• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.2003-2005
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• 2002

바이오 마이크로 시스템 및 바이오 MEMS 분야, 특히 실리콘을 기질로 하는 바이오 센서 제작에서 반도체 공정 기술은 센서의 대량 생산과 초소형화를 위해서 반드시 필요한 기술이다. 그러나, 감지전극의 마이크로화에 따른 센서의 감도 및 안정성 저하 문제는 해결해야 할 과제이다. 최근, 다공질 실리콘이 갖는 대면적이 실리콘 기질과 생체 고분자 (예: 단백질, 핵산 등) 간의 결합력을 향상시킬 수 있음이 알려지면서, 바이오 센서 분야에서, 새로운 형태의 드랜스듀서 재료로서의 다공질 실리콘에 대한 논의가 활발히 전개되고 있으며 또한, ISFET (Ion-Selective Field-Effect Transistors) 와는 달리 다공질 실리콘 층은 저항이 크기 때문에 센서 제작 과정에서의 부가적인 절연막을 필요로 하지 않는다. 본 연구에서는, 백금을 증착한 다공질 실리콘 표면에 전도성 고분자로서 Polypyrrole (PPy) 필름과 생체 고분자 물질로서 Urease를 각각 전기화학적으로 흡착하였다. 다공질 실리콘 층의 형성을 위해 테플론 소재의 전기화학 전지에 불산 (49%), 에탄올 (95%), $H_2O$ 혼합 용액을 넣고 실리콘 웨이퍼에 일정시간 수 mA의 산화 전류를 흘려주었으며, 약 $200{\AA}$의 티타늄 박막과 $200{\AA}$의 백금 박막을 RF 스퍼터링하여 작업 전극을 제작하였고, 백금 박막 및 Ag를 기화 증착하여 제작한 Ag/AgCl 박막을 각각 상대 전극과 기준전극으로 하였다. 박막 전극의 표면 분석을 위해 SEM (Scanning Electron Microscopy), EDX (Energy Dispersive X-ray spectroscopy) 등을 이용하였다. 제작된 요소 센서로부터 요소 농도 범위 0.01 mmol/L ${\sim}$ 100 mmol/L에서 약 0.2 mA/decade의 감도를 얻었다.

• Journal of Microbiology and Biotechnology
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• v.27 no.11
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• pp.2037-2043
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• 2017

The surface protein hemagglutinin (HA) mediates the attachment of influenza virus to host cells containing sialic acid and thus facilitates viral infection. Therefore, HA is considered as a good target for the development of diagnostic tools for influenza virus. Previously, we reported the isolation of single-stranded aptamers that can distinguish influenza subtype H1 from H5. In this study, we describe a method for the selective electrical detection of H1 using the isolated aptamer as a molecular probe. After immobilization of the aptamer on Si wafer, enzyme-linked immunosorbent assay (ELISA) and field emission scanning electron microscopy (FE-SEM) showed that the immobilized aptamer bound specifically to the H1 subtype but not to the H5 subtype. Assessment by cyclic voltammetry (CV) also demonstrated that the immobilized aptamer on the indium thin oxide-coated surface was specifically bound to the H1 subtype only, which was consistent with the ELISA and FE-SEM results. Further measurement of CV using various amounts of H1 subtype provided the detection limit of the immobilized aptamer, which showed that a nanomolar scale of target protein was sufficient to produce the signal. These results indicated that the selected aptamer can be an effective probe for distinguishing the subtypes of influenza viruses by monitoring current changes.

• Environmental Engineering Research
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• v.25 no.4
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• pp.579-587
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• 2020

Novel silane grafted bentonite was obtained using the natural bentonite as precursor material. The material which is termed as nanocomposite was characterized by the Fourier Transform Infra-red (FT-IR) and X-ray diffraction (XRD) methods. The surface imaging and elemental mapping was performed using Scanning Electron Microscopic (SEM/EDX) technique. The electroanalytical studies were performed using the nanocomposite electrode. The electroactive surface area of nanocomposite electrode was significantly increased than the pristine bentonite or bare carbon paste based working electrode. The impedance spectroscopic studies were conducted to simulate the equivalent circuit and Nyquist plots were drawn for the carbon paste electrode and nanocomposite electrodes. A single step oxidation/reduction process occurred for As(III) having ΔE value 0.36 V at pH 2.0. The anodic stripping voltammetry was performed for concentration dependence studies of As(III) (0.5 to 20.0 ㎍/L) and reasonably a good linear relationship was obtained. The detection limit of the As(III) detection was calculated as 0.00360±0.00002 ㎍/L having with observed relative standard deviations (RSD) less than 4%. The presence of several cations and anions has not affected the detection of As(III) however, the presence of Cu(II) and Mn(II) affected the detection of As(III). The selectivity of As(III) was achieved using the Tlawng river water sample spiked with As(III).

