• Journal of the Korea Organic Resources Recycling Association
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• v.30 no.3
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• pp.5-12
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• 2022

This study suggests the effective recycling method of sludge waste from various industrial fields to synthesize uniform colloidal silica nanoparticles. In detail, polymers are removed from the sludge waste to attain sludge-extracted silica (s-SiO₂) micron-sized particles, and ammonia assisted sonication is applied to s-SiO₂, which has effectively extracted the silanol precursor. The nano-sized silica (n-SiO₂) particles are successfully synthesized by a typical sol-gel method using silanol precursor. Also, the yield amounts of n-SiO₂ are determined by the function of s-SiO₂ etching time. Finally, n-SiO₂-based slurry is synthesized for the practical CMP application. As a result, rough-surfaced semiconductor chip is successfully polished by the n-SiO₂-based slurry to exhibit the mirror-like clean surface. In this regard, sludge wastes are successfully prepared as valuable semicondutor grade materials.

• Journal of the Korea Organic Resources Recycling Association
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• v.32 no.1
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• pp.21-29
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• 2024

In this study, EMC(Epoxy molding compound) waste from the semiconductor molding process is recycled and synthesized into silica nanoparticles, which are then applied as abrasive materials contains CMP(Chemical mechanical polishing) slurry. Specifically, silanol precursor is extracted from EMC waste according to the ultra-sonication method, which provides heat and energy, using ammonia solution as an etchant. By employing as-extracted silanol via a facile sol-gel process, uniform silica nanoparticles(e-SiO₂, experimentally synthesized SiO₂) with a size of ca. 100nm are successfully synthesized. Through physical and chemical analysis, it was confirmed that e-SiO₂ has similar properties compared to commercially available SiO₂(c-SiO₂, commercially SiO₂). For practical CMP applications, CMP slurry is prepared using e-SiO₂ as an abrasive and tested by polishing a semiconductor chip. As a result, the scratches that are roughly on the surface of the chip are successfully removed and turned into a smooth surface. Hence, the results present a recycling method of EMC waste into silica nanoparticles and the application to high-quality CMP slurry for the polishing process in semiconductor packaging.

• Korean Journal of Materials Research
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• v.6 no.1
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• pp.29-39
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• 1996

silica의 precursor로 TMOS를 사용하여 autoclave 내에서 supersritical drying으로 투명한 TiO2-SiO2 이성분계 aerogle을 얻을 수 있었다. 반응성이 뛰어난 titanium alkoxide의 중축합반응을 억제할 수 있는 강한 산성 영역에서 투명한 Aerogel을 얻을 수 있었으며, 물을 직접 첨가하지 않고 silicon alkoxide의 축합반응의 부산물인 물을 이용하여 titanium alkoxide의 반응성을 제어했을 때 투명성이 더욱 증진되었다.

• Bulletin of the Korean Chemical Society
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• v.24 no.4
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• pp.499-503
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• 2003

Encapsulation of L-ascorbic acid (vitamin C) within a bio-compatible layered inorganic material was achieved by coprecipitation reaction, in which the layered inorganic lattice and its intercalate of vitamin C are simultaneously formed. The nano-meter sized powders of vitamin C intercalate thus prepared was again encapsulated with silica nano-sol to form a nanoporous shell structure. This ternary nanohybrid of vitamin Clayered inorganic core-$SiO_2$ shell exhibited an enhanced storage stability and a sustained releasing of vitamin C. Furthermore, the nano-encapsulation of vitamin C with inorganic mineral was very helpful in delivering vitamin C molecules into skin through stratum corneum, facilitating transdermal penetration of vitamin C in topical application.

