• Journal of Sensor Science and Technology
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• v.19 no.2
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• pp.137-141
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• 2010

In this paper, we fabricated silicon piezoresistive pressure sensor with dry etching technology which used Deep-RIE and etching delay technology which used SOI(silicon-on-insulator) wafer. We improved pressure sensor offset and its temperature dependence by removing oxidation layer of SOI wafer which was used for dry etching delay layer. Sensitivity of the fabricated pressure sensor was about 0.56 mV/V${\cdot}$kPa at 10 kPa full-scale, and nonlinearity of the fabricated pressure sensor was less than 2 %F.S. The zero off-set change rate was less than 0.6 %F.S.

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.355-360
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• 2013

A wireless intraocular (IOP) pressure sensor based on micro electro mechanical system (MEMS) technology is proposed. The proposed IOP sensor uses variable inductance according to the external pressure. The proposed sensor is composed of two flexible membranes: a ferrite bottom part, an inductor, and a capacitor. The inductance of the sensor varies according to the external pressure. The resonance frequency of the sensor is also varied, and this frequency is detected using an external coil. The external coil is designed with an FR-4 printed circuit board. The feasibility of the proposed sensor structure using variable inductance to detect the external pressure is successfully demonstrated.

• Annual Conference of KIPS
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• 2019.10a
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• pp.540-542
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• 2019

본 논문에서는 스마트블록 모듈을 활용한 스마트 모듈형 로봇 및 관련 콘텐츠인 자율주행로봇, 탐지 로봇 콘텐츠를 개발하였다. 스마트 모듈형 로봇의 H/W, S/W개발 및 스마트블록 모듈의 콘텐츠 활용방법 제안한다.

• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.183-187
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• 2008

A sub-ppm level MEMS gas sensor that can be used for the detection of formaldehyde (HCHO) is presented. It is realized by using a zinc oxide (ZnO) thin-film material with a Ni-seed layer as a sensing material and by bulk micromachining technology. To enhance sensitivity of the MEMS gas sensor with Ni-seed layer was embedded with ZnO sensing material and sensing electrodes. As experimental results, the changed sensor resistance ratio for HCHO gas was 9.65 % for 10 ppb, 18.06 % for 100 ppb, and 35.7 % for 1 ppm, respectively. In addition, the minimum detection level of the fabricated MEMS gas sensor was 10 ppb for the HCHO gas. And the measured output voltage was about 0.94 V for 10 ppb HCHO gas concentration. The noise level of the fabricated MEMS gas sensor was about 50 mV. The response and recovery times were 3 and 5 min, respectively. The consumption power of the Pt micro-heater under sensor testing was 184 mW and its operating temperature was $400^{\circ}C$.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.957-960
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• 2009

Sensor applications of thin-film transistors (TFTs), such as photosensor, magnetic sensor, temperature sensor and chemical sensor, are introduced. Active-matrix circuits and amplifying circuits using poly-Si TFTs are integrated with these sensors to improve sensor performances and generate additional functions. These sensors may be promising applications after flat-panel displays (FPDs) in giant-micro electronics.

• Bulletin of the Korean Chemical Society
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• v.34 no.11
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• pp.3307-3311
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• 2013

A new fiber optical sensor was developed for the determination of 2,4-dichlorophenol (DCP). The sensor was based on DCP oxidation by oxygen with the catalysis of iron(III) tetrasulfophthalocyanine (Fe(III)PcTs). The optical oxygen sensing film with $Ru(bpy)_3Cl_2$ as the fluorescence indicator was used to determine the consumption of oxygen in solution. A lock-in amplifier was used for detecting the lifetime of the oxygen sensing film by measuring the phase delay change of the sensor head. The different variables affecting the sensor performance were evaluated and optimized. Under the optimal conditions (i.e. pH 6.0, $25^{\circ}C$, Fe(III)PcTs concentration of 0.62 mg/mL), the linear detection range and response time of the sensor are $1.0{\times}10^{-6}-9.0{\times}10^{-6}$ mol/L and 250 s, respectively. The sensor displays high selectivity, good repeatability and stability, and can be used as an effective tool in analyzing DCP concentration in practical samples.

• Journal of Sensor Science and Technology
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• v.26 no.1
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• pp.24-27
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• 2017

In this study, I developed a simple and low cost process-printing a silver, carbon, dielectric, adhesive layer on PET films using screen printing technology and bonding the two films face-to-face-to fabricate a low price capacitive pressure-mapping sensor. Both electrodes forming the pressure measuring capacitor are arranged between the two PET films similar to a sandwich. Therefore, the sensor has the advantage of minimizing the influence of external noise. In this study, a $10{\times}10$ capacitance-type pressure-mapping sensor was fabricated and its characteristics were analyzed.

• Proceedings of the Optical Society of Korea Conference
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• 1999.08a
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• pp.114-115
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• 1999

• Nuclear Engineering and Technology
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• v.50 no.5
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• pp.751-757
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• 2018

In this article, a UV sensor that is an appropriate tool for fire detection has been designed and constructed. The structure of this UV sensor is an air-filled single-wire detector that is able to operate under normal air condition. A reflective CsI photocathode is installed at the end of the sensor chamber to generate photoelectrons in the ion chamber. An electric current is produced by accelerating photoelectrons to the anode in the electric field. The detector is able to measure the intensity of the incident UV rays whenever the current is sufficiently high. Therefore, the sensitivity coefficient of this sensor is found to be $7.67{\times}10^{-6}V/photons/sec$.

• Proceedings of the KIEE Conference
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• 1987.07a
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• pp.481-485
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• 1987

The fabrication of a micro mass flow sensor on a silicon chip by means of micro-machining technology is described on this paper. The operation of micro mass flow sensor is based on the heat transfer from a heated chip to a fluid. The temperature differences on the chip is a measure for the flow velocity in a plane parallel with the chip surface. An anisotropic etching technigue was used for the formation of the V-type groove in this fabrication. The micro mass flow sensor is made up of two main parts ; A thin glass plate embodying the connecting parts and mass flow sensor parts in silicon chip. This sensor have a very small size and a neglible dead space. Micro mass flow sensor can fabricate on silicon chip by micro machining technology too.