• Title/Summary/Keyword: substrate condition

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Deposition of Tungsten Thin Film on Silicon Surface by Low Pressure Chemical Vapor Deposition Method (저압 화학 기상 증착법을 이용한 실리콘 표면 위의 텅스텐 박막의 증착)

  • Kim, Seong Hun
    • Journal of the Korean Chemical Society
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    • v.38 no.7
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    • pp.473-479
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    • 1994
  • Tungsten thin film was deposited on p-(100) silicon substrate by using the LPCVD(low pressure chemical vapor deposition) technique. $WF_6$ was used as a source gas for tungsten and $SiH_4$ was used as a reducing gas for $WF_6$. Tungsten thin film was deposited by either SiH4 or Si substrate reduction of $WF_6$ under cold-wall condition and it was deposited by $SiH_4$ reduction of $WF_6$ under hot-wall condition. The crystal structure of deposited thin film under both conditions were identified to be bcc (body centered cubic). The physical and electrical properties of deposited thin films were investigated. The deposited film under hot-wall condition changed to $WSi_2$ film by the annealing under $800^{\circ}C.$ From the experimental results and theoretical considerations, the change of the crystal structure of the thin film by annealing was discussed. $WSi_2$ thin film, which was known to have good compatibility with Si substrate, could be produced under hot-wall condition although the film properties were superior under cold-wall condition.

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Intramolecular Esterification by Lipase Powder in Microaqueous Cycohexane (미소 수용 Cyclohexange 중에서 분말 Lipase에 의한 분자내 에스테르화반응)

  • 이민규;감삼규
    • Journal of Life Science
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    • v.5 no.4
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    • pp.155-161
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    • 1995
  • The effects of substrate concentration, enzyme concentration, reaction temperature, and water content were investigated in intramolecular esterification. This study used cyclohexane as organic solvent, power lipase as enzyme, and benzyl alcohol and octanoic acid as substrate. The initial reaction rate was found to be proportional to enzyme concentration; followed Michaelis-Menten equation for octanoic acid; and was inhibited by benzyl alcohol . The observed initial reaction rate first increased, then decreased with increasing reaction temperature, giving rise to the maximum rate at 20$\circ$. The drop in the reaction rate at higher temperature was to partition equilibrium change of substrate between organic solvent and hydration layer of enzyme molecule in addition to the deactivation by enzyme denaturation. Water layer surrounding enzyme molecule seemed to activate in organic solvent and the realistic reaction was done in the water layer. In the enzymatic reaction in organic solvent, the initial reaction rate was influenced by partition quilibrium of substrate, so the optimum condition of substrate concentration, enzyme concentration, reaction temperature, and water content would give a good design tool.

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Graphene Synthesis on Pt Substrate using a Chemical Vapor Deposition Method (열화학기상증착법에 의한 백금 기판 위의 그래핀 합성)

  • Lee, Byeong-Joo;Jeong, Goo-Hwan
    • Journal of Industrial Technology
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    • v.35
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    • pp.89-94
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    • 2015
  • Graphene is a carbon-based two dimensional honeycomb lattice with monoatomic thickness and has attracted much attention due to its superior mechanical, electronic, and physical properties. Here, we present a synthesis of high quality graphene on Pt substrate using a chemical vapor deposition (CVD). We optimized synthesis condition with various parameters such as synthesis temperature, time, and cooling rate. Based on the results, we concluded that graphene synthesis is driven by mainly carbon adsorption on surface rather than precipitation of carbon which is dominant in other metal substrate. In addition, Pt substrate can be repeatedly used several times with high quality graphene.

