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Thermal Stable Ni-silicide Utilizing Pd Stacked Layer for nano-scale CMOSFETs (나노급 CMOSFET을 위한 Pd 적층구조를 갖는 열안정 높은 Ni-silicide)

  • Yu, Ji-Won;Zhang, Ying-Ying;Park, Kee-Young;Li, Shi-Guang;Zhong, Zhun;Jung, Soon-Yen;Yim, Kyoung-Yean;Lee, Ga-Won;Wang, Jin-Suk;Lee, Hi-Deok
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.10-10
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    • 2008
  • Silicide is inevitable for CMOSFETs to reduce RC delay by reducing the sheet resistance of gate and source/drain regions. Ni-silicide is a promising material which can be used for the 65nm CMOS technologies. Ni-silicide was proposed in order to make up for the weak points of Co-silicide and Ti-silicide, such as the high consumption of silicon and the line width limitation. Low resistivity NiSi can be formed at low temperature ($\sim500^{\circ}C$) with only one-step heat treat. Ni silicide also has less dependence of sheet resistance on line width and less consumption of silicon because of low resistivity NiSi phase. However, the low thermal stability of the Ni-silicide is a major problem for the post process implementation, such as metalization or ILD(inter layer dielectric) process, that is, it is crucial to prevent both the agglomeration of mono-silicide and its transformation into $NiSi_2$. To solve the thermal immune problem of Ni-silicide, various studies, such as capping layer and inter layer, have been worked. In this paper, the Ni-silicide utilizing Pd stacked layer (Pd/Ni/TiN) was studied for highly thermal immune nano-scale CMOSFETs technology. The proposed structure was compared with NiITiN structure and showed much better thermal stability than Ni/TiN.

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테라헤르츠 펄스 기술

  • Han, Hae-Ok;Yu, Nan-Lee;Jeon, Tae-In;Jin, Yun-Sik;Park, Ik-Mo;Kim, Jeong-Hoe;Mun, Gi-Won;Han, Yeon-Ho;Jeong, Eun-A;Gang, Cheol;Lee, Yeong-Rak;Go, Do-Gyeong;Lee, Ui-Su;Ji, Young-Bin;Kim, Geun-Ju;Han, Gyeong-Ho
    • The Proceeding of the Korean Institute of Electromagnetic Engineering and Science
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    • v.19 no.5
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    • pp.87-103
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    • 2008
  • In recent years, the field of THz photonics based on THz pulse technology has gained tremendous, world-wide interest as a new exciting research subject. With a possibility of many commercial applications as well as fundamental scientific achievements in the field, many advanced nations are stepping up their effort in advancing the field of THz photonics. This fact is supported by the observation of the significant increase in the number of papers on THz pulse technology presented in renowned international journals and conferences. The subject that is interesting for the THz application is the development of THz pulse sources and detectors, and other passive devices. In this paper, we present a brief review on some of the key devices and their relavant measurement techniques such as THz photoconductive antennas, optical rectification, difference frequency geneneration with quasi-phase matching structures, electro-optic sampling, high speed real time measurements, THz transmission lines, and other various waveguide structures.

Cytotoxicity of Trichoderma spp. Cultural Filtrate Against Human Cervical and Breast Cancer Cell Lines

  • El-Rahman, Atef Abd El-Mohsen Abd;El-Shafei, Sally Mohamed Abd El-Aziz;Ivanova, Elena Vladimirovna;Fattakhova, Alfia Nurlimanovna;Pankova, Anna Victorovna;El-Shafei, Mohamed Abd El-Aziz;El-Morsi, El-Morsi Abu El-Fotouh;Alimova, Farida Kashifovna
    • Asian Pacific Journal of Cancer Prevention
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    • v.15 no.17
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    • pp.7229-7234
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    • 2014
  • Trichoderma spp. are known as a rich source of secondary metabolites with biological activity belonging to a variety of classes of chemical compounds. These fungi also are well known for their ability to produce a wide range of antibiotic substances and to parasitize other fungi. In search for new substances, which might act as anticancer agents, the overall objective of this study was to investigate the cytotoxic effects of Trichoderma harzianum and Trichoderma asperellum cultural filtrates against human cervical and breast cancer cell lines (HeLa and MCF-7 cells respectively). To achieve this objective, cells were exposed to 20, 40, 60, 80 and 100 mg/ml of both T. harzianum cultural filtrate (ThCF) and T. asperellum cultural filtrate (TaCF) for 24h, then the cell viability and the cytotoxic responses were assessed by using trypan blue and 3-(4,5-dimethylthiazol-2yl)-2,5-biphenyl tetrazolium bromide (MTT) assays. Morphological changes in cells were investigated by phase contrast inverted microscopy. The results showed that ThCF and TaCF significantly reduce the cell viability, have cytotoxic effects and alter the cellular morphology of HeLa and MCF-7 cells in a concentration dependent manner. A concentration of 80 and 100mg/ml of ThCF resulted in a sharp decline in the cell viability percent of HeLa and MCF-7 respectively (25.2%, 26.5%) which was recorded by trypan blue assay. The half-maximal inhibitory concentrations ($IC_{50}$) of ThCF and TaCF in HeLa and MCF-7 were recorded as 16.6, 12.0, 19.6 and 0.70mg/ml respectively by MTT assay. These results revealed that ThCF and TaCF have a substantial ability to reduce the viability and proliferation of human cervical and breast cancer cells.

