• Title/Summary/Keyword: sensor density

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CMP properties of $SnO_2$ thin film ($SnO_2$ 박막의 CMP 특성)

  • Choi, Gwon-Woo;Lee, Woo-Sun;Ko, Pil-Ju;Kim, Tae-Wan;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.04b
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    • pp.93-96
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    • 2004
  • As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric(IMD) layer with free-defect. The effect of alternative commerical slurries pads, and post-CMP cleaning alternatives are discuess, with removal rate, scratch dentisty, surface roughness, dishing, erosion and particulate density used as performance metrics. we investigated the performance of $SnO_2$-CMP process using commonly used silica slurry, ceria slurry, tungsten slurry. This study shows removal rate and nonuniformity of $SnO_2$ thin film used to gas sensor by using Ceria, Silica, W-Slurry after CMP process. This study also shows the relation between partical size and CMP with partical size analysis of used slurry.

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The Comparison of thrust computational methods of a brushless DC linear motor (브러시 없는 직류 선형 모터의 추력 계산 방법의 비교)

  • Choi, Moon-Suk;Kim, Yong-Yil
    • Proceedings of the KIEE Conference
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    • 1997.11a
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    • pp.32-34
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    • 1997
  • For a given brushless DC linear motor, we suggest the numerical prediction methods to analyze it's thrust characteristics. First, we calculate the magnetic flux density by the finite element method, and we then compute the maximum thrust with three computational methods - a Lorentz equation, a Maxwell stress method and a virtual work method. To confirm the accuracy of the computational methods, we measure the thrust of the linear motor made by our laboratory with a force-torque sensor. Also, we calculate the thrust by the measured back electromotive force. To choose the appropriate method for a specified application, we compare the maximum thrusts of the computational method and the calculation by the back electromotive force with the measured one. We conclude that the Maxwell stress method is turned out the best because it has the most accurate results among three computational methods and it is more convenient than the calculation method by the back electromotive force.

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The effect of cathodic protection system by means of zinc sacrificial anode on pier in Korea

  • Jeong, Jin-A;Jin, Chung-Kuk
    • Journal of Advanced Marine Engineering and Technology
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    • v.38 no.10
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    • pp.1206-1211
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    • 2014
  • This study has been conducted to confirm the effect of sacrificial anode cathodic protection system for 90 days to protect corrosion on pier that is located in Korea. The cathodically protected structure was a slab and a pile cap. Before the construction of cathodic protection system, the macrography was carried out. As a result of the macrography, many corrosion traces were confirmed in this structure. The trace was mainly focused on joint and zones that concrete cover was eliminated. To apply the cathodic protection system, many onsite techniques have been adopted. In addition, to confirm the inner state of steel in concrete properly, a corrosion monitoring sensor (DMS-100, Conclinic Co. Ltd) has been applied. Test factors were corrosion & cathodic protection potential, 4 hour depolarization potential, resistivity and current density. After 90 days from the installation of cathodic protection system, it could confirm that proper corrosion protection effect was obtained by considering the result of tests.

Development of BLDC Motor Controller for Tread Mill Application (Tread Mill 구동용 BLDC 제어기 개발)

  • Ahn Jin-Woo;Lee Dong-Hee;Park Sung-jun
    • Proceedings of the KIPE Conference
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    • 2002.07a
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    • pp.138-141
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    • 2002
  • BLDCM(Brushless D.C. Motor) is widely used for industrial application because of high efficiency and high power density Especially, in servo system and home appliance, BLBCM is very useful due to high control performance and low acoustic noise. In this paper, 2.5HP rated BLDCM controller and drive was developed for tread mill application. The prototype BLDCM has 4 poles rotor and 24 slots stator. Ferrite was used as a rotor magnet due to the cost and temperature characteristic. For the stable operation of tread mill, over current and high temperature can be detected by the DSP controller. For the commutation signal, switching patterns from the sensorless circuit and hall sensor signal are used in the DSP controller.

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Study of Microrobot formed the Wing of a Insect (곤충 날개를 형상화한 마이크로로봇의 연구)

  • 김종걸;이건영
    • 제어로봇시스템학회:학술대회논문집
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    • 2000.10a
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    • pp.424-424
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    • 2000
  • The implementation of a insect-based flying microrobot has been previously proposed as using magnetic force. The flying principle of a butterfly is different from that of a airplane, which obtain lifting force above the wings by a air stream with low pressure. Butterflies obtain lifting force below the wings by flapping. They can fly when drag during the down stroke is greater that during the up stroke. The structure of flying microrobot must satisfy these condition. And that must be manufacture lightly and keep balance for rising to the air sufficiently. Moreover the efficiency of an electromagnet is high and the flux density is sustained uniformly and widely Nevertheless these condition is satisfied, the implementation of a flying microrobot is very difficult as the flying microrobot has to fly without guides or sensor. We propose differently a new model il] comparison with that other paper has suggested. This imitates the form of the Korean shield-shaped kite.

