• 제목/요약/키워드: sensitivity experiment

검색결과 747건 처리시간 0.029초

Fault Detection with OES and Impedance at Capacitive Coupled Plasmas

  • 최상혁;장해규;채희엽
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.499-499
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    • 2012
  • This study was evaluated on etcher of capacitive coupled plasmas with OES (Optical Emission Spectroscopy) and impedance by VI probe that are widely used for process control and monitoring at semiconductor industry. The experiment was operated at conventional Ar and C4F8 plasma with variable change such as pressure and addition of gas (Atmospheric Leak: N2 and O2), RF, pressure, that are highly possible to impact wafer yield during wafer process, in order to observe OES and VI Probe signals. The sensitivity change on OES and Impedance by Vi probe was analyzed by statistical method to determine healthy of process. The main goal of this study is to understand unwanted tool performance to eventually improve productive capability. It is important for process engineers to actively adjust tool parameter before any serious problem occurs.

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TPMS 적용을 위한 가변 정전 용량형 압력센서 개발 (The development of a variable capacitive pressure sensor for TPMS(tire pressure monitoring system))

  • 최범규;김도형;오재근
    • 센서학회지
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    • 제14권4호
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    • pp.265-271
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    • 2005
  • In this study, a variable capacitive pressure sensor is fabricated for TPMS (Tire Pressure Monitoring System). This study is for developing sensors which consecutively measure the tire pressure given as 30 psi from the industrial standard. For improving non-linearity of the prior capacitive pressure sensors, it is suggested that touch mode capacitive pressure sensor be applied. In addition, initial capacitance is designed as small as possible for the conformity to the wireless sensor. ANSYS, commercial FEA package, is used for designing and simulating the sensor. The device is progressed by MEMS (Micro Electro Mechanical Systems) fabrication and packaged with PDMS. The result is obtained sensitivity, 1 pF/psi, through a pressure test. The simulation result is discrepant from experiment one. Wafer's uniformity is presumed as the main reason of discrepancy.

실험계획법을 활용한 승용차용 등속조인트 설계기법 연구 (Study on the Design Methodology of Constant Velocity Joints for Passenger Cars using DOE)

  • 정창현;정도현;배원락
    • 한국자동차공학회논문집
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    • 제16권6호
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    • pp.121-133
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    • 2008
  • We presented design methodology of constant velocity joint for passenger cars using design of experiment. On the basis of contact normal stress of internal components of constant velocity joints, we performed a sensitivity analysis of several design parameters. And then we performed robust design and optimization design process. As a result, we could find robust design and also propose the optimized design. Presented design process would be very helpful for engineers who are suffer for new constant velocity joint design.

반응면기법을 이용한 침전조의 형상최적설계 (Shape Optimization of Sedimentation Tank Using Response Surface Method)

  • 김홍민;최승만;김광용
    • 한국유체기계학회 논문집
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    • 제7권6호
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    • pp.55-61
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    • 2004
  • A numerical procedure for optimizing the shape of three-dimensional sedimentation tank is presented to maximize its sedimentation efficiency. The response surface based optimization is used as an optimization technique with Reynolds-averaged Navier-Stokes analysis for multi-phase flow. Standard $k-{\epsilon}$ model is used as a turbulence closure. Three design variables such as, tank height to center feed wall diameter ratio, blockage ratio of center feed wall and angle of distributor are chosen as design variables. Sedimentation efficiency is defined as an objective function. Full-factorial method is used to determine the training points as a means of design of experiment. Sensitivity of each design variable on the objective function has been evaluated. And, optimal values of the design variables have been obtained.

Perceptual Experiment on Number Production for Speaker Identification

  • Yang, Byung-Gon
    • 음성과학
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    • 제8권1호
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    • pp.7-19
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    • 2001
  • The acoustic parameters of nine Korean numbers were analyzed by Praat, a speech analysis software, and synthesized by SenSynPPC, a Klatt formant synthesizer. The overall intensity, pitch and formant values of the numbers were modified dynamically by a step of 1 dB, 1 Hz and 2.5% respectively. The study explored the sensitivity of listeners to changes in the three acoustic parameters. Twelve subjects (male and female) listened to 390 pairs of synthesized numbers and judged whether the given pair sounded the same or different. Results showed that subjects perceived the same sound quality within the range of 6.6 dB of intensity variation, 10.5 Hz of pitch variation and 5.9% of the first three formant variations. The male and female groups showed almost the same perceptual ranges. Also, an asymmetrical structure of high and low boundary was observed. The ranges may be applicable to the development of a speaker identification system while the method of synthesis modification may apply to its evaluation data.

