• KIEE International Transactions on Electrophysics and Applications
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• 제5C권4호
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• pp.176-179
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• 2005

The increasing demand for high density packaging technologies and the evolution to mixed digital and analogue devices has been the con-set of increasing research in thin film multi-layer technologies such as the passive components integration technology. In this paper, Cu and TaO thin film with RF sputtering was deposited for spiral inductor and MOM capacitor on the $SiO_2$/Si(100) substrate. MOM capacitor and spiral inductor were fabricated for L-C band pass filter by sputtering and lift-off. We are analyzed and designed thin films L-C passive components for band pass filter at 900 MHz and 1.8 GHz, important devices for mobile communication system. Based on the high-Q values of passive components, MOM capacitor and spiral inductors for L-C band pass filter, a low insertion loss of L-C passive components can be realized with a minimized chip area. The insertion loss was 3 dB for a 1.8 GHz filter, and 5 dB for a 900 MHz filter. This paper also discusses a analysis and practical design to thin-film L-C band pass filter.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2006년도 하계종합학술대회
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• pp.547-548
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• 2006

In this paper, cost effective parallel-branch inductor has been proposed and developed in order to increase the quality factor of the conventional spiral inductor. This parallel-branch inductor is composed of only two metals. The presented parallel-branch inductor shows 12% improvement in the quality factor with the same area as the conventional inductor. Also, we improve the parallel-branch inductor for high frequency applications.

• 전기학회논문지
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• 제57권3호
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• pp.446-452
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• 2008

To design a spiral inductor a genetic algorithm is applied with fast computing technique. For the inductance extraction of the given geometry the fast multipole method is used, also the distributed computing technique using 10 personal computers is introduced for the massive computation of the genetic algorithm. A few important design parameters are used as genes for the optimization in the genetic algorithm. The target function is chosen as mean square error of the inductance at several sampling frequency points. A large-scaled inductor is fabricated and compared with the simulated data.

• Journal of the Optical Society of Korea
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• 제12권1호
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• pp.49-51
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• 2008

The wide-band spiral inductor to be monolithically integrated on the AlN substrate as a choking inductor for a compact 10 Gb/s optical transmitter applications is investigated. In order to reduce the parasitic capacitance limiting the choking bandwidth, the AlN substrate is partially etched away, which is analyzed by using an equivalent circuit model. The measured $S_{21}$ transmission response of the fabricated inductor is suppressed as low as -10 dB in the frequency range of 5 to 16 GHz.

• 산업기술연구
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• 제29권B호
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• pp.101-105
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• 2009

A 1.571GHz LC VCO with optimized spiral inductor for GPS receiver is designed in 130nm CMOS process. The phase noise of the VCO has been reduced the use of high Q inductor and on chip filter. It has phase noise of -91dBc/Hz, -111dBc/Hz, and -131dBc/Hz at 10kHz, 100kHz, and 1MHz offset frequencies from the carrier, respectively. This VCO consumes 2mA from a 0.6V supply.

• 한국전자파학회:학술대회논문집
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• 한국전자파학회 2003년도 종합학술발표회 논문집 Vol.13 No.1
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• pp.163-167
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• 2003

In this paper, an air-suspension type RF MEMS inductor is fabricated, and an appropriate de-embedding scheme for 3-dimenstional MEMS structure is applied and verified with inductance calculation algorithm. With the presented de-embedding method, parasitics from contanct pads and feeding lines are effectively and accurately de-embedded using open and short calibration procedure, and only spiral and posts can be characterized as a high-Q inductor structure. The validity of the de-embedding method is verified by the comparison of the measured and calculated inductances of two 1.5 and 2.5 turn square spiral inductors. The open-short de-embedded inductance error is below 5% each case in comparison with the calculated value based on H.M. Greenhouse's algorithm.

• 반도체디스플레이기술학회지
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• 제2권1호
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• pp.11-14
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• 2003

The high Q(quality factor) suspended spiral inductors were fabricated on the silicon substrate by 3D surface micromachined process. The integration of 2.4GHz VCO has been performed by fabricating suspended spiral inductor of the top of CMOS VCO circuit. The phase noise of VCO integrated MEMS inductor is 93.5 dBc/Hz at 100kHz of offset frequency.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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• pp.669-672
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• 2003

With the advances on wireless internet technology, many research on minimization of wireless LAN is on the progress. To apply passive components in MCM, characteristic analysis of passive components is essential. In this paper, three square spiral inductors were modeled by HSPICE using PEEC (Partial Element Equivalent Circuit) method. Afterwards, Monte-Carlo analysis was performed to evaluate the optimized parameters. This work will give an idea on PEEC modeling of spiral inductor, and enable researchers with predictive data before large scale manufacturing.

• 한국재료학회:학술대회논문집
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• 한국재료학회 1998년도 추계학술발표강연 및 논문개요집
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• pp.74-74
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• 1998

• 대한전자공학회논문지SD
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• 제37권10호
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• pp.17-24
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• 2000

면적 효율이 높은 대칭 구조를 갖는 이중층 나선형 인덕터를 제시하였으며 그 특성을 일반적인 단일층 나선형 인덕터와 비교하여 분석하였다. 일반적인 예측과 달리 이중층 인덕터의 상하층 유도 계수가 인덕터의 권선수와 함께 증가하는 것을 확인하였고 이로 인하여 동일한 면적에 대하여 이중층 인덕터은 권선수에 따라 단일층에 비해 2.5-4배 정도 높은 인덕턴스값을 나타내었다. 또한 같은 인덕턴스 값에 대하여 이중층 구조로 단일층 구조 보다 높은 충실도를 가짐을 확인하였다. 본 논문에서는 이중층 나선형 인덕터가 단일층 나선형 인덕터보다 면적 효율과 충실도 측면에서 우수하여 RF집적회로에 활용되기에 적절한 보다 구조임을 제시하고자 한다. 제시된 이중층 나선형 인덕터는 완벽한 대칭 구조를 갖도록 설계되었으며 측정 결과에서 이와 같은 특성을 확인할 수 있었으며, 고주파용 초크로서 활용가능성을 확인하였다.