• Title/Summary/Keyword: spindle dynamics

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Development of Wafer Grinding Spindle with Porous Air Bearings (다공질 공기 베어링을 적용한 반도체 웨이퍼 연마용 스핀들 개발)

  • Donghyun Lee;Byungock Kim;Byungchan Jeon;Gyunchul Hur;Kisoo Kim
    • Tribology and Lubricants
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    • v.39 no.1
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    • pp.28-34
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    • 2023
  • Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

Runout Control of a Magnetically Suspended Grinding Spindle (자기베어링으로 지지된 연삭 스핀들의 런아웃 제어)

  • 노승국;경진호;박종권;최언돈
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2000.05a
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    • pp.1011-1015
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    • 2000
  • In this paper, the case studies of reducing rotational errors is theoretically done for a grinding spindle with an active magnetic bearing system. The rotational errors acting on the magnetic bearing spindle are due to mass unbalance of rotor, runout, grinding excitation and unmodeled nonlinear dynamics of electromagnets. The adaptive feedforward method based on LMS algorithm is discussed to compensate output and input disturbances, and investigated its effectiveness by numerical simulation. The feedforward control reduced external excitation and rotational error for specified frequency. The interpolation method using impulse function for cancelling the electrical 'uncut is studied. These methods show their effectiveness for the rotational accuracy of the improving magnetic bearing spindle through some simulation results of the rotational error decreased by them.

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On-line Cutting Force Estimation by N[ensuring Spindle Displacement in High-Speed Milling Process (고속 밀링 가공 시 주축 변위 측정을 통한 절삭력의 실시간 감시)

  • Kim J.H.;Kim J.H.;Kim I.H.;Ahn H.J.;Jang D.Y.;Han D.C.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.133-134
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    • 2006
  • A cylindrical capacitive displacement sensor (CCS) was developed and applied for monitoring end milling processes. Dynamic characteristics of a spindle-assembly were measured using the CCS and a designed magnetic exciter. The technique to extract the spindle displacement component caused only by cutting from the measured signals using the CCS was proposed in the paper. Using CCS signals and FRF (Frequency Response Function) derived from dynamics of the spindle tool system, dynamic cutting forces are estimated quantitatively.

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A Study On The Acoustic Noise Characteristics of Hard Disk Drive Due To The Structural Excitation Of Spindle Motor (하드디스크 드라이브에 있어서 스핀들모터의 구조적 가진에 따른 시스템의 소음 특성에 관한 연구)

  • Son, Young;Hwang, Tae-Yeon;Kang, Seong-Woo;Han, Yun-Sik;Koo, Ja-Choon
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2000.06a
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    • pp.1549-1554
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    • 2000
  • HDD structure is excited by the dynamic motion of disk-spindle motor components. Those excitations which are generated at stator and magnet rotor, at bearings and from disk dynamics, are transmitted through motor spindle and flange to HDD cover and base. The operational deflection shape measurement can show the structural excitation patterns at the most influent frequency on the acoustic noise level. One of those components is the axial excitation along spindle, and the other is the local orbital excitation at contact area of motor flange and base. To make a reduction of those structural transmission excitations, the structure of spindle motor is modified to the direction of reinforcement at transmission path without change of bearings, magnet and coil. Some excitation of spindle motor component carrying out essential function is unavoidable. So it is the efficient way of HDD noise improvement to control the structural transmission of excitation.

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Finite Element Modal Analysis of a Spinning Flexible Disk-Spindle System Considering the Flexiblity of Supporting Structures and an Actuator in a HDD (지지구조와 액츄에이터의 유연성을 고려한 HDD 유연 회전 디스크-스핀들 시스템의 유한 요소 고유 진동 해석)

  • Seo, Chan-Hee;Lee, Chang-Suk;Jang, Gun-Hee;Lee, Ho-Sung
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2005.11a
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    • pp.330-336
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    • 2005
  • This paper presents a method to analyze the vibration of a flexible spinning disk-spindle system with FDBs, flexible base structure and an actuator in a HDD by using the FEM. Finite element equations of each component of a HDD spindle system from the spinning flexible disk to the flexible base plate are consistently derived by satisfying the geometric compatibility in the internal boundary between each component. A global matrix equation obtained by assembling the finite element equations of each substructure is transformed to a state-space matrix-vector equation, and both damped natural frequencies and modal damping ratios are calculated by using the restarted Arnoldi iteration method. The validity of the proposed method is verified by comparing the simulated natural frequencies, mode shapes with the experimental results.