Development of Two-Dimensional Scanning Videokymography for Analysis of Vocal Fold Vibration

  • Wang, Soo-Geun;Lee, Byung-Joo;Lee, Jin-Choon;Lim, Yun-Sung;Park, Young Min;Park, Hee-June;Roh, Jung-Hoon;Jeon, Gye-Rok;Kwon, Soon-Bok;Shin, Bum-Joo
    • Journal of the Korean Society of Laryngology, Phoniatrics and Logopedics
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    • v.24 no.2
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    • pp.107-111
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    • 2013
  • Objectives : We developed two-dimensional (2D) scanning videokyomography to evaluate the mucosal wave of whole vocal cords in real time to overcome the limit of preexisting stroboscopy and line scanning videokymography which could not evaluate it. Methods : We implemented a continuous light source with high brightness, a high-definition CMOS camera, and capture board for saving the data. We created the software program to analyze the image data from the system. The test of the functionality of the 2D scanning videokymography camera was performed in one of the authors (P.H.J 32 years old male). Vocal cord images were obtained during normal phonation and falsetto phonation. Images were obtained also during cough, diplophonia. Results : The system made it possible to measure objective parameters, including fundamental frequency, amplitude, regularity, mucosal wave, and phase difference, medial and lateral peak, opening versus closing duration related to vocal fold vibration. Simultaneously, it enabled analysis of the whole mucosal wave of the entire vocal fold in real time. 2D scanning videokymography was also effective for evaluating the dynamic status of the vocal fold when the subject phonated aperiodic voice. Conclusion : In conclusion, 2D scanning videokymography can support the analysis of the whole mucosal wave of the entire vocal cord with objective vocal parameters, overcoming the limitations of stroboscopy and previous line scanning videokymography techniques.

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The Effect of Temperature on the Breakthrough of Charcoal Tube During Vinyl Chloride Monomer Sampling (공기중 염화비닐단량체 포집시 온도가 파과현상에 미치는 영향)

  • Park, Youn Jung;Lee, Sang Hoi;Kim, Chi Nyon;Won, Jong Uk;Roh, Jaehoon
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.8 no.1
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    • pp.115-123
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    • 1998
  • Vinyl chloride monomer exists as gas phase at normal temperature and reacts with oxygen and strong oxidant in the air to form oxidized materials. Because of being easily synthesized, it is used as a main source at the synthetic reaction process of PVC synthesis factories. Ministry of Labor regulates its usage as a carcinogen and its exposure level as 1 ppm. But the amount of VCM production in PVC and VCM production process hasn't been exactly estimated. In addition, facilities of this factory are located in outdoor. Therefore, this study was designed to investigate effects of temperature on breakthrough of charcoal tube at a fixed concentration and temperature during VCM sampling based on NIOSH and OSHA methods which were used as methods of occupational environment measuring and analysis. During the sampling of VCM, methods of OSHA and NIOSH require flow rate of 0.05 lpm and sampling volume of $3{\ell}$, $5{\ell}$ respectively, at this time carbon molecular sieve tube and coconut shell charcoal tube are used to observe the breakthrough along with concentration and temperature. As a result, significant difference between average adsorbed amounts of OSHA methods but that of NIOSH methods cannot be found. NIOSH method is likely to be effected by high temperature and normal temperature in high concentration. Breakthrough is not found in the method of OSHA at different conditions of temperature and concentration. As the result of this study we could verify that breakthrough occurred in the process of sampling VCM with NIOSH methods. Therefor in summer time, breakthrough should be considered and research on the breakthrough volume should be done. It is considered the research about the specificity of the coconut shell charcoal and carbon molecular sieve sorbent should be done when sampling VCM in comming days.

