• 반도체디스플레이기술학회지
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• 제2권1호
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• pp.11-14
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• 2003

The high Q(quality factor) suspended spiral inductors were fabricated on the silicon substrate by 3D surface micromachined process. The integration of 2.4GHz VCO has been performed by fabricating suspended spiral inductor of the top of CMOS VCO circuit. The phase noise of VCO integrated MEMS inductor is 93.5 dBc/Hz at 100kHz of offset frequency.

• Transactions on Electrical and Electronic Materials
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• 제7권4호
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• pp.184-188
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• 2006

This work describes efforts in the fabrication and testing of robust microelectromechanical systems (MEMS). Robustness is typically achieved by investigating non-silicon substrates and materials for MEMS fabrication. Some of the traditional MEMS fabrication techniques are applicable to robust MEMS, while other techniques are drawn from other technology areas, such as electronic packaging. The fabrication technologies appropriate for robust MEMS are illustrated through laminated polymer membrane based pressure sensor arrays. Each array uses a stainless steel substrate, a laminated polymer film as a suspended movable plate, and a fixed, surface micromachined back electrode of electroplated nickel. Over an applied pressure range from 0 to 34 kPa, the net capacitance change was approximately 0.14 pF. An important attribute of this design is that only the steel substrate and the pressure sensor inlet is exposed to the flow; i.e., the sensor is self-packaged.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2383-2385
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• 2005

In this paper we discuss the design and fabrication of two millimeter wave filters, in bandpass and bandstop topologies for wireless communications applications. The filters are made using a high Q MMIC transmission line, which consists of a 100 micrometers tall, surface micromachined, air filled inverted microstrip structure on a quartz substrate, made by using a JSR THB-151N negative photoresist sacrificial layer mold and electroplating technology. The filter topologies include a new, very compact, four pole, cross-coupled filter, that presents a single transmission zero at the lower side of the passband, which provides a very sharp out of passband rejection at this region.

• 한국ITS학회:학술대회논문집
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• 한국ITS학회 2004년도 제3회 정기총회 및 추계학술대회
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• pp.224-227
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• 2004

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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• pp.603-605
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• 1995

We present a novel method. to fabricate surface micromachined structures without their sticking on the substrate. An anhydrous HF/$CH_3OH$ vapor-phase etching (VPE) of sacrificial $SiO_2$ layers was employed to release 0.5-2 {\mu}m$ thick polysilicon cantilevers. The fabricated structures were observed using scanning electron microscope and 3-dimensional optical microscope. The results show that we can successfully make cantilever beams up to 1200{\mu}m$ long without sticking. Annealing effects on residual stress of polysilicon microstructures were also investigated. Anneal ins at 1100$^{\circ}C$ for 1 hour was found to be effective to release the residual stress of the polysilicon microstructures. These VPE and anneal ins techniques will be useful in surface micromachining technologies.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 하계학술대회 논문집 C
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• pp.2230-2232
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• 2000

This paper reports an electrostatically driven and electromagnetically sensed planar vibratory gyroscope based on a surface-bulk combined micromachining. The fabricated structure has comb electrodes which are 400${\mu}m$ thick, 18${\mu}m$ wide, 600${\mu}m$ long and separated by 7${\mu}m$ so that the height-gap ratio is about 57. It also has electroplated gold springs which are 15${\mu}m$ wide, 14${\mu}m$ thick and 500${\mu}m$ long on both sides of the seismic mass. The open-loop characteristics of fabricated gyroscope at atmospheric pressure are measured on a rate table. The fabricated gyroscope has a sensitivity of 30mV/deg/sec, and a resolution of 0.1deg/sec at atmospheric pressure. It is expected that non linearity of full scale output is less than 0.8% with. the dynamic range of $\pm$500deg/sec.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 하계학술대회 논문집 Vol.8
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• pp.331-332
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• 2007

Surface micromachined SiC devices have readily been fabricated from the polycrystalline (poly) 3C-SiC thin film which has an advantage of being deposited onto $SiO_2$ or $Si_3N_4$ as a sacrificial layer. Therefore, in this work, magnetron reactive ion etching process which can stably etch poly 3C-SiC thin films grown on $SiO_2$/Si substrate at a lower energy (70 W) with $CHF_3$ based gas mixtures has been studied. We have investigated the etching properties of the poly 3C-SiC thin film using PR/Al mask, according to $O_2$ flow rate, pressure, RF power, and electrode gap. The etched RMS (root mean square), etch rate, and etch profile of the poly 3C-SiC thin films were analyzed by SEM, AFM, and $\alpha$-step.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.2182-2186
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• 2003

This paper presents the differential type resonant accelerometer (DRXL) and its performance test results. The DRXL is the INS grade, surface micro-machined sensor. The proposed DRXL device produces a differential digital output upon an applied acceleration, and the principle is a gap-dependent electrical stiffness variation of the electrostatic resonator with torsion beam structures. Using this new operating concept, we designed, fabricated and tested the proposed device. The final device was fabricated by using the wafer level vacuum packaging process. To test the performance of the DRXL, a nonlinear self-oscillation loop is designed using describing function technique. The oscillation loop is implemented using discrete electronic elements. The performance test of the DRXL shows that the sensitivity of the accelerometer is 12 Hz/g and its long term bias stability is about $2mg(1{\sigma})$. The turn on repeatability, bandwidth, and dynamic range are 4.38 mg, 100 Hz, and ${\pm}\;70g$, respectively.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.925-928
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• 2005

In this study, we fabricated the DAMLs using surface micromachining technology as well a low loss coupler for the millimeter-wave band applications using these DAMLs. The structure of DAML is that a signal line is supported on ground plane by dielectric posts. Therefore it has advantages about the loss characteristic and the stable structure. The other advantage of the DAML process is a simple and convenient technique using 4 mask steps, even if it has a micromachining technology. The lowest loss of the fabricated DAML was obtained 2.2 dB/cm at 110 GHz. To obtain the low loss characteristic, couplers were designed and fabricated by using DAMLs. The fabricated ring hybrid coupler has the coupling of 3.58 dB and the thru of 3.31 dB at 60 GHz. We can also obtain the coupling of 3.42 dB, the thru of 3.82 dB from fabricated branch line coupler at 60 GHz.

• 센서학회지
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• 제3권1호
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• pp.12-18
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• 1994

본 연구에서는, calorimetric 형 흐름센서 소자를 미세가공된 실리콘 구조상에 제작하고 그 특성을 평가하였다. 기체의 흐름을 통한 냉각효과 및 가열효과를 가열저항을 중심으로 양측에 배열된 두개의 온도센서로 측정하였으며 절연박막 다이아프램을 기판으로 사용하여 열적절연효과를 향상시켰다. 제작된 흐름센서는 $0{\sim}0.25grs/min$의 질소가스의 흐름 범위 내에서, 10V의 브릿지 인가전압에 대해 $0{\sim}378.4mV$의 출력전압을 발생하였으며, 센서가 동작 영역에 이르는 시간은 10초 내외로 나타났다.