• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.39 no.1
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• pp.84-89
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• 2011

A Xenon Feed System (XFS) has been developed for hall-effect thruster to small satellite space-propulsion system applications. The XFS delivers low pressure gas to the Anode and Cathode of thruster head unit from a xenon storage tank. Accurate throttling of the propellant mass flow rate is independently required for each channel of the thruster head unit. The mass flow rate to each channel is controlled using the accumulator tank pressure regulation through a micron orifice and isolation valve. This paper discusses the Xenon Feed System design including the component selections, performance estimation and functional test.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.5
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• pp.150-156
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• 2009

The removal of tiny particles adhered to surfaces is one of the crucial prerequisite for a further increase in IC fabrication, large area displays and for the process in nanotechnology. Various cleaning techniques (wet chemical cleaning, scrubbing, pressurized jets and ultrasonic processes) currently used to clean critical surfaces are limited to removal of micrometer-sized particles. Therefore the removal of sub-micron sized particles from silicon wafers is of great interest. For this purpose various cleaning methods are currently under investigation. In this paper, we report on experiments on the cleaning effect of 100nm sized fluorescence particles on silicon wafer using the plasma shockwave occurred by femtosecond laser. The plasma shockwave is main effect of femtosecond laser cleaning to remove particles. The removal efficiency was dependent on the gap distance between laser focus and surface but in some case surface was damaged by excessive laser intensity. These experiments demonstrate the feasibility of femtosecond laser cleaning using 100nm size fluorescence particles on wafer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.6
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• pp.431-435
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• 2010

In this paper, we investigated the dependence of device performance and hot carrier lifetime on the channel direction of PMOSFET. $I_{D.sat}$ vs. $I_{Off}$ characteristic of PMOSFET with <100> channel direction is greater than that with <110> channel direction because carrier mobility of <100> channel direction is greater than that of <110> channel direction. However, hot carrier lifetime for <110> channel direction is much lower than that with <110> channel due to the greater impact ionization rate in the <100> channel direction. Therefore, concurrent consideration of reliability characteristics and device performance is necessary for channel strain engineering of MOSFETs.

• Asian Journal of Atmospheric Environment
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• v.6 no.1
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• pp.41-52
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• 2012

Particulate sulfate in $PM_{2.5}$, sulfur dioxide ($SO_2$) and size-segregated aerosol particle number concentrations were measured at a site ($32^{\circ}19'N$, $129^{\circ}59'E$) on the southwestern Japan coast from 5 March to 10 April, 2010. Results show frequent episodic increases of sulfate and $SO_2$. Compared to the average concentration of sulfate $4.4{\pm}2.7\;{\mu}g\;m^{-3}$ in the whole observation period, episodic sulfate reached $10.5-20.1\;{\mu}g\;m^{-3}$. The variation of sulfate always synchronized with aerosol particles in the size range of $0.1-0.5 {\mu}m$, indicating the episodic sulfate was a consequence of the increase of the sub-micron particles. $SO_2$ did not have remarkable increase in any episodes of sulfate increase. During the passage of low pressure systems which loaded Asian dust in postfrontal air, concentrated sulfate appeared right behind the front but before dust arrival, suggesting the dominance of dust-free particulate sulfate. Weather and backward trajectory analyses revealed that air parcels with high sulfate passed eastern and northeastern China or Korean peninsula before arriving at the site. In contrast, those with high $SO_2$ passed an active volcano, Mt. Sakurajima, about 100 km in the south, suggesting the $SO_2$ was more likely from the volcanic emission. The ratio of sulfate to total sulfur compounds $({SO_4}^{2-})/({SO_4}^{2-}+SO_2)$ was 0.31-0.89 in continentally originated air while was 0.25-0.43 in the air having passed the volcano, showing more efficient conversions of $SO_2$ to sulfate in the air from the continent. The close dependence of the conversion on humidity in the continentally originated air was confirmed.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.6
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• pp.2846-2851
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• 2012

Effects of ground tire rubber(GTR) and unexpanded $Expancel^{(R)}$ powders on the thermal conducting characteristics of rigid polyurethane foams(PUFs) were studied. Sub-micron sized GTR powders and $Expancel^{(R)}$ powders were used as the foam nucleating agents to improve the thermal insulating properties of the rigid PUFs. As the results, while the thermal conductivities of the GTR filled-PUF samples were increased linearly with GTR contents, those of $Expancel^{(R)}$ filled-PUF samples were decreased a little bit. It was considered from the results that GTR powders might predominantly play a role as the extending fillers. On the other hand, $Expancel^{(R)}$ powders could act as the foam nucleating agents based on the polar surface, showing smaller cell sized PUF with improved insulating characteristics.