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Hypoallergenic and Physicochemical Properties of the A2 β-Casein Fractionof Goat Milk

  • Jung, Tae-Hwan;Hwang, Hyo-Jeong;Yun, Sung-Seob;Lee, Won-Jae;Kim, Jin-Wook;Ahn, Ji-Yun;Jeon, Woo-Min;Han, Kyoung-Sik
    • Food Science of Animal Resources
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    • v.37 no.6
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    • pp.940-947
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    • 2017
  • Goat milk has a protein composition similar to that of breast milk and contains abundant nutrients, but its use in functional foods is rather limited in comparison to milk from other sources. The aim of this study was to prepare a goat A2 ${\beta}$-casein fraction with improved digestibility and hypoallergenic properties. We investigated the optimal conditions for the separation of A2 ${\beta}$-casein fraction from goat milk by pH adjustment to pH 4.4 and treating the casein suspension with calcium chloride (0.05 M for 1 h at $25^{\circ}C$). Selective reduction of ${\beta}$- lactoglobulin and ${\alpha}_s$-casein was confirmed using sodium dodecyl sulphate-polyacrylamide gel electrophoresis and reverse-phase high-performance liquid chromatography. The hypoallergenic property of A2 ${\beta}$-casein fraction was examined by measuring the release of histamine and tumor necrosis factor alpha from HMC-1 human mast cells exposed to different proteins, including A2 ${\beta}$-casein fraction. There was no significant difference in levels of both indicators between A2 ${\beta}$-casein treatment and the control (no protein treatment). The A2 ${\beta}$-casein fraction is abundant in essential amino acids, especially, branched-chain amino acids (leucine, valine, and isoleucine). The physicochemical properties of A2 ${\beta}$-casein fraction, including protein solubility and viscosity, are similar to those of bovine whole casein which is widely used as a protein source in various foods. Therefore, the goat A2 ${\beta}$-casein fraction may be useful as a food material with good digestibility and hypoallergenic properties for infants, the elderly, and people with metabolic disorders.

Nutrient Requirements of Exercising Swamp Buffalo, Bubalus bubalis. II. Details of Work Energy of Cows and Its Relation to Heart Rate

  • Mahardika, I.G.;Sastradipradja, D.;Sutardi, T.;Sumadi, I.K.
    • Asian-Australasian Journal of Animal Sciences
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    • v.13 no.7
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    • pp.1003-1009
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    • 2000
  • Four young swamp buffalo cows of similar age ranging in body weight (W) between 280 to 380 kg and trained for doing physical exercise were used in two consecutive experiments, each using a latin square design, to determine energy expenditure for draught. The experiments consisted of field trials using 4 levels of work load, i.e. no work as control and loads amounting 450 to 500 Newton (N) continuous traction for respectively 1, 2 and 3 h daily for 14 consecutive days for experiment 1, and no work, traction loads equaling 5, 10 and 15% of W for 3 h daily for 14 days for experiment 2. Heart rate during rest and exercise was monitored using PE-3000 HR monitor. Cows were fed only king grass (Penisetum purpuroides) ad libitum and were subjected to balance trials. Body composition was estimated in vivo by the body density method and daily energy expenditure (EE) was calculated from ME minus RE. RE was calculated from the changes in body-protein and -fat measured before and immediately after the 14 d experimental period assuming an energy equivalent of 39.32 MJ/kg fat and 20.07 MJ/kg protein. $E_{exercise}$ ($EE_{work}\;-\;EE_{resting}$), which was the energy spent for doing the traction during 1, 2 and 3 h was 7.13, 15.45 and 19.90 MJ, respectively. $EE_{work}$ for the 1 h treatment group was 39.75 MJ/d equivalent to 1.30 times $EE_{resting}$. The values for the 2 and 3 h treatment groups were 1.75 and 1.86 times resting energy requirement, respectively. Absolute efficiency of work in all exercise trials of experiment 2 was around 27.28%. The increases of daily $E_{exercise}$ values were correlated to elevation of heart rate (HR) according to the equation $E_{exercise}=(0.270HR^{0.363}\;-\;1)$ MJ, while draught force related to heart rate according to the equation DF (N)=6.66 HR - 361.62. Blood glucose and triglyceride levels were gradually elevated with time during the course of exercise. Mean values of blood glucose were 91.7, 115.0 and 116.2 mg/dl for cows after 1, 2 and 3 h pulling loads at 15% W respectively as compared to 88.2 mg/dl prior to work. In the same order and treatment, mean blood triglyceride concentrations were 13.5, 13.3 and 14.8 mg/dl, and 11.5 mg/dl for control. For blood lactate, the values were 1.68, 1.63 and 1.66 mM, and 0.80 mM for control. Glucose was used as the major source of energy during the initial phase of exercise, but for prolonged work, fat will replace carbohydrate as the main substrate. Accumulation of lactate persisted for some time at the end of the exercise trials.

