• 제목/요약/키워드: slot coating

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슬릿 노즐 내부 압력 분포와 코팅 박막 두께 균일도 간의 상관관계 연구 (Study on Correlation Between the Internal Pressure Distribution of Slit Nozzle and Thickness Uniformity of Slit-coated Thin Films)

  • 김기은;나정필;정모세;박종운
    • 반도체디스플레이기술학회지
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    • 제22권4호
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    • pp.19-25
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    • 2023
  • With an attempt to investigate the correlation between the internal pressure distribution of slit nozzle and the thickness uniformity of slot-coated thin films, we have performed computational fluid dynamics (CFD) simulations of slit nozzles and slot coating of high-viscosity (4,800 cPs) polydimethylsiloxane (PDMS) using a gantry slot-die coater. We have calculated the coefficient of variation (CV) to quantify the pressure and velocity distributions inside the slit nozzle and the thickness non-uniformity of slot-coated PDMS films. The pressure distribution inside the cavity and the velocity distribution at the outlet are analyzed by varying the shim thickness and flow rate. We have shown that the cavity pressure uniformity and film thickness uniformity are enhanced by reducing the shim thickness. It is addressed that the CV value of the cavity pressure that can ensure the thickness non-uniformity of less than 5% is equal to and less than 1%, which is achievable with the shim thickness of 150 ㎛. It is also found that as the flow rate increases, the average cavity pressure is increased with the CV value of the pressure unchanged and the maximum coating speed is increased. As the shim thickness is reduced, however, the maximum coating speed and flow rate decrease. The highly uniform PDMS films shows the tensile strain as high as 180%, which can be used as a stretchable substrate.

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슬롯코팅에서 정상 및 비정상상태 컴퓨터해석을 통한 코팅의 균일성 분석 (Analysis of Coating Uniformity through Unsteady and Steady State Computer Simulation in Slot Coating)

  • 우정우;성달제;류민영
    • 폴리머
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    • 제38권5호
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    • pp.640-644
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    • 2014
  • 평판 디스플레이 제조공정 중의 하나인 유리기판 위에 감광액을 도포하는 과정에 슬롯코팅 방법이 많이 쓰이고 있다. 도포공정에서는 균일한 코팅 두께를 얻는 것이 중요하며, 코팅의 균일성은 노즐방향과 운전방향의 균일성으로 나뉜다. 운전방향의 코팅 균일성은 코터의 운전조건에 영향을 받고, 노즐방향의 균일성은 다이 내부의 흐름의 균일성에 영향을 받게 된다. 이러한 영향 인자들로 인해 코팅두께가 불균일한 현상이 발생하는데, 코터 진행의 초기 구간에는 비정상상태 구간으로 운전방향과 노즐방향으로 코팅두께가 균일하지 않다. 본 연구에서는 이러한 현상이 나타나는 원인을 파악하기 위해 비정상상태와 정상상태를 구별하여 해석하고 이를 실험과 비교하였다. 그 결과 감광액이 다이 내부에서 균일한 압력분포에 도달하기까지 시간이 필요하고 이로 인해 코팅 초기구간에서 다이의 양가장자리 영역의 속도가 중앙 영역에 비해 속도가 낮게 나타났으며 코팅 두께도 얇게 나타났다. 그러나 정상상태에 도달한 후에는 가장자리 영역의 속도가 중앙 영역보다 높게 나타났고 코팅 두께 역시 두껍게 나타났다.

대면적 탄소나노튜브 / 은나노와이어 투명전극필름 롤투롤 연속생산시스템 (Roll-to-roll Continuous Manufacturing System for Carbon-Nanotube- / Silver-Nanowire-Based Large-Area Transparent Conductive Film)

  • 박장훈;이창우
    • 한국정밀공학회지
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    • 제32권8호
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    • pp.673-680
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    • 2015
  • A roll-to-roll (R2R) continuous manufacturing system for a carbon-nanotube (CNT)-/silver-nanowire (AgNW)- based large-area transparent conductive film was introduced in this study. The systemic guidelines of the R2R slot-die coating process including roll eccentricity, wrap angle, pump accuracy, and blower influence were discussed. To simulate the coating phenomenon, we investigated the governing parameters of the coating process by incorporating the estimated relative thickness that was defined by combining the viscocapillary model and volume model. By using experimental and mathematical approaches, an excellent transparent conductive layer with a $40{\Omega}/{\Box}$ sheet resistance and 88 % transmittance was obtained; moreover, a dimensionless number identifies the correlation between the transparent conductive film and the anti-reflection film.

Coating deviation control in traverse direction in a continuous galvanizing line

  • Yoo, Seung-Ryeol;Choi, Il-Seop;Kim, Sang-Jun;Park, Han-Ku;Kwak, Young-Woo
    • 제어로봇시스템학회:학술대회논문집
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    • 제어로봇시스템학회 1995년도 Proceedings of the Korea Automation Control Conference, 10th (KACC); Seoul, Korea; 23-25 Oct. 1995
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    • pp.323-327
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    • 1995
  • A new air knife system for coating thickness control in hot dip galvanizing process had been developed and installed on the CGL in Pohang Steel Works, POSCO. This new system consists of air knives with remotely adjustable nozzle slot and an automatic control system which can control both longitudinal and traverse coating deviations. Based on the optimal control algorithm, a traverse coating deviation control was designed. The controller controls the lip profile of the air knives with flexible structure according to the deviation of coating weight. From the measured values which are dependent on the strip width, the lip gaps are calculated with optimal algorithm and the model of the coating deviation. Time delay between knives and a coating thickness gauge is solved by the Smith Predictor.

