A Study of Optical Characteristics Correlated with Low Dielectric Constant of SiOCH Thin Films Through Ellipsometry (Ellipsometry를 이용한 저 유전상수를 갖는 SiOCH박막의 광학특성 연구)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.23 no.3
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- pp.228-233
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- 2010