In-situ Synchrotron Radiation Photoemission Spectroscopy Study of Property Variation of Ta2O5 Film during the Atomic Layer Deposition

  • Lee, Seung Youb;Jeon, Cheolho;Kim, Seok Hwan;Lee, Jouhahn;Yun, Hyung Joong;Park, Soo Jeong;An, Ki-Seok;Park, Chong-Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.362-362
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    • 2014
  • Atomic layer deposition (ALD) can be regarded as a special variation of the chemical vapor deposition method for reducing film thickness. ALD is based on sequential self-limiting reactions from the gas phase to produce thin films and over-layers in the nanometer scale with perfect conformality and process controllability. These characteristics make ALD an important film deposition technique for nanoelectronics. Tantalum pentoxide ($Ta_2O_5$) has a number of applications in optics and electronics due to its superior properties, such as thermal and chemical stability, high refractive index (>2.0), low absorption in near-UV to IR regions, and high-k. In particular, the dielectric constant of amorphous $Ta_2O_5$ is typically close to 25. Accordingly, $Ta_2O_5$ has been extensively studied in various electronics such as metal oxide semiconductor field-effect transistors (FET), organic FET, dynamic random access memories (RAM), resistance RAM, etc. In this experiment, the variations of chemical and interfacial state during the growth of $Ta_2O_5$ films on the Si substrate by ALD was investigated using in-situ synchrotron radiation photoemission spectroscopy. A newly synthesized liquid precursor $Ta(N^tBu)(dmamp)_2$ Me was used as the metal precursor, with Ar as a purging gas and $H_2O$ as the oxidant source. The core-level spectra of Si 2p, Ta 4f, and O 1s revealed that Ta suboxide and Si dioxide were formed at the initial stages of $Ta_2O_5$ growth. However, the Ta suboxide states almost disappeared as the ALD cycles progressed. Consequently, the $Ta^{5+}$ state, which corresponds with the stoichiometric $Ta_2O_5$, only appeared after 4.0 cycles. Additionally, tantalum silicide was not detected at the interfacial states between $Ta_2O_5$ and Si. The measured valence band offset value between $Ta_2O_5$ and the Si substrate was 3.08 eV after 2.5 cycles.

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Film Properties of MOCVD TiN prepared by TDMAT and TDMAT/$NH_3$ (TDMAT와 TDMAT/$NH_3$ 로 형성한 MOCVD(Metal Organic Chemical Vapor Deposition) Titanium Nitride 박막의 특성)

  • Baek, Su-Hyeon;Kim, Jang-Su;Park, Sang-Uk;Won, Seok-Jun;Jang, Yeong-Hak;O, Jae-Eung;Lee, Hyeon-Deok;Lee, Sang-In;Choe, Jin-Seok
    • Korean Journal of Materials Research
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    • v.5 no.7
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    • pp.775-780
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    • 1995
  • Thin films of titanium nitride are formed using the tetrakis-dimethyl-amino-titanium (TDMAT(Ti[N($CH_3$)$_2$]$_4$)) under various conditions. The formation of TiN films has been obtained from the thermal decomposition of the Ti-precursor and the gas phase reaction between TDMAT and ammonia(NH$_3$). The resistivity of the MOCVD film can be attributed to their impurity. Especially the curve fitting graph of XPS data is revealed that main impurities in the films as carbon and oxygen make various interstitial compounds which has influenced physical and electrical properties of the film. In the contact hole with the aspect ratio of 3:1 and the diameter of 0.5${\mu}{\textrm}{m}$, the SEM morphology shows that the step coverage is more decreased in the films formed y flowing ammonia additionally than the films formed by pyrolysis of TDMAT and the phenomenon is probably related with the activation energy.

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Production and Characterization of Thermostable Protease from Bacillus licheniformis Isolated from Korean Traditional Soybean Paste (재래식 된장에서 분리된 Bacillus licheniformis의 내열성 Protease 특성과 생산성)

  • Bae, Young Eun;Yoon, Ki-Hong
    • Korean Journal of Microbiology
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    • v.48 no.4
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    • pp.298-304
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    • 2012
  • Among 63 Bacillus strains grown at $60^{\circ}C$ from sixteen samples of homemade Korean soybean paste, one strain was selected for producing the thermostable protease. The isolate has been identified as Bacillus licheniformis on the basis of its 16S rDNA sequence, morphology and biochemical properties. Culture filtrate of the isolate showed maximal protease activity at the reaction condition of $60-65^{\circ}C$ and pH 11. The culture filtrate retained more than 87% of initial protease activity after incubation for 30 min at $60^{\circ}C$ without substrate. In order to develop the medium composition, effects of ingredients including nitrogen sources, carbon sources, metal ions and phosphate were examined for protease production of the isolate. Lactose and soytone peptone were the most effective carbon and nitrogen source for the enzyme production. After the late logarithmic growth phase the isolate began to produce the protease, and the maximum protease productivity was reached to 550 unit/ml in the optimized medium consisting of lactose (3%), soytone peptone (1.5%), $MgSO_4$ (0.1%), $K_2HPO_4$ (0.03%), and $KH_2PO_4$ (0.03%) at 28 h of incubation.