• 제목/요약/키워드: sub-micron

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엑시머 레이져를 이용한 극히 얕은 접합과 소스, 드레인의 형성과 50nm 이하의 극미세 n-MOSFET의 제작 (Ultra Shallow Junction wish Source/Drain Fabricated by Excimer Laser Annealing and realized sub-50nm n-MOSFET)

  • 정은식;배지철;이용재
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2001년도 하계학술대회 논문집
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    • pp.562-565
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    • 2001
  • In this paper, novel device structures in order to realize ultra fast and ultra small silicon devices are investigated using ultra-high vacuum chemical vapor deposition(UHVCVD) and Excimer Laser Annealing (ELA). Based on these fundamental technologies for the deep sub-micron device, high speed and low power devices can be fabricated. These junction formation technologies based on damage-free process for replacing of low energy ion implantation involve solid phase diffusion and vapor phase diffusion. As a result, ultra shallow junction depths by ELA are analyzed to 10~20nm for arsenic dosage(2${\times}$10$\_$14//$\textrm{cm}^2$), exciter laser source(λ=248nm) is KrF, and sheet resistances are measured to 1k$\Omega$/$\square$ at junction depth of 15nm and realized sub-50nm n-MOSFET.

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전해법에 의한 Mn-ferrite 생성 (The formation of Mn-ferrite by electrolysis)

  • 김유상;황용길
    • 한국표면공학회지
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    • 제25권1호
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    • pp.1-7
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    • 1992
  • The formation of manganese ferrite has been performed to investigate some properties according to the variation of compositions, pH, current density by electrolysis. It has been found that the amount of oxidized weight of anode were increased with increasing current density. The amount of oxidized weight of anode were most in pH 10. As the result of X-ray diffraction Mn Fe₂O₄ crystal composition in pH13. When the particles of Mn/sub x/ Fe/sub 3-x/O₄ were heated at 300℃, it has been shown typical Mn Fe₂O₄(JCPDS Card No. 10-319) in X=1 composition. As the result of SEM observation, the size of MnFe₂O₄ particles were about 0.1㎛, the shape of particles were spherical type. According to the above mentioned experimental condition, 0.1-0.5㎛ sub-micron particles of manganese ferrite were formed from the wasted manganese dry cell, through washing → reduction → electrloysis.

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Structural and component characterization of the B4C neutron conversion layer deposited by magnetron sputtering

  • Jingtao Zhu;Yang Liu;Jianrong Zhou;Zehua Yang;Hangyu Zhu;Xiaojuan Zhou;Jinhao Tan;Mingqi Cui;Zhijia Sun
    • Nuclear Engineering and Technology
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    • 제55권9호
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    • pp.3121-3125
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    • 2023
  • Neutron conversion detectors that use 10B-enriched boron carbide are feasible alternatives to 3He-based detectors. We prepared boron carbide films at micron-scale thickness using direct-current magnetron sputtering. The structural characteristics of natural B4C films, including density, roughness, crystallization, and purity, were analyzed using grazing incidence X-ray reflectivity, X-ray diffraction, X-ray photoelectron spectroscopy, time-of-flight secondary ion mass spectrometry, and scanning electron microscopy. A beam profile test was conducted to verify the practicality of the 10B-enriched B4C neutron conversion layer. A clear profile indicated the high quality of the neutron conversion of the boron carbide layer.

PVA의 분자량에 따른 전기방사 거동에 관한 연구 (A Study on the Electrospinning of Poly(vinyl alcohol) with the Molecular Weight)

  • 양찬오;강태진;이승구
    • 한국섬유공학회:학술대회논문집
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    • 한국섬유공학회 2003년도 봄 학술발표회 논문집
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    • pp.173-176
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    • 2003
  • Poly(vinyl alcohol)(PVA)는 친수성이 좋고, 제조가 용이하며, 화학 약품에 대한 내성이 강한 특성을 가지고 있어, 코팅제나 페인트, 접착제 등 산업 전반에 널리 사용되고 있으며 섬유 제조에 대해서도 최근 활발하게 연구되고 있다. 전기방사(Electrospinning)는 전기장 내의 전위차를 이용하여 sub-micron 또는 nano-scale의 직경을 가지는 초극세 섬유를 제조할 수 있는 유용한 방법이다. (중략)