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볼엔드밀 절삭공정의 절삭력 디지털 제어

  • 이천환;이건복
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1992.10a
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    • pp.198-203
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    • 1992
  • There are two important variables in machining process control, which are feed and cutting speed. It is possible to improve the machining accuracy and the productivity by maintaining the optimal feed and cutting speed. IN this work, a controller is designed to achieve on-line cutting force control based on the modeling of cutting process dynamics established through step response test. Two schemes are proposed and implemented. The first is feed control under the constant spindle speed and the second is spindle speed control under the constant feed. Finally, both are proved to work properly through simulation and experimentation.

Monitoring and Control of Turning Chatter using Sound Pressure (음압을 이용한 선삭작업에서의 채터감시 및 제어)

  • 이성일
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1996.10a
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    • pp.85-90
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    • 1996
  • In order to detect and suppress chatter in turning processes a stability control methodology was studied through manipulation of spindle speeds regarding to chatter frequencies. The chatter frequency was identified by monitoring and signal processing of sound pressure during turning on a lathe. The stability control methodology can select stable spindle speeds without knowing a prior knowledge of machine compliances and cutting dynamics. Teliability of the developed stability control methodology was verified through turning experiments on an engine lathe. Experimental results show that a microphone is an excellent sensor for chatter detection and control

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Monitoring and Control of Turing Chatter using Sound Pressure and Stability Control Methodology (음압신호와 안정도제어법을 이용한 선삭작업에서의 채터 감시 및 제어)

  • 이성일
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.6 no.4
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    • pp.101-107
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    • 1997
  • In order to detect and suppress chatter in turning process, a stability control methodology was studied through manipulation of spindle speeds regarding to chatter frequencies, The chatter frequency was identified by monitoring and signal processing of sound pressure during turing on a lathe. The stability control methodology can select stable spindle speeds without knowing a prior knowledge of machine compliances and cutting dynamics. Reliability of the developed stability control methodology was verified through turing experiments on an engine lathe. Experimental results show that a microphone is an excellent sensor for chatter detection and control .

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Milling Chatter Stability Analysis in Consideration of Gyroscopic Effect (자이로 스코프 효과를 고려한 밀링 채터 안정성 해석)

  • 박재현;홍성욱;김현수;박중윤
    • Journal of the Korean Society for Precision Engineering
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    • v.17 no.2
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    • pp.58-63
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    • 2000
  • The dynamics of spindle-bearing-workpiece system significantly affects the cutting condition and stability in milling process. The present paper investigates the chatter stability of milling process due to the change in the dynamics of spindle-bearing-workpiece systems. In particular, the present paper focuses on chatter stability due to the presence of gyroscopic effect. An eigenvalue problem approach to the stability of milling process is extensively used in this paper. To incorporate the rotational speed dependent gyroscopic effect, an iterative algorithm is proposed. A numerical example is provided for examining the chatter stability problem in the presence of gyroscopic effects.

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Development of the Automated Calculation System for Air-Bearing Spindle (공기 베어링 주축의 자동설계시스템 개발)

  • Chernopyatov Y.A.;Chung W.J.;Dolotov K.S.;Kim D.S.;Lee C.M.
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.13 no.5
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    • pp.38-48
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    • 2004
  • Recently the use of high-speed equipment in machine-tool industry has greatly increased, which requires the development of prognostics and prediction methods on the design stage. Conversion of the test/experiments stage from real to virtual reality will not only significantly reduce the design and manufacturing cost, but will also increase design quality. This paper shows how it is possible to develop the automated system for the design calculations of the air-bearing spindles. First, the general calculation method is introduced. It contains several steps, namely, geometry identification, pressure calculation, stiffiness calculation, dynamics characteristics calculation. For geometry identification reducing spindle shaft to rings was proposed, which helps to automate the calculation process. For pressure calculation the Peshti method was implemented. For stiffiness calculation the analysis was made, which shown the necessity of correct calculation step selection. Then the system of ordinary differential equations containing influence coefficients was evolved, which is used for trjectories calculation. The graphical representation of the calculation results shows the dynamic behavior of the spindle unit concerning various working conditions. Finally, this automated system is illustrated by an example of the air-bearing spindle calculation.