• Korean Journal of Materials Research
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• v.13 no.1
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• pp.43-47
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• 2003

As and BF$_2$dopants are implanted for the formation of source/drain with dose of 1${\times}$10$^{15}$ ions/$\textrm{cm}^2$∼5${\times}$10$^{15}$ ions/$\textrm{cm}^2$ then formed cobalt disilicide with Co/Ti deposition and doubly rapid thermal annealing. Appropriate ion implantation and cobalt salicide process are employed to meet the sub-0.13 $\mu\textrm{m}$ CMOS devices. We investigated the process results of sheet resistance, dopant redistribution, and surface-interface microstructure with a four-point probe, a secondary ion mass spectroscope(SIMS), a scanning probe microscope (SPM), and a cross sectional transmission electron microscope(TEM), respectively. Sheet resistance increased to 8%∼12% as dose increased in $CoSi_2$$n^{＋}$ and $CoSi_2$$p^{V}$ , while sheet resistance uniformity showed very little variation. SIMS depth profiling revealed that the diffusion of As and B was enhanced as dose increased in $CoSi_2$$n^{＋}$ and $CoSi_2$$p^{＋}$ . The surface roughness of root mean square(RMS) values measured by a SPM decreased as dose increased in $CoSi_2$$n^{＋}$ , while little variation was observed in $CoSi_2$$p^{＋}$ . Cross sectional TEM images showed that the spikes of 30 nm∼50 nm-depth were formed at the interfaces of $CoSi_2$$n^{＋}$ / and $CoSi_2$/$p^{＋}$, which indicate the possible leakage current source. Our result implied that Co/Ti cobalt salicide was compatible with high dose sub-0.13$\mu\textrm{m}$ process.

• Journal of Korean Society for Atmospheric Environment
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• v.32 no.5
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• pp.526-535
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• 2016

Recently, fine dust in atmosphere have been considerably issued as a harmful element for human. Nitrogen oxide ($NO_x$) exhausted from diesel engines and power plants has been disclosed as a main source of secondary production of fine dust. In order to prevent exhausting these nitrogenous compounds into atmosphere, a treatment system with selective catalytic reduction (SCR) catalyst with ammonia as a reductant has been used in various industries. Urea solution has been widely studied to supply ammonia into a SCR catalytic reactor, safely. However, the conversion of urea solution to ammonia has several challenges, especially on a slow conversion velocity. In the present study, a fast urea conversion system including a plasma burner was suggested and designed to evaluate the performances of urea conversion and initial operation time. A designed lab-scale facility has a plasma burner, urea nozzle, mixer, and SCR catalyst which is for hydrolysis of isocyane. Flow rate of methane that is a fuel of the plasma burner was varied to control temperatures in the urea conversion facility. From experimental results, it is found that urea can be converted into ammonia using high temperature condition of above $400^{\circ}C$. In the designed test facility, it is found that ammonia can be produced within 1 min from urea injection and the result shows prospect commercialization of proposed technology in the SCR facilities.

• The Journal of the Korea Contents Association
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• v.14 no.2
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• pp.457-466
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• 2014

During irradiation of lesions in cancer treatment with high energy electrons, normal tissue and critical organs are protected by the shielding material. Scattered radiation that generated the shielding materials affect the depth dose and atomic number. Therefore, we want to examine secondary particles and the scattered photons through calculation and its associated analysis, and compare the measurement for the aluminum, copper, and lead shielding substance of which thickness has 95% charge reduction. Dose change rate which effected scattering radiation was found to be +0.88% for material thickness, +0.43% for atomic number, and +19.70%, +15.20%, +12.40% for measurement, +25.00%, +15.10%, +13.70% for calculation on the aluminum, copper, and lead materials of which thickness has 95% charge reduction, respectively, As a result, we found that scattering rate was dependent on thickness than atomic number. In the dose increasing rate, scattered electrons are more important than scattered photon. For the above mentioned reasons, I think that high atomic number materials should be applied to reduce scattered radiation that generated with thickness effect.

• Structural Engineering and Mechanics
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• v.76 no.2
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• pp.153-162
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• 2020

Aiming at the mechanical and structural characteristics of the contact zone composite rock, the shear tests and numerical studies were carried out. The effects of the differences in mechanical properties of different materials and the normal stress on shear properties of contact zone composite samples were analyzed from a macro-meso level. The results show that the composite samples have high shear strength, and the interface of different materials has strong adhesion. The differences in mechanical properties of materials weakens the shear strength and increase the shear brittleness of the sample, while normal stress will inhibit these effect. Under low/high normal stress, the sample show two failure modes, at the meso-damage level: elastic-shearing-frictional sliding and elastic-extrusion wear. This is mainly controlled by the contact and friction state of the material after damage. The secondary failure of undulating structure under normal-shear stress is the nature of extrusion wear, which is positively correlated to the normal stress and the degree of difference in mechanical properties of different materials. The increase of the mechanical difference of the sample will enhance the shear brittleness under lower normal stress and the shear interaction under higher normal stress.

• Journal of Powder Materials
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• v.27 no.2
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• pp.126-131
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• 2020

The grain growth behavior of M-type Sr hexaferrite (SrM) grains is investigated with the addition of MnCO₃. First, the SrM powder is synthesized by a conventional solid-state reaction. The powder compacts of SrM are sintered at 1250℃ for 2 h with various amounts of MnCO₃ (0, 0.5, 1.0, and 4.0 mol%). There is no secondary solid phase in any of the sintered samples. Relative density increases when MnCO₃ is added to the SrM. Obvious abnormal grain growth does not appear in any of the SrM samples with MnCO₃. The average grain size increases when 0.5 mol% MnCO₃ is added to the SrM. However, as the amount of MnCO₃ increase to over 0.5 mol%, the average grain size decreases. These observations allow us to conclude that the growth of SrM grains is governed by the two-dimensional nucleation grain growth mechanism, and the critical driving force for the growth of a grain decreases as the amount of MnCO₃ increases.

