• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.464-464
• /
• 2010

A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

• Tunnel and Underground Space
• /
• v.22 no.4
• /
• pp.257-265
• /
• 2012

In this study, a series of CFD (Computational Fluid Dynamics) simulations carried out to evaluate the optimum design model of the internal flow path of drill bit. The Star-CCM+ code was adopted to simulate the multi-phase discharge flow of rock particles and flushing air during a drilling process. The input parameters for the flow simulation of rock particles and air were obtained from the in-situ drilling test results. After the three design factors were determined, the experimental design method (Taguchi method) was utilized to evaluate the optimum value of each factor.

• Journal of Life Science
• /
• v.23 no.11
• /
• pp.1381-1387
• /
• 2013

The leaves and roots of Ligularia stenocephala, which are widely used as a food in Korea, were investigated for their antioxidant activities and cytotoxicity in vitro, and their hepatoprotective effect, alcohol detoxicant efficacy, and memory-enhancing property were investigated in vivo. The unique odor of the leaves was analyzed by GC-MS. Lipid peroxidation, superoxide anion formation, and DPPH radicals were inhibited remarkably by the extracts of the leaves and roots. The leaves of this edible plant significantly protected the hepatotoxicity induced by carbon tetrachloride and further diminished the blood alcohol content in mice. While the roots of this plant exhibited adequate cytotoxicity against four human tumor cell lines, especially against melanoma, the leaves revealed relatively weak activity. Both the leaves and the roots exerted an excellent ameliorating property on scopolamine-induced memory impairment in the passive avoidance task using an animal model. The hexane fraction of the leaves was analyzed by GC-MS, suggesting that a series of terpenoids may be odorous compounds in this plant.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.10 no.9
• /
• pp.2535-2544
• /
• 2009

The brain-wave research provides relatively various information for brain condition in safety. The counselor or measuree will must easily reduce user TCO about the series of process for the measurement, analysis, and management of brain-wave, and can access to the desired information in real time. While the traditional method for brain-wave process was processed manually by the judgment of a specialist. In this paper the developed system is smart brain-wave care system based on optimizing and combining the 3-Tier client/server by IT with brain-wave technology including BQT. This system was developed in the real-time service with a completely automated process by the conveniently web interface. Our system currently gave a service at the field, and the collected data on DB were provided to researchers for the use of clinical research.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.15 no.5
• /
• pp.2882-2892
• /
• 2014

The purpose of this study was to develop a program to prevent depression and suicidality in vulnerable community-dwelling elderly women, then to furthermore demonstrate the effectiveness of the program in a community setting. The researchers designed the depression and suicide prevention program by combining a cognitive behavioral theory model with prospective research data. The effects of the program were measured by time-series design based on survey results from 12 vulnerable community-dwelling elderly women. The depression and suicide prevention program was implemented and feelings of depression, suicidal ideation, and hopelessness were measured 4 weeks before implementation, prior to implementation, immediately following implementation, and 4 weeks after implementation. Although there was no statistically significant difference in feelings of depression, suicidal ideation, and hopelessness immediately after implementation of the program, there was a statistically significant difference in all parameters 4 weeks following the implementation of the program. Therefore, we recommend the implementation of our program in community mental health care centers or welfare facilities.

• Journal of the Korean Association of Geographic Information Studies
• /
• v.12 no.4
• /
• pp.84-94
• /
• 2009

Moisture Index time series derived from NOAA/AVHRR data have showed to be useful for humid and arid states. The humid/arid states of the Geum river basin are classified by means of the moisture index estimated from the climatic water budget model. Validations showed that the moisture index has excellent ability to detect humid/arid conditions and to measure time of its onset, intensity and duration. In this study, a simple method to classify the moisture index is proposed by statistical distribution condition. Also, the moisture index is compared with the regional actual state to detect drought area.

• Journal of Ocean Engineering and Technology
• /
• v.27 no.6
• /
• pp.81-89
• /
• 2013

This paper considers the steering characteristics of a four-row tracked vehicle crawling on extremely cohesive soft soil, where each side is composed of two parallel tracks. The four-row tracked vehicle (FRTV) is assumed to be a rigid body with 6-DOF. A dynamic analysis program for the tracked vehicle is developed using the Newmark-${\beta}$ method based on an incremental-iterative scheme. A terra-mechanics model of an extremely cohesive soft soil is implemented in the form of the relationships of the normal pressure to the sinkage, the shear resistance to the shear displacement, and the dynamic sinkage to the shear displacement. In order to investigate the steering characteristics of the four-row tracked vehicle, a series of dynamic simulations is conducted with respect to the distance between the left and right tracks (pitch), steering ratios, driving velocity, reference track velocity, lengths of the tracks, and properties of the cohesive soft soil. Through these numerical simulations, the possibility of using a kinematic steering ratio is explored.

