• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.10 no.5
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• pp.153-160
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• 2010

We optimized the Si(substrate)/$SiO_2$(cladding)/$Si_3N_4$(antiresonant cladding)/$SiO_2$(core)/air multi-layers rib-optical waveguides of antiresonant reflecting optical waveguide (ARROW) for integrated optical biosensor structure utilizing beam propagation method (BPM). Thickness of anti-resonant cladding was derived to minimize the propagation loss and leaky field mode deeply related with evanescent mode was theoretically derived. Depth, width, refractive index and cladding thickness of anti-resonant cladding were numerically calculated into 2.3${\mu}m$, 5${\mu}m$, 1.488, and 0.11${\mu}m$ respectively to minimize propagation loss using the BPM simulation tool. Finally one- and two-dimensional propagation characteristics of ARROW was confirmed.

• Journal of Power Electronics
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• v.5 no.3
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• pp.233-239
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• 2005

In this paper, a new conceptual circuit configuration of a 3-phase voltage source, soft switching AC-DC-AC converter using an IGBT module, which has one ARCPL circuit and one ARDCL circuit, is presented. In actuality, the ARCPL circuit is applied in the 3-phase voltage source rectifier side, and the ARDCL circuit is in the inverter side. And more, each power semiconductor device has a novel clamp snubber circuit, which can save the power semiconductor device from voltage and current across each power device. The proposed soft switching circuits have only two active power semiconductor devices. These ARCPL and ARDCL circuits consist of fewer parts than the conventional soft switching circuit. Furthermore, the proposed 3-phase voltage source soft switching AC-DC-AC power conversion system needs no additional sensor for complete soft switching as compared with the conventional 3-phase voltage source AC-DC-AC power conversion system. In addition to this, these soft switching circuits operate only once in one sampling term. Therefore, the power conversion efficiency of the proposed AC-DC-AC converter system will get higher than a conventional soft switching converter system because of the reduced ARCPL and ARDCL circuit losses. The operation timing and terms for ARDCL and ARCPL circuits are calculated and controlled by the smoothing DC capacitor voltage and the output AC current. Using this control, the loss of the soft switching circuits are reduced owing to reduced resonant inductor current in ARCPL and ARDCL circuits as compared with the conventional controlled soft switching power conversion system. The operating performances of proposed soft switching AC-DC-AC converter treated here are evaluated on the basis of experimental results in a 50kVA setup in this paper. As a result of experiment on the 50kVA system, it was confirmed that the proposed circuit could reduce conduction noise below 10 MHz and improve the conversion efficiency from 88. 5% to 90.5%, when compared with the hard switching circuit.

• Journal of the Korean Recycled Construction Resources Institute
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• v.12 no.2
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• pp.162-168
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• 2024

This study investigated the setting characteristics of cement paste with varying proportions of fly ash replacement using the electro-mechanical impedance (EMI) sensing technique. Cement paste samples were prepared with a water-to-binder ratio of 40 %, substituting fly ash for 10 %, 20 %, and 30 % of the cement weight. Piezoelectric (PZT) sensors were embedded in the center of each cement paste sample to continuously monitor the EMI signals. Vicat needle test and semi-adiabatic calorimetry test were conducted to validate the reliability of the EMI sensing technique in monitoring the setting of cement paste. Experimental results revealed notable changes in the magnitude and resonant frequency of the EMI resonant peaks during the setting time. It was confirmed that the setting times measured through the EMI sensing technique were correlated with those determined by the Vicat needle test and semi-adiabatic calorimetry test.

• Journal of Sensor Science and Technology
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• v.8 no.5
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• pp.368-376
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• 1999

This paper predicts the changes in the spring constant, the resonant frequency, the electrostatic force, and the displacement of a resonant structure due to non-ideal anisotropic RIE etching process. First, a $6\;{\mu}m$ thick polysilicon was etched by RIE and the anisotropy of the etched structure was measured as a function of a RF power, a $Cl_2$ flow rate and a chamber pressure. In the experimental results, an anisotropy was decreased as the RF power, the $Cl_2$ flow rate, or the chamber pressure was increased. A comb actuator's operation characteristic was predicted depending on the anisotropy variations in RIE etching. Comb actuators with three different support beam structures were investigated : fixed-fixed, crab-leg, and double crab-leg. As the RIE etch anisotropy becomes non-ideal, i.e. the cross section becomes rather a trapezoidal than a rectangular shape, it decreases spring constant, resonant frequency and electrostatic force of a comb actuator but it increases the displacement of the mass. Among the three structures, the comb actuator with double crab-leg support beams is more influenced by anisotropy variation in RIE etch than other two.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.49 no.2
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• pp.1-8
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• 2012

This paper presents the accelerometer which is a key component of TPMS(Tire Pressure Monitoring System). Generally a piezoresistive accelerometer has characteristics of lower cost, better linearity and better immunity about the environmnet noise than a capacitive one. Three types of piezoresistive accelerometers are degined and simulated using ANSYS program. The best one is a piezoresistive sensor which is supported by four beams located at the center of the edge of the mass after comparing the characteristics of resonant frequency of the three types. Considering the sensor size and a simulated maximum stress and maximum displacement, the length of beams is set as $200{\mu}m$. The size of a piezoresistive accelerometer is $3.0mm{\times}3.0mm{\times}0.4mm$. The sensor output is characterized by measuring the output characteristic depending on angle. As a result the offset voltage of the accelerometer is 43.2 mV and its sensitivity is $42.5{\mu}V/V/g$. The temperature bias drift is measured. The shock durability of the sensor is 1500g and the measuring range is 0 ~ 60 g.

