• International Journal of Air-Conditioning and Refrigeration
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• 제6권
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• pp.45-55
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• 1998

A theoretical and experimental study is performed to investigate the characteristics of ice slurry product. By diffusion-controlled evaporation model the possibility of ice slurry is theoretically anticipated. The water vapor evaporated from the surface of droplets is extracted continuously from the chamber by a vacuum pump. The droplet diameter is measured by silicon immersion method. The ice slurry is obtained by spraying droplets of ethylene glycol aqueous solution in the chamber where pressure is maintained under the triple point of water. The droplet with the diameter of 300 $\mu\textrm{m}$and the initial temperature of 2$0^{\circ}C$ was changed into ice particle within the chamber of 1.33m in height.

• 한국터널지하공간학회 논문집
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• 제26권5호
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• pp.449-461
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• 2024

NATM 공법과 비교하여 소음 및 진동이 적고 안전성이 높은 기계화 굴착공법인 TBM (tunnel boring machine)의 사용이 전 세계적으로 증가하였다. 특히 이수식(slurry shield) TBM의 경우 EPB (earth pressure balanced) 방식에 비해 고수압에 유리하므로 하저 및 해저 구간 등에서 많이 사용된다. 이와 같이 이수식 TBM의 사용수는 오폐수처리시설을 거쳐 방류된다. 대단면 TBM의 경우, 사용되는 물의 양이 막대하기 때문에 재활용을 통해 비용 저감 및 환경 보호가 가능하다. 이수식 TBM에서는 지상의 이수처리시설인 STP (slurry treatment plant)와 필터프레스(filter press)의 성능을 향상시키기 위해 다양한 종류의 첨가제를 사용한다. 이 중 응집제는 버력의 응집도를 높여 필터프레스의 생산성을 향상시킨다. 본 연구에서는 응집제가 투입된 후 필터프레스를 통해 걸러진 사용수에 대한 실내시험을 시행하여 재사용 가능 여부를 평가하였다.

• Geomechanics and Engineering
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• 제23권2호
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• pp.151-163
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• 2020

Grouting method is an effective way of reinforcing cracked rock masses and plugging water gushing. Current grouting diffusion models are generally developed for horizontal cracks, which is contradictory to the fact that the crack generally occurs in rock masses with irregular spatial distribution characteristics in real underground environments. To solve this problem, this study selected a cement-sodium silicate slurry (C-S slurry) generally used in engineering as a fast-curing grouting material and regarded the C-S slurry as a Bingham fluid with time-varying viscosity for analysis. Based on the theory of fluid mechanics, and by simultaneously considering the deadweight of slurry and characteristics of non-uniform spatial distribution of viscosity of fast-curing grouts, a theoretical model of slurry diffusion in an oblique crack in rock masses at constant grouting rate was established. Moreover, the viscosity and pressure distribution equations in the slurry diffusion zone were deduced, thus quantifying the relationship between grouting pressure, grouting time, and slurry diffusion distance. On this basis, by using a 3-d finite element program in multi-field coupled software Comsol, the numerical simulation results were compared with theoretical calculation values, further verifying the effectiveness of the theoretical model. In addition, through the analysis of two engineering case studies, the theoretical calculations and measured slurry diffusion radius were compared, to evaluate the application effects of the model in engineering practice. Finally, by using the established theoretical model, the influence of cracking in rock masses on the diffusion characteristics of slurry was analysed. The results demonstrate that the inclination angle of the crack in rock masses and azimuth angle of slurry diffusion affect slurry diffusion characteristics. More attention should be paid to the actual grouting process. The results can provide references for determining grouting parameters of fast-curing grouts in engineering practice.

• 대한기계학회논문집B
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• 제21권12호
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• pp.1576-1585
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• 1997

The microexplosive combustion of a slurry droplet was investigated experimentally. The microexplosion has been approximately considered to be caused by pressure build-up in the shell and to be promoted by heterogeneous nucleation of liquid carrier, which is due to the suppression of evaporation and subsequent superheating of liquid carrier. To closely investigate the pressure build-up and the heterogeneous nucleation, the experiments were conducted in an electric combustor, of which temperature was controllable (400 K-900 K). And the effects of two aligned droplets on the interactive combustion and microexplosion were found in a hot post region of a flat flame burner. Transient internal temperature distributions for slurry droplets were measured. And the shell formation and the microexplosion of suspended A1/JP-8 and Al/n-heptane slurry droplets were examined with various surfactant concentrations (0.5-5 wt%) and solid loadings (10-50 wt.%). The microexplosion time of binary array of droplets was found to be less than that of the isolated droplet due to radiative interaction between droplets.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.434-437
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• 2005

