Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Fabrication of Polysilicon Microstructures Using Vapor-phase HF Etching and Annealing Techniques

HF 증기상 식각과 열처리를 이용한 다결정 규소 미세 구조체의 제작

  • Park, K.H. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Lee, C.S. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Jung, Y.I. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Lee, J.Y. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Lee, Y.I. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Choi, B.Y. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Lee, J.H. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Yoo, H.J. (Semiconductor Division, Electronics and Telecommunications Research Institute)
  • 박경호 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 이춘수 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 정영이 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 이재열 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 이용일 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 최부연 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 이종현 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 유형준 (한국전자통신연구소, 반도체연구단 미세구조연구실)
  • Published : 1995.11.18
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Abstract

We present a novel method. to fabricate surface micromachined structures without their sticking on the substrate. An anhydrous HF/$CH_3OH$ vapor-phase etching (VPE) of sacrificial $SiO_2$ layers was employed to release 0.5-2 {\mu}m$ thick polysilicon cantilevers. The fabricated structures were observed using scanning electron microscope and 3-dimensional optical microscope. The results show that we can successfully make cantilever beams up to 1200{\mu}m$ long without sticking. Annealing effects on residual stress of polysilicon microstructures were also investigated. Anneal ins at 1100$^{\circ}C$ for 1 hour was found to be effective to release the residual stress of the polysilicon microstructures. These VPE and anneal ins techniques will be useful in surface micromachining technologies.

Keywords