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CFD를 이용한 슬롯 다이 헤드 내부의 유체 분포 분석 (Study on Fluid Distribution in Slot-die Head Using CFD)

  • 유수호;김기은;신영균;박종운
    • 반도체디스플레이기술학회지
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    • 제21권4호
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    • pp.39-44
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    • 2022
  • Using a CFD (computational fluid dynamics) simulation tool, we have offered a design guideline of a slot-die head having a simple T-shaped cavity through an analysis of the fluid dynamics in terms of cavity pressure and outlet velocity, which affect the uniformity of coated thin films. We have visualized the fluid flow with a transparent slot-die head where poly(3,4-ethylenedioxythiophene):poly(4-styrenesulfonate) (PEDOT:PSS) is injected. We have shown that the fluid dynamics inside the slot-die head depends sensitively on the cavity depth, cavity length, land length, and channel gap (i.e., shim thickness). Of those, the channel gap is the most critical parameter that determines the uniformity of the pressure and velocity distributions. A pressure drop inside the cavity is shown to be reduced with decreasing shim thickness. To quantify it, we have also calculated the coefficient of variation (CV). In accordance with Hagen-Poiseuille's laws and electron-hydraulic analogy, the CV value is decreased with increasing cavity depth, cavity length, and land length.

소수성 마이크로 패턴을 갖는 Stripe 코팅용 슬롯 다이 헤드 구조 최적화 (Structure Optimization of a Slot-Die Head with a Hydrophobic Micro-Patterns for Stripe Coatings)

  • 유수호;이진영;박종운
    • 반도체디스플레이기술학회지
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    • 제18권2호
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    • pp.6-10
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    • 2019
  • In the presence of $\mu-tip$ for narrow stripe coating, there appears lateral capillary flow along the hydrophilic head lip because the $\mu-tip$ has some resistance to flow. It was known to be suppressed by increasing the contact angle of the head lip. In this paper, we have demonstrated by computational fluid dynamics(CFD) simulations that it can also be suppressed by the formation of micro-patterns on the shim and meniscus guide embedded into the slot-die head. To optimize the micro-patterned structure, we have performed simulations by varying the groove width, depth, and clearance. In the absence of micro-patterns, it is shown by experiment and simulation that the solution spreads to a distance of $1,300{\mu}m$ from the ${\mu}-tip$. In the presence of micro-patterns with the groove width and clearance of $50{\mu}m$, the distance the solution spreads is reduced to $260{\mu}m$. However, no further suppression in the capillary flow is observed with micro-patterns with the groove width of $40{\mu}m$ or less. It is also observed that the capillary flow is not affected by the groove depth if it is larger than $10{\mu}m$. We have shown that the distance the solution spreads can be reduced further to $204{\mu}m$ by coating a hydrophobic material (contact angle of $104^{\circ}$) on the surface of micro-patterns having the groove width and clearance of $50{\mu}m$.

Needle 코팅을 이용한 미세 PEDOT:PSS 스트라이프 제작 (Fabrication of Fine PEDOT:PSS Stripes Using Needle Coating)

  • 이진영;박종운
    • 반도체디스플레이기술학회지
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    • 제18권3호
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    • pp.100-104
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    • 2019
  • We have investigated the feasibility of fabricating fine stripes using needle coating for potential applications in solution-processed organic light-emitting diodes (OLEDs). To this end, we have employed an aqueous poly(3,4-ethylenedioxythiophene):poly(4-styrenesulfonate) (PEDOT:PSS) solution that has been widely used as a hole injection layer (HIL) of OLEDs and performed needle coatings by varying the process parameters such as the coating gap and coating speed. As expected, the stripe width is reduced with increasing coating speed. However, the central thickness of the stripe is rather increased as the coating speed increases, which is different from other coating processes such as slot-die and blade coatings. It is due to the fact that the meniscus formed between the needle tip and the substrate varies depending sensitively on the coating speed. It is also found that the stripe width and thickness are reduced with increasing coating gap. To demonstrate its applicability to OLEDs, we have fabricated a red OLED stripe and obtained light emission with the width of about 90㎛.

유전체로 코팅된 유한한 두께의 주기 슬롯을 갖는 평행평판 도파관으로부터 누설파 복사 : H-편파 (Leaky Wave Radiation from Dielectric-Coated Parallel-Plate Waveguied Periodic Slot with Finite Thickness : H-polarization)

  • 김중표;이창원;손현
    • 한국전자파학회논문지
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    • 제10권2호
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    • pp.247-256
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    • 1999
  • 유전체 코팅된 유한한 두께의 주기적인 슬롯을 갖는 명행명판 도파관으로부터 누설파 안테나를 H-편파 경 우에 대하여 해석하였다. 이러한 구조에 대해 슬롯영역의 전자계는 명행평판 도파관의 TM 모드의 합으로 전 개하고 그 외의 모든 영역의 전자계는 역퓨리에 변환을 이용하여 파수영역 형태로 표현되어진다. 경계조건을 적용하여 선형동차 방정식을 유도한다. 슬롯 폭과 슬롯 두께, 유전체층 두께, 슬롯 개수의 영향이 위상 상수. 누설 상수 및 복사패턴 등과 같은 복사 특성에 미치는 영향을 조사하였다. 유한한 슬롯 개수의 결과와 무한 구조의 결과와 비교하여 잘 일치함을 확인하였다.

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