• Membrane and Water Treatment
• /
• v.9 no.2
• /
• pp.69-77
• /
• 2018

The use of membrane as an innovative technology for water treatment process has now widely been accepted and adopted to replace the conventional water treatment process in increasing fresh water production for various domestic and industrial purposes. In this study, ultrafiltration (UF) membranes with different formulation were fabricated via phase inversion method. The membranes were fabricated by varying the polymer concentration (16 wt%, 18 wt%, 20 wt%, and 21 wt%). A series of tests, such as field emission scanning electron microscope (FESEM), pore size and porosity, contact angle, and zeta potential were performed to characterize the membranes. The membrane performance in terms of permeation flux and rejection were evaluated using a laboratory bench-scale test unit with mine water, lake water and tube well as model feed solution. Long hour filtration study of the membranes provides the information on its fouling property. Few pore blocking mechanism models were proposed to examine the behaviour of flux reduction and to estimate the fouling parameters based on different degree of fouling. 21 wt% PVDF membrane with smaller membrane pore size showed an excellent performance for surface water treatment in which the treated water complied with NWQS class II standard.

• Korean Journal of Remote Sensing
• /
• v.22 no.1
• /
• pp.49-61
• /
• 2006

The lifting scheme has been found to be a flexible method for constructing scalar wavelets with desirable properties. In this paper, it is extended to the UDAR data compression. A newly developed data compression approach to approximate the UDAR surface with a series of non-overlapping triangles has been presented. Generally a Triangulated Irregular Networks (TIN) are the most common form of digital surface model that consists of elevation values with x, y coordinates that make up triangles. But over the years the TIN data representation has become an important research topic for many researchers due its large data size. Compression of TIN is needed for efficient management of large data and good surface visualization. This approach covers following steps: First, by using a Delaunay triangulation, an efficient algorithm is developed to generate TIN, which forms the terrain from an arbitrary set of data. A new interpolation wavelet filter for TIN has been applied in two steps, namely splitting and elevation. In the splitting step, a triangle has been divided into several sub-triangles and the elevation step has been used to 'modify' the point values (point coordinates for geometry) after the splitting. Then, this data set is compressed at the desired locations by using second generation wavelets. The quality of geographical surface representation after using proposed technique is compared with the original UDAR data. The results show that this method can be used for significant reduction of data set.

• Proceedings of the Korea Water Resources Association Conference
• /
• 2015.05a
• /
• pp.451-451
• /
• 2015

최근 1900년부터 1990년 사이 해수면은 매년 평균 1.2mm 상승했지만 1990년부터는 매년 평균 3mm씩 높아지고 있으며, 이에 1990년부터 현재까지 해수면 수위의 상승속도가 이전 90년 동안 측정된 수치보다 2.5배 빠르다는 연구결과가 발표되었다. 해수면 상승으로 인한 피해는 범람과 침식을 야기할 수 있으며 해일 및 폭풍으로 인한 피해를 증가시킴으로 물질적 피해와 인명 피해를 유발할 수 있다. 이러한 이유로 해수면 상승에 따른 과학적인 분석과 신뢰성 있는 전망을 통하여 해수면 상승에 따른 대응과 대비가 필요하다. 이에 본 연구에서는 비정상성 빈도해석 방법을 통하여 미래의 해수면 상승을 고려할 수 있는 비정상성 빈도해석 기법을 개발하였다. 본 연구에서는 극치사상을 추출하기 위해 국립해양조사원 (Korea Hydrographic and Oceanographic Administration, KHOA)에서 관리한 45개 조위관측소의 시 조위 자료를 이용하였다. 45개 조위관측소의 한 시간 단위 자료로부터 연최대 및 연평균 조위계열 (annual average and annual maximum sea level series)을 추출하였다. 본 연구에서는 한반도 해안을 동해안, 서해안, 남해안, 제주 권역으로 구분하고 빈도 해석의 신뢰성을 만족하기 위해 자료 구축기간이 20년 이상이며, 각 해안을 나타낼 수 있는 지점을 선정하였다. 비정상성 빈도해석은 Gumbel 극치분포를 적용하였으며, 계층적 Bayesian 기법을 결합하여 매개변수들에 대한 사후분포를 추정하였다. 본 연구에서는 대부분의 지점에서 비정상성 빈도해석 결과와 정상성 빈도해석 결과와 상당한 차이를 보여주고 있으며, 이는 주로 정상성 가정에 기인하는 문제점으로 판단된다. 향후 기후변화에 따른 연안지역의 홍수 및 사회기반시설의 위험도를 평가하기 위해서는 비정상성을 고려한 빈도해석 절차의 수립과 적용이 필요할 것으로 판단된다.