• Journal of Biosystems Engineering
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• v.32 no.6
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• pp.448-454
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• 2007

This study was conducted to develop a 100 kPa soil tensiometer mainly consisted of a porous ceramic cup, water-holding tube, and a digital vacuum gauge, through theoretical design analysis and experimental performance evaluation. Major findings were as follows. 1. Theoretical analysis showed that air entry value of a porous media decreased as the maximum effective size of the pore increased, and the maximum diameter of the pores was $2.9\;{\mu}m$ for measuring up a 100 kPa of soil-water tension. 2. Property analysis of tensiometer porous cups supplied in Korean domestic market indicated that main components were $SiO_2$ and $Al_2O_3$ with a porosity range of $33.8{\sim}49.3%$. 3. The porous cup selected through sample fabrication and air-permeability tests showed weight ratios of 87% and 11% for $Al_2O_3$ and $SiO_2$. The analysis of SEM (scanning electron microscope) images showed that the sample was sintered at temperatures of about $1150^{\circ}C$, which consisted of pores with sizes of up to 25% of those for commercial porous cups. 4. The prototype soil tensiometer was fabricated using the developed porous cup and a digital vacuum gauge that could measure water tension with a pressure of 85 kPa in air tests. 5. In-soil tests of the prototype conducted during a period of 25-day drying showed that soil-water tension values measured with the prototype and commercial units were not significantly different, and soil-water characteristic curves could be established for different soils, confirming accuracy and stability of the prototype.

• Journal of Sensor Science and Technology
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• v.7 no.1
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• pp.51-60
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• 1998

La-modified $PbTiO_{3}$(PLT) thin plates were prepared for the fabrication of PLT pyroelectric IR sensors. The effects of the preparation parameters such as tile sintering temperature, the La content, and the ambient powder quantity, on the microstructural and dielectric properties of PLT thin plates were investigated by X-ray diffraction, scanning electron microscope, and measurements of relative density and dielectric properties. With an increased La content, the tetragonality c/a was decreased but the densification and the grain size were increased, which is considered to be due to the increased Pb vacancy concentration to maintain charge neutrality at the increased of La content. When the quantity of the ambient powder wvas increased, the tetragonality was slightly increased, which is believed io be due to the reduced evaporation of PbO. But the e(fect is insignificant compared to that of La content. The dielectric constant at room temperature was increased and the Curie temperature was decreased in accordance with the decreased tetragonality ratio c/a with the increase of La content. The dielectric constant and tan ${\delta}$ of $500{\mu}m$ thick PLT thin plate with 10 wt% excess PbO and 10 mol% La contant sintered at $1250^{\circ}C$ for 2 hours in ambient powder of $0.02\;g/cm^{3}$ were 360 and 0.02, respectively.

• Korean Journal of Materials Research
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• v.23 no.12
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• pp.667-671
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• 2013

We present an easy method of preparing two-dimensional (2D) periodic hollow tin oxide ($SnO_2$) hemisphere array gas sensors using polystyrene (PS) spheres as a template. The structures were fabricated by the sputter deposition of thin tin (Sn) metal over an array of PS spheres on a planar substrate followed by calcination at an elevated temperature to oxidize Sn to $SnO_2$ while removing the PS template cores. The $SnO_2$ hemisphere array structures were examined by scanning electron microscopy and X-ray diffraction. The structures were calcined at various temperatures and their sensing properties were examined with varying operation temperatures and concentrations of nitric oxide (NO) gas. Their gas-sensing properties were investigated by measuring the electrical resistances in air and the target gases. The measurements were conducted at different NO concentrations and substrate temperatures. A minimum detection limit of 30 ppb, showing a sensitivity of S = 1.6, was observed for NO gas at an operation temperature of $150^{\circ}C$ for a sample having an Sn metal layer thickness corresponding to 30 sec sputtering time and calcined at $600^{\circ}C$ for 2 hr in air. We proved that high porosity in a hollow $SnO_2$ hemisphere structure allows easy diffusion of the target gas molecules. The results confirm that a 2D hollow $SnO_2$ hemisphere array structure of micronmeter sizes can be a good structural morphology for high sensitivity gas sensors.

• Proceedings of the KSRS Conference
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• 1998.09a
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• pp.313-318
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• 1998

Electro-Optical Camera(EOC) is the main payload of Korea Multi-Purpose SATellite(KOMPSAT) with the mission of cartography to build up a digital map of Korean territory including Digital Terrain Elevation Map(DTEM). This instrument which comprises EOC Sensor Assembly and EOC Electronics Assembly produces the panchromatic images of 6.6 m GSD with a swath wider than 17 km by push-broom scanning and spacecraft body pointing in a visible range of wavelength, 510 ~ 730 nm. The high resolution panchromatic image is to be collected for 2 minutes during 98 minutes of orbit cycle covering about 800 km along ground track, over the mission lifetime of 3 years with the functions of programmable rain/offset and on-board image data storage. The image of 8 bit digitization, which is collected by a full reflective type F8.3 triplet without obscuration, is to be transmitted to Ground Station at a rate less than 25 Mbps. EOC was elaborated to have the performance which meets or surpasses its requirements of design phase. The spectral response the modulation transfer function, and the uniformity of all the 2592 pixel of CCD of EOC are illustrated as they were measured for the convenience of end-user. The spectral response was measured with respect to each gain setup of EOC and this is expected to give the capability of generating more accurate panchromatic image to the EOC data users. The modulation transfer function of EOC was measured as greater than 16% at Nyquist frequency over the entire field of view which exceeds its requirement of larger than 10%, The uniformity that shows the relative response of each pixel of CCD was measured at every pixel of the Focal Plane Array of EOC and is illustrated for the data processing.

