• Journal of the Semiconductor & Display Technology
• /
• v.5 no.1 s.14
• /
• pp.27-31
• /
• 2006

Non-contact transportation system using air cushion for the manufacturing of large-sized LCD panels was considered. Flow characteristics between air pad and glass plate was analyzed using computational fluid dynamics method to obtain optimized air pad configurations. Effects of the design variables such as hole arrays from which gas is injected, gas-feeding method into the gas supplying channels, and horizontal and vertical pitches of clusters of holes were studied. Optimized air pad unit gave evenly distributed pressure contour on the glass surface and well-suspended levitation height in the experiment.

• Journal of the Semiconductor & Display Technology
• /
• v.10 no.1
• /
• pp.101-105
• /
• 2011

In case of high-tech process industries such as semiconductor and TFT-LCD manufactures, fault of a virtually finished product that is value-added one, since it has gone throughout the most of processes, may give rise to quality cost nearly amount to its selling price and can be a main cause that decreases the efficiency of manufacturing process. This paper proposes a real-time dispatching algorithm for semiconductor manufacturing process with rework. In order to evaluate the proposed algorithm, this paper examines the performance of the proposed method by comparing it with that of the existing dispatching algorithms, based on various experimental data.

• Transactions of the Korean Society of Machine Tool Engineers
• /
• v.16 no.5
• /
• pp.162-165
• /
• 2007

TFT-LCD process has two advantages as compared with the semiconductor-process. It is that cycle time is short and number of the final products are small. But it needs complicated inspection / assembly line to be treated manually and much higher labor costs in the TFT-LCD process. Also, It is necessary to build PICS(Production Information and Control System) which is automated and intelligent. In this paper, an automated process of LCD module assembly line that can increase productivity and reduce the cost of production to strengthen the competitiveness corresponding with global market is planned in comparison with its manual/semi-auto. It is noted that The automated line for COG$\sim$FOG process replacing with the existing facilities had the following effects; the productivity is increased to about 1.5 times and labor cost reduced 85%. In addition, whole assembly line can be short and simple.

• Journal of the Semiconductor & Display Technology
• /
• v.14 no.1
• /
• pp.45-49
• /
• 2015

Process gases with vapor or liquid phase as well as gas phase may experience alteration in itself or be contaminated in the fluid pipe to the process chamber. And thus it result in as particles or defects on the substrates in semiconductor, LCD, LED manufacturing. Purifiers and filters are used for control of contamination. However, none of detection device is available in the delivery line. In this paper, we propose simple device with lighting and sensing in order to predict contamination of the fluid or the tube wall. For some general purpose gases, it showed constant voltage output regardless of the flow rates. But, the smoke and the moisture in the air lowered the figure due to its concentration. Numerical values for several solid and liquid media were obtained. And, the operating temperature tendency was investigated.

• Journal of the Semiconductor & Display Technology
• /
• v.11 no.4
• /
• pp.31-36
• /
• 2012

The high thrust of the linear motor in the exposer generates the high temperature heat by the friction and the electromagnetic forces on its coil. It can cause the thermal deformation and the accuracy of the equipment is finally decreased which has a bad effect on the productivity. In this research, the heat and flow on the linear motor of the exposer has been analyzed. The existing equipment is non-contact fluid refrigerant type. The numerical analysis data of the existing equipment have been acquired and the reliability of the data has been verified. The revised modeling for the next-generation is suggested for cooling the exposer effectively.

• Journal of the Semiconductor & Display Technology
• /
• v.16 no.2
• /
• pp.98-105
• /
• 2017

In the display industry, the residual vibration of the transfer robot can increase the process time and cause the breakage of the glass substrate, which is critical to productivity of display manufacturing. In this paper, the natural frequencies of transfer robot are analyzed by finite element method. On the basis of the analyzed data, we investigated the response characteristics of input shaping control with or without the glass presence on the hand of the transfer robot using MATLAB program, and compared with the current response characteristics of input shaping control applied to the industry. Based on this, we suggest an optimal residual vibration control method for the practical application in display industry.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.12 no.5
• /
• pp.141-148
• /
• 2013

There are several problems in the conventional 2-D image processing and 3-D measurement systems. In the case of the 2-D image processing system, it is not possible to detect elevation data. In a 3-D measurement system, it requires a skillful operator and a lot of time for measuring data. Also, there exist data errors depending on operators. The limitation of detecting elevation data in the 2-D image processing system can be solved by laser diodes. In this study an algorithm that measures the accurate data in a subject face to be detected by combining laser diodes and a commercial CCD camera is developed. In the development process, a planar equation is developed using laser diodes and the equation is used to obtain a normal vector. Based on the results, an algorithm that transforms commercial CCD camera coordinates to 3-D coordinates is proposed. The completed measurement method will be applied to replace a manual measurement system for vehicle bodies and parts by an automated system.

• Journal of the Semiconductor & Display Technology
• /
• v.3 no.4
• /
• pp.51-55
• /
• 2004

In the design stage of high precision manufacturing/inspection FAB facilities, it is necessary to investigate the allowable vibration limits of high precision equipments and to study structural dynamic characteristics of C/R and Sub-structure in order to provide structural vibration criteria to satisfy these allowable limits. The goal of this study is to investigate the dynamic characteristics of PC-Type mock-up structures designed for next generation TFT-LCD FAB through experiments and analysis procedures. Therefore, in order to provide a proper dynamic structural design for high precision manufacturing/inspection work process, these allowable limits must be satisfied.

• Fire Science and Engineering
• /
• v.26 no.5
• /
• pp.41-47
• /
• 2012

As a core process in the manufacture of state-of-the-art industrial technologies such as semiconductor and LCD, a clean room is the most important process which can affect the performance and quality of products drastically. Nevertheless, scientific research on comprehensive safety measures from a fire protection standpoint is not being carried out in Korea. This study aims to derive measures to improve smoke control systems by identifying performance and problems of smoke systems installed in clean rooms as an LCD manufacturing process and analyzing fire and evacuation simulations considering several scenarios. As a result of analysis of fires and smoke in a clean roomas an LCD manufacturing process, it is found to be necessary to stop air handling units through interlocking in case of a fire and exhaust smoke out of the room through the top of FAB in consideration of buoyancy of smoke. It is also found to be necessary to install quick response sprinkler heads and accessories to accelerate the response time, because the heat-accumulating performance of sprinkler heads decreases in this application. Despite its low density of dwelling due to the automation process, clean room is characterized by an array of complex production equipment and working environment requiring dustproof clothes, which makes it difficult to acquire evacuation safety performance. Thus, thorough control of danger factors in processes and periodic education and training are required. It is also necessary to establish a level of domestic technologies equivalent to the level of standards of advanced countries in fire protection.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.3 no.3
• /
• pp.52-57
• /
• 2004

Many kinds of gases, such as erosion gas, dilution gas, and toxic gas have been used in manufacturing process of LCD at semiconductor. In order to increase accumulation rate of manufacturing process, high degree of purity in these gases and minimized metalllic dust are required. All wetted stainless steel surface must be 316L electro-polished with $0254{\mu}m$ in average. Based on the AES analysis, Cr/Fe 11 and $Cr_2O_3$ thickness $25{\AA}$ are measured Molybdenum and silicon contaminants which is characteristic of stainless steel and oxygen were found on the surface.