• 한국정밀공학회지
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• 제15권5호
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• pp.34-42
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• 1998

This paper describes an analysis of measuring error of on the machine measuring(OMM) system which directly measures machined surface dimensions using scanning probe on a CNC milling machine. 21 inch TV shadow mask mould clamped to a pallet was measured using PTP(point to point) measuring algorithm in OMM system and the results were compared with those using coordinate measuring machine(CMM). The OMM error was evaluated by probe error, stylus contact error, center shift error, repeatability, work-piece clamping error and etc. The results show that elastic deformation of the pallet is most affecting factor on the measuring error, thus pallet design and clamping method need very careful cosiderations.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.73-77
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• 1997

This paper describes the analysis of measuring error of on the machine measuring(OMM) system which can directly measure the three dimensional machined free surface dimension using scanning probe on milling machine. 21 inch TV shadow mask mould was measured using PTP(point to point)measurement algorithm at pallet clamped and unclamped state on OMM system, and using coordinate measuring machine(CMM) one after another. The OMM system was evaluated probe error, stylus contact error, center shift error, repeatability and so on. Consequencely, the conclusion derived that elastic displacement of pallet had effect on measuring error mainly, and pallet design and setup method would be important.

• 전자공학회논문지A
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• 제29A권8호
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• pp.49-55
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• 1992

We Have investigated the properties of the titanium nitrite films widely used in VLSI devices as diffusion barrier in Al-based metallization. TiN films were formed by reactive sputtering from Ti target in Ar-N$_2$ mixtures, varying deposition parameters such as N$_2$ partial pressure, substrate temperature, power, and total pressure. All the samples received the heat treatment at 45$0^{\circ}C$ for 30 min. The resulting films are characterized by mechanical stylus($\alpha$-step), x-ray diffraction(XRD), scanning electron microscopy(SEM), and four point probe method. The Tin film properties strongly depend on the deposition condition. The stoichiometry and Ti deposition rate are critically affected by nitrogen partial pressure, and the resistivity, in particular, is dependent on both the substrate temperature and sputtering power.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2003년도 하계종합학술대회 논문집 II
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• pp.1049-1052
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• 2003

This study shows the change of the structural characteristic of AIN thin film deposition with the change of the deposition conditions such as Ar/$N_2$ gas ratio, operating pressure in chamber, and the distance between substrate and target in RF Magnetron Sputtering. The orientation and surface roughness of AIN thin film are studied by using XRD and AFM and the thickness is measured by using STYLUS PROFILER. While we can not identify the orientation of the thin film deposited in Ar only, we can obtain the (100) orientation of the thin film with the addition of $N_2$ to Ar. Especially the thin film deposited at 10% of Ar/$N_2$ gas ratio appears to be the most (100) oriented. The (100) orientation of thin film becomes weaker as the operating pressure becomes higher. The further distance between substrate and target is stronger the (100) orientation of the thin film is. The (100) orientation becomes weaker and (002) orientation starts to appear as the distance is shorter.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.169-172
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• 2000

In this paper, an OMM (On-the-Machine Measuring) system has been developed, which can perform measuring and inspection of sculptured surfaces of die and mold, by use of a scanning-type touch probe mounted into the spindle of a NC machine. The calibration procedures of a scanning prove (SP2-1, Renishaw) and an algorithm for measuring surface points by a ball-nosed stylus have been studied. The system has been developed based on commercial CAM software (Z-Master 2000), and tested through measuring a plastic injection molding-die. Also some experimental results of the calibration and measuring for given surface positions are analyzed to verify its accuracy and reliability.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1998년도 춘계학술대회 논문집
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• pp.143-147
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• 1998

As the accuracy of manufactured goods needed high-accuracy processing has made the efficiency of NC and measurment technology develop, the innovation of machine tools has influence the development of the semi-conductor and optical technology. We can mention that a traction role of the acceleration for the development like that depends on the development of the measurement technics - Stylus instrument method, STM, SEM, Laser interferometer method - which are used for measuring the movement accuracy of machine tools. The movement error factors in movement accuracy are expressed as yaw, roll, and pitch etc. Machining center has 21 movement error factors including of 3 axies joint errors because that has 3 axies and has been measured as the standard of the unloaded condition until now inspite of getting static, dynamic, and servo-gain errors in the case of expending the error range. Therefore, this study tries to measure position accuracy according to loading on the X-Y table of the machining center.

• 한국공작기계학회논문집
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• 제13권5호
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• pp.7-15
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• 2004

The purpose of this study was to present the method to choose the optimum machining condition for the wire EDM. This was completed by examining the ever-changing quality of the material and by improving the function of the wire electric discharge machine. Precision metal mold products and the unmanned wire electric discharge machining system were used and then applied in industrial fields. This experiment uses the wire electric discharge machine with brass wire electrode of 0.25mm. To measure the precision of the machining surface, average values are obtained from 3 samples of measures of center-line average roughness by using a third dimension gauge and a stylus surface roughness gauge.

• 한국광학회:학술대회논문집
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• 한국광학회 2000년도 제11회 정기총회 및 00년 동계학술발표회 논문집
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• pp.176-177
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• 2000

고분해능 분광학, 레이저 주파수 안정화, 단원자 레이저, 레이저 자이로 등의 다양한 분야에서 널리 응용되는 저손실, 고반사율 반사경 제작은 고품질의 반사경 기판 사용을 전제로 하고 있다. 1$\AA$이하의 표면거칠기(surface roughness)를 요구하는 반사경 기판의 초연마(super-polishing) 기술과 저손실 반사경 박막코팅 기술은 최근 수 년 사이에 상당한 발전이 이루어졌으며, 이와 함께 초연마 반사경 기판의 표면거칠기 측정기술이 중요한 분야로 주목받고 있다. 표면거칠기 측정기법은 현재까지 여러 가지 방법이 연구, 발전되어 왔는데, 접촉식 측정방법으로 stylus 방법과 비접촉식 측정방법으로 광학 간섭계 방법, 스캔닝 전자현미경(SEM, Scanning Electron Microscopes) 등이 있다. 이들 중 광학 간섭계 방법은 표면형상을 직접 측정 가능하다는 점에서 유망한 비접촉 표면측정 기법으로 알려져 있다. (중략)

• 융합신호처리학회논문지
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• 제14권1호
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• pp.21-26
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• 2013

The objective of this study was to develop a system for handwriting recognition in three dimensions (3D) to authenticate users. While previous studies have used a stylus pen for two-dimensional input on a tablet, this study uses the Wii Remote controller because it can capture 3D human motion and could therefore be more effective means of recognition. The information obtained from a Wii Remote controller included x and y coordinates, acceleration (x, y, z), angular velocity (pitch, yaw, roll), twelve input buttons, and time. The proposed system calculates distances using six features extracted after preprocessing the data. In an experiment where 15 subjects wrote "AIZU" 10 times, we obtained a 94.8% identification rate using a combination of writing velocity, the peak value of pitch, and the peak value of yaw. This suggests that this system holds promise for handwriting-based authentication in the future.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.128-131
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• 2002

Three Dimensional measuring system using optical interference is greatly needed for semiconductor surface or optical surface. The application of this system are : MEMS product, semiconductor surfaces, optical components, precise machined surface, etc. In this paper, Interferometry based measurement system is introduced, which is nondestructive and noncontact inspection system. This system have relatively many advantage, compared with AFM/STM, SEM, Stylus, etc. The developed system can measure the surface topography with high precision and resolution, and with few seconds. And the associated software algorithm is also developed for the ultra precision 3D measuring surface. Various samples that is measured using this system is showed in the latter of this paper.