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Ferroelectric Cholesteric Suspension

  • Buchnev, Olesander;Reznikov, Yuri;Tereshchenko, Olexander;Grabar, A.;Kwon, Soon-Bum
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
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    • pp.1236-1239
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    • 2004
  • We developed a new cholesteric material for bistable LCDs. The material consists of dispersion of sub-micron ferroelectric particles in cholesteric host. We found that the doping of the cholesteric with ferroelectric particles in small concentration (< 1% by weight) strongly improved basic characteristics of the transition between poly-domain planar texture and focal conic texture. Decrease of the driving voltage, increase of the reflection contrast and the steepness of the transition is associated with giant steady dipole and dielectric constant of the ferroelectric particles.

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펄스전류인가가 황동-알루미나 나노복합도금층의 경도에 미치는 영향 (Effect of Pulse Plating on Hardness of Brass-Alumina Nanocomposite)

  • 오영주;안재우;안종관;이만승
    • 한국표면공학회지
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    • 제35권3호
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    • pp.158-164
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    • 2002
  • Nanocomposites consisting of a nanocrystalline brass matrix (grain size ; 20-100nm) with sub-micron sized Al2O3 particles (60-200nm) were prepared by pulsed current electrodeposition. The microhardness of the nanocomposite with a grain size of 90-100nm was approximately 1.7 times higher than that of a comparable electrodeposit with no particles. However, significant variations in microhardness were not observed between the nanocomposites with grain sizes of 20 nm and the comparable electrodeposit.

전기방사를 이용한 폴리카보네이트 부직포 제조 (Preparation of Polycarbonate Non-woven by Electrospinning)

  • 라영민;김학용;이근형;이덕래
    • 한국섬유공학회:학술대회논문집
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    • 한국섬유공학회 2002년도 봄 학술발표회 논문집
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    • pp.263-264
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    • 2002
  • 무정형 고분자인 폴리카보네이트는 투명하고 뛰어난 기계적 성질(특히 내충격성) 내열성 내한성ㆍ전기적 성질을 균형 있게 갖추고, 무독하고 자기소화성(自己消火性)도 있는 엔지니어링 플라스틱이다. 본 연구의 목적은 이러한 특성을 가지는 폴리카보네이트를 이용하여 전기방사법으로 sub-micron의 섬유직경으로 구성된 부직포를 제조하는데 있다. (중략)

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초정밀 가공기의 방전시스템 설계기술연구 (The design of Vibration Isolation for Ultra-Precision Machine)

  • 박종권
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1993년도 추계학술대회 논문집
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    • pp.171-176
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    • 1993
  • 초정밀 공작기계의 구조물은 Sub-micron의 운동정밀도를 갖추어야 초정밀기계로서의 기능이 유지된다. 특히 가공기의 베드구조물은 구동요소간의 상대 위치를 정.동적으로 규정 해주는 중요한 기본구조물이므로 고강성, 고쇠감성,열안정성, 경년변화에 대한 치수의 안정성등의 성능이 요구되며, 이를위해 공간적인 형상 설계 및 구조재의 선정에 고도의 기술이 필요하다. 따라서 본 연구는 낮은 고유진동수의 특성을 갖으면서 하중의 설치높이의 변화에서도 고유진동수가 일정히 유지되고 또한 구조물의 중심변화에 대한 수평조절이 가능하면서 자동제어가 가능한 공기스프링을 초정밀 가공기의 방진시스템으로 활용방안에 대하여 연구하였다.

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Rheological Consideration of Sub-micron Sized Hollow Polyaniline Malonate Salts Suspension under the Electric Field

  • Choi, Ung-Su
    • KSTLE International Journal
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    • 제8권1호
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    • pp.7-10
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    • 2007
  • The rheological property of hollow PANI malonate suspension in silicone oil was investigated by varying the electric fields and shear rates, respectively. The hollow PANI malonate susepnsion showed a typical electrorheological (ER) response caused by the polarizability of an amide polar group and shear yield stress due to the formation of chains upon application of an electric field. The shear stress for the hollow PANI malonate suspension exhibited an electric field power of 0.90. On the basis of the experimental results, the newly synthesized hollow PANI malonate suspension was found to be an anhydrous ER fluid.