• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2007.06a
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• pp.123-123
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• 2007

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.112-114
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• 2002

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.78-81
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• 2003

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.136-140
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• 2003

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.141-145
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• 2003

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2003.12a
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• pp.186-191
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• 2003

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2002.11a
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• pp.97-99
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• 2002

• 제어로봇시스템학회:학술대회논문집
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• 2000.10a
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• pp.290-290
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• 2000

This paper presents some ideas about an open architectural controller platform for semiconductor manufacturing equipment First, we proposed modular-typed software architecture. Each module is composed of commands and status sets. Second, common bus protocol is suggested in order to communicate with other modules. It is designed with visual c++ programming. Finally, job program is consisted of simple commands and status. Consequently, Controllers are easily developed with some required modular assembling.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.05a
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• pp.125-128
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• 2005

The equipments in semi-conductor, display and measurement fields require high precision and resolution positioning technology. High positioning control can be carried out by using linear motors with little vibration, backlash and friction. In this paper, the acceleration patterns of the moving Part are analyzed to obtain the optimum pattern which leads to the less vibration reduction of equipment. In addition, the effect of friction force in guide rail on position control accuracy is investigated to identify possibility of using current bearing system for nano-positioning control.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2004.05a
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• pp.249-252
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• 2004

냉음극관(CCFL) 램프를 이용한 멀티램프 구동용 인버터를 제작 한 후 이를 이용하여 휘도 $20,000 cd/\textrm{m}^2$, 휘도 균일도 85%의 장비용 백라이트를 제작하였다. 이러한 고휘도, 높은 휘도 균일도의 직하방식 백라이트를 이용하여 기존의 형광등을 이용한 검사장비 보다 고휘도, 박형의 장수명 백라이트를 제작하였다.