Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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Method of Reducing Residual Vibration at the LCD Transfer Robot

디스플레이 반송로봇 잔류진동 저감방안

  • Moon, Sung Bae (Graduate Department of Mechatronics Engineering, Korea University of Technology and Education) ;
  • Rim, Kyung-Hwa (School of Mechatronics Engineering, Korea University of Technology and Education)
  • 문성배 (한국기술교육대학교 대학원 메카트로닉스공학과) ;
  • 임경화 (한국기술교육대학교 메카트로닉스공학부)
  • Received : 2017.06.21
  • Accepted : 2017.06.23
  • Published : 2017.06.30
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Abstract

In the display industry, the residual vibration of the transfer robot can increase the process time and cause the breakage of the glass substrate, which is critical to productivity of display manufacturing. In this paper, the natural frequencies of transfer robot are analyzed by finite element method. On the basis of the analyzed data, we investigated the response characteristics of input shaping control with or without the glass presence on the hand of the transfer robot using MATLAB program, and compared with the current response characteristics of input shaping control applied to the industry. Based on this, we suggest an optimal residual vibration control method for the practical application in display industry.

Keywords

References

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