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차온제어기의 On-Off 온도설정에 따른 태양열 시스템 열성능 (Thermal Performance of Solar Thermal System by On-Off Differential Temperature of Differential Temperature Controller)

  • 신우철;백남춘
    • 한국태양에너지학회 논문집
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    • 제25권2호
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    • pp.1-8
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    • 2005
  • On-off differential controller is one of the very important components which affect the system performance of the active solar thermal system. In this study, analyses were made regarding the influence of "on-off" setting temperature on the system efficiency and on the electrical consumption by circulation pump. This study was performed by experiment as well as the computer simulation using TRNSYS program. The simulation system was developed in this study was verified the its reliability by the experimental results. As a results, the turn off temperature(${\Delta}T_{off}$) is much more influence than the turn on temperature(${\Delta}T_{on}$) on the system efficiency. It is more clear and sensitivity in winter season. Finally the optimum on-off setting value and the system on-off pattern according to the several different kind of system was also represented.

Application of Carbon-13 NMR spectroscopy to the chemistry of natural products

  • Yamasaki, Kazuo
    • Archives of Pharmacal Research
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    • 제3권1호
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    • pp.57-64
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    • 1980
  • Carbon-13 NMR spectroscopy(abbreviated CMR) is an extremely powerful strategy for the study of natural organic molecules. The information derivable from CMR is often complementary to that obtianed form proton NMR spectroscopy (PMR). Because of low natural abundance of $^{13}C$ nucleus (1.1%) coupled with low inherent sensitivity relative to $^{1}H$ (about 1/64), CMR experiment is approximately 6000 times less sensitive than PMR. Despite of this, now it is possible to measure CMR of small amount of compound by the development of three significant ingenious techniques, i. e. a) computer time-averaging, b) wide-band (or noise modulated) proton decoupling, and c) pulsed Fourier transform (FT) NMR : For general recognition of CMR, its fundamental aspects of CMR are briefly reviewed.

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Consideration for a Proper Stress Definition in Fatigue Analysis of Welded Structures

  • Kim, Myung-Hyun;Kang, Sung-Won
    • 대한용접접합학회:학술대회논문집
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    • 대한용접접합학회 2005년도 춘계학술발표대회 개요집
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    • pp.396-398
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    • 2005
  • At present, fatigue design of welded structures is primarily based on nominal stress or hot spot stress approach with a series of classified weld S-N curves. However, these methods are known to possess drawbacks, such as difficulty associated with defining proper nominal stress and the finite element sue sensitivity etc. Recently, a mesh-size insensitive structural stress definition is proposed by Battelle that gives a stress state at weld toe with relatively large mesh size. The structural stress definition is based on the elementary structural mechanics theory and provides an effective measure of a stress state in front of weld toe. As an experimental validation of the structural stress method in obtaining the fatigue strength of weldments, a series of experiment is carried out for various sizes of weldments. Based on the result from this study, it is expected to develop a more precise fatigue strength evaluation technique and to save time period required in the fatigue design of ship and offshore structures.

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측정 불확도 모형 분류 및 평가 (Model Classification and Evaluation of Measurement Uncertainty)

  • 최성운
    • 대한안전경영과학회지
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    • 제9권1호
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    • pp.145-156
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    • 2007
  • This paper is to propose model classification and evaluation of measurement uncertainty. In order to obtain type A and B uncertainty, variety of measurement mathematical models are illustrated by example. The four steps to evaluate expanded uncertainty are indicated as following; First, to get type A standard uncertainty, measurement mathematical models of single, double, multiple, design of experiment and serial autocorrelation are shown. Second, to solve type B standard uncertainty measurement mathematical models of empirical probability distributions and multivariate are presented. Third, type A and B combined uncertainty, considering sensitivity coefficient, linearity and correlation are discussed. Lastly, expanded uncertainty, considering degree of freedom for type A, B uncertainty and coverage factor are presented with uncertainty budget. SPC control chart to control expanded uncertainty is shown.

저 잡음 에르븀 첨가 광섬유 증폭기의 제작 및 광전차 증폭 실험 (Fabrication of low Noise Erbium-Doped Fiber Amplifier and Optical Preamplification Experiment)

  • 이상수;한정희;윤태열;이창희;심창섭
    • 전자공학회논문지A
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    • 제31A권6호
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    • pp.70-77
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    • 1994
  • A low noise erbium doped fiber amplifier for optical preamplification has been demonstrated. The amplifier incoporates an optical isolator in its midway to prevent decrease of population inversion at the input port due to backward traveling amplified spontaneous emission. Then, high gain and low noise can be achieved simultaneously. A small signal gain of 34dB and a noise figure of 5.5dB have been achieved. With this amplifier, we obtained a receiver sensitivity of -39.7dBm with back to back configuration and -39.3dBm with 47km normal fiber for 10$^{-9}$BER at 2.5Gbps direct modulated optical signal.

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