Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 2008.11a
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- Pages.298-299
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- 2008
Images of deposited layers of organic light-emitting diodes observed by scanning-electron microscope
주사 전자 현미경으로 관찰한 유기 발광 소자의 누적층 모양
- Lee, Eun-Hye (Hongik Univ.) ;
- Yoon, Hee-Myoung (Hongik Univ.) ;
- Han, Wone-Keun (Hongik Univ.) ;
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Kim, Tae-Wan
(Hongik Univ.)
;
- Lee, Won-Jae (Kyungwon Univ.) ;
- Jang, Kyung-Uk (Kyungwon Univ.) ;
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Ahn, Joon-Ho
(KAIST)
- Published : 2008.11.06
Abstract
Images of deposited layers of organic light-emitting diodes were observed by scanning-electron microscope (SEM). We were able to see a clear cross-sectional view of deposited layers. The SEM is a type of electron microscope that images the sample surface by scanning it with a high-energy beam of electrons in a raster scan pattern. A thickness of deposited layer measured by thickness monitor is close to a real value measured by a-step surface profiler within 5%. We were able to see a formation of domains of size about 50-100nm from a surface morphology of Al, and pin holes of size about 50nm.