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A Study on the Formation of Interface and the Thin Film Microstructure in TiN Deposited by Ion Plating (이온플레팅에 의한 TiN 증착중 계면형성과 박막 미소조직에 관한 연구)

  • 여종석;이종민;한봉희
    • Journal of the Korean institute of surface engineering
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    • v.24 no.2
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    • pp.73-79
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    • 1991
  • Recent studies son surface coatings have shown that the change of physical, chemical and crystallographic structure analysed and observed according to the deposition process variables has the effects on the resultant film properties. Under the same preparation condition conditions of the substrate and process variables, physical morphology variations characterized by substrate temperature and bias which offect the surface mobility of adatom and adhesion variations related to the formation of Ti interlayer were considered in the present study. Microhardness showed the highest value around 40$0^{\circ}C$ of the substrate temperature and increased with the substrate bias. Adhesion was improved with the increase of substrate temperature and bias. An interlayer of pure titanium formed prior to deposition of TiN improves the adhesion at its optimum thickness. These results were explained by the change of physical morphology and phase analysis.

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Fabrication of Thin $YBa_{2}Cu_{3}O_{7-\delta}$ Films on $CeO_2$Buffered Sapphire Substrate Using Combined Sputter and Pulsed Laser Deposition (스퍼터링과 펄스 레이저를 이용하여 $CeO_2$완충층 위에 층착된 $YBa_{2}Cu_{3}O_{7-\delta}$박막의 제작)

  • 곽민환;강광용;김상현
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.901-904
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    • 2001
  • For the c-axis oriented epitaxial YBa$_2$Cu$_3$O$_{7-{\delta}}$ thin film on r-cut sapphire substrate it is necessary to deposit buffer layers. The CeO$_2$buffer layer was deposited on sapphire substrate using RF magnetron sputtering system. We investigated XRD pattern of CeO$_2$thin films at various sputtering conditions such as sputtering gas ratio, sputtering power, target to substrate distance, sputtering pressure and substrate temperature. The optimum condition was 15 mTorr with deposition pressure, 1:1.2 with $O_2$and Ar ratio and 9cm with target to substrate distance. The CeO$_2$(200) peak was notable for a deposition temperature above 75$0^{\circ}C$. The YBa$_2$Cu$_3$O$_{7-{\delta}}$ was deposited on CeO$_2$buffered r-cut sapphire substrate using pulsed laser ablation. The YBa$_2$Cu$_3$O$_{7-{\delta}}$CeO$_2$(200)/A1$_2$O$_3$thin film was exhibited a critical temperature of 89K.xhibited a critical temperature of 89K.

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Fundamental Study on Ni-Base Self-Fluxing Alloy Coating by Thermal Spraying(I) - Effect of Splat Behavior of Sprayed Particles on Mechanical Properties of Coating Layer - (Ni-기 자융성합금의 코팅에 관한 기초적 연구(I) - 용사입자의 편평거동이 코팅층의 기계적 특성에 미치는 영향 -)

  • Kim, Y.S.;Kim, H.S.;Nam, K.W.
    • Journal of Power System Engineering
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    • v.1 no.1
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    • pp.70-79
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    • 1997
  • Ni-base self-fluxing alloy powder particles were flame sprayed onto the SS400 mild steel substrate surface. The effects of both substrate temperature and spraying distance on the splat behavior of sprayed particles were examined. The results obtained are summarized as follows: 1) In the splat behavior of Ni-base self-fulxing alloy particles sprayed onto the SS400 mild steel substrate, splashing was observed under the room temperature condition. On the contrary, it showed circular plate pattern in the substrate temperature range over 373K. 2) It was cleared that there was close relationship between mechanical properties of coating layer and splat behavior of sprayed particles. 3) From the experimental results, optimum spraying conditions showed excellent mechanical properties in the case of Ni-base self fluxing alloy sprayed onto the SS400 mild substrate were 473K of substrate temperature and 250mm of spraying distance.

