• Title/Summary/Keyword: technology reliability

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Effect of Post-annealing on the Interfacial adhesion Energy of Cu thin Film and ALD Ru Diffusion Barrier Layer (후속 열처리에 따른 Cu 박막과 ALD Ru 확산방지층의 계면접착에너지 평가)

  • Jeong, Minsu;Lee, Hyeonchul;Bae, Byung-Hyun;Son, Kirak;Kim, Gahui;Lee, Seung-Joon;Kim, Soo-Hyun;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
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    • v.25 no.3
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    • pp.7-12
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    • 2018
  • The effects of Ru deposition temperature and post-annealing conditions on the interfacial adhesion energies of atomic layer deposited (ALD) Ru diffusion barrier layer and Cu thin films for the advanced Cu interconnects applications were systematically investigated. The initial interfacial adhesion energies were 8.55, 9.37, $8.96J/m^2$ for the sample deposited at 225, 270, and $310^{\circ}C$, respectively, which are closely related to the similar microstructures and resistivities of Ru films for ALD Ru deposition temperature variations. And the interfacial adhesion energies showed the relatively stable high values over $7.59J/m^2$ until 250h during post-annealing at $200^{\circ}C$, while dramatically decreased to $1.40J/m^2$ after 500 h. The X-ray photoelectron spectroscopy Cu 2p peak separation analysis showed that there exists good correlation between the interfacial adhesion energy and the interfacial CuO formation. Therefore, ALD Ru seems to be a promising diffusion barrier candidate with reliable interfacial reliability for advanced Cu interconnects.

A new Method of Stiction Reduction for MEMS Structures Using DDMS (DDMS를 이용한 MEMS 구조물의 새로운 점착방지 방법)

  • Kim, Bong-Hwan;Oh, Chang-Hoon;Chun, Kuk-Jin;Oh, Yong-Soo
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.37 no.6
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    • pp.9-16
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    • 2000
  • In order to achieve stiction-free polysilicon surfaces, we have suggested a new class of chemical coating precursors and confirmed their excellent characteristics. The strategy is to adopt dialkyldichlorosilanes (DDS, $R2SiCl_2$) instead of monoalkyltrichlorosilanes (MTS, $RSiCl_3$) such as octadecyltrichlorosilane (OTS) or 1H,1H2H,2H-perfluorodecyltrichlorosilane (FDTS). Dichlorodimethylsilane (DDMS, $(CH_3)2SiCl_2$) in this study is commercially available DDS with two short chains. DDMS in aprotic media spontaneously deposits on the hydrophilic polysilicon surface, which is completely changed to hydrophobic one. When polysilicon surface is exposed to DDMS solution at room temperature, anti-stiction property and hydrophobicity are clearly comparable to FDTS. DDMS is even superior to MTS in reliability and easy handling, which provides high yield. Since interactions among precursor molecules are reduced, conglomeration both in homogeneous solution and on surface can be effectively avoided. Even the cantilevers of 3 mm in length can be protected successfully from the stiction and the final quality of the modified surfaces is much less dependent on temperature. And no difference was found between the processes in ambient environment and in dry box. In addition, DDMS has advantages of remarkably reduced process time and low cost.

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Establishment of Rebar Quantity Estimation in BIM-based Initial Design Phase (BIM기반 초기 설계 단계 철근 물량 산출 프로세스 구축)

  • Song, Chi-Ho;Kim, Chee-Kyeong;Lee, Si Eun;Choi, Hyunchul
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.29 no.5
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    • pp.447-454
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    • 2016
  • In the meantime, looking at the present status of how to estimationte the quantity of rebar based on 3D BIM getting the limelight in these days, commercial BIM tools provide rebar modeling functions however it takes a vast amount of modeling time for modeling of rebar in use of that function hence there is no BIM software at present for practical use. Therefore, in this study, we organized and presented a practical rebar quantity estimationtion process in BIM-based design work-site and intended to develop a program named Rebar Automatic Arrangement Program - hereinafter called RAAP - which enables automatic rebar arrangement based on much more precise cross-sectional information of bars in column, beam, slab and wall than the one from existing 2D method under the conditions without any cross-sectional information in the initial design phase. In addition, we intended to establish rebar quantity estimationtion process in the initial design phase through interworking of modeling & quantity estimationtion functions in consideration of joint, anchoring length of BuilderHUB as a BIM software with RAAP. The results from this study are practical in developing a technology that is able to estimationte quantity with more improved reliability than the one from existing 2D-based methods with less effort when the quantity of framework is estimationted in the uncompleted state of cross-sectional design for structural members in the initial design phase of a construction project. And it is expected that it could be utilized as a basic study from which a reasonable quantity estimationtion program can be established in the initial design phase.