• Korean Journal of Materials Research
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• v.5 no.2
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• pp.208-214
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• 1995

In order to study on the penetrations of HF solution acording to the geometrical shrinkage of contact-hole pattern size, the wet etch characteristics for oxide in microchannel patterns was investigated. Microchannel patterns of LPCVD oxide surrounded by nitride film, with dimensions of 0.1~1$\mu\textrm{m}$ height and 0.1~20$\mu\textrm{m}$, width, were fabricated. And the etch rates of oxide in HF solution were observed. It was found that oxide etch rate for micro-channel patterns in HF was not affected by pattern sizes and initial aspect ratios up to $0.1 \times 0.1 \mu \textrm{m}^{2} size and 1.2$\mu\textrm{m}$ depth. Finally, it was concluded that there were no special limitations for penetrations of HF solution in wet processes according to the geometrical shrinkage of contact-hole pattern size.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.3.2-3.2
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• 2011

In recent years, inkjet printing technology has received significant attention as a micro/nanofabrication technique for flexible printing of electronic circuits and solar cells, as well for biomaterial patterning. It eliminates the need for physical masks, causes fewer environment problems, lowers fabrication costs, and offers good layer-to-layer registration. To fulfill the requirements for use in the above applications, however, the inkjet system must meet certain criteria such as high frequency jetting, uniform droplet size, high density nozzle array, etc. Existing inkjet devices are either based on thermal bubbles or piezoelectric pumping; they have several drawbacks for flexible printing. For instance, thermal bubble jetting has limitations in terms of size and density of the nozzle array as well as the ejection frequency. Piezoelectric based devices suffer from poor pumping energy in addition to inadequate ejection frequency. Recently, an electrohydrodynamic (EHD) printing technique has been suggested and proposed as an alternative to thermal bubble or piezoelectric devices. In EHD jetting, a liquid (ink) is pumped through a nozzle and a strong electric field is applied between the nozzle and an extractor plate, which induce charges at the surfaces of the liquid meniscus. This electric field creates an electric stress that stretches the meniscus in the direction of the electric field. Once the electric field force is larger than the surface tension force, a liquid droplet is formed. An EHD inkjet head can produce droplets smaller than the size of the nozzle that produce them. Furthermore, the EHD nano-inkjet can eject high viscosity liquid through the nozzle forming tiny structures. These unique features distinguish EHD printing from conventional methods for sub-micron resolution printing. In this presentation, I will introduce the recent research results regarding the EHD nano-inkjet and the printing system, which has been applied to solar cell or thin film transistor applications.

• Korean Journal of Materials Research
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• v.18 no.7
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• pp.384-388
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• 2008

Hydrogen production via high high-temperature steam electrolysis consumes less electrical energy than compared to conventional low low-temperature water electrolysis, mainly due to the improved thermodynamics and kinetics at elevated temperaturetemperatures. The elementalElemental powders of Cu, Ni, and YSZ are were used to synthesize high high-temperature electrolysis cathodecathodes, of Ni/YSZ and Cu/YSZ composites, by mechanical alloying. The metallic particles of the composites were uniformly covered with finer YSZ particles. Sub-micron sized pores are were homogeneously dispersed in the Ni/YSZ and Cu/YSZ composites. In this study, The cathode materials were synthesized and their Characterizations properties were evaluated in this study: It was found that the better electric conductivity of the Cu/YSZ composite was measured improved compared tothan that of the Ni/YSZ composite. Slight A slight increase in the resistance can be produced for in a Cu/YSZ cathode by oxidation, but it this is compensated offset for by a favorable thermal expansion coefficient. Therefore, Cu/YSZ cermet can be adequately used as a suitable cathode material of in high high-temperature electrolysis.

• JSTS:Journal of Semiconductor Technology and Science
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• v.7 no.1
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• pp.51-55
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• 2007

This paper investigates the subthreshold behavior of Fin Field Effect Transistor (FinFET). The FinFET is considered to be an alternate MOSFET structure for the deep sub-micron regime, having excellent device characteristics. As the channel length decreases, the study of subthreshold behavior of the device becomes critically important for successful design and implementation of digital circuits. An accurate analysis of subthreshold behavior of FinFET was done by simulating the device in a 3D process and device simulator, Taurus. The subthreshold behavior of FinFET, was measured using a parameter called S-factor which was obtained from the $In(I_{DS})\;-\;V_{GS}$ characteristics. The value of S-factor of devices of various fin dimensions with channel length $L_g$ in the range of 20 nm - 50 nm and with the fin width $T_{fin}$ in the range of 10 nm - 40 nm was calculated. It was observed that for devices with longer channel lengths, the value of S-factor was close to the ideal value of 60 m V/dec. The S-factor increases exponentially for channel lengths, $L_g\;<\;1.5\;T_{fin}$. Further, for a constant $L_g$, the S factor was observed to increase with $T_{fin}$. An empirical relationship between S, $L_g$ and $T_{fin}$ was developed based on the simulation results, which could be used as a rule of thumb for determining the S-factor of devices.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.6 no.3
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• pp.237-246
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• 1994

Experimental data are reported for charging and collection of NaCl aerosols in the 0.03- to $0.2{\mu}m$-geometric-mean-diameter range in 2-stage parallel-plate electrostatic precipitators. The NaCl aerosols are generated with geometric standard deviation of about 1.74 and particle generation rate of about 10^9 particles/see by the constant output atomizer and injected into the air flow in the clean wind-tunnel. The 2-stage parallel-plate electrostatic precipitator installed in the test section of the wind-tunnel is operated with a positive corona discharge. The NaCl aerosols in the channel flow are sampled and transported to the aerosol particle number concentration measurement system by using the isoaxial sampling and transport system constructed based on the Okazaki and Willeke design. The aerosol particle number concentration measurement system measures the size distribution of submicrometer aerosols by an electrical mobility detection technique. It is confirmed from comparing the measured collection efficiencies in this study and the predicted ones by our previous theoretical analysis that the predicted collection efficiencies agree well with the experimental ones. It is also found from the comparison that below about $0.02{\mu}m$ all particles are not charged and the uncharged particles are not collected, and consequently 2-stage parallel-plate electrostatic precipitators are not suitable for that particle size range.