• Title/Summary/Keyword: substrate condition

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Effects of Pretreatment Condition and Substrate Bias on the Characteristics of MPECVD Diamond Thin Films (전처리조건과 기판Bias가 MPECVD 다이아몬드 박막의 특성에 미치는 영향)

  • 최지환;박정일;박광자;이은아;장감용;박종완
    • Journal of the Korean institute of surface engineering
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    • v.28 no.4
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    • pp.225-235
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    • 1995
  • To investigate the effects of pretreatment and substrate bias on the characteristics of the diamond thin films, the thin films were deposited on the p-type Si(100) wafer by MPECVD using mixtures of $H_2$, $CH_4$, and $O_2$ gases. Deposition was carried out at the substrate temperature of $900^{\circ}C$ and at the pressure of 40torr. The effect of the pretreatment on the film formation was the examined by using SiC and diamond powders as abrasive powders. Furthermore, the substrate bias effect on the formation of the diamond film was also examined. The highest nucleation density was observed for the pretreatment with 40~60$\mu\textrm{m}$ size of diamond powders and a negative bias potential(-50V). Many defects and(111) twins in the diamond films were observed.

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Study on a large-size glass substrate handler for new generation OLED (차세대 유기 EL 디스플레이를 위한 기판 조작에 관한 연구)

  • Kim Soak-Han;Lee Dong-Eun;Kim Jun-Chul;Lee Eung-Ki
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.79-80
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    • 2006
  • In order to raise productivity of the OLED and realization of the OLED TV, it is required to improve the design of the board size glass panel. The large-size glass substrate has some difficulties regarding its deflection during handling operation due to its small thickness (0.7t) which is not even enough to stand its mass itself. This paper is demonstrating a new solution of this difficult through clamping and bending end condition, which helps to minimize the deflection of the glass substrate.

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Characteristics of ITO thin Films Grown under Various Process Condition by Using Facing Target Sputtering (FTS) System (FTS장치를 이용한 다양한 공정 조건에서 제작한 ITO 박막의 특성 분석)

  • Kim, Sangmo;Keum, Min Jong;Kim, Kyung Hwan
    • Journal of the Semiconductor & Display Technology
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    • v.16 no.1
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    • pp.112-115
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    • 2017
  • ITO thin films were grown on the glass substrate under various oxygen gas flow and substrate temperature by using FTS (Facing Target Sputtering) system. To investigate properties of as-prepared films for transparent electrical devices, we employed four-point probe, UV-VIS spectrometer, X-ray diffractometer (XRD), scanning electron microscopy (SEM), Hall Effect measurement system and Atomic Force Microscope (AFM). As a results, all of prepared samples has high transmittance of over 80 % in the visible range (300-800 nm). Their resistivity increased as a function of oxygen gas flow and substrate temperature due to their crystal structure and oxygen defect in the films. As-prepared films have a resistivity of under $10^{-4}({\Omega}-cm)$.

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Development of the RF SAW filters based on PCB substrate (PCB 기판을 적용한 RF SAW 필터 개발)

  • Lee, Young-Jin;Im, Jong-In;Lee, Seung-Hee
    • Proceedings of the IEEK Conference
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    • 2006.06a
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    • pp.597-598
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    • 2006
  • This paper describes a development of a new $1.4{\times}1.1$ and $2.0{\times}1.4mm$ RF SAW filters made by PCB substrate instead of HTCC package, and this technology can reduce the cost of materials down to 40%. We have investigated the multi-layered PCB substrate structures and raw materials to find out the optimal flip-bonding condition between the $LiTaO_3$ wafer and PCB substrates. Also the optimal materials and processing conditions of epoxy laminating film were found out through the experiments which can reduce the bending moment caused by the difference of the thermal expansion between the PCB substrate and laminating film. The new PCB SAW filter shows good electrical and reliability performances with respect to the present SAW filters.

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Electrical and Structural Properties of Ti Thin Films on Al2O3 Substrate (Al2O3 기판에 형성된 Titanium 박막의 전기적 및 구조적 특성)

  • 정운조;양현훈;임정명;김영준;박계춘
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.16 no.9
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    • pp.753-758
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    • 2003
  • Ti films were deposited onto 100${\times}$100 mm alumina substrates using dc magnetron sputtering under the following conditions; substrate temperature of R.T~400 $^{\circ}C$, annealing temperature of 100~400 $^{\circ}C$, and sputtering gas pressure of 4${\times}$10$^{-3}$ Torr~4${\times}$10$^{-2}$ Torr. And the films were examined by X-ray diffraction analysis (XRD), scanning electron microscopy(SEM) and 4-point measurement system. The best electrical and structural properties was obtained by substrate temperature of ~200 $^{\circ}C$, target-substrate distance of ~14 cm and sputtering pressure of ~1${\times}$10$^{-2}$ Torr. Also at that condition the most excellent adhesion was observed.