Evaluation of Flexural Properties of Indirect Gum-Shade Composite Resin for Esthetic Improvement (심미성 향상을 위한 간접수복용 Gum-Shade 복합레진의 굽힘 특성 평가)

  • Im, Yong-Woon;Hwang, Seong-Sig
    • Journal of dental hygiene science
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    • v.15 no.4
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    • pp.407-412
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    • 2015
  • This study investigated flexural properties of indirect Gum-shade composite resins for esthetic improvement. The material utilized in this study was Crea.lign, Twiny flow and Twiny paste (TP). Ten specimens were fabricated with a dimension of $25{\times}2{\times}2mm$ according to the ISO 4049. After fabrications, specimens were stored in the distilled water for 24 hours at the temperature of $37^{\circ}C$. Three-point bending test was performed in universal testing machine (Instron 3344; Instron, USA) at a crosshead speed of 1 mm/min until the failure occurred. TP exhibited a higher flexural strength (FS) and flexural modulus (FM) compared to the flowable materials. There were significant differences among the three materials in FS and FM. However, there was no significant difference in work of fracture (WOF) in all tested materials (p>0.05). In Weibull analysis, TP showed the greatest Weibull modulus which means a higher reliability of the materials. Also, Gum-shade composite resins revealed a strong correlation in all flexural properties. There was a positive correlation in FS-FM ($r^2=0.99$) and a negative correlation between FS-WOF and FM-WOF ($r^2>0.97$). Therefore, this confirmed that flexural property was important for mechanical behavior evaluation and useful information. To addition, this improved among mechanical properties correlation of materials as important factor.

Cloud Service Evaluation Techniques Using User Feedback based on Sentiment Analysis (감정 분석 기반의 사용자 피드백을 이용한 클라우드 서비스 평가 기법)

  • Yun, Donggyu;Kim, Ungsoo;Park, Joonseok;Yeom, Keunhyuk
    • Journal of Software Engineering Society
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    • v.27 no.1
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    • pp.8-14
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    • 2018
  • As cloud computing has emerged as a hot trend in the IT industry, various types of cloud services have emerged. In addition, cloud service broker (CSB) technology has emerged to alleviate the complexity of the process of selecting the desired service that user wants among the various cloud services. One of the key features of the CSB is to recommend the best cloud services to users. In general, CSB can use a method to evaluate a service by receiving feedback about a service from users in order to recommend a cloud service. However, since each user has different criteria for giving a rating, there is a problem that reliability of service evaluation can be low when the rating is only used. In this paper, a method is proposed to supplement evaluation of rating based service by applying machine learning based sentiment analysis to cloud service user's review. In addition, the CSB prototype is implemented based on proposed method. Further, the results of comparing the performance of various learning algorithms is proposed that can be used for sentiment analysis through experiments using actual cloud service review as learning data. The proposed service evaluation method complements the disadvantages of the existing rating-based service evaluation and can reflect the service quality in terms of user experience.

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Development of a Simple Method for Detecting Capsaicinoids Using Gibb's Reagent in Pepper (Gibb's Reagent를 이용한 캡사이시노이드 간이 분석 방법)

  • Jeong, Hee-Jin;Hwang, Do-Yeon;Ahn, Jeong-Tak;Chun, Jin-Young;Han, Ko-Eun;Lee, Woo-Moon;Kwon, Jin-Kyung;Lee, Yong-Jik;Kang, Byoung-Cheorl
    • Horticultural Science & Technology
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    • v.30 no.3
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    • pp.294-300
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    • 2012
  • Capsaicinoids are responsible for the pungency of Capsicum species. Among the several reported methods for quantifying capsaicinoids in pepper, liquid chromatography methods such as TLC and HPLC have been the most widely used due to their precision and reliability. However, they are quite expensive and time consuming to be applied to the field breeding. In this paper, we demonstrated that Gibb's reagent, 2,6-dichloroquinone chlorimide, mediated measurement of capsaicinoids is a simple and reliable method for determining the presence/absence of capsaicinoids, and estimating the amount of capsacinoids in pepper fruits. The capsaicinoids could be also detected via colorimetiric reactions of the Gibb's reagent. This simple method has been verified to be as accurate as the HPLC analysis. We have also modified this method for a high through-put analysis. This method will be useful for measuring capsaicinids in pungency breeding programs in pepper.

