• Title/Summary/Keyword: surface uniformity

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Measurement of Width and Step-Height of Photolithographic Product Patterns by Using Digital Holography (디지털 홀로그래피를 이용한 포토리소그래피 공정 제품 패터닝의 폭과 단차 측정)

  • Shin, Ju Yeop;Kang, Sung Hoon;Ma, Hye Joon;Kwon, Ik Hwan;Yang, Seung Pil;Jung, Hyun Chul;Hong, Chung Ki;Kim, Kyeong Suk
    • Journal of the Korean Society for Nondestructive Testing
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    • v.36 no.1
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    • pp.18-26
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    • 2016
  • The semiconductor industry is one of the key industries of Korea, which has continued growing at a steady annual growth rate. Important technology for the semiconductor industry is high integration of devices. This is to increase the memory capacity for unit area, of which key is photolithography. The photolithography refers to a technique for printing the shadow of light lit on the mask surface on to wafer, which is the most important process in a semiconductor manufacturing process. In this study, the width and step-height of wafers patterned through this process were measured to ensure uniformity. The widths and inter-plate heights of the specimens patterned using photolithography were measured using transmissive digital holography. A transmissive digital holographic interferometer was configured, and nine arbitrary points were set on the specimens as measured points. The measurement of each point was compared with the measurements performed using a commercial device called scanning electron microscope (SEM) and Alpha Step. Transmission digital holography requires a short measurement time, which is an advantage compared to other techniques. Furthermore, it uses magnification lenses, allowing the flexibility of changing between high and low magnifications. The test results confirmed that transmissive digital holography is a useful technique for measuring patterns printed using photolithography.

The Experimental Assessment of Influence Factors on KLS-1 Microwave Sintering (한국형 인공월면토(KLS-1) 마이크로파 소결에 미치는 영향인자에 관한 실험적 연구)

  • Jin, Hyunwoo;Lee, Jangguen;Ryu, Byung Hyun;Shin, Hyu-Soung;Kim, Young-Jae
    • Journal of the Korean Geotechnical Society
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    • v.37 no.2
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    • pp.5-17
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    • 2021
  • The Moon has been an attractive planet as an outpost for deep space exploration since He-3 and water ice which can be used as energy resources were discovered. In-Situ Resource Utilization (ISRU) construction material fabrication method is required for sustainable space planet exploration. In this paper, the possibility of microwave sintering technology for construction material fabrication was evaluated using lunar regolith that can be easily collected from the Moon surface. Experimental assessment of the influence factors on microwave sintering was conducted using a hybrid sintering system for efficient processing. The heat distribution in the furnace was observed using thermal paper that is coated with a material formulated to change color when exposed to heat. Based on this result, sintered cylindrical KLS-1s with a diameter of 1 cm and a height of 2 cm were fabricated. Densities were measured for the sintered KLS-1s under rotating turntable conditions that have an effect of microwave dispersion. The more dielectrics were arranged, the more microwaves were dispersed reducing the heat concentration, and thus a uniformity of sintered KLS-1s was enhanced.

Influence of Mixture Non-uniformity on Methane Explosion Characteristics in a Horizontal Duct (수평 배관의 메탄 폭발특성에 있어서 불균일성 혼합기의 영향)