• Corrosion Science and Technology
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• v.12 no.6
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• pp.274-279
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• 2013

Flow accelerated corrosion (FAC) of the carbon steel piping in nuclear power plants (NPPs) has been major issue in nuclear industry. During the FAC, a protective oxide layer on carbon steel dissolves into flowing water leading to a thinning of the oxide layer and accelerating corrosion of base material. As a result, severe failures may occur in the piping and equipment of NPPs. Effect of alloying elements on FAC of pipe materials was studied with rotating cylinder FAC test facility at $150^{\circ}C$ and at flow velocity of 4m/s. The facility is equipped with on line monitoring of pH, conductivity, dissolved oxygen(DO) and temperature. Test solution was the demineralized water, and DO concentration was less than 1 ppb. Surface appearance of A 106 Gr. B which is used widely in secondary pipe in NPPs showed orange peel appearance, typical appearance of FAC. The materials with Cr content higher than 0.17wt.% showed pit. The pit is thought to early degradation mode of FAC. The corrosion product within the pit was enriched with Cr, Mo, Cu, Ni and S. But S was not detected in SA336 F22V with 2.25wt.% Cr. The enrichment of Cr and Mo seemed to be related with low, solubility of Cr and Mo compared to Fe. Measured FAC rate was compared with Ducreaux's relationship and showed slightly lower FAC rate than Ducreaux's relationship.

• Corrosion Science and Technology
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• v.16 no.3
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• pp.115-127
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• 2017

Coal tar-coated pipes buried in a domestic nuclear power plant have operated under the cathodic protection. This work conducted the simulation of the coating performance of these pipes using a FEM method. The pipes, being ductile cast iron have been suffered under considerably high cathodic protection condition beyond the appropriate condition. However, cathodic potential measured at the site revealed non-protected status. Converting from 3D CAD data of the power plant to appropriate type for a FEM simulation was conducted and cathodic potential under the applied voltage and current was calculated using primary and secondary current distribution and physical conditions. FEM simulation for coal tar-coated pipe without defects revealed over-protection condition if the pipes were well-coated. However, the simulation for coal tar-coated pipes with many defects predict that the coated pipes may be severely degraded. Therefore, for high risk pipes, direct examination and repair or renewal of pipes are strongly recommended.

• Transactions of the Korean hydrogen and new energy society
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• v.18 no.4
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• pp.365-373
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• 2007

We optimized the compositions of electrolyte and additives for anode in Ni-MH battery to improve the electrode characteristics at ambient and low temperatures using response surface method(RSM). Among various additives for anode, PTFE exhibited the greatest influence on the discharge capacity of the anode. Through response optimization process, we found the optimum composition of the additives to exhibit the greatest discharge capacity. When the amount of additives was too small, the anode was degraded with time due to the low binding strength among alloy powders and the resultant separation of powders from the current collector. In contrast, the addition of large amount of the additives increased in the resistance of the electrode. In addition, the discharge capacity of the anode at $-18^{\circ}C$ increased with decreasing the concentration of KOH, NaOH and LiOH in design range of electrolyte. The resistance and viscosity of electrolyte appear to affect the discharge capacity of the anode at low temperature.

• Proceedings of the Korea Association of Crystal Growth Conference
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• 1996.06a
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• pp.422-448
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• 1996

Low-temperature epitaxial growth of Si and SiGe layers of Si is one of the important processes for the fabrication of the high-speed Si-based heterostructure devices such as heterojunction bipolar transistors. Low-temperature growth ensures the abrupt compositional and doping concentration profiles for future novel devices. Especially in SiGe epitaxy, low-temperature growth is a prerequisite for two-dimensional growth mode for the growth of thin, uniform layers. UHV-ECRCVD is a new growth technique for Si and SiGe epilayers and it is possible to grow epilayers at even lower temperatures than conventional CVD's. SiH and GeH and dopant gases are dissociated by an ECR plasma in an ultrahigh vacuum growth chamber. In situ hydrogen plasma cleaning of the Si native oxide before the epitaxial growth is successfully developed in UHV-ECRCVD. Structural quality of the epilayers are examined by reflection high energy electron diffraction, transmission electron microscopy, Nomarski microscope and atomic force microscope. Device-quality Si and SiGe epilayers are successfully grown at temperatures lower than 600℃ after proper optimization of process parameters such as temperature, total pressure, partial pressures of input gases, plasma power, and substrate dc bias. Dopant incorporation and activation for B in Si and SiGe are studied by secondary ion mass spectrometry and spreading resistance profilometry. Silicon p-n homojunction diodes are fabricated from in situ doped Si layers. I-V characteristics of the diodes shows that the ideality factor is 1.2, implying that the low-temperature silicon epilayers grown by UHV-ECRCVD is truly of device-quality.

• Journal of the Korea Society of Computer and Information
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• v.19 no.12
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• pp.369-384
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• 2014

Since the start of gifted education in 2002, educational support system has now been established, and sufficient growth in quantitative aspects has been achieved in Korea. On the other hand, they report that there are insufficient points in terms of education quality. In other words, most of the gifted education simply expands knowledge by prior-learning. In order to improve the quality of gifted education, they should enhance critical-thinking and creativity able to apply interdisciplinary principles or phenomena for solving problems. In this study, we designed and developed a convergent teaching-learning materials based on the concept of integrated education, which explore the process that basic logic operations such as AND, OR, XOR do the role of computer cells. A survey result showed that student satisfaction(usefulness, understanding, interest) of the materials is significantly higher than that of other traditional learning topics, and the design intent was met.