Mechanical reliability of Sn-37Pb BGA solder joints with high-speed shear test (고속전단 시험을 이용한 Sn-37Pb BGA solder joints의 기계적 신뢰성 특성 평가)

  • Jang, Jin-Kyu;Ha, Sang-Su;Ha, Sang-Ok;Lee, Jong-Gun;Moon, Jung-Tak;Park, Jai-Hyun;Seo, Won-Chan;Jung, Seung-Boo
    • Journal of the Microelectronics and Packaging Society
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    • v.15 no.4
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    • pp.65-70
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    • 2008
  • The mechanical shear strength of BGA(Ball Grid Array) solder joints under high impact loading was investigated. The Sn-37Pb solder balls with a diameter of $500{\mu}m$ were placed on the pads of FR-4 substrates with ENIG(Electroless Nickel Immersion Gold) surface treatment and reflowed. For the High Temperature Storage(HTS) test, the samples were aged a constant testing temperature of $120^{\circ}C$ for up to 250h. After the HTS test, high speed shear tests with various shear speed of 0.01, 0.1, 1, 3 m/s were conducted. $Ni_3Sn_4$ intermetallic compound(IMC) layer was observed at the solder/Ni-P interface and thickness of IMC was increased with aging process. The shear strength increased with increasing shear speed. The fracture surfaces of solder joints showed various fracture modes dependent on shear speed and aging time. Fracture mode was changed from ductile fracture to brittle fracture with increasing shear speed.

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A review on inorganic phosphor materials for white LEDs (백색 발광다이오드(White LEDs)용 무기형광체 재료의 연구개발 현황)

  • Hwang, Seok Min;Lee, Jae Bin;Kim, Se Hyeon;Ryu, Jeong Ho
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.22 no.5
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    • pp.233-240
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    • 2012
  • White LEDs (light-emitting diodes) are promising new-generation light sources which can replace conventional lamps due to their high reliability, low energy consumption and eco-friendly effects. This paper briefly reviews recent progress of oxy/nitride host phosphor and quantum dot materials with broad excitation band characteristics for phosphor-converted white LEDs. Among oxy/nitride host materials, $M_2Si_5N_8$ : $Eu^{2+}$, $MAlSiN_3$ : $Eu^{2+}$ M-SiON (M = Ca, Sr, Ba), ${\alpha}/{\beta}$-SiAlON : $Eu^{2+}$ are excellent phosphors for white LED using blue-emitting chip. They have very broad excitation bands in the range of 440~460 nm and exhibit emission from green to red. In this paper, In this review we focus on recent developments in the crystal structure, luminescence and applications of the oxy/nitride phosphors for white LEDs. In addition, the application prospects and current trends of research and development of quantum dot phosphors are also discussed.

A CMOS 16:1 Binary-Tree Multiplexer applying Delay Compensation Techniques (딜레이 보상 기법을 적용한 바이너리-트리 구조의 CMOS 16:1 멀티플렉서)

  • Shon, Kwan-Su;Kim, Gil-Su;Kim, Kyu-Young;Kim, Soo-Won
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.45 no.2
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    • pp.21-27
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    • 2008
  • This paper describes a CMOS 16:1 binary-tree multiplexer(MUX) using $0.18-{\mu}m$ technology. To provide immunity for wide frequency range and process-and-temperature variations, the MUX adopts several delay compensation techniques. Simulation results show that the proposed MUX maintains the setup margins and hold margins close to the optimal value, i.e., 0.5UI, in wide frequency-range and in wide process-and-temperature variations, with standard deviation of 0.05UI approximately. These results represent that these proposed delay compensations are effective and the reliability is much improved although CMOS logic circuits are sensitive to those variations. The MUX is fabricated using $0.18-{\mu}m$ CMOS process, and tested with a test board. At power supply voltage of 1.8-V, maximum data-rate and area of the MUX is 1.65-Gb/s and 0.858 $mm^2$, respectively. The MUX dissipates a power of 24.12 mW, and output eye opening is 272.53 mV, 266.55 ps at 1.65-Gb/s operation.

Analysis of the Radiation Patterns of Satellite SAR System with Active-Transponder (능동전파반사기를 이용한 위성 SAR 시스템 방사 패턴 분석)

  • Hwang, Ji-Hwan;Kweon, Soon-Koo;Oh, Yisok
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.23 no.10
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    • pp.1204-1211
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    • 2012
  • Measurement and analysis results of the extracted radiation-patterns from the field-experiments which were conducted to acquire the generic technology for calibration and validation of the satellite SAR system(Synthetic Aperture Radar) are presented in this study. Prototype of active transponder is adjustable within maximum 63.1 dBsm of RCS (Radar Cross Section) and includes the receiving-function with external receiver. To increase an accuracy of these field experiments, we repetitively measured satellite SAR systems of the same operating mode(i.e., COSMO-SkyMed No. 2 & 3, hh-pol., strip-map himage mode, 3 m resolution). Then, the reliability of experimental results was cross-checked through analysis of the RCS of active transponder on SAR image. The property of azimuth radiation patterns of satellite SAR system extracted from them has $0.352^{\circ}$ of HPBW(half-power beamwidth), $0.691^{\circ}$ of FNBW(first-null beamwidth), and 11.17 dB of PSLR(peak to side lobe ratio), respectively.