• Title/Summary/Keyword: soft etching

Search Result 32, Processing Time 0.023 seconds

무전해 식각법으로 합성된 Si 나노와이어를 이용한 CMOS 인버터

  • Mun, Gyeong-Ju;Lee, Tae-Il;Lee, Sang-Hun;Hwang, Seong-Hwan;Myeong, Jae-Min
    • Proceedings of the Materials Research Society of Korea Conference
    • /
    • 2011.10a
    • /
    • pp.22.2-22.2
    • /
    • 2011
  • Si 나노와이어를 합성하는 다양한 방법들 중에서 Si 기판을 나노와이어 형태로 제작하는 무전해 식각법은 쉽고 간단하기 때문에 최근 많은 연구가 진행되고 있다. 무전해 식각법을 이용한 Si 나노와이어는 p 또는 n형의 전기적 특성을 갖는 Si 기판의 도핑농도에 따라 원하는 전기적 특성을 갖는 나노와이어를 얻을 수 있을 것이라는 기대가 있었지만 n형으로 제작된 나노와이어의 경우 식각에 의한 표면의 거칠기 때문에 그 특성을 나타내지 못하는 문제점을 가지고 있다. 본 연구에서는 무전해 식각법을 이용하여 p와 n형 나노와이어를 합성하고 field-effect transistors (FETs) 소자를 제작하여 각각의 특성을 구현하였다. 나노와이어와 절연막 사이의 계면 결함을 최소화하기 위하여 poly-4-vinylphenol (PVP) 고분자 절연막에 나노와이어를 삽입시킨 형태로 소자를 제작하였고, 특히 n형 나노와이어의 표면을 보다 평평하게 하기 위하여 열처리를 진행 하였다. 이렇게 각각의 특성이 구현된 나노와이어를 이용하여 soft-lithography 공정을 통해 complementary metal-oxide semiconductor (CMOS) 구조의 인버터 소자를 제작하였으며 그 전기적 특성을 평가하였다.

  • PDF

Reverse-Conducting IGBT Using MEMS Technology on the Wafer Back Side

  • Won, Jongil;Koo, Jin Gun;Rhee, Taepok;Oh, Hyung-Seog;Lee, Jin Ho
    • ETRI Journal
    • /
    • v.35 no.4
    • /
    • pp.603-609
    • /
    • 2013
  • In this paper, we present a 600-V reverse conducting insulated gate bipolar transistor (RC-IGBT) for soft and hard switching applications, such as general purpose inverters. The newly developed RC-IGBT uses the deep reactive-ion etching trench technology without the thin wafer process technology. Therefore, a freewheeling diode (FWD) is monolithically integrated in an IGBT chip. The proposed RC-IGBT operates as an IGBT in forward conducting mode and as an FWD in reverse conducting mode. Also, to avoid the destructive failure of the gate oxide under the surge current and abnormal conditions, a protective Zener diode is successfully integrated in the gate electrode without compromising the operation performance of the IGBT.

The Study on the Crystal Growing of Mn-Zn Ferrite Single Crystals by Floating Zone Method (Floating Zone법에 의한 Mn-Zn Ferrite 단결정성장에 관한 연구)

  • 정재우;오근호
    • Journal of the Korean Crystal Growth and Crystal Technology
    • /
    • v.2 no.1
    • /
    • pp.10-19
    • /
    • 1992
  • Mn - Zn Ferrite has physical properties of the high initial permeability, saturation magnetic flux density, and low loss factor as a representative magnetic material of soft ferrites, in addition the mechanical property is excellent as a single crystal. Therefore it is important electronic components and used for VTR Head. Mn - Zn Ferrite single crystals with the diameter 8mm were grown in atmosphere mixed with $O_2$ and Ar gas by the Floating Zone(FZ) method that impurities can not be incorporated to the crystals because of not-using the crucible to put in the melt, and the sharp temperature gradient results from making a focus at one point utilizing the infrared ray emitted from the halogen lamp as a heat source. During the crystal growing, the highest temperature of melting area was maintained to be $1650^{\circ}C$, growth rate and rotation rate were 10 mm/hr, 20 rpm respectively. The phases and the growth directions of crystals were determined from the analysis of X RD patterns, Laue, TEM diffraction patterns and etch pit shapes were observed by the optical microscope through the chemical etching. The corelation of optimum conditions for acquiring the better crystals was found out with the growth rate, the length and diameter of melt at the interface according to the diameter of feed rod, and the patterns of growing interface also studied.

