• 제목/요약/키워드: selective addition

검색결과 821건 처리시간 0.03초

$Si_2H_6$$H_2$ 가스를 이용한 LPCVD내에서의 선택적 Si 에피텍시 성장에 미치는 산소의 영향 (The effects of oxygen on selective Si epitaxial growth using disilane ane hydrogen gas in low pressure chemical vapor deposition)

  • 손용훈;박성계;김상훈;이웅렬;남승의;김형준
    • 한국진공학회지
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    • 제11권1호
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    • pp.16-21
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    • 2002
  • $Si_2H_6$가스를 이용한 LPCVD내에서의 실리콘의 선택적 에피텍시 성장을 $1000^{\circ}C$ 이하의 초청정 분위기하의 저온에서 수행하였다. HCI 첨가없이 초청정 공정으로 인한 양질의 에피텍시 Si층이 균일하게 얻어 졌으며, $SiO_2$위에 증착된 실리콘의 잠복기를 발견할 수 있었다. 단결정위의 에피텍시 층은 산화물 층위 보다 더 두껍게 증착되었다. 산소첨가로 잠복기가 20~30초간 증가하였다. 증착된 박막의 절단면과 표면 형상은 SEM으로 관찰되었으며, XRD를 통해 막질을 평가하였다.

SiCl$_4$와 Cl$_2$가스에 의한 InP, InGaAs 및 InAIAs의 반응성 이온 식각: 가스유량, rf 전력, 공정압력, Ar 첨가의 영향 (Reactive Ion Etching of InP, InGaAs and InAIAs by SiCl$_4$ and Cl$_2$ Gases: Effects of Gas Flow Rate, rf Power, Process Pressure and Ar Addition)

  • 유재수;송진동;배성주;정지훈;이용탁
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2001년도 하계종합학술대회 논문집(2)
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    • pp.25-28
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    • 2001
  • In this paper, we have investigated the effects of gas flow rate, rf power, process pressure and Ar addition on reactive ion etching of InP, InGaAs and InAlAs using Sic14 and Cl$_2$ gases. The etch rates were measured by using a surface profiler. The etched profiles, sidewall roughness, and surface morphology were observed by scanning electron microscopy and by atomic force microscopy. The selective etching of InGaAs to InP and InAlAs was studied by varying the etching parameters. It was found that Cl$_2$ gas is more efficient for the selective etching of InGaAs to InAlAs than SiCl$_4$ gas. The etch selectivity of InGaAs to InAlAs is strongly dependent on the rf power and the process pressure.

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기판 표면 기능화에 의한 실리카 나노입자의 선택적 패턴 성장 (Selective Pattern Growth of Silica Nanoparticles by Surface Functionalization of Substrates)

  • 김기출
    • 한국산학기술학회논문지
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    • 제21권4호
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    • pp.20-25
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    • 2020
  • 나노과학과 나노기술의 발전에 따라 선택적 패턴 성장을 위한 기술이 주목을 받고 있다. 실리카(Silica) 나노입자는 바이오 라벨링, 바이오 이미징 및 바이오 센싱에 사용되고 있는 유망한 나노소재이다. 본 연구에서는 실리카 나노입자를 수정된 스토버 방법(Stöber Method)인 졸겔(Sol-Gel) 공정으로 합성하였다. 또한 기판의 표면을 미세접촉프린팅 기술로 발수 처리하여 실리카 나노입자를 선택적으로 패턴 성장시켰다. 합성된 실리카 나노입자의 크기와 선택적으로 패턴 성장된 실리카 나노입자의 표면형상을 전계방출 주사전자현미경(Field Emission Scanning Electron Microscopy, FE-SEM)으로 조사하였고, 기판의 표면 기능화에 따른 기판의 접촉각 특성을 조사하였다. 그 결과 OTS 용액으로 발수 처리된 기판에서는 실리카 나노입자를 스핀 코팅하였을 때, 실리카 나노입자를 관찰할 수 없었으나, KOH 용액으로 친수 처리된 기판에서는 실리카 나노입자가 잘 코팅되는 것을 확인하였다. 또한 미세접촉프린팅 기술로 발수 처리한 기판영역 외에서만 실리카 나노입자가 선택적으로 패턴 성장하는 것을 FE-SEM으로 확인하였다. 이러한 실리카 나노입자의 패턴성장 특성을 염료가 도핑 된 실리카 나노입자에 적용한다면, 실리카 나노입자의 패턴 성장 기술은 바이오 이미징 및 바이오 센싱 분야에 유용하게 활용될 것으로 기대된다.

The Selective Visualization of Lignin Peroxidase, Manganese Peroxidase and Laccase, Produced by White Rot Fungi on Solid Media

  • Ryu, Won-Youl;Jang, Moon-Yup;Cho, Moo-Hwan
    • Biotechnology and Bioprocess Engineering:BBE
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    • 제8권2호
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    • pp.130-134
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    • 2003
  • A visual method for the selective screen Eng of lignin degrading enzymes, produced by white rot fungi (WRF), was investigated by the addition of coloring additives to solid media. Of the additives used in the enzyme production media, guaiacol and RBBR could be used for the detection of lignin peroxidase (LiP), manganese peroxidase (MnP) and lactase. Syringaldazine and Acid Red 264 were able for the detection of both the MnP and lactase, and the LiP and laccase, respectively, and a combination of these two additives was able to detect each of the ligninases produced by the WRF on solid media.

