to accomodate future space program, such as KOMPSAT, COMS, and Launch vehicles. This new facility will be used to qualify the first self developed High Resolution Camera, which will be loaded on KOMPSAT-3. To perform an optical test for space camera, it is necessary to provide vibration free environment. Thus the vibration responses on the optical table due to external vibration should be minimized by using a special isolation system. In this paper, we propose the concept design of vibration isolation system for the development of the high resolution camera.

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미소진동저감용 진동절연기의 성능유지를 위한 극저온 냉각용 압축기 조립체 열제어 설계 (Thermal Design of Cryogenic Compressor with Strategies for Keeping Performance of Micro-vibration Isolation System)

  • 오현웅;이경주;정석용;신소민
    • 한국항공우주학회지
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    • 제40권3호
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    • pp.237-242
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    • 2012
  • 극저온이 요구되는 우주용 탑재장비의 냉각을 위해 일반적으로 Pulse Tube-type 압축기가 적용되고 있으며, 궤도상에서 압축기의 냉각성능, 임무수명 및 비대칭 온도분포에 의한 미소진동발생 방지를 위해 압축기를 허용온도 범위로 유지하는 열제어가 필요하다. 압축기는 궤도 운용 시 미소진동을 발생하여 관측성능이 요구되는 탑재체의 지향성능을 저하시키는 원인으로 작용한다. 본 논문에서는 압축기의 미소진동 방지를 목적으로 적용된 진동절연기의 성능유지 및 압축기의 허용온도범위 유지를 위한 열제어 성능을 동시에 만족하는 우주용 압축기 조립체의 열설계를 제안하였으며, 설계의 유효성을 해석적으로 입증하였다.

외부챔버와 유연한 튜브로 연결된 LCD 패널 검사기 방진용 공기 스프링의 열 및 동적 연성거동에 대한 연구: PART I, 이론적 모델링 (Study on the Thermal and Dynamic Behaviors of Air Spring for vibration isolation of LCD panel inspecting machine connected with an External Chamber through a flexible tube: PART I, Theoretical Modeling)

  • 석종원;이주홍;김필기
    • 반도체디스플레이기술학회지
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    • 제10권1호
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    • pp.33-41
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    • 2011
  • Due to the recent quantum leaps forward in bio-, nano-, and information-technologies (BT, NT and IT), the precisionization and miniaturization of mechanical and electrical components are in high demand. In particular, the ITrelated equipments that take a great part in our domestic industry are in the area requiring high precision technologies. As a consequence, the researches on the development vibration isolation systems that diminish external disturbance or internal vibration are highly required. Among the components comprising the vibration isolation system, air spring has become on a focal point for the researchers due to its merits. This air spring is able to support heavy loads, keep a low natural frequency despite of having a lower value of stiffness, and control the performance of vibration isolation. However, sometimes the sole use of air spring is in demand due to some economic reasons. Under this circumstance, the damping effect of sole air spring may not enough to reduce sufficient amount of vibration. In this study, the air spring mount system connecting with an external chamber is proposed to increase or control the damping effect. To investigate its damping mechanism, the thermal and dynamic behaviors of the system is examined through a theoretical modeling approach in this part of research. In this approach, thermomechanical and Helmholtz resonator type models are to be employed for the air spring/external chambers and connecting tube system, respectively. The frequency response functions (FRFs) derived from the modeling effort are evaluated with physical parametric values and the effects of connecting tube length on these FRFs are identified through computer simulations.