• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1283-1287
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• 2004

The design rules are being more strict with requirement of operation speed and development of IC industry. For this reason, required minimum line-width has been narrowed under sub-micron region. As the length of minimum line-width is narrowed, local and global planarization are being prominent. CMP(Chemical-Mechanical Polishing), one of the planarizarion technology, is a process which polishes with the ascent of chemical reaction and relative velocity between pad and wafer without surface defects. CMP is performed with a complex interaction among many factors, how CMP has an interaction with such factors is not evident. Accordingly, the studies on this are still carrying out. Therefore, an examination of the CMP phenomena and an accurate understanding of compositive factors are urgently needed. In this paper, we will consider of the relations between the effects of temperature which influences many factors having an effect on polishing results and the characteristics of CMP in order to understand and estimate the influence of temperature. Then, through the interaction of shown temperature and polishing result, we could expect to boost fundamental understanding on complex CMP phenomena.

• Proceedings of the SAREK Conference
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• 2006.06a
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• pp.188-193
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• 2006

In present study, the thermal-hydraulic characteristics of the subchannels are investigated as measuring single-phase heat transfer coefficients and the cross sectional velocity field using LDV in the downstream of support grid in $6{\times}6$ rod bundles. Support grid with mixing vanes make enhancing heat transfer in rod bundles by generating turbulent flow. But this turbulent flow only is reserved in a short distance. Support grid with LSVF mixing vanes keep the turbulent flow a long distance. The experiments are performed at the nominal Reynolds number 30,000 and 50,000. The heat transfer coefficients are measured using heated and unheated copper sensor. In this study, the comparison of local heat transfer coefficients for LSVF mixing vane and split mixing vane is represented.

• Journal of the Semiconductor & Display Technology
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• v.22 no.2
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• pp.17-23
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• 2023

In semiconductor manufacturing processes, a cleaning process is important that can remove sub-micron particles. Conventional wet cleaning methods using chemical have limits in removing nano-particles. Thus, physical forces of a mechanical vibration up to 1 MHz frequency, was tried to aid in detaching them from the substrates. In this article, we developed a 1 MHz quartz megasonic for a bare wafer cleaning using finite element analysis. At first, a 1 MHz megasonic prototype was manufactured. Using the results, a main product which can improve a particle removal performance, was analyzed and designed. The maximum impedance frequency was 992 kHz, which agreed well with the experimental value of 986 kHz (0.6% error). Acoustic pressure distributions were measured, and the result showed that maximum / average was 400.0~432.4%, and standard deviation / average was 46.4~47.3%. Finally, submicron particles were deposited and cleaned for the assessment of the system performance. As a result, the particle removal efficiency (PRE) was proved to be 92% with 11 W power. Reflecting these results, the developed product might be used in the semiconductor cleaning process.

• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.66-71
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• 2023

This paper describes a hybrid cleaning method of silicon wafer combining nano-bubble and ultrasound to remove sub-micron particles and contaminants with minimal damage to the wafer surface. In the megasonic cleaning process of semiconductor manufacturing, the cavitation induced by ultrasound can oscillate and collapse violently often with re-entrant jet formation leading to surface damage. The smaller size of cavitation bubbles leads to more stable oscillations with more thermal and viscous damping, thus to less erosive surface cleaning. In this study, ultrasonic energy was applied to the wafer surface in the DI water to excite nano-bubbles at resonance to remove contaminant particles from the surface. A patented nano-bubble generator was developed for the generation of nano-bubbles with concentration of 1×10⁹ bubbles/ml and nominal nano-bubble diameter of 150 nm. Ultrasonic nano-bubble technology improved a contaminant removal efficiency more than 97% for artificial nano-sized particles of alumina and Latex with significant reduction in cleaning time without damage to the wafer surface.

• Bulletin of the Korean Chemical Society
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• v.30 no.1
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• pp.219-223
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• 2009

$TiO_2$ doped with $Er^{3+\;and\;Yb^{3+}$ was used for fabricating a scattering layer and a nano-crystalline $TiO_2$ electrode layer to be used in dye-sensitized solar cells. The material was prepared using a new sol-gel combustion hybrid method with acetylene black as fuel. The $Er^{3+}$-$Yb^{3+}$ co-doped titanium oxide powder synthesized at 700oC had embossed structure morphology with a size between 27 to 54 nm that agglomerated to produce micron size particles, as observed by the scanning electron micrographs. The XRD patterns showed that the $Er^{3+}$-$Yb^{3+}$ co-doped titanium oxide had an amorphous structure, while using the same method without doping $Er^{3+}\;or\;Yb^{3+},\;TiO_2$ was obtained in the crystallite form with thea dominance of rutile phase. Fabricating a bilayer structure consisting of nano-crystalline $TiO_2$ and the synthesized $Er^{3+}$-$Yb^{3+}$ co-doped titanium oxide showed better scattering property, with an overall increase of 15.6% in efficiency of the solar cell with respect to a single nano-crystalline $TiO_2$ layer.

• Journal of the Korean Ceramic Society
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• v.52 no.5
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• pp.320-324
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• 2015

Optimization of the fabrication process of NiO-yttrium doped barium zirconate (BZY) composite anode substrates using tape-casting for high performance thin-film protonic ceramic fuel cells (PCFCs) is investigated. The anode substrate is composed of a tens of microns-thick anode functional layer laminated over a porous anode substrate. The macro-pore structure of the anode support is induced by micron-scale polymethyl methacrylate (PMMA) pore formers. Thermal gravity analysis (TGA) and a dilatometer are used to determine the polymeric additive burn-out and sintering temperatures. Crystallinity and microstructure of the tape-cast NiO-BZY anode are analyzed after the sintering.

• Atmosphere
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• v.31 no.1
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• pp.113-141
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• 2021

The impacts of ice clouds on the energy budget of the Earth and their representation in climate models have been identified as important and unsolved problems. Ice clouds consist almost exclusively of non-spherical ice crystals with various shapes and sizes. To determine the influences of ice clouds on solar and infrared radiation as required for remote sensing retrievals and numerical models, knowledge of scattering and microphysical properties of ice crystals is required. A conventional method for representing the radiative properties of ice clouds in satellite retrieval algorithms and numerical models is to combine measured microphysical properties of ice crystals from field campaigns and pre-calculated single-scattering libraries of different shapes and sizes of ice crystals, which depend heavily on microphysical and scattering properties of ice crystals. However, large discrepancies between theoretical calculations and observations of the radiative properties of ice clouds have been reported. Electron microscopy images of ice crystals grown in laboratories and captured by balloons show varying degrees of complex morphologies in sub-micron (e.g., surface roughness) and super-micron (e.g., inhomogeneous internal and external structures) scales that may cause these discrepancies. In this study, the current idealized models representing morphologies of ice crystals and the corresponding numerical methods (e.g., geometric optics, discrete dipole approximation, T-matrix, etc.) to calculate the single-scattering properties of ice crystals are reviewed. Current problems and difficulties in the calculations of the single-scattering properties of atmospheric ice crystals are addressed in terms of cloud microphysics. Future directions to develop physically consistent ice-crystal models are also discussed.

• Journal of the Korean Ceramic Society
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• v.45 no.12
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• pp.839-844
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• 2008

$TiO_2$ is an environment-friendly semiconducting material, and it has photocatalytic and hydrophilic effect. There are a lot of reports on the photocatalytic characteristics of $TiO_2$, such as organic pollutants resolving, anti-bacterial, and self-purification material. In this paper, $TiO_2$ micron-sized powders were deposited on the glass by room temperature powder spray in vacuum process, so called aerosol deposition (AD), and nano-grained $TiO_2$ photocatalytic thin films were fabricated. The thickness of the films were controlled by changing the number of deposition cycle. Morphologies and characteristics of the AD-$TiO_2$ thin films were examined by SEM, TEM, XRD, and UV-Visible Spectrophotometer. As the thickness of $TiO_2$ films increased, surface roughness increased. By this increment, the reaction area between film and pollutant was enlarged, resulting in better photocatalytic property.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.11
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• pp.5595-5600
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• 2012

This paper is to review and study about the crystallization nucleating agent to improve the heat-resistance properties of poly(lactic acid). Four sub-micron sized nucleating agents, metallic salts of 2,2'-methylene bis(4,6-di-tert-butylphenol), were prepared and used as a crystallization nucleating agent. Thermal and mechanical properties of polymer compounds were investigated by DSC, HDT and UTM. As the results, While the heat-resistance properties of the polymer compound samples were increased linearly with the contents of nucleating agent as well as their smaller size. Among them, the highest heat-resistance property of compound was observed with 2 wt% of MPZ2. HDT values of PL98Z2 compound was $116^{\circ}C$ at 0.455Mpa.

• The Bulletin of The Korean Astronomical Society
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• v.40 no.2
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• pp.36.2-36.2
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• 2015

We report the first detection of linearly polarized emission at an observing wavelength of 350 mum from the radio-loud active galactic nucleus 3C 279. We conducted polarization observations for 3C 279 using the SHARP polarimeter in the Caltech Submillimeter Observatory on 2014 March 13 and 14. For the first time, we detected the linear polarization with the degree of polarization of $13.3%{\pm}3.4%$ (3.9sigma) and the electric vector position angle (EVPA) of $34.^{\circ}7{\pm}5.^{\circ}6$. We also observed 3C 279 simultaneously at 13, 7, and 3.5 mm in dual polarization with the Korean very long baseline interferometry (VLBI) Network on 2014 March 6 (single dish) and imaged in milliarcsecond (mas) scales at 13, 7, 3.5, and 2.3 mm on March 22 (VLBI). We found that the degree of linear polarization increases from 10% to 13% at 13 mm to 350 mum and the EVPAs at all observing frequencies are parallel within < $10^{\circ}$ to the direction of the jet at mas scale, implying that the integrated magnetic fields are perpendicular to the jet in the innermost regions. We also found that the Faraday rotation measures RM are in a range of $-6.5{\times}102{\sim}-2.7{\times}103$ rad m-2 between 13 and 3.5 mm, and are scaled as a function of wavelength:| {RM}| ${\backslash}propto$ {lambda }-2.2. These results indicate that the millimeter and sub-millimeter polarization emission are generated in the compact jet within 1 mas scale and affected by a Faraday screen in or in the close proximity of the jet.