  • Ou-Sup Han;Yi-Rac Choi;HyeongHk Kim;JinHo Lim
    • Korean Chemical Engineering Research
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    • v.62 no.1
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    • pp.27-35
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    • 2024
  • Fuel gases such as methane and propane are used in explosion hazardous area of domestic plants and can form non-uniform mixtures with the influence of process conditions due to leakage. The fire-explosion risk assessment using literature data measured under uniform mixtures, damage prediction can be obtained the different results from actual explosion accidents by gas leaks. An explosion characteristics such as explosion pressure and flame velocity of non-uniform gas mixtures with concentration change similar to that of facility leak were examined. The experiments were conducted in a closed 0.82 m long stainless steel duct with observation recorded by color high speed camera and piezo pressure sensor. Also we proposed the quantification method of non-uniform mixtures from a regression analysis model on the change of concentration difference with time in explosion duct. For the non-uniform condition of this study, the area of flame surface enlarged with increasing the concentration non-uniform in the flame propagation of methane and was similar to the wrinkled flame structure existing in a turbulent flame. The time to peak pressure of methane decreased as the non-uniform increased and the explosion pressure increased with increasing the non-uniform. The ranges of KG (Deflagration index) of methane with the concentration non-uniform were 1.30 to 1.58 [MPa·m/s] and the increase rate of KG was 17.7% in methane with changing from uniform to non-uniform.

Verification of Skin Dose in Tomotherapy Using the Developed Phantom for Image Based Radiation Treatment System (영상 기반 치료 장비용 팬톰을 이용한 토모테라피 피부 선량 검증)

  • Park, Ji-Yeon;Chang, Ji-Na;Oh, Seung-Jong;Kang, Dae-Gyu;Jung, Won-Gyun;Lee, Jeong-Woo;Jang, Hong-Suk;Kim, Hoi-Nam;Park, Hae-Jin;Kim, Sung-Hwan;Suh, Tae-Suk
    • Progress in Medical Physics
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    • v.20 no.2
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    • pp.88-96
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    • 2009
  • Radiation treatment for skin cancer has recently increased in tomotherapy. It was reported that required dose could be delivered with homogeneous dose distribution to the target without field matching using electron and photon beam. Therapeutic beam of tomotherapy, however, has several different physical characteristic and irradiation of helical beam is involved in the mechanically dynamic factors. Thus verification of skin dose is requisite using independent tools with additional verification method. Modified phantom for dose measurement was developed and skin dose verification was performed using inserted thermoluminescent dosimeters (TLDs) and GafChromic EBT films. As the homogeneous dose was delivered to the region including surface and 6 mm depth, measured dose using films showed about average 2% lower dose than calculated one in treatment planning system. Region indicating about 14% higher and lower absorbed dose was verified on measured dose distribution. Uniformity of dose distribution on films decreased as compared with that of calculated results. Dose variation affected by inhomogeneous material, Teflon, little showed. In regard to the measured dose and its distribution in tomotherapy, verification of skin dose through measurement is required before the radiation treatment for the target located at the curved surface or superficial depth.

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A STUDY ON THE MODE OF POLYMERIZATION OF LIGHT-CURED RESTORATIVE MATERIALS CURED WITH THREE DIFFERENT LIGHT SOURCES (광원의 유형에 따른 광중합 수복재의 중합양상)

  • Kwon, Min-Seok;Jung, Tae-Sung;Kim, Shin
    • Journal of the korean academy of Pediatric Dentistry
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    • v.30 no.2
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    • pp.229-237
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    • 2003
  • The purpose of this study was to compare the effect of exposure time on the polymerization of surface and 2 mm below the surface of light-cured restorative materials cured with three different light sources; conventional halogen light curing unit(XL 3000, 3M, U.S.A.), plasma arc light curing unit(Flipo, LOKKI, France) and light emitting diode(LED) light curing unit(Elipar Free light, 3M, U.S.A.) and compare the uniformity of polymerization from the center to the periphery of resin surfaces according to polymerization diameter cure with three different light sources. From the experiment, the following results were obtained. 1. In Z-100, Plasma arc light exposure time of 6 to 9 seconds and LED light exposure time of 40 to 60 seconds produced microhardness values similar to those produced with 40 second exposure to a conventional halogen light(p>0.05). 2. In Tetric Flow, Plasma arc light exposure time of 9 seconds and LED light exposure time of 40 to 60 seconds produced microhardness values similar to those produced with 40 second exposure to a conventional halogen light(p>0.05). 3. In Dyract AP, Plasma arc light exposure time of 6 to 9 seconds and LED light exposure time of 20 to 40 seconds produced microhardness values similar to those produced with 40second exposure to a conventional halogen light(p>0.05). 4. In Fuji II LC, Plasma arc light exposure time of 9 seconds and LED light exposure time of 20 to 60 seconds produced microhardness values similar to those produced with 40second exposure to a conventional halogen light(p>0.05). 5. Except Fuji II LC, microhardness was decreased from the center to the periphery in all light sources(p<0.05).