Mechanical Impedance at the Interface between a Torsionally-Vibrating Rod and a Viscous Fluid (비틀림 진동 봉과 점성 유체의 경계면에서의 역학적 임피던스)

  • 전한용;김진오
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2002.05a
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    • pp.153-159
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    • 2002
  • This paper deals with the measurement of the fluid viscosity by using the torsional vibration of a circular red excited by a torsional vibrator at one end. The effect of an adjacent viscous fluid on the torsional vibration of the rod has been studied theoretically and expressed in terms of the mechanical impedance. The theoretically-obtained trend that the mechanical impedance is proportional to the square root of the viscosity times the density of the fluid has been confirmed by the impedance measurement. The paper demonstrates that a torsionally-vibrating rod can be used as a sensor to measure the viscosity of a fluid.

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Test method comparison for vibration-damping of materials (물질의 진동감쇠 시험법 비교)

  • 신수현;이용봉;정성수;조승일
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2003.11a
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    • pp.700-703
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    • 2003
  • The test method of ASTM E 756 and KS D 0076 to estimate vibration-damping properties is compared. Comparison method depending on specimen support, exciting method and calculation method for loss factor is used. Half-power bandwidth method and vibration decay method is used in the calculation method for loss factor, and Young's modulus is decided by geometric character and density for specimen and resonance frequency. Vibration measurement sensor is compared by using non-contact displacement detector, velocity detector and accelerometer. This paper is also presented the matter which is able to cause error in the measurement

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Design and Analysis of a Vibration-Driven Electromagnetic Energy Harvester Using Multi-Pole Magnet

  • Munaz, Ahmed;Chung, Gwiy-Sang
    • Journal of Sensor Science and Technology
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    • v.21 no.3
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    • pp.172-179
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    • 2012
  • This paper presents the design and analysis of a vibration-driven electromagnetic energy harvester that uses a multi-pole magnet. The physical backgrounds of the vibration electromagnetic energy harvester are reported, and an ANSYS finite element analysis simulation has been used to determine the different alignments of the magnetic pole array with their flux lines and density. The basic working principles for a single and multi-pole magnet are illustrated and the proposed harvester has been presented in a schematic diagram. Mechanical parameters such as input frequency, maximum displacement, number of coil turns, and load resistance have been analyzed to obtain an optimized output power for the harvester through theoretical study. The paper reports a maximum of 1.005 mW of power with a load resistance of $1.9k{\Omega}$ for 5 magnets with 450 coil turns.

Research on the Energy Hole Problem Based on Non-uniform Node Distribution for Wireless Sensor Networks

  • Liu, Tang;Peng, Jian;Wang, Xiao-Fen;Yang, Jin;Guo, Bing
    • KSII Transactions on Internet and Information Systems (TIIS)
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    • v.6 no.9
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    • pp.2017-2036
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    • 2012
  • Based on the current solutions to the problem of energy hole, this paper proposed a nonuniform node distribution clustering algorithm, NNDC. Firstly, we divide the network into rings, and then have an analysis and calculation on nodes' energy consumption in each ring of the network when clustering algorithm is applied to collect data. We also put forward a scheme of nonuniform node distribution on the basis of the proportion of nodes' energy consumption in each ring, and change nodes' active/hibernating states under density control mechanism when network coverage is guaranteed. Simulation shows NNDC algorithm can satisfyingly balance nodes' energy consumption and effectively avoid the problem of energy hole.

A Node-Density Adaptive Scheduling Scheme for Cluster-based Routing Protocol in Wireless Sensor Networks (무선 센서 네트워크에서 클러스터 기반 라우팅 프로토콜을 위한 노드 밀도에 따른 스케줄링 기법)

  • Hong, Sang-Ryeol;Park, Hyeong-Soon;Kim, Si-Gwan
    • Proceedings of the Korean Information Science Society Conference
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    • 2006.10d
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    • pp.647-650
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    • 2006
  • 무선 센서 네트워크에서는 다른 네트워크보다 전력 공급이 큰 제약으로 작용하고 있는데, 본 논문에서는 클러스터를 기반으로 하는 프로토콜에서 클러스터를 구성하는 센서 노드의 밀도에 따라서 클러스터 헤더에게 데이터를 전송하는 노드 수를 조정하는 방법을 제안한다. 제안하는 스케줄링 개념은 노드 밀도가 큰 클러스터에서는 클러스터 멤버 노드들의 라운드 당 데이터 전송 회 수를 줄임으로써 전송 에너지 소모를 줄일 수 있으며 네트워크 전체의 라이프 타임을 증가 시킬 수 있다.

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