  • PDF

Controllable Patterning of an Al Surface by a PDMS Stamp (PDMS를 이용한 균일한 알루미늄 표면 패터닝 연구)

  • Park, Gayun;Kim, Kyungmin;Lee, Hoyeon;Park, Changhyun;Kim, Youngmin;Tak, Yongsug;Choi, Jinsub
    • Applied Chemistry for Engineering
    • /
    • v.23 no.5
    • /
    • pp.501-504
    • /
    • 2012
  • In this study, etched Al electrodes with ordered arrays of pits and high aspect ratios were successively obtained using a patterned protect layer on the Al surface prepared with soft lithography method. Various methods were applied to fabricate a well ordered protect layer on the Al surface and the difference of etched Al surfaces with and without a protect layer was investigated by using SEM. It was found that the etched Al surfaces were affected by using either a protect layer or a non protect layer. As a result, the Al surface with the well ordered pits could be achieved by protect layer. However, the etched Al with nonuniform pits can be obtained without any protect layers.

Magnetic Bias Effects in Field-annealed CoFeSiB Amorphous Ribbons (공기 중에서 자기장 열처리된 CoFeSiB 비정질 리본에서의 자기 바이어스 효과)

  • Cha, Yong-Jun;Jeong, Jong-Ryul;Kim, Cheol-Gi;Kim, Dong-Young;Yoon, Seok-Soo
    • Journal of the Korean Magnetics Society
    • /
    • v.19 no.6
    • /
    • pp.191-196
    • /
    • 2009
  • Magnetic bias phenomena of field-annealed CoFeSiB amorphous ribbons showing asymmetric giant magnetoimpedance was investigated by MOKE method. The specimens removed the crystalline layer at one surface side by chemical etching were prepared and measured magnetization curves by MOKE to investigate the effect of the crystalline layer on magnetization of inner soft amorphous phase. We observed the shift of hysteresis loop, and concluded that the crystalline layer exerts bias field effect on inner soft amorphous phase and the direction of bias filed is opposite to the magnetization direction of surface crystalline layer.

SCANNING ELECTRON MICROSCOPIC STUDY OF THE EFFECT OF ACIDIC DRINK ON ENAMEL EROSION : A CASE REPORT (탄산음료에 의해 부식된 법랑질 표면변화에 대한 증례발표)

  • Kim, Su-Youn;Park, Jae-Hong;Kim, Gwang-Chul;Choi, Young-Chul
    • Journal of the korean academy of Pediatric Dentistry
    • /
    • v.35 no.3
    • /
    • pp.509-515
    • /
    • 2008
  • It is widely believed that the increase in the prevalence of dental erosion is due to soft drinks. The purpose of this study was to assess the influence of soft drinks and etchant on the erosion of tooth enamel and the effect of tooth brushing on the abrasion of eroded enamel, and the effect of milk, saliva and Tooth $Mousse^{(R)}$ on the remineralization. The changes in tooth enamel surface were observed by scanning electron microscophy. The results were as follows; 1. The pH of Coca-Cola and Chilsung-Cider were higher than the pH of FineEtch 37 and $Tyrian^{TM}SPE$. 2. The SEM photos revealed that the pattern of the surface eroded by Coca-Cola and Chilsung-Cider were more obvious than that eroded by etchants. 3. The results of remineralization by saliva, milk, Tooth $Mousse^{(R)}$ were not different from each other. 4. The remineralization by saliva decreased tooth brushing abrasion.

  • PDF

Fabrication of Optically Active Nanostructures for Nanoimprinting

  • Jang, Suk-Jin;Cho, Eun-Byurl;Park, Ji-Yun;Yeo, Jong-Souk
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2012.08a
    • /
    • pp.393-393
    • /
    • 2012
  • Optically active nanostructures such as subwavelength moth-eye antireflective structures or surface enhanced Raman spectroscopy (SERS) active structures have been demonstrated to provide the effective suppression of unwanted reflections as in subwavelength structure (SWS) or effective enhancement of selective signals as in SERS. While various nanopatterning techniques such as photolithography, electron-beam lithography, wafer level nanoimprinting lithography, and interference lithography can be employed to fabricate these nanostructures, roll-to-roll (R2R) nanoimprinting is gaining interests due to its low cost, continuous, and scalable process. R2R nanoimprinting requires a master to produce a stamp that can be wrapped around a quartz roller for repeated nanoimprinting process. Among many possibilities, two different types of mask can be employed to fabricate optically active nanostructures. One is self-assembled Au nanoparticles on Si substrate by depositing Au film with sputtering followed by annealing process. The other is monolayer silica particles dissolved in ethanol spread on the wafer by spin-coating method. The process is optimized by considering the density of Au and silica nano particles, depth and shape of the patterns. The depth of the pattern can be controlled with dry etch process using reactive ion etching (RIE) with the mixture of SF6 and CHF3. The resultant nanostructures are characterized for their reflectance using UV-Vis-NIR spectrophotometer (Agilent technology, Cary 5000) and for surface morphology using scanning electron microscope (SEM, JEOL JSM-7100F). Once optimized, these optically active nanostructures can be used to replicate with roll-to-roll process or soft lithography for various applications including displays, solar cells, and biosensors.