Corrosion Properties of Carbon-Coated Metallic Bipolar Plate for PEMFC (고분자 전해질 연료전지 금속 분리판 적용을 위한 탄소 박막의 증착과 내식성 평가)

  • Jang, Dong-Su;Lee, Jung-Joong
    • Journal of the Korean institute of surface engineering
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    • v.48 no.3
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    • pp.87-92
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    • 2015
  • Carbon thin films were deposited on STS 316L sheets by inductively coupled plasma enhanced magnetron sputtering with or without substrate bias voltage. Typical Raman spectrum for amorphous diamond-like carbon (DLC) was obtained, and the interfacial contact resistance (ICR) was measured to show its conductive nature. The electrochemical impedance spectroscopy (EIS) was used to investigate the corrosion mechanism of the carbon coating under the polymer electrolyte membrane fuel cell (PEMFC) condition. According to the pore-corrosion mechanism, the electrolyte penetrates the carbon coating through the pores and reacts with the substrate. As the substrate corrosion proceeds, the pore enlargement occurs and the surface area of the substrate exposed to the electrolyte. Applicability of the carbon coating for the PEMFC bipolar plate was evaluated by potentiodynamic polarization experiments. Finally, an adhesion problem was briefly considered.

A review of effects of partial dynamic loading on dynamic response of nonlocal functionally graded material beams

  • Ahmed, Ridha A.;Fenjan, Raad M.;Hamad, Luay Badr;Faleh, Nadhim M.
    • Advances in materials Research
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    • v.9 no.1
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    • pp.33-48
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    • 2020
  • With the use of differential quadrature method (DQM), forced vibrations and resonance frequency analysis of functionally graded (FG) nano-size beams rested on elastic substrate have been studied utilizing a shear deformation refined beam theory which contains shear deformations influence needless of any correction coefficient. The nano-size beam is exposed to uniformly-type dynamical loads having partial length. The two parameters elastic substrate is consist of linear springs as well as shear coefficient. Gradation of each material property for nano-size beam has been defined in the context of Mori-Tanaka scheme. Governing equations for embedded refined FG nano-size beams exposed to dynamical load have been achieved by utilizing Eringen's nonlocal differential law and Hamilton's rule. Derived equations have solved via DQM based on simply supported-simply supported edge condition. It will be shown that forced vibrations properties and resonance frequency of embedded FG nano-size beam are prominently affected by material gradation, nonlocal field, substrate coefficients and load factors.

Effect of Solar Cell Cover Glass on Solar Cell Performance (태양전지 보호유리가 태양전지 성능에 미치는 영향)

  • Choi, Young-Jin;Wang, Jin-Suk
    • Proceedings of the KIEE Conference
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    • 1996.07c
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    • pp.1421-1423
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    • 1996
  • In this study, the effect of solar cell cover glass on the solar cell performance is evaluated. Silicon solar cell (active area:4*6cm, efficiency:12.6% at AMO condition) is used for this study. ITO(Indium tin Oxide) film thickness of the ITO/AR/substrate glass/solar cell structure samples are $40{\AA}$, $60{\AA}$, $160{\AA}$, $240{\AA}$ respectively. The solar cell maximum output power on the stacking structure variations showed 465mW in the AR/ITO/substrate glass/solar cell, and minimum output power showed 403mW in the AR/substrate glass/solar cell. The maximum output power of the solar cell on the ITO thickness variations of the ITO/AR/substrate glass/solar cell showed 460mW at $40{\AA}$ then decrease output power as ITO thickness increase. For environment tests, all samples are exposed UV light in the vacuum chanber. The output power degradation of AR(UVR)/substrate glass/solar cell stacking structure is small compared with ITO/AR(UVR)/substrate glass/solar cell stacking structure.

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Fabrication of Ni substrates made by powder metallurgy and casting method (초기시편 제조법에 따른 Ni substrate의 특성비교)

  • 임준형;김규태;김정호;장석헌;주진호;나완수;지봉기;전병혁;김찬중
    • Proceedings of the Korea Institute of Applied Superconductivity and Cryogenics Conference
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    • 2003.10a
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    • pp.55-58
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    • 2003
  • We fabricated the textured Ni substrate and evaluated the effects of processing variables on microstructural evolution and texture transformation. Ni-rods as an initial specimen were prepared by two different methods, i.e., powder metallurgy(P/M) and plasma arc melting(PAM) The texture of the substrate was characterized by pole-figure and surface condition was evaluated by atomic force microscopy. It was observed that the texture of substrate made by P/M did not significantly varied with annealing temperature of 800~120$0^{\circ}C$ and the full-width at half-maximums (FWHM) of both in-plane and out-of-plane were 9$^{\circ}$~10$^{\circ}$. On the other hand, the texture of substrate made by PAM was more dependent on the annealing temperature and the FWHMs of in-plane texture was 9$^{\circ}$~13$^{\circ}$ at the temperature range. In addition, twin texture, (221)<221>, was formed as the temperature increased further. The grain size of substrate made by P/M was smaller than that made by PAM and this difference was correlated to the microstructure of initial specimens.

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Optimal Conditions for the Enzymatic Hydrolysis of Isolated Sesame Meal Protein (효소에 의한 참깨박 단백질의 최적 가수분해 조건)

  • Lee, S.H.;Cho, Y.J.;Kim, S.;Ahn, B.J.;Choi, C.
    • Applied Biological Chemistry
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    • v.38 no.3
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    • pp.248-253
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    • 1995
  • Optimum conditions for the enzymatic hydrolysis of isolated sesame meal protein were investigated. Optimum conditions by papain were $60^{\circ}C$, pH 6.0, 3% enzyme concentration to substrate and 1.5% substrate concentration, respectively. The optimum operating conditions using pepsin were $55^{\circ}C$, pH 9.0, 3% enzyme concentration to substrate and 1% substrate concentration. The optimum operating conditions using trypsin were $60^{\circ}C$, pH 9.0, 1% enzyme concentration to substrate and 1% substrate concentration.

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