• Title/Summary/Keyword: scan pattern

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Defect Inspection of Extreme Ultra-Violet Lithography Mask (극자외선 리소그래피용 마스크의 결함 검출)

  • Yi Moon-Suk
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.43 no.8 s.350
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    • pp.1-5
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    • 2006
  • At-wavelength inspection system of extreme Ultra-violet lithography was developed and the inspection results were compared with the optical mask inspection system by cross correlation experiments. In at-wavelength EUV mask inspection system, a raster scan of focused euv light is used to illuminate euv light to mask blank and specularly and non-specularly reflected euv light are detected by photo diode and microchannel plate. The cross correlation results between at-wavelength inspection tool and optical inspection tool shows strong correlation. Far-field scattering fringe pattern from programmed phase and opqque defect, which were detected by phosphor plate and CCD camera shows that distinct diffraction fringes were observed with fringe spacing dependent on the defect size.

Radiation Characteristics of an E-plane Linear Array Antenna Composed of Inductive Loaded Patch Antennas (Inductive loaded 마이크로스트립 패치 안테나를 이용한 E-평면 선형 배열 안테나의 방사 특성)

  • Yoon, Young-Min;Kwak, Eun-Hyuk;Kim, Jae-Hyun;Kim, Boo-Gyoun
    • Journal of the Institute of Electronics and Information Engineers
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    • v.50 no.7
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    • pp.59-67
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    • 2013
  • The radiation characteristics of an E-plane linear array antenna composed of inductive loaded patch antennas (ILPAs) are investigated. The radiation characteristics of an ILP array antenna are significantly improved compared to those of a conventional array antenna because the mutual coupling of an ILP array antenna is very small. The patch length of a $5{\times}2$ ILPA for the enhancement of the radiation characteristics of a 5-element E-plane linear array antenna composed of ILPAs is presented.

The Effect of Molecular Weight and the Linear Velocity of Drum Surface on the Properties of Electrospun Poly(ethylene terephthalate) Nonwovens

  • Kim, Kwan-Woo;Lee, Keun-Hyung;Khil, Myung-Seob;Ho, Yo-Seung;Kim, Hak-Yong
    • Fibers and Polymers
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    • v.5 no.2
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    • pp.122-127
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    • 2004
  • In this study, we evaluated the effect of the molecular weight of the polymer on electrospun poly(ethylene terephthalate) (PET) nonwovens, and their mechanical properties as a function of the linear velocity of drum surface. Polymer solutions and electrospun PET nonwovens were characterized by means of viscometer, tensiometer, scanning electron microscope(SEM), wide angle X-ray diffraction measurement (WAXD) and universal testing machine (UTM). By keeping the uniform solution viscosity, regardless of molecular weight differences, electrospun PET nonwovens with similar average diameter could be obtained. In addition, the mechanical properties of the electrospun PET nonwovens were strongly dependent on the linear velocity of drum surface. From the results of the WAXD scan, it was found that the polymer took on a particular molecular orientation when the linear velocity of drum surface was increased. The peaks became more definite and apparent, evolving from an amorphous pattern at 0 m/min to peaks and signifying the presence of crystallinity at 45 m/min.

Laser scribing for buried contact solar cell processing (전극함몰형 태양전지의 제조를 위한 레이저 scribing)

  • 조은철;조영현;이수홍
    • Electrical & Electronic Materials
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    • v.9 no.6
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    • pp.593-599
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    • 1996
  • Laser scribing of silicon plays an important role in metallization including the grid pattern and the front surface geometry which means aspect ratio of metal contacts. To make a front metal electrode of buried contact solar cell, we used ND:YAG lasers that deliver average 3-4W at TEM$\_$00/ mode power to sample stage. The Q-switched Nd:YAG laser of 1.064 gm wavelength was used for silicon scribing with 20-40.mu.m width and 20-200.mu.m depth capabilities. After silicon slag etching, the groove width and depth for buried contact solar cell are -20.mu.m and 30-50.mu.m respectively. Using MEL 40 Nd:YAG laser system, we can scribe the silicon surface with 18-23.mu.m width and 20-200.mu.m depth controlled by krypton arc lamp power, scan speed, pulse frequency and beam focusing. We fabricated a buried contact Silicon Solar Cell which had an energy conversion efficiency of 18.8 %. In this case, the groove width and depth are 20.mu.m and 50.mu.m respectively.

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Images of deposited layers of organic light-emitting diodes observed by scanning-electron microscope (주사 전자 현미경으로 관찰한 유기 발광 소자의 누적층 모양)

  • Lee, Eun-Hye;Yoon, Hee-Myoung;Han, Wone-Keun;Kim, Tae-Wan;Lee, Won-Jae;Jang, Kyung-Uk;Ahn, Joon-Ho
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.298-299
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    • 2008
  • Images of deposited layers of organic light-emitting diodes were observed by scanning-electron microscope (SEM). We were able to see a clear cross-sectional view of deposited layers. The SEM is a type of electron microscope that images the sample surface by scanning it with a high-energy beam of electrons in a raster scan pattern. A thickness of deposited layer measured by thickness monitor is close to a real value measured by a-step surface profiler within 5%. We were able to see a formation of domains of size about 50-100nm from a surface morphology of Al, and pin holes of size about 50nm.

