• 마이크로전자및패키징학회지
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• 제9권3호
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• pp.37-41
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• 2002

본 연구에서는 자기 공명 특성을 이용한 박막 센서의 멤브레인 및 박막 센서의 특성을 알아보았다. 멤브레인으로 유망한 물질로 $Si_xN_y$과 SiC가 있으며, 최적의 멤브레인 형성 조건을 알고자 박막의 잔류 응력 및 물성을 비교 분석하였다. 그 중에서 박막 센서에 적용 가능한 멤브레인으로 SiC보다 적절한 인장응력과 낮은 열팽창 계수를 가지는 $Si_xN_y$이 센서의 구조층으로 우수하였으며, $Si_xN_y$위에 박막 센서 물질을 증착 및 패턴닝(patterning)을 함으로써 센서의 자기 이력 곡선 및 자기 공진 주파수를 분석하였다. 센서에 인가되는 외부 자기장을 제거하면 자장에 의해 형성된 자화(magnetization)가 탄성 모드로 바뀌면서 에너지 방출에 의해 센서에서 전압이 발생하는데 이때 전압 발생 구간이 길어지면 기계적 진동이 야기되어 신호가 발생한다. 그리고 센서의 길이 및 폭이 증가할수록 자기공명 주파수가 감소하는 것을 볼 수 있다.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2009년도 9th International Meeting on Information Display
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• pp.953-956
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• 2009

We have investigated the effect of light on amorphous silicon thin film transistors based photo-sensor applications. We have analyzed the instability caused by electrical gate bias stresses under the light illumination and the effect of photo-induced quasi-annealing on the instability. Threshold voltage ($V_{TH}$) under the negative gate bias stress with light illumination was more decreased than that under the negative gate bias stress without light illumination even though $V_{TH}$ caused by the light-induced stress without negative gate bias was shifted positively. These results are because the increase of carrier density in a channel region caused by the light illumination has the enhanced effect on the instability caused by negative gate bias stress. The prolonged light illumination led to the recovery of shifted VTH caused by negative gate bias stress under the light illumination due to the recombination of trapped hole charges.

• 한국군사과학기술학회지
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• 제26권1호
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• pp.1-9
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• 2023

The skin structure of sensor pod mounted on the exterior of aircraft can be exposed to the acoustic dynamic load and static load such as aerodynamic pressure and inertial load during flight. Fatigue life prediction of structural model under acoustic load should be performed and also differential stiffness of model modified by static load should be considered. The acoustic noise test spectrum of MIL-STD-810G was applied to the structural model and the stress response power spectral density (PSD) was calculated. The frequency response analysis was performed with or without prestress induced by inplane static load, and the response spectrum was compared. Time series data was generated using the calculated PSD, and the time and frequency domain fatigue life were predicted and compared. The variation of stress response spectrum due to static load and predicted fatigue life according to the different structural model considering mean stress were examined and decreasing fatigue life was observed in the model with prestress of compressive static load.

• Journal of Welding and Joining
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• 제30권6호
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• pp.80-85
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• 2012

Fatigue cracks in structural components are the most common cause of structural failure when exposed to fatigue loading. In this respect, fatigue crack detection and structural health assessment are very important. Currently, various smart materials are used for detecting fatigue crack and measurement of SIFs(Stress Intensity Factors). So, this paper presented a measurement of SIFs using MFC(Micro Fiber Composite) sensor which is the one of the smart material. MFC sensor is more flexible, durable and reliable than other smart materials. The SIFs of Mode I(K I) as well as Mode II(K II) based on the piezoelectric constitutive law and fracture mechanics are calculated. In this study, the SIF values measured by MFC sensors are compared with the theoretical results.

• 센서학회지
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• 제13권4호
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• pp.316-320
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• 2004

The possibility to use powder consisting of fullerite microcrystallines as a device sensitive to the external axial mechanical load is considered. We suppose that the change of conductivity of fullerite microcrystalline powder as a function of external mechanical stress will be useful for the creation of nanoscale devices of sensor electronics. This new effect based on changing of intermolecular distance between fullerene molecules due to the action of external mechanical force, which can change the distance between fullerene molecules because of weak van der Waals interaction exists. The founded effect is quite linear and sensitive to external mechanical stress is better then in well-known pressure transducers is based on silicon technology.

• Transactions on Electrical and Electronic Materials
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• 제18권1호
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• pp.25-29
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• 2017

This paper presents a unique pressure sensor design for environmental applications. The design uses a new geometry for a multi bossed beam-membrane structure with a SOI (silicon-on-insulator) substrate and a mechanical transducer. The Intellisuite MEMS CAD design tool was used to build and analyze the structure with FEM (finite element modeling). The working principle of the multi bossed beam structure is explained. FEM calculations show that a sensing diaphragm with Mises stress can provide superior linear response compared to a stress-free diaphragm. These simulation results are validated by comparing the estimated deflection response. The results show that, the sensitivity is enhanced by using both the novel geometry and the SOI substrate.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2000년도 춘계학술대회논문집A
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• pp.138-142
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• 2000

In LNG Tank, it is very important to measure the strain in Membrane by theoretical and experimental stress analysis. In this paper, perform the test about strain gage, thermal sensor and lead wire to make clear the properies. The test results conclude that stress measurement by strain gage must consider the effect of many factors to measure strain acculately. The corrections should be made on apparent strain, lead wire length and Membrane shape. It is also important to measure the temperatures accurately at the strain gage location

• E2M - 전기 전자와 첨단 소재
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• 제7권3호
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• pp.200-205
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• 1994

The FEM technique was applied to simulate the change of stress characteristics for various structural parameters and loading positions of the load cell. The output voltage of the load cell was then computed to compare with the manufactured load cell. The tendency of the stress variations of the load cell was well agreed with the basic formula of the single fixed. beam. Also, the stress characteristics according to the change of loading positions showed respective featured results as different structure. The calculated output voltages of the load cell were very close to those of the real manufactured ones.

• 한국안전학회지
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• 제16권4호
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• pp.7-13
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• 2001

Wire electrical discharge machining experiments in conducted to investigate characteristics of acoustic emission (AE) and electrical discharge energy due to current peak (I$_{p}$), pulse on time($\tau$/on/). The AE signals are obtained with a sensor attached to workpiece side. Machining states are identified with scanning electron microscopy and residual stress analyzer. It is demonstrated that the residual stress provide reliable informations about the machining states. Moreover, machining states can be detected successfully using both the residual stress and AE count rate.e.

• 센서학회지
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• 제11권4호
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• pp.191-199
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• 2002

This paper presents the design concept, theoretical investigation, and fabrication of a six-degree of freedom (6-DOF) turbulent flow micro sensor utilizing the piezoresistive effect in silicon. Unlike other flow sensors, which typically measure just one component of wall shear stress, the proposed sensor can independently detect six components of force and moment on a test particle in a turbulent flow. By combining conventional and four-terminal piezoresistors in Si (111), and arranging them suitably on the sensing area, the total number of piezoresistors used in this sensing chip is only eighteen, much fewer than the forty eight piezoresistors of the prior art piezoresistive 6-DOF force sensor.