• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1999년도 춘계학술대회 논문집
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• pp.128-133
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• 1999

In recent years, LSI devices have become more powerful and lower-priced, caused by a development of various wafer materials and an increase in the diameter of wafers. On the other hand, these have created some serious problems in manufacturing of wafers because materials used as semiconductor substrate are very brittle. In view of this fact, there are some trials to apply shear-mode(or ductile-mode) grinding for efficient manufacturing of semiconductor wafers instead of conventional lapping process. In fact grinding process that has not only more excellent degree of accuracy but also more adaptable to fully automated manufacturing than lapping, is already used in Si machining field. This paper described the elementary studies to establish the grinding technology of wafers. First, we investigated the variation of grinding force and the transition of grinding mode as various grinding conditions. Then, it was inspected that the change of grinding force affected the integrity such as the topography and the roughness of ground surfaces, and led to the chemical defects generation and distribution in damaged layer. The degree of defects was estimated by FT-IR(Fourier Transformed Infrared) Spectroscopy and Auger Electron Spectroscopy

• 한국기계가공학회지
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• 제3권3호
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• pp.17-23
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• 2004

The performance and life of a die are influenced by the machining methods. In order to examine the effects of machining methods on surface charactenstics, simple experiments are devised and performed. A die steel STD11, commonly used as a die material in press working, is selected. Three ways of machining methods to manufacture a die are considered. Those are (1) milling and then grinding, (2) wire-cut electric discharge dachining (W-EDM) and (3) heat treatment after W-EDM. The resulting surface roughnesses are measured. Also, the changes of surface microstructures are investigated using the scanning electron microscope(SEM) with energy dispersive X-ray spectrometer(EDS) and the results are discussed in details.

• 한국세라믹학회지
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• 제46권1호
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• pp.102-107
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• 2009

This study has been focused on an effective surface finishing method combining ELID (ELectrolytic In-process Dressing) and MAP (Magnetic Assisted Polishing) for the nano-precision mirror grinding of glass-lens molding mould. ELID grinding is an excellent technique for mirror grinding of various advanced metallic or nonmetallic materials. A polishing process is also required for elimination of scratches present on ELID grinded surfaces. MAP has been used as polishing method due to its high polishing efficiency and superior surface quality. It also presents some techniques for achieving the nanometer roughness of the hard material such as WC-Co, which are extensively used in precision tooling material.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.1105-1108
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• 2001

In these days, according s the increase of technological development the part demension goes up for ultra-precision. It is grinding behavior that is important processing which directly influences by machining accuracy at product quality with the net shape manufacturing. In this study, by using CBN wheel an analysis carried out for workpiece's profiles and its characteristics by measuring grinding force and surface roughness. Workpiece materials were used STD11, SUS304 and STB2 varing condition of feedrate and depth of cut.

• 한국정밀공학회지
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• 제17권4호
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• pp.240-246
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• 2000

An in-process estimation of the ground surface roughness is a bottle-neck and an essential field in conventional grinding operation. We defined the dimensionless average roughness factor (D.A.R.F) that exhibits a roughness characteristics of ground surface. The D.A.R.F was composed easily of the absolute average and the standard deviation values which were the analytic parameters of the acoustic emission (AE) signal generated during the machining process. The theoretical equation between the surface roughness and the D.A.R.F has been derived from the linear regressive analysis and verified its availability through the experimentation on the surface grinding machine.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.477-481
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• 2002

Grinding which is the final finishing step in the machining processes plays an important role fur precision manufacturing because it directly affect the product quality. Since the ground surface is affected by the states of grains and voids on the grinding wheel surface, the wheel should be dressed before the machined surface deteriorates over a quality limit. This paper describes a systematic approach to decide a proper dressing chance. A fabricated eddy current sensor and CCD camera are used to measure the loading on the working wheel surface and to visualize the wheel surface states respectively. The dressing chance can be properly decided through the relation between the variation of the thresholding image of the wheel and the machined surface roughness as the variation of the eddy current sensor output is greater than the detected value previously.

• 한국정밀공학회지
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• 제15권11호
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• pp.233-243
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• 1998

The demand of high speed machining is increasing due to the high speed cutting and grinding provides high efficiency of process, short process time, improved metal removal capacity and better surface finish. Active magnetic bearings allow much high surface speed than conventional ball bearings and therefore greatly suitable for high speed cutting or grinding. This paper describes a design process of an active magnetic bearing system for a high speed grinding spindle with power 5.5kW and maximum speed 60,000rpm. Magnetic actuators are designed by the magnetic circuit theory considering static load condition, and examined with FEM analysis. Dynamic characteristics are also considered, such as bandwidth, stiffness, natural frequency and static deflection. System characteristics are simulated with a rigid rotor model.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1257-1260
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• 2003

Rapid Prototyping technology has many advantages such as Rapid Tooling. However, Using the RT technique is limited by the poor surface quality of the RP part. Thus, additional post-machining is required for improving the surface roughness by the sanding, grinding and polishing etc. But, these traditional finishing techniques are time and labor cost consuming. Hence, improving and formulation the finishing technique is inevitably necessary for the RF part. A new post-machining methodology for RP part is presented by the SLS part is used for automobile components in this research. Also, a web based interface tool that user requirements are rapidly ordered for post-machining RP part is developed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 춘계학술대회 논문집
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• pp.8-13
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• 1996

A relatively new non-traditional finishing process called Abrasive Flow Machining(AFM) is being used to deburr, polish and radius workpiece or produce compressive residual stresses by flowing an abrasive-laden viscoelastic compound across the surface to be machined. This paper presents the effects of AFM on surfaces of tool steel produced by EDM and W-EDM. Using AFM, white layer produced by EDM is erased almost equally and the amount of metal removal is significantly affected the initally machined surface condition of workpiece. The dimension of workiece is enlarged and its surface roughness is improved as AFM time is increased. The optimal AFM time can be established from the experimental results. It is considered that the grinding method lide AFM is useful to grind complex or slim geometry of workpiece even. Scanning Electron Microscopy(SEM) was used to study the surface characteristics of the workpiece before and after AFM.

• International Journal of Precision Engineering and Manufacturing
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• 제3권1호
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• pp.5-12
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• 2002

The grinding process has been mainly used fur finishing metal products as final machining stage. But chatter vibration and bum of a workpiece have a bad effect on the machined surface and should be detected in modern grinding process. This paper deals with a fault detection of the cylindrical plunge grinding process by power parameters. During the grinding process the power signals of an induced motor were sampled and used to determine the relationship between fault and change of power parameters. A neural network was used far detecting the grinding fault and an influence of power parameters to the grinding fault was analyzed.