• Journal of Sensor Science and Technology
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• v.5 no.5
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• pp.21-29
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• 1996

A piezoresistive silicon acceleration sensor with 8 beams, utilized by an unique silicon micromachining technique using porous silicon etching method which was fabricated on the selectively diffused (111)-oriented $n/n^{+}/n$ silicon subtrates. The width, length, and thickness of the beam was $100\;{\mu}m$, $500\;{\mu}m$, and $7\;{\mu}m$, respectively, and the diameter of the mass paddle (the region suspended by the eight beams) was 1.4 mm. The seismic mass on the mass paddle was formed about 2 mg so as to measure accelerations of the range of 50g for automotive applications. For the formation of the mass, the solder mass was loaded on the mass paddle by dispensing Pb/Sn/Ag solder paste. After the solder paste is deposited, Heat treatment was carried out on the 3-zone reflow equipment. The decay time of the output signal to impulse excitation of the fabricated sensor was observed for approximately 30 ms. The sensitivity measured through summing circuit was 2.9 mV/g and the nonlinearity of the sensor was less than 2% of the full scale output. The output deviation of each bridge was ${\pm}4%$. The cross-axis sensitivity was within 4% and the resonant frequency was found to be 2.15 KHz from the FEM simulation results.

• Journal of the Korean Society for Nondestructive Testing
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• v.31 no.5
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• pp.522-528
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• 2011

Artificial basilar membranes made of PVDF(polyvinylidene fluoride) are manufactured using microfabrication processes. The mechanical behavior of PVDF artificial basilar membrane was measured to evaluate its performance as a mechanical frequency analyzer using scanning LDV(laser Doppler vibrometer). The experimental setup consists of the microfabricated artificial basilar membrane, a loud speaker connected to an amplifier for generating acoustic pressure of specific spectral pattern, and a scanning LDV with controlling unit for measuring the displacement of the membrane on the incoming acoustic stimulation. The microfabricated artificial basilar membrane was attached tightly upon a package containing a chamber which can be filled with silicone oil before placed on the experimental setup stage. The experiment results showed that the microfabricated artificial basilar membrane has a property as a mechanical frequency analyzer.

• Journal of Food Hygiene and Safety
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• v.13 no.3
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• pp.206-212
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• 1998

An improved antibody-coated sensor system based on quartz crystal microbalance was developed for the detection of Salmonella spp. An antibody against Salmonella common structural antigen was immobilized onto one gold electrode of the piezoelectric quartz crystal surface by various immobilization procedures. The best results in sensitivity and stability were obtained with the thin layers of protein A and 3,3'-dithiopropionimidate.2HCI(DTBP), a homobifunctional thiol-cleavable crosslinker. After the addition of a S. typhimurium suspension into a reaction cell with 0.1 M sodium phosphate buffer, pH 7.2, the resonant frequency owing to S. typhimurium adsorption decreased conspicuously. The antibody-immobilized crystals prepared by the gold-protein A complex formation and DTBP thiolation showed the frequency shifts of 80 and 283 Hz, respectively. The time required for maximum frequency shift was about 30~60 min. The antibody-coated crystal could be reused for 6~8 consecutive assays.

• Korean Journal of Food Science and Technology
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• v.31 no.1
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• pp.1-6
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• 1999

A piezoelectric (PZ) biosensor system detecting Salmonella spp. was developed. The system consisted of an oscillator, a frequency counter and an antibody-immobilized quartz crystal. An anti-Salmonella antibody was immobilized on one gold. surface of the quartz crystal with protein A. Salmonella detection was made by measuring resonant frequency shift owing to a mass change by specific binding of microbial cells to the gold surface of the PZ crystal. The PZ antibody sensor was operated optimally at 0.1M phosphate buffer, pH 7.2 and $35^{\circ}C$. The sensor was quite specific to Salmonella spp. The obtained frequency shift was correlated with the Salmonella concentration in the range of $10^5{\sim}10^6\;CFU/mL$. The frequency shift increased further by addition of polystyrene beads. The Salmonella detection which is indicated by a steady-state microbial adsorption to the quartz crystal was accomplished within 50min.

• Journal of Sensor Science and Technology
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• v.24 no.6
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• pp.373-378
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• 2015

The structure of the human ear is divided into the outer ear, the middle ear, and the inner ear. The inner ear includes the cochlea that plays a very important role in hearing. Recently, the development of an artificial cochlear device for the hearing impaired with cochlear damage has been actively researched. Research has been carried out on the biomimetic piezoelectric thin film ABM (Artificial Basilar Membrane) in particular. In an effort to improve the frequency separation performance of the existing piezoelectric thin film ABM, this paper presents the design, fabrication, and characterization of the production and performance of a partially etched-type ABM material. $O_2$ plasma etching equipment was used to partially etch a piezoelectric thin film ABM to make it more flexible. The mechanical-behavior characterization of the manufactured partially etched-type ABM showed that the overall separation frequency range shifted to a lower frequency range more suitable for audible frequency bandwidths and it displayed an improved frequency separation performance. In addition, the maximum magnitude of the vibration displacement at the first local resonant frequency was enhanced by three times from 38 nm to 112 nm. It is expected that the newly designed, partially etched-type ABM will improve the issue of cross-talk between nearby electrodes and that the manufactured partially etched-type ABM will be utilized for next-generation ABM research.