  • PDF

A Retrospective Clinical Study of Survival Rate for a Single Implant in Posterior Teeth (구치부 단일 임플란트의 생존율에 대한 후향적 연구)

  • Han, Sung-Il;Lee, Jae-Hoon
    • Maxillofacial Plastic and Reconstructive Surgery
    • /
    • v.34 no.3
    • /
    • pp.186-199
    • /
    • 2012
  • Purpose: Single implants, of which screw loosening has been observed frequently, presents problems such as fixtures fractures, marginal bone loss, and inflammation of the soft tissue around the implant. However, the single implant is more conservative, cost effective, and predictable compared to the 3 unit bridge with respect to the long-term outcome. This study evaluated the survival rate as well as future methods aimed at increasing the survival rate in single implants in posterior teeth. Methods: Among the implants placed in the Dankook University Dental Hospital department of Oral & Maxillofacial surgery from January 2001 to June 2008, 599 implants placed in the maxillar and mandibular posterior were evaluated retrospectively. Survival rates were investigated according to implant location, cause of tooth loss, gender, age, general disease, fixture diameter and length, surface texture, implant type and shape, presence of bone graft, surgery stage, surgeons, bone quality and opposite teeth. Results: Out of 599 single implants in posterior teeth, 580 implants survived and the survival rate was 96.8%. The difference in survival rate was statistically significant according to the implant location. The survival rate was low (84.2%) in implants exhibiting a wide diameter (${\geq}5.1mm$) and the surface treated by the acid etching group demonstrated a significantly lower survival rate (91.1%). One stage surgical procedure, which implemented a relatively better bone quality survival rate (100%), was higher than the two stage surgical procedure (96.1%). The survival rate of type IV bone quality (75%) was significantly lower than the other bone quality. Conclusion: Single posterior teeth implant treatments should use an improved surface finishing fixture as well as careful and safe procedures when performing implant surgery in the maxilla premolar and molar regions since bone quality is poor.

Dependence of Gas Sensing Properties of Embossed TiO2 Thin Films on Links Between Hollow Hemispheres (엠보싱 TiO2 박막에서 링크 형상 제어에 따른 가스 감도 변화)

  • Moon, Hi-Gyu;Park, Hyung-Ho;Yoon, Seok-Jin;Jang, Ho-Won
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
    • /
    • v.25 no.8
    • /
    • pp.639-645
    • /
    • 2012
  • Embossed $TiO_2$ thin films with high surface areas are achieved using soft-templates composed of monolayer polystyrene beads. The form of links between the beads in the templates is controlled by varying the $O_2$ plasma etching time on the templates, resulting in various templates with close-linked, nano-linked, and isolated beads. Room-temperature deposition of $TiO_2$ on the plasma-treated templates and calcination at $550^{\circ}C$ result in embossed films with tailored links between anatase $TiO_2$ hollow hemispheres. Although all the embossed films have similar surface areas, the sensitivity of films with nano-linked $TiO_2$ hollow hemispheres to 500 ppm CO and ethanol gases are much higher than that of films with close-linked and isolated hollow hemispheres, and the detection limits of them are as low as 0.6 ppm for CO and 0.1 ppm for ethanol. The strong correlation of sensitivity with the form of links between hollow hemispheres reveals the critical role of potential barriers formed at the links. The facile, large-scale, and on-chip fabrication of embossed $TiO_2$ films with nano-linked hollow hemispheres on Si substrate and the high sensitivity without the aid of additives give us a sustainable competitive advantage over various methods for the fabrication of highly sensitive $TiO_2$-based sensors.

Inductive Micro Thin Film Sensor for Metallic Surface Crack Detection (금속 표면결함 검출용 자기유도 마이크로 박막 센서)

  • Kim, Ki-Hyeon
    • Journal of the Korean Society for Nondestructive Testing
    • /
    • v.28 no.5
    • /
    • pp.395-400
    • /
    • 2008
  • Alternating magnetic field was used for detection of surface flaws on nonmagnetic and magnetic metallic specimens. The nondestructive sensor probe was composed of the planar coil with inductive magnetic thin film yoke as a sensing component and a single straight typed exciting coil. The planar inductive coil sensor with magnetic yoke was fabricated by sputtering, electroplating, dry etching and photolithography process. The alternative currents with the range of 0.1A to 1.0A (0.7 MHz to 1.8 MHz) were applied to the exciting coil. The specimens were prepared with the slit shaped artificial surface flaws (minimum depth and width; 0.5 mm) on metallic plate (Al; nonmagnetic metal and FeC; magnetic metal). The detected signal for the positions and shapes of surface flaws on specimens were obtained with high sensitivity and high signal to ratio. The measured output signals by the non-contacted scanning on surface of FeC specimen with micron-sized crack were converted to the images of the flaws. And these results were compared with the optical images, respectively.