• Journal of the Korean Ceramic Society
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• v.26 no.5
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• pp.631-636
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• 1989

Submicron high-purity mullite powder was prepared by a colloidal sol-gel route. Boehmite and silica were the starting materials. 2wt% $\alpha$-Al2O3 or ZrO2 was used as a seeding material. The gelled powder was calcined at 130$0^{\circ}C$ for 100min and attrition milled for 3hrs. The mullite powder obtained was composed of submicrometer and uniform particles with a narrow size distribution. It was hot-pressed at 1$600^{\circ}C$ for 1hr under 10MPa or was sintered at 1$650^{\circ}C$ for 4hrs. The bulk densities of the products made by both processes were 3.14 and 3.12g/㎤. the mechanical, thermal and electrical properties of the sintered mullite were characterized by bending strength, thermal expansion coefficient, thermal conductivity, dielectric constant and dielectric loss, etc.

• 한국생물공학회:학술대회논문집
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• 2003.04a
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• pp.676-679
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• 2003

Long time over 6 month was required to form granuler sludge, which is critically necessary for UASB reactor. By feeding both high molecular cationic polymer and anionic silica sol to conventional digestion sludge, granular sludge was obtained within 5 minutes. Succession adaptation was performed for granular sludge for 30 days. $80{\sim}90%$ COD removal efficiency was shown with granular sludge, which was comparable with that of typical UASB granular sludge.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.220-220
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• 2003

The microencapsulation of droplets or particles within a solid shell leads to the formation of core-shell particles. Microencapsulation provides protection and controlled release of core materials such as drugs, vitamins, enzymes, perfumes, and the like. Such particles have, therefore, found a diverse range of applications in the pharmaceutical, agricultural, cosmetic, and food industries. UV absorbers are widely used for cosmetics to screen out ultra violet (UV) rays which have side effects on human skin. The absorbers are made generally from synthetic organic compounds, which can stimulate the human skins to develop allergic phenomena.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.106-106
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• 2003

최근 집적형 광소자, 레이저 재료, 자료 저장 또는 통신 기술부문에서 제어된 광학적 성질을 갖는 유기-무기 나노 복합체를 만드는 연구가 많은 관심과 주목을 받고 있다. 유기물인 PEG는 대다수의 금속염을 고정시키는 용매 역할을 하는 polymer로써 액체와 같은 특징을 나타내며 무기물인 silica의 network는 순수한 PEG 시스템보다 좋은 기계적 물성을 나타내며, 투명한 물질을 얻을 수 있게 해 준다. 이에 본 연구에서는 SiO2-PEG의 matrix에 우수한 광학적 성질을 지닌 europium을 doping하여 유기-무기 나노 복합막을 합성하여 europium의 농도와 PEG 분자량에 따른 구조적 및 광학적 성질을 알아보고자 한다.

• Bulletin of the Korean Chemical Society
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• v.32 no.9
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• pp.3274-3280
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• 2011

Monodispersed porous NiO and $Co_3O_4$ microcapsules with a hollow core were synthesized using SBA-16 silica sol and PS as a hard template. The porous hollow microcapsules were characterized by XRD, TEM and $N_2$ adsorption/desorption analysis. After $H_2$ reduction of metal oxide microspheres, they were conducted as an active catalyst in the reduction of chiral butylronitrile and cyanobenzene. The mesoporous metals having a hollow structure showed a higher activity than a nonporous metal powder and an impregnated metal on the carbon support.

• Journal of the Korean Ceramic Society
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• v.29 no.6
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• pp.496-504
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• 1992

Alumina tubes suitable for the support of gas separation membranes have been prepared by the slipcasting technique. These supports have the average pore size of 0.1 ${\mu}{\textrm}{m}$ within the narrow distribution. The sol-gel dipcoating process of nanoparticulate sols is very sensitive to microstructure of the support, and the coating on the inside surface of the tube is found to be more successful than on the outside surface. Nanoparticulate silica sols (0.82 mol/ι) have been synthesized by an interfacial hydrolysis reaction between TEOS and high alkaline water. When coating an alumina tube with these sols, the minimum limits of the particle size and the aging time required for forming the coated gel layer at the given pH are provided. It is optimum to coat the support with less concentrated sols stabilized through aging for the appropriate time (more than 22 days) at the lower pH (pH 2.0) for producing a reproducible crack free thin film coating in composite membranes.