• Korean Journal of Remote Sensing
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• v.27 no.3
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• pp.303-314
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• 2011

Surface albedo is an important parameter of the surface energy budget, and its accurate quantification is of major interest to the global climate modeling community. Therefore, in this paper, we consider the direct solution of kernel based bidirectional reflectance distribution function (BRDF) models for retrieval of normalized reflectance of high resolution satellite. The BRD effects can be seen in satellite data having a wide swath such as SPOT/VGT (VEGETATION) have sufficient angular sampling, but high resolution satellites are impossible to obtain sufficient angular sampling over a pixel during short period because of their narrow swath scanning when applying semi-empirical model. This gives a difficulty to run BRDF model inferring the reflectance normalization of high resolution satellites. The principal purpose of the study is to estimate normalized reflectance of high resolution satellite (RapidEye) through BRDF components from SPOT/VGT. We use semi-empirical BRDF model to estimated BRDF components from SPOT/VGT and reflectance normalization of RapidEye. This study used SPOT/VGT satellite data acquired in the S1 (daily) data, and within this study is the multispectral sensor RapidEye. Isotropic value such as the normalized reflectance was closely related to the BRDF parameters and the kernels. Also, we show scatter plot of the SPOT/VGT and RapidEye isotropic value relationship. The linear relationship between the two linear regression analysis is performed by using the parameters of SPOTNGT like as isotropic value, geometric value and volumetric scattering value, and the kernel values of RapidEye like as geometric and volumetric scattering kernel Because BRDF parameters are difficult to directly calculate from high resolution satellites, we use to BRDF parameter of SPOT/VGT. Also, we make a decision of weighting for geometric value, volumetric scattering value and error through regression models. As a result, the weighting through linear regression analysis produced good agreement. For all sites, the SPOT/VGT isotropic and RapidEye isotropic values had the high correlation (RMSE, bias), and generally are very consistent.

• Journal of Sensor Science and Technology
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• v.27 no.1
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• pp.55-58
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• 2018

Low-cost and large-scale fabrication method of nanohole array, which comprises nanoscale voids separated by a few tens to a few hundreds of nanometers, has opened up new possibilities in biomolecular sensing as well as novel frontier optical devices. One of the key aspects of the nanohole array research is how to control the hole size following each specific needs of the hole structure. Here, we report the extensive study on the fine control of the hole size within the range of 500-2500 nm via surface-catalyzed chemical deposition. The initial hole structures were prepared via conventional photo-lithography, and the hole size was decreased to a designed value through the surface-catalyzed chemical reduction of the gold ion on the predefined hole surfaces, by simple dipping of the hole array device into the aqueous solution of gold chloride and hydroxylamine. The final hole size was controlled by adjusting reaction time, and the optimal experimental condition was obtained by doing a series of characterization experiments. The characterization of size-controlled hole array was systematically examined on the image results of optical microscopy, field emission scanning electron microscopy(FESEM), atomic-force microscopy(AFM), and total internal reflection microscopy.

• Korean Journal of Materials Research
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• v.20 no.8
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• pp.408-411
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• 2010

Indium doped $SnO_2$ thick films for gas sensors were fabricated by a screen printing method on alumina substrates. The effects of indium concentration on the structural and morphological properties of the $SnO_2$ were investigated by X-ray diffraction and Scanning Electron Microscope. The structural properties of the $SnO_2$:In by X-ray diffraction showed a (110) dominant $SnO_2$ peak. The size of $SnO_2$ particles ranged from 0.05 to $0.1\;{\mu}m$, and $SnO_2$ particles were found to contain many pores, according to the SEM analysis. The thickness of the indium-doped $SnO_2$ thick films for gas sensors was about $20\;{\mu}m$, as confirmed by cross sectional SEM image. Sensitivity of the $SnO_2$:In gas sensor to 2000 ppm of $CO_2$ gas and 50 ppm of H2S gas was investigated for various indium concentrations. The highest sensitivity to $CO_2$ gas and H2S gas of the indium-doped $SnO_2$ thick films was observed at the 8 wt% and 4 wt% indium concentration, respectively. The good sensing performances of indium-doped $SnO_2$ gas sensors to $CO_2$ gas were attributed to the increase of oxygen vacancies and surface area in the $SnO_2$:In. The $SnO_2$:In gas sensors showed good selectivity to $CO_2$ gas.