• Proceedings of the Korean Vacuum Society Conference
• /
• 2006.02a
• /
• pp.93-93
• /
• 2006

• Proceedings of the Korean Vacuum Society Conference
• /
• 2007.08a
• /
• pp.138-138
• /
• 2007

• Polymer Science and Technology
• /
• v.24 no.5
• /
• pp.528-534
• /
• 2013

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2008.10a
• /
• pp.91-94
• /
• 2008

Newly developed Atom Probe Tomography (APT) technique can provide the highest available spatial resolution, 3D tomography imaging and quantitative chemical analysis in a sub-nm scale. As a complementary technique to APT, Nano-secondary ion Mass Spectroscopy (SIMS) also provides the boron distribution in micro-scale. Therefore, the exact behavior of boron at either grain boundary or grain interior in steels can be investigated by the combination of APT and SIMS techniques from the sub-nanometer scale to the micrometer scale. The results obtained by both APT and SIMS revealed that the boron atoms were mainly segregated to the grain boundaries rather than to the grain interior in the steels containing 50ppm and 100ppm boron. It also found that carbon atoms were segregated at the boron enriched regions, which were thought to be retained austenite phase due to the chemical composition of carbon atoms.

• Korean Journal of Materials Research
• /
• v.25 no.9
• /
• pp.497-502
• /
• 2015

The hardenability of boron steel specimens with different molybdenum and chromium contents was investigated using dilatometry and microstructural observations, and then was quantitatively measured at a critical cooling rate corresponding to 90 % martensite hardness obtained from a hardness distribution plotted as a function of cooling rate. Based on the results, the effect of an austenitizing temperature on the hardenability and tensile properties was discussed in terms of segregation and precipitation behavior of boron atoms at austenite grain boundaries. The molybdenum addition completely suppressed the formation of pro-eutectoid ferrite even at the slowest cooling rate of $0.2^{\circ}C/s$, while the chromium addition did at the cooling rates above $3^{\circ}C/s$. On the other hand, the hardenability of the molybdenum-added boron steel specimens decreased with an increasing austenitizing temperature. This is associated with the preferred precipitation of boron atoms since a considerable number of boron atoms could be concentrated along austenite grain boundaries by a non-equilibrium segregation mechanism. The secondary ion mass spectroscopy results showed that boron atoms were mostly segregated at austenite grain boundaries without noticeable precipitation at higher austenitization temperatures, while they formed as precipitates at lower austenitization temperatures, particularly in the molybdenum-added boron steel specimens.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.15 no.7
• /
• pp.576-582
• /
• 2002

Nonvolatile semiconductor memory devices with reoxidized nitrided oxide(RONO) gate dielectrics were fabricated, and nitrogen distribution and bonding species which contribute to memory characteristics were analyzed. Also, memory characteristics of devices depending on the anneal temperatures were investigated. The devices were fabricated by retrograde twin well CMOS processes with $0.35\mu m$ design rule. The processes could be simple by in-situ process in growing dielectric. The nitrogen distribution and bonding states of gate dielectrics were investigated by Dynamic Secondary Ion Mass Spectrometry(D-SIMS), Time-of-Flight Secondary Ion Mass Spectrometry(ToF-SIMS), and X-ray Photoelectron Spectroscopy(XPS). As the nitridation temperature increased, nitrogen concentration increased linearly, and more time was required to form the same reoxidized layer thickness. ToF-SIMS results showed that SiON species were detected at the initial oxide interface which had formed after NO annealing and $Si_2NO$ species within the reoxidized layer formed after reoxidation. As the anneal temperatures increased, the device showed worse retention and degradation properties. It could be said that nitrogen concentration near initial interface is limited to a certain quantity, so the excess nitrogen is redistributed within reoxidized layer and contribute to electron trap generation.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.37 no.3
• /
• pp.27-33
• /
• 2000

The selective chemical vapor deposition techniques for Cu metallization were studied. For enhancing the selectivity, furnace annealing and N$_{2}$ plasma were treated on patterned TiN/BPSG prior to the copper deposition. As a result, Cu did not deposited lead to suppressing the nucleation on BPSG singificantly. With the increasement the plasma treatment temperature, copper nucleation on BPSG was suppressed mote effectively, From TOF-SIMS(Time-of-Flight Secondary ion Mass Spectrometry), it is considered that annealing and N$_{2}$ plasma treatment remove hydroxyl(0-H) group so that eliminating the nucleation site for copper precursor enhance the selectivity.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2014.02a
• /
• pp.339.1-339.1
• /
• 2014

In this paper we studied the application of inter-poly dielectric as silicon dioxide-like film was deposited by the higher energy assisting deposition (HEAD) process the modified CCP process, which enables low temperature (LT) process and improving film density. In these experiments the relative hydrogen concentration of $SiO_2$-like films deposited on silicon substrate were analyzed by the secondary ion mass spectroscopy (SIMS) and it was shown that our lower hydrogenated oxide (LHO) film prepared by HEAD process with the precursor contained the siloxane species had lower hydrogen concentration, $8{\times}10{\cdot}^{22}cm{\cdot}^3$ than that of the commercial undoped silicon glass (USG) film ($1{\times}10{\cdot}^{21}cm{\cdot}^3$) prepared by the high density plasma-chemical vapor deposition (HDP-CVD). We consider that the LHO film deposited by HEAD process used as high performance material into Flash memory devices.

• Korean Journal of Materials Research
• /
• v.23 no.10
• /
• pp.555-561
• /
• 2013

The hardenability of low-carbon boron steels with different molybdenum and chromium contents was investigated using dilatometry, microstructural observations and secondary ion mass spectroscopy (SIMS), and then discussed in terms of the segregation and precipitation behaviors of boron. The hardenability was quantitatively evaluated by a critical cooling rate obtained from the hardness distribution plotted as a function of cooling rate. It was found that the molybdenum addition was more effective than the chromium addition to increase the hardenability of boron steels, in contrast to boron-free steels. The addition of 0.2 wt.% molybdenum completely suppressed the formation of eutectoid ferrite, even at the slow cooling rate of $0.2^{\circ}C/s$, while the addition of 0.5 wt.% chromium did this at cooling rates above $3^{\circ}C/s$. The SIMS analysis results to observe the boron distribution at the austenite grain boundaries confirmed that the addition of 0.2 wt.% molybdenum effectively increased the hardenability of boron steels, as the boron atoms were significantly segregated to the austenite grain boundaries without the precipitation of borocarbide, thus retarding the austenite-to-ferrite transformation compared to the addition of 0.5 wt.% chromium. On the other hand, the synergistic effect of molybdenum and boron on the hardenability of boron steels could be explained from thermodynamic and kinetic perspectives.

• Nuclear Engineering and Technology
• /
• v.44 no.5
• /
• pp.491-500
• /
• 2012

The dissimilar metal joints welded between Ni-based alloy, Alloy 690 and low alloy steel, A533 Gr. B with Alloy 152 filler metal were characterized by using optical microscope, scanning electron microscope, transmission electron microscope, secondary ion mass spectrometry and 3-dimensional atom probe tomography. It was found that in the weld root region, the weld was divided into several regions including unmixed zone in Ni-base alloy, fusion boundary, and heat-affected zone in the low alloy steel. The result of nanostructural and nanochemical analyses in this study showed the non-homogeneous distribution of elements with higher Fe but lower Mn, Ni and Cr in A533 Gr. B compared with Alloy 152, and the precipitation of carbides near the fusion boundary.