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Analysis and Conservation of Metal Thread Made of Proteinaceous Substrate - Golden Decorative Rank Badge of an Official Uniform Excavated from Baekryeong Im's Tomb in the 16th Century of Korea - (단백질계 배지로 이루어진 금속사의 분석과 보존처리 - 16세기 임백령 묘 출토 단령의 직금 흉배를 중심으로 -)

  • Noh, Soo-Jung;Oh, Joon-Suk
    • Journal of the Korean Society of Costume
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    • v.58 no.9
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    • pp.129-141
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    • 2008
  • Jikgeum(woven with supplementary golden wefts) hyungbae(rank badge) of danryung(official uniform) excavated from Im Backryung'tomb($1498{\sim}1546$) of the Joseon dynasty($1392{\sim}1910$) at Goyang, Gyunggi-Do in 2007, was in a critical condition because of serious collapse of substrate in metal thread. For conservation of hyungbae, metal thread was examined by different scientific methods(Light Microscope, Scanning Electron Microscope and Energy Dispersive X-Rray Spectrometry(SEM-EDS), Fourier Transform Infrared Spectroscopy(FT-IR)). Analytical data showed that metal thread was gilt membrane strip composed of gold leaves and proteinaceous substrate which was probably parchment. To protect collapse of substrate, 1% solution of Paraloid B-72 was infilterated into substrate for consolidation of substrate and it was adhered to warp of fabric in hyungbae, before wet cleaning. After wet cleaning, the most of the gold leaves were restored, which was confirmed by both the examination with the naked eye and the microscopic examination.

Study on Laser irradiation characteristics for Oxide TFTs on Flexible Substrate (산화물 반도체 Flexible Display 소자 제작을 위한 Laser 가공 특성 연구)

  • Son, Hyeok;Lee, Gong-Su;Jeong, Han-Uk;Kim, Gwang-Yeol;Choe, Yeong-Deok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.203-203
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    • 2009
  • Low temperature annealing for oxide TFTs including IGZO on PI substrate is the essential process to fabricate flexible display devices, since low heat-resistance on PI and PEN substrates limits the temperature range. Laser annealing is one of the promising candidates for low temperature process, and it has been used for various application in semiconductor and LCD fabrication. We irradiated laser to solution-based IGZO thin films on PI substrate were irradiated to laser beam, and investigated laser damage of PI layer. Based on transmittance analysis, wavelength(532nm) and scan speed(1000mm/s) is the optimized condition for laser irradiation about ink-Jet printed oxide TFTs on PI substrates.

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Evaluating Piezoelectric Thin Film Characteristics Using Resonance Spectrum Method (공진주파수 스펙트럼법을 이용한 압전박막의 특성 평가)

  • Choi Joon Young;Chang Dong Hoon;Kang Seong Jun;Yoon Yung Sup
    • Proceedings of the IEEK Conference
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    • 2004.06b
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    • pp.477-480
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    • 2004
  • We studied the characteristics of impedance and electromechanical coupling coefficient in ZnO and AIN thin films by using resonance frequency spectrum method. The response peak of impedance decreased with the decrease of thickness of piezoelectrics, the number of mode of response peak increased with the increase of substrate thickness. An error of $k_{t}^{2}$ estimated from input $k_{t}^{2}$ increased as the thickness of piezoelectrics decreased and the thickness of substrate increased. Also, the error was increased in case of a large acoustic impedance of substrate. It was found that the composite resonator operating in optimized condition could be designed through the resonance frequency spectrum analysis of composited resonator consisted of piezoelectric thin film and substrate.

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Effects of substrate type on adhesion strength of cementitious tile adhesive (타일시멘트 접착강도에 미치는 Substrate 종류의 영향)

  • Choi, Nak-Woon;Kim, Sung-Hoon;Kim, Eun-Jeong
    • Proceedings of the Korea Concrete Institute Conference
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    • 2010.05a
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    • pp.325-326
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    • 2010
  • In this study, we prepared three kinds of substrate for the adhesion strength test of cementitious tile adhesive. As a result, the maximum adhesion strength is obtained from the concrete substrate specified in ISO 13007 regardless of curing condition of tile cement specimens.

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