• Journal of the Korean Institute of Telematics and Electronics
• /
• v.24 no.3
• /
• pp.472-477
• /
• 1987

In order to prevent the short-channel effects due to threshold voltage adjustment implantation in conventional n+ doped silicon gate process, a new approach involving automatic doping of polycide by boron during source and drain implantation is introduced. P-MOSFET devece fabricated by theis approach shows improved short channel characteristics than conventional device with n+ doped gate. Some concerns of adopting this approach in CMOS technology are addressed togetheer with some suggestions.

• Journal of the Korean Institute of Telematics and Electronics
• /
• v.24 no.3
• /
• pp.478-485
• /
• 1987

Optimization of the sub-micron N-channel MOSFET with the LDD(Lightly Doped Drain)structure has been investigated. LDD devices with various length of n-region, n-dose and n-implantation species were fabricated for this purpose. It will be shown that LDD devices have lower substrate current by an order of magnitude and higher breakdown voltage than the conventional devices with comparable channel length. Optimized LDD structure has been found when the sidewall thickness is 2500\ulcorner and n-region is phosphorus implantd with the dose of 1.0E13/cm\ulcorner It has been found that transconductance degradation is less than 20%.

• Proceedings of the Korean Magnestics Society Conference
• /
• 2004.06a
• /
• pp.154-155
• /
• 2004

• Proceedings of the PSK Conference
• /
• 2003.10b
• /
• pp.227.2-228
• /
• 2003

In many biodegradable polymers recently investigated, poly(lactic acid)(PLA) or poly(lactic-co-glycolic acid)(PLGA) have extensively been utilized as drug delivery systems for sustained release drug delivery. Recently, there has been increased interest in electrospinning, which can produce fibers that are sub-micron in diameter. This technique has been applied to various micro/nano fabrication areas using numerous polymers but very few uses in the sharmaceutical area have been reported. (omitted)

• Journal of the Korean Vacuum Society
• /
• v.20 no.1
• /
• pp.63-69
• /
• 2011

In this study, we report on the novel lithographic patterning method to fabricate organic thin film field effect transistors (OTFTs) based on photo and e-beam lithography with well-known silicon technology. The method is applied to fabricate pentacene-based organic field effect transistors. Owing to their solubility, sub-micron sized patterning of P3HT and PEDOT has been well established via micromolding in capillaries and inkjet printing techniques. Since the thermally deposited pentacene cannot be dissolved in solvents, other approach was done to fabricate pentacene FETs with a very short channel length (~30 nm), or in-plane orientation of pentacene molecules by using nanometer-scale periodic groove patterns as an alignment layer for high-performance pentacene devices. Here, we introduce $Al_2O_3$ film grown via atomic layer deposition method onto pentacene as a passivation layer. $Al_2O_3$ passivation layer on OTFTs has some advantages in preventing the penetration of water and oxygen and obtaining the long-term stability of electrical properties. AZ5214 and ma N-2402 were used as a photo and e-beam resist, respectively. A few micrometer sized lithography patterns were transferred by wet and dry etching processes. Finally, we fabricated micron sized pentacene FETs and measured their electrical characteristics.

• Journal of the Korean Ceramic Society
• /
• v.42 no.2 s.273
• /
• pp.110-116
• /
• 2005

Suitable compositions which are sinterable at low temperature in the $BaO-B_{2}O_{3}-ZnO$ glass system were investigated as a function of the ratio between BaO and ZnO. The effect of $Al_{2}O_3$ filler on densification and physical characteristics of the glass was also examined. When the amount of $Al_{2}O_3$ filler increased, the densification rate and the values of dielectric constant, thermal expansion coefficient and hardness in the glass-filler composites decreased gradually. The decreasing rate of the physical properties accelerated when fine $Al_{2}O_3$ filler was used. However, the fracture toughness of the composite rather increased due to the existence of filler particles and pores which effectively suppressed crack propagation with addition of fine $Al_{2}O_3$ filler.

• Transactions of the KSME C: Technology and Education
• /
• v.5 no.1
• /
• pp.69-77
• /
• 2017

Nanotechnology, along with Information Technology (IT) and Bio-technology (BT), has been regarded as a core area that will drive technological revolution of $21^{st}$ century. South Korea and other countries with advanced scientific and technological research programs are investing heavily in the field, and among its various aspects, nanomaterial industry is considered to be at the heart of this global competition. In this review, we look at nanomaterials industry from the perspective of mechanical engineering. Nanomaterials exhibit unique characteristics differing from those of micron, or sub-micron sized materials, and hence are potentially able to open up new opportunities. Specifically, environmental and biological sciences, energy, and catalysis are areas that are expected to benefit from these developments.