Chemical Mechanical Polishing (CMP) has become an essential step in the overall semiconductor wafer fabrication technology. In general, CMP is a surface planarization method in which a silicon wafer is rotated against a polishing pad in the presence of slurry under pressure. The polishing pad, generally a polyurethane-based material, consists of polymeric foam cell walls, which aid in removal of the reaction products at the wafer interface. It has been found that the material removal rate of any polishing pad decreases due to the so-called 'pad glazing' after several wafer lots have been processed. Therefore, the pad restoration and conditioning has become essential in CMP processes to keep the urethane polishing pad at the proper friction coefficient and to allow effective slurry transport to the wafer surface. Diamond pad conditioner employs a single layer of brazed bonded diamond crystals. Due to the corrosive nature of the polishing slurry required in low pH metal CMP such as copper, it is essential to minimize the possibility of chemical interaction between very low pH slurry (pH <2) and the bond alloy. In this paper, we report an exceptional protective coated conditioner for in-situ pad conditioning in low pH Cu CMP process. The protective Cr-coated conditioner has been tested in slurry with pH levels as low as 1.5 without bond degradation.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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• pp.34-37
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the inter-metal dielectrics (IMD) layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}m$ POU (point of use) filter, which is depth-type filter and has 80% filtering efficiency for the $1.0{\mu}m$ size particle. In this paper, we studied the relationship between defect generation and pad count to understand the exact efficiency of the slurry filtration, and to find out the appropriate pad usage. Our preliminary results showed that it is impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the flow rate of slurry to overcome depth type filters weak-point, and to install the high spray of de-ionized Water (DIW) with high pressure.

• 한국전기전자재료학회논문지
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• 제14권9호
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• pp.707-713
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• 2001

As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

• 한국지반공학회:학술대회논문집
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• 한국지반공학회 2004년도 춘계학술발표회
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• pp.672-677
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• 2004

This paper is on determination method of preconsolidation pressure and consolidation coefficient using Kores University Calibration Chamber System(KUCCS). High-quality, large-size cohesive soil specimen was prepared by using two-stage slurry consolidation technique, which has many advantage for research and calibration purpose. The result from consolidation stage in KUCCS was compared with results of oedometer test. The results by Casagrcnde method gave very good agreement with preconsolidation pressure in slurry consolidometer. And, the predicted consolidation coefficient by log t method showed agreement with the experimental results in KUCCS.

• 설비공학논문집
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• 제17권7호
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• pp.635-641
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• 2005

This study experimented to understand the effects of transporting ice slurry through elbow and inclined tube. And at this experiment it used propylene glycol-water solution and a diameter of about 2mm ice particle. The experiments were carried out under various conditions, with velocity of water solution at the entry ranging from 1.0 to 3.5 w/s and elbows and inclined tubes of 4 kinds angle with $30^{\circ},\;45^{\circ},\;90^{\circ}\;and\;180^{\circ}$. The pressure drop between the tube entry and exit were measured. According to angle of bending, the highest pressure drop was measured at $30^{\circ}$ elbow and the lowest pressure drop was measured at $90^{\circ}$ elbow, and there are only a little differences of pressure drop between $45^{\circ}$ elbow and $180^{\circ}$ elbow. According to angle of inclined tube, the highest pressure drop was measured at $90^{\circ}$ inclined tube and the pressure drop at $45^{\circ},\;30^{\circ},\;180^{\circ}$ inclined tubes were lower successively. The lowest pressure drop in elbows and inclined tubes was measured at velocity of $2.0\~2.5$ m/s and concentration of $10\;wt\%$.

• Geomechanics and Engineering
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• 제29권4호
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• pp.391-405
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• 2022

A newly proposed grouting simulation method, the sequential diffusion solidification method was introduced into the numerical simulation of combined bi-borehole grouting. The traditional, critical and difficult numerical problem for the temporal and spatial variation simulation of the slurry is solved. Thus, numerical simulation of grouting and blocking of flowing water in karst conduits is realized and the mechanism understanding of the combined bi-borehole technology is promoted. The sensitivity analysis of the influence factors of combined bi-borehole grouting was investigated. Through orthogonal experiment, the influences of proximal and distal slurry properties, the initial flow velocity of the conduit and the proximal and distal slurry injection rate on the blocking efficiency are compared. The velocity variation, pressure variation and slurry deposition phenomenon were monitored, and the flow field characteristics and slurry outflow behavior were analyzed. The interaction mechanism between the proximal and distal slurries in the combined bi-borehole grouting is revealed. The results show that, under the orthogonal experiment conditions, the slurry injection rate has the greatest impact on blocking. With a constant slurry injection rate, the blocking efficiency can be increased by more than 30% when using slurry with weak time-dependent viscosity behavior in the distal borehole and slurry with strong time-dependent viscosity behavior in the proximal borehole respectively. According to the results of numerical simulation, the grouting scheme of "intercept the flow from the proximal borehole by quick-setting slurry, and grout cement slurry from the distal borehole" is put forward and successfully applied to the water inflow treatment project of China Resources Cement (Pingnan) Limestone Mine.