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Generation of Sea Surface Temperature Products Considering Cloud Effects Using NOAA/AVHRR Data in the TeraScan System: Case Study for May Data (TeraScan시스템에서 NOAA/AVHRR 해수면온도 산출시 구름 영향에 따른 신뢰도 부여 기법: 5월 자료 적용)

  • Yang, Sung-Soo;Yang, Chan-Su;Park, Kwang-Soon
    • Journal of the Korean Society for Marine Environment & Energy
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    • v.13 no.3
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    • pp.165-173
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    • 2010
  • A cloud detection method is introduced to improve the reliability of NOAA/AVHRR Sea Surface Temperature (SST) data processed during the daytime and nighttime in the TeraScan System. In daytime, the channels 2 and 4 are used to detect a cloud using the three tests, which are spatial uniformity tests of brightness temperature (infrared channel 4) and channel 2 albedo, and reflectivity threshold test for visible channel 2. Meanwhile, the nighttime cloud detection tests are performed by using the channels 3 and 4, because the channel 2 data are not available in nighttime. This process include the dual channel brightness temperature difference (ch3 - ch4) and infrared channel brightness temperature threshold tests. For a comparison of daytime and nighttime SST images, two data used here are obtained at 0:28 (UTC) and 21:00 (UTC) on May 13, 2009. 6 parameters was tested to understand the factors that affect a cloud masking in and around Korean Peninsula. In daytime, the thresholds for ch2_max cover a range 3 through 8, and ch4_delta and ch2_delta are fixed on 5 and 2, respectively. In nighttime, the threshold range of ch3_minus_ch4 is from -1 to 0, and ch4_delta and min_ch4_temp have the fixed thresholds with 3.5 and 0, respectively. It is acceptable that the resulted images represent a reliability of SST according to the change of cloud masking area by each level. In the future, the accuracy of SST will be verified, and an assimilation method for SST data should be tested for a reliability improvement considering an atmospheric characteristic of research area around Korean Peninsula.

A STUDY ON THE MODE OF POLYMERIZATION OF LIGHT-CURED RESTORATIVE MATERIALS CURED WITH PLASMA ARC LIGHT CURING UNIT (Plasma arc light curing unit을 이용한 광중합형 수복재의 중합양상)

  • Woo, Youn-Sun;Jeong, Tae-Sung;Kim, Shin
    • Journal of the korean academy of Pediatric Dentistry
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    • v.29 no.2
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    • pp.262-269
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    • 2002
  • The purpose of this study was to compare the effect of distance of light tip to resin surfaces and exposure time on the polymerization of surface and 2 mm subsurface of composite resins cured with two light sources; conventional halogen light (XL 3000, 3M, U.S.A.) and plasma arc light (Flipo, LOKKI, France) and compare the uniformity of polymerization from the center to the periphery of resin surfaces according to polymerization diameter cure with two light sources. From the experiment, the following results were obtained. 1. Difference of relative light intensity decrease in plasma arc light smaller than that of conventional halogen light(p<0.05). 2. In all groups, microhardness of top surfaces was decreased when distance of the light tip to resin surfaces is more than 2mm and increased according to increase of exposure time(p<0.05). 3. Difference of microhardness of the 2mm subsurface was rapidly decreased when distance of light tip to resin surfaces is more than 4mm(except, plasma arc light exposure time of 3 seconds). and the distance of light tip to resin surfaces and exposure time more affected 2mm subsurface rather than top surface(p<0.05). 4. Although exposure time was increased, difference of microhardness of the 2mm subsurface with the distance of light tip to resin surfaces was relatively high in groups between below 4mm and 6 mm(p<0.05). 5. Plasma arc light exposure time of 6 to 9 seconds produced microhardness values and microhardness change according to various distance similar to those produced with 40 to 80 second exposure to a conventional halogen light(p>0.05). 6. In all groups, microhardness was decreased gradually from the center to the periphery of resin surfaces(p<0.05).