실리콘 선택적 기상 성장을 이용한 마이크로 센서에 응용되는 구조물 제조법 (Application of selective Epitaxial Growth of Silicon on MEMS Structure)

  • 박정호;김종관;김상영;성영권
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1995년도 하계학술대회 논문집 C
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    • pp.1025-1027
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    • 1995
  • SEG(Selective Epitaxial Growth) and ELO(Epitaxial Lateral Growth) of Silicon offer new opportunities in the fabrication of MEMS(Micro Electro-Mechanical Systems) structures. SEG of silicon enables the stacking of junctions in addition to those resulting from the standard bipolar process and this properly was utilized for the fabrication of an improved-performance color sensor. When the crystalline growth takes place through the seed windows and proceeds over the dielectric, after reaching the surface, it form an ELO silicon layer and this ELO-Si can be modified into various structures for MEMS application such as cantilevers, beams, diaphragms.

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Dehydrogenation of Ethylbenzene with Carbon Dioxide as Soft Oxidant over Supported Vanadium-Antimony Oxide Catalyst

  • Hong, Do-Young;Vislovskiy, Vladislav P.;Park, Sang-Eon;Park, Min-Seok;Yoo, Jin-S.;Chang, Jong-San
    • Bulletin of the Korean Chemical Society
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    • 제26권11호
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    • pp.1743-1748
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    • 2005
  • This work presents that carbon dioxide, which is a main contributor to the global warming effect, could be utilized as a selective oxidant in the oxidative dehydrogenation of ethylbenzene. The dehydrogenation of ethylbenzene over alumina-supported vanadium-antimony oxide catalyst has been studied under different atmospheres such as inert nitrogen, steam, oxygen or carbon dioxide as diluent or oxidant. Among them, the addition of carbon dioxide gave the highest styrene yield (up to 82%) and styrene selectivity (up to 97%) along with stable activity. Carbon dioxide could play a beneficial role of a selective oxidant in the improvement of the catalytic behavior through the oxidative pathway.

Facile and Selective Synthesis of ZnO Hollow or Crumpled Spheres and Their Photocatalytic Degradation Activities

  • Choi, Yomin;Lee, Young-In
    • 한국세라믹학회지
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    • 제55권3호
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    • pp.261-266
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    • 2018
  • Hollow or bumpy ZnO structures with micrometer-size features have been investigated as photocatalysts for water purification due to their high surface area available for reaction with harmful organic molecules and relatively large size for easy separation after finishing the photocatalytic reaction. In this study, selective synthesis of ZnO hollow or crumpled microspheres was performed using a simple and versatile ultrasonic spray pyrolysis process with various zinc precursors. The morphologies, phases, specific surface areas, and optical properties of the microspheres were characterized using X-ray diffraction, scanning electronic microscopy, nitrogen adsorption-desorption isotherms, and UV-vis spectroscopy. In addition, the mechanism underlying the formation of different morphologies and their photocatalytic activities were systematically investigated.

"Turn-on" type colorimetric/fluorimetric probe for selective detection of Cu2+ at neutral pH condition

  • Lee, Hyun Jung;Saleem, Muhammad;Lee, Ki Hwan
    • Rapid Communication in Photoscience
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    • 제4권4호
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    • pp.88-90
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    • 2015
  • The design and development of fluorescent chemosensors have recently been intensively explored for sensitive and specific detection of environmentally and biologically relevant metal ions in aqueous solution and living cells. Herein, we report the photophysical results of rhodamine B based fluorogenic and chromogenic receptor for selective copper detection in the complete organic or mixed aqueous-organic media at neutral pH under ambient condition. The ligand exhibited the remarkable increment in the fluorescence emission and UV-visible absorption signal intensities at 587 and 547 nm, respectively, on induction of copper ion while the ligand solution remain completely silent on addition of varieties of other metal ions.

교환법칙을 만족하는 비다양체 모델의 선택적 불리안 작업의 개발 (Development of the Selective Boolean Operations on Non-Manifold Models)

  • 이상헌;이강수;박상근
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 춘계학술대회 논문집
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    • pp.836-839
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    • 2002
  • This paper describes the selective Boolean operations on non-manifold geometric models whose union and subtraction operations are communicative. These operations guarantee the same resulting shape in spite of change of the order of Boolean operations, and the integrity of the model for omission of some features. In addition, a B-rep model for a modified modeling history is obtained in a short time, as no boundary evaluation is necessary. These features enable easy implementation of multi-resolution representation of B-rep models.

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Hierarchical Identity-Based Encryption with Constant-Size Private Keys

  • Zhang, Leyou;Wu, Qing;Hu, Yupu
    • ETRI Journal
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    • 제34권1호
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    • pp.142-145
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    • 2012
  • The main challenge at present in constructing hierarchical identity-based encryption (HIBE) is to solve the trade-off between private-key size and ciphertext size. At least one private-key size or ciphertext size in the existing schemes must rely on the hierarchy depth. In this letter, a new hierarchical computing technique is introduced to HIBE. Unlike others, the proposed scheme, which consists of only two group elements, achieves constant-size private keys. In addition, the ciphertext consists of just three group elements, regardless of the hierarchy depth. To the best of our knowledge, it is the first efficient scheme where both ciphertexts and private keys achieve O(1)-size, which is the best trade-off between private-key size and ciphertext size at present. We also give the security proof in the selective-identity model.