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A Study on the Distribution of Plantar Pressure in Adult Hemiplegia during Gait with the Use of Cane

  • Cha, Yong-Jun;Kim, Kyoung
    • The Journal of Korean Physical Therapy
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    • v.22 no.3
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    • pp.49-53
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    • 2010
  • Purpose: The purpose of this study was to investigate the plantar pressure distribution between the affected and unaffected side in adult hemiplegia during gait with the use of a quad-cane. Methods: Thirty-four stroke patients from 34 to 83 years of age were enrolled in this study, and in random order, all patients were asked to walk at their most comfortable speed three times along a walkway with the use of quad-cane over a period of three days. Plantar pressure distribution was measured with regard to foot contact pattern and center of pressure (CoP) trajectories during the stance phase, progressing from heel-strike to toe-off. The F-scan system was used to compare the foot pressure of the affected and unaffected sides. Results: A significant reduction in the total contact area, the width of fore foot (FF) and hind foot (HF), and anterior/posterior (AP) CoP trajectory of the affected side was found. However, contact pressure of the hind foot on the affected side during walking increased when compared to that on the unaffected side. Conclusion: We demonstrated that plantar pressure distribution on the affected side of adult hemiplegia patients was generally poorer than that on the unaffected side when these patients walked with cane assistance. However, the use of a quad-cane was shown to increase contact pressure of the hind foot on the affected side because weight can be borne on the affected side during heel-strike with use of the cane.

A Fatal Complication Associated with Combined Posterior Petrous and Suboccipital Approach to a Giant Jugular Foramen Schwannoma - A Case Report - (하후두부 접근법과 후경추체 접근법에 의한 거대 경정맥공 신경초종의 제거술과 동반된 합병증 - 증례보고 -)

  • Koh, Sung-Bum;Koh, Young-Cho;Yoo, Heon;Park, Si-Young;Park, Hyo-IL
    • Journal of Korean Neurosurgical Society
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    • v.30 no.9
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    • pp.1144-1149
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    • 2001
  • Schwannomas of the jugular foramen, originating from the glossopharyngeal nerve, vagus and accessory nerve represent approximately 0.17-0.72% of all intracranial tumor, and consists of 1.4-2.9% of all intracranial schwannomas. The clinical presentation of these tumors varies significantly according to originated nerve and it's growth pattern. Magnetic resonance(MR) image and temporal bone computed tomography(CT) scan have a major role for diagnosis of such tumor. The treatment of choice is total resection whenever possible. Generally, suboccipital approach is sufficient for the removal of the tumor, but in case with large size, combination of resection of petrous part of temporal bone with or without transection of sigmoid sinus is may be necessory. We have recently experienced one case of giant jugular foramen schwannoma and postoperative fatal complication in a 34-year-old male who was treated with combined posterior petrous and suboccipital approach with transection of sigmoid sinus

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Laser Drilling System for Fabrication of Micro via Hole of PCB (인쇄회로기판의 미세 신호 연결 홀 형성을 위한 레이저 드릴링 시스템)

  • Cho, Kwang-Woo;Park, Hong-Jin
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.10
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    • pp.14-22
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    • 2010
  • The most costly and time-consuming process in the fabrication of today's multi-layer circuit board is drilling interconnection holes between adjacent layers and via holes within a layer. Decreasing size of via holes being demanded and growing number of via holes per panel increase drilling costs. Component density and electronic functionality of today's multi-layer circuit boards can be improved with the introduction of cost-effective, variable depth laser drilled blind micro via holes, and interconnection holes. Laser technology is being quickly adopted into the circuit board industry but can be accelerated with the introduction of a true production laser drilling system. In order to get optimized condition for drilling to FPCB (Flexible Printed Circuit Board), we use various drill pattern as drill step. For productivity, we investigate drill path optimization method. And for the precise drilling the thermal drift of scanner and temperature change of scan system are tested.

A Study on Formation of Conductive Pattern on Polymer Using LDS (LDS를 이용한 폴리머상의 전도성 패턴 형성 연구)

  • Paik, Byoung-Man;Lee, Jae-Hoon;Shin, Dong-Sig;Lee, Kun-Sang
    • Laser Solutions
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    • v.12 no.4
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    • pp.6-11
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    • 2009
  • The LDS(Laser Direct Structuring) process uses thermoplastic polymers with a additive compound that serves as plating seed after the activation by laser. It can realize industry requirement such as miniaturization of electrical component, design flexibility and reduction of production steps. The purpose of this study is to introduce LDS, and to investigate the fundamental mechanism. Also the characteristics of conductive patterns were investigated with respect to laser fluence and intensity. We have used a pulsed fiber laser (wavelength : 1064nm) and copper electroless plating to fabricate conductive patterns. The result showed that laser induced metal-organic complex was caused metalization by electroless copper plating, the critical laser fluence was $1.41\;J/cm^2$ at a scan speed of 1 m/s.

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Time Difference of the COP Displacement according Obstacle Height during Obstacle Crossing in Older Adults (노인의 장애물 보행 시 장애물 높이에 의한 압력중심 이동시간의 차이)

  • Park, Seol;Kim, Kyoung;Park, Ji-Won
    • The Journal of Korean Physical Therapy
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    • v.23 no.2
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    • pp.1-5
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    • 2011
  • Purpose: This study examined the difference in the center of pressure (COP) displacement time in older adults according to the obstacle height during stance at each sub.phase when crossing obstacles. Methods: Fifteen older adults were enrolled in this study (${\geq}65$ years of age). The F-scan was used to measure the COP displacement time when crossing a 0, 10 and 40cm obstacle, and the stance phase was divided into 4 sub-phases according to the foot contact pattern. Results: During the stance phase, the COP displacement time increased with increasing obstacle height. During the mid-stance, terminal stance and pre-swing except for the loading response, there were significant differences in the COP displacement time according to the obstacle height. Conclusion: This study suggests that older adults show differences in the COP displacement time according to the stance sub-phase while crossing obstacles, and they use different mechanisms according the sub-phases to maintain balance during obstacle crossing.