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Manufacturing Techniques of Bronze Medium Mortars(Jungwangu, 中碗口) in Joseon Dynasty (조선시대 중완구의 제작 기술)

  • Huh, Ilkwon;Kim, Haesol
    • Conservation Science in Museum
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    • v.26
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    • pp.161-182
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    • 2021
  • A jungwangu, a type of medium-sized mortar, is a firearm with a barrel and a bowl-shaped projectileloading component. A bigyeokjincheonroe (bombshell) or a danseok (stone ball) could be used as a projectile. According to the Hwaposik eonhae (Korean Translation of the Method of Production and Use of Artillery, 1635) by Yi Seo, mortars were classified into four types according to its size: large, medium, small, or extra-small. A total of three mortars from the Joseon period have survived, including one large mortar (Treasure No. 857) and two medium versions (Treasure Nos. 858 and 859). In this study, the production method for medium mortars was investigated based on scientific analysis of the two extant medium mortars, respectively housed in the Jinju National Museum (Treasure No. 858) and the Korea Naval Academy Museum (Treasure No. 859). Since only two medium mortars remain in Korea, detailed specifications were compared between them based on precise 3D scanning information of the items, and the measurements were compared with the figures in relevant records from the period. According to the investigation, the two mortars showed only a minute difference in overall size but their weight differed by 5,507 grams. In particular, the location of the wick hole and the length of the handle were distinct. The extant medium mortars are highly similar to the specifications listed in the Hwaposik eonhae. The composition of the medium mortars was analyzed and compared with other bronze gunpowder weapons. The surface composition analysis showed that the medium mortars were made of a ternary alloy of Cu-Sn-Pb with average respective proportions of (wt%) 85.24, 10.16, and 2.98. The material composition of the medium mortars was very similar to the average composition of the small gun from the Joseon period analyzed in previous research. It also showed a similarity with that of bronze gun-metal from medieval Europe. The casting technique was investigated based on a casting defect on the surface and the CT image. Judging by the mold line on the side, it appears that they were made in a piece-mold wherein the mold was halved and using a vertical design with molten metal poured through the end of the chamber and the muzzle was at the bottom. Chaplets, an auxiliary device that fixed the mold and the core to the barrel wall, were identified, which may have been applied to maintain the uniformity of the barrel wall. While the two medium mortars (Treasure Nos. 858 and 859) are highly similar to each other in appearance, considering the difference in the arrangement of the chaplets between the two items it is likely that a different mold design was used for each item.

Comparison and evaluation between 3D-bolus and step-bolus, the assistive radiotherapy devices for the patients who had undergone modified radical mastectomy surgery (변형 근치적 유방절제술 시행 환자의 방사선 치료 시 3D-bolus와 step-bolus의 비교 평가)

  • Jang, Wonseok;Park, Kwangwoo;Shin, Dongbong;Kim, Jongdae;Kim, Seijoon;Ha, Jinsook;Jeon, Mijin;Cho, Yoonjin;Jung, Inho
    • The Journal of Korean Society for Radiation Therapy
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    • v.28 no.1
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    • pp.7-16
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    • 2016
  • Purpose : This study aimed to compare and evaluate between the efficiency of two respective devices, 3D-bolus and step-bolus when the devices were used for the treatment of patients whose chest walls were required to undergo the electron beam therapy after the surgical procedure of modified radical mastectomy, MRM. Materials and Methods : The treatment plan of reverse hockey stick method, using the photon beam and electron beam, had been set for six breast cancer patients and these 6 breast cancer patients were selected to be the subjects for this study. The prescribed dose of electron beam for anterior chest wall was set to be 180 cGy per treatment and both the 3D-bolus, produced using 3D printer(CubeX, 3D systems, USA) and the self-made conventional step-bolus were used respectively. The surface dose under 3D-bolus and step-bolus was measured at 5 measurement spots of iso-center, lateral, medial, superior and inferior point, using GAFCHROMIC EBT3 film (International specialty products, USA) and the measured value of dose at 5 spots was compared and analyzed. Also the respective treatment plan was devised, considering the adoption of 3D-bolus and stepbolus and the separate treatment results were compared to each other. Results : The average surface dose was 179.17 cGy when the device of 3D-bolus was adopted and 172.02 cGy when step-bolus was adopted. The average error rate against the prescribed dose of 180 cGy was -(minus) 0.47% when the device of 3D-bolus was adopted and it was -(minus) 4.43% when step-bolus was adopted. It was turned out that the maximum error rate at the point of iso-center was 2.69%, in case of 3D-bolus adoption and it was 5,54% in case of step-bolus adoption. The maximum discrepancy in terms of treatment accuracy was revealed to be about 6% when step-bolus was adopted and to be about 3% when 3D-bolus was adopted. The difference in average target dose on chest wall between 3D-bolus treatment plan and step-bolus treatment plan was shown to be insignificant as the difference was only 0.3%. However, to mention the average prescribed dose for the part of lung and heart, that of 3D-bolus was decreased by 11% for lung and by 8% for heart, compared to that of step-bolus. Conclusion : It was confirmed through this research that the dose uniformity could be improved better through the device of 3D-bolus than through the device of step-bolus, as the device of 3D-bolus, produced in consideration of the contact condition of skin surface of chest wall, could be attached to patients' skin more nicely and the thickness of chest wall can be guaranteed more accurately by the device of 3D-bolus. It is considered that 3D-bolus device can be highly appreciated clinically because 3D-bolus reduces the dose on the adjacent organs and make the normal tissues protected, while that gives no reduction of dose on chest wall.

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Quality Characteristics of Hard Roll Bread with Concentrated Sweet Pumpkin Powder (농축단호박 분말을 대체한 하드롤 빵의 품질 특성)

  • Lee, Chan-Ho;Chun, Soon-Sil;Kim, Mun-Yong
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.37 no.7
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    • pp.914-920
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    • 2008
  • In this study, hard roll breads were prepared with 3, 6, 9, 12, and 15% of concentrated sweet pumpkin powder (CSPP). The samples and a control were then compared in terms of quality characteristics, including pH, total titratable acidity, fermentation power of dough expansion, specific volume, baking loss, moisture content, color, textural characteristics, external and internal surface appearances, and sensory qualities of bread in order to determine the optimal ratio of CSPP in the formulation. As CSPP content increased, pH of dough, specific volume, baking loss, and lightness of bread decreased, while total titratable acidity of dough, pH, total titratable acidity, moisture content, and redness of bread increased. Fermentation power of dough expansion increased as incubation time increased. The CSPP samples had significantly higher yellowness, hardness, cohesiveness, gumminess, chewiness, and resilience than the control group. Adhesiveness was the highest at the 12% substitution level, while the lowest at the 6% level. Springiness increased with increasing CSPP content. In the sensory evaluation, as CSPP content increased, scores for color and consistency of crumb decreased, while scores for aroma of sweet pumpkin, sweetness, and delicious taste increased. Density of crumb pore were maximal with the 12% CSPP substitution. The CSPP samples had significantly higher uniformity of crumb pore and springiness of crumb than the control group. However, mouth-feel and overall acceptability showed the reverse effect, obtaining fairly good scores. In conclusion, the results indicate that substituting $6{\sim}9%$ CSPP to hard roll bread is optimal, providing good physiological properties as well as reasonably high overall acceptability.