• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.9 s.240
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• pp.1169-1174
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• 2005

Imprint lithography is a promising method for high-resolution and high-throughput lithography using low-cost equipment. In particular, ultraviolet-nanoimprint lithography (UV-NIL) is applicable to large area imprint easily. We have proposed a new UV-NIL process using an elementwise patterned stamp (EPS), which consists of a number of elements, each of which is separated by channel. Experiments on UV-NIL are performed on an EVG620-NIL using the EPS with 3mm channel width. The replication of uniform sub 70 nm lines using the EPS is demonstrated. We investigate the nonuniformity of residual layer caused by wafer deformation in experiment with varying wafer thickness. Severely deformed wafer works as an obstacle in spreading of dropped resin, which causes nonuniformity of thickness of residual layer. Numerical simulations are conducted to analyze aforementioned phenomenon. Wafer deformation in the process is simulated by using a simplified model, which is a good agreement with experiments.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2001.10a
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• pp.61-63
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• 2001

Residual stress distribution in injection-molded short fiber composites was determined using layer-removal method. Polysterene with 3 vol% carbon fibers was injection-molded into the tensile specimen. With milling machine layer-removal process was conducted and the curvature data were acquired. Treuting and Read analysis which is assuming isotropic material, and White analysis considering anisotropy due to the fiber orientation were used to calculate residual stress of the flow direction through the thickness direction and compared with each other.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1921-1926
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• 2003

Nano-imprint technology has been vigorously studied by many researchers for it is one of the most promising technologies for manufacturing the pattern with its critical dimension below 100nm. In the nano-imprint technology, nano patterns are transferred on a polymer film and the transferred patterns are used as an etch mask to define the designed patterns on a substrate or a metal layer. To this end, it is important to keep the residual thickness of the imprinted polymer film uniform. In this study, a novel measurement technique to measure the residual thickness of films is proposed based on nanoindentation theory. This technique has advantages of saving time and measuring the residual thickness of highly-localized portions in comparison with other techniques, but has limitation of requiring calibration process.

• Journal of the Korean Ceramic Society
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• v.27 no.3
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• pp.329-336
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• 1990

In this investigation, bar-shaped specimens which consisted of three layers are prepared to study the effects of residual compressive stress on the mechanical properties in ZTA. The outer layers contained Al2O3 and unstabilized ZrO2 and the central layer contained Al2O3 and stabilized ZrO2(with 5.10wt% Y2O3). When cooled from the sintering temperature, some of zirconia in the outer layers transformed to the monoclinic form while zirconia in the central layer was retained in the tetragonal form. The transformation which induces to dilatational expansion led to the estabilishmenet of compressive stress in the outer layers and balances tensile stress in the central layer. Decrease of outer layer thickness(for a fixed total thickness)increases residual compressive stress. Because of residual compressive stress in the outer layers, the fracture toughness of outer layers of 3-layers composite is 10.21 Mpam1/2, which is increased to 25% above in comparison with 1-layer specimens in ZTA. Also, the 3-layers composite is believed to exhibite greater fracture resistance in contact damage environment from thermal shock test.

• Journal of Environmental Science International
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• v.10 no.6
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• pp.417-422
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• 2001

The vertical structure of atmosphere was observed In investigate the variation of surface ozone concentration by vertical downward mixing of residual ozone in the atmospheric boundary layer at the Busan coastal area. Airsonde and pilot balloon measurements were made at Gamcheondong and the Kimhae airport for April 26~27, 1996. The vertical potential of potential temperature showed a residual layer between 510m and 1800m from 2100LST April 26 to 0900LST April 27. The downward mixing of ozone in the residual layer of the atmospheric boundary layer was confirmed from vertical profile of mixing ratio near 600m in the morning. The thickness of the sea