• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.7
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• pp.346-350
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• 2001

We present a surface-micromachined polysilicon capacitive accelerometer using unevenly distributed comb electrodes. The unique features of the accelerometer include a perforated proof-mass and the inner and outer comb electrodes with uneven electrode gaps. The perforated proof-mass reduces stiction between the structure and the substrate and the unevenly distributed electrodes shorten the electrode length required for a given sensitivity. The polysilicon accelerometer has been fabricated by the conventional 6-mask surface-micromachining process and showes a sensitivity of 1.03mV/g with a hybrid detection circuitry.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.391-392
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• 2008

A surface micromachined uncooled microbolometer based on the amorphous silicon was designed and fabricated. We designed the microbolometer with a pixel size of $35\times35$, $44\times44{\mu}m^2$ and a fill factor of about 70 % by considering such important factors as the thermal conductance, thermal time constant, the temperature coefficient of resistance, and device resistance. Finally, we successfully fabricated the microbolometer by using surface MEMS technology, and the properties of bolometer have been measured as such that TCR and absorptance can be achieved above -2.5%/K and about 90% with titanium layer, respectively.

• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2550-2552
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• 1998

The stiction phenomena poses a design constraint in surface micromachining by reducing the releasable size of the microstructure. This problem occurs during the fabrication process of surface micromachined microstructures during the wet etch of sacrificial layers. For the prevention of the sticking problem, the microsctructure is released by sublimation after the substitution of the sacrificial layer etchant with a sublimation material heated above its melting temperature. In the sublimation drying method, the sublimation materials such as p-dichlorobenzene, t-butyl alcohol, and cyclohexane are used. In this paper, a method for designing a sublimation drying system is developed, and its performance is experimentally evaluated.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.2239-2241
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• 2000

In this study, we fabricated surface micromachined mirror that is actuated by magnetic force. The mirror was fabricated with Al, and Ni was electroplated on the surface of Al mirror as a magnetic material. The fabricated mirror is actuated by magnetic force of simple solenoid. The maximum deflection angle is about 70$^{\circ}$ when the applied magnetic field is about $1.5{\times}10^4$A/m.

• Journal of Practical Engineering Education
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• v.6 no.2
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• pp.105-110
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• 2014

In this work, mechanical characteristics of titanium diaphragm have been studied as a potential robust substrate and a diaphragm material for automotive tire pressure sensor. Lamination process techniques combined with traditional micromachining processes have been adopted as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on titanium diaphragm have been designed, fabricated and characterized. The fabrication process for micromachined titanium devices keeps the membrane and substrate being at the environment of 20 MPa pressure and $200^{\circ}C$ for a half hour and then subsequently cooled to $24^{\circ}C$. Each sensor uses a stainless steel substrate, a laminated titanium film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. Besides, out-of-plane deflections are calculated under pressures on the diaphragm. The sensitivity of the fabricated device is $9.45ppm\;kPa^{-1}$ with a net capacitance change of 0.18 pF over a range 0-210 kPa.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.574-578
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• 2004

In this paper, a nonlinear feedback system is analyzed for a surface micromachined resonant accelerometer. For this, a brief illustration of the plant dynamics is given. In the analysis, the periodic signal in the nonlinear feedback loop is obtained by the limit cycle point, which is best approximated via the describing function method. Considering the characteristic feature of plant dynamics, a simple phase shifted relay with finite slope is designed for the nonlinearity implementation. With a describing function for random plus sinusoidal input, we analyzed the effect of a white Gaussian noise on oscillation frequency. Finally, simulation and experimental result is given.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.50 no.2
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• pp.86-95
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• 2001

Mechanical properties of electroplated gold microstructures were determined from the micromachined beam structures. Cantilever and bridge beam structures of different length were fabricated by electroplating-surface micromachining technique, which is specially designed to realize an anchor structure close to an ideal fixed-boundary condition. Fabricated beams were electrostatically excited and their resonance frequencies were measured by optical system composed of laser displacement meter with dynamic signal analyzer. Young's modulus and mean residual stress were calculated from the measured frequencies of microbeams. In addtion, stress gradient was measured using deformation of released cantilever beam structure.

• Transactions on Electrical and Electronic Materials
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• v.11 no.3
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• pp.130-133
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• 2010

A flexible three-axial tactile sensor was fabricated on Kapton polyimide film using polymer micromachining technology. Nichrome (Ni:Cr = 8:2) strain gauges were positioned on an etched membrane to detect normal and shear loads. The optimal positions of strain gauges were determined through strain distribution from finite element analysis. The sensor was evaluated by applying normal and shear loads from 0 N to 0.8 N using an evaluation system. Sensitivity of the tactile sensor to normal and shear loads was about 206.6 mV/N and 70.1 mV/N, respectively. The sensor showed good linearity, and its determination coefficient ($R^2$) was about 0.982. The developed sensor can be applied in a curved or compliant surface that requires slip detection and flexibility, such as a robotic fingertip.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.223-227
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• 2003

A new flexible electronic packaging technology and its medical applications are presented. Conventional silicon chips and electronic modules can be considered as "mechanically rigid box." which does not bend due to external forces. This mechanically rigid characteristic prohibits its applications to wearable systems or bio-implantable devices. Using current MEMS (Microelectromechanical Systems) technology. a surface micromachined flexible polysilicon sensor array and flexible electrode array fer neural interface were fabricated. A chemical thinning technique has been developed to realize flexible silicon chip. To combine these techniques will result in a realization of truly flexible sensing modules. which are suitable for many medical applications.

• Proceedings of the KIEE Conference
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• 1997.11a
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• pp.659-661
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• 1997

An in-plane motion measurement method using $moir{\acute{e}}$ patterns by linear-gratings and cross-gratings, which can be used as micro inertial sensors, micro actuators, and micromachined scanning microscopes is demonstrated. A simple digital image processing method that calculates and analyzes the motion of microstructure from $moir{\acute{e}}$ patterns was developed. And using several grating structures fabricated by surface micromachining, we formed $moir{\acute{e}}$ patterns and analyzed the motion of microstructure.