• Korean Journal of Materials Research
• /
• v.18 no.2
• /
• pp.92-97
• /
• 2008

In spray pyrolysis, the effects of the preparation temperature, flow rate of the carrier gas and concentration of the spray solution on characteristics such as the morphology, size, and emission intensity of $Ca_8Mg(SiO_4)_4Cl_2:Eu^{2+}$ phosphor powders under long-wavelength ultraviolet light were investigated. The phosphor powders obtained post-treatment had a range of micron sizes with regular morphologies. However, the composition, crystal structure and photoluminescence intensity of the phosphor powders were affected by the preparation conditions of the precursor powders. The $Ca_8Mg(SiO_4)_4Cl_2:Eu^{2+}$ phosphor powders prepared at temperatures that were lower and higher than $700^{\circ}C$ had low photoluminescence intensities due to deficiencies related to the of Cl component. The phosphor powders with the deficient Cl component had impurity peaks of $Ca_2SiO_4$. The optimum flow rates of the carrier gas in the preparation of the $Ca_8Mg(SiO_4)_4Cl_2:Eu^{2+}$ phosphor powders with high photoluminescence intensities and regular morphologies were between 40 and 60 l/minute. Phosphor powders prepared from a spray solution above 0.5 M had regular morphologies and high photoluminescence intensities.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.37 no.3
• /
• pp.1-5
• /
• 2000

Inductively coupled plasma (ICP) excited by a spiral planar antenna is used to etch elctrodes for PZT capacitors. Pt/RuO$_{2}$ bilayers are tested as bottom electrodes for PZT capacitors in order to utilize better leakage characteristics of Pt and easy etch characteristics of RuO$_{2}$ at the same time. The etch rates and selectivities to SiO$_{2}$ hard mask have been measured for each of Pt and RuO$_{2}$ in terms of various plasma conditions. As Cl$_{2}$ ratio increases in $O_{2}$/Cl$_{2}$ mixture, the etch rate of Pt increases while that of RuO$_{2}$ reaches the highest near 10 ％ of Cl$_{2}$. Optimum gas mixture ratio has been determined for etching Pt and RuO$_{2}$ bilayers sequentially, and sub-half micron patterning is demonstrated.

• Membrane and Water Treatment
• /
• v.11 no.1
• /
• pp.69-77
• /
• 2020

Former studies revealed that sepiolite thermally treated at high temperature have high adsorption capacity for phosphate. However, its micron size (75 ㎛) limits its application to water treatment. In this study, we synthesized sepiolite impregnated polysulfone (PSf) beads to separate it easily from an aqueous solution. PSf beads with different sepiolite ratios were synthesized and their efficiencies were compared. The PSf beads with 30% impregnated sepiolite (30SPL-PSf bead) possessed the optimum sepiolite ratio for phosphate removal. Kinetic, equilibrium, and thermodynamic adsorption experiments were performed using the 30SPL-PSf bead. Equilibrium adsorption was achieved in 24 h, and the pseudo-first-order model was suitable for describing the phosphate adsorption at different reaction times. The Langmuir model was appropriate for describing the phosphate adsorption onto the 30SPL-PSf bead, and the maximum adsorption capacity of the 30SPL-PSf bead obtained from the model was 24.48 mg-PO₄/g. Enthalpy and entropy increased during the phosphate adsorption onto the 30SPL-PSf bead, and Gibb's free energy at 35 ℃ was negative. An increase in the solution pH from 3 to 11 induced a decrease in the phosphate adsorption amount from 27.30 mg-PO₄/g to 21.54 mg-PO₄/g. The competitive anion influenced the phosphate adsorption onto the 30SPL-PSf bead was in the order of NO₃^- > SO₄^2- > HCO_3^-. The phosphate breakthrough from the column packed with the 30SPL-PSf bead began after ~2000 min, reaching the influent concentration after ~8000 min. The adsorption amounts per unit mass of 30SPL-PSf and removal efficiency were 0.775 mg-PO₄/g and 61.6%, respectively. This study demonstrates the adequate performance of 30SPL-PSf beads as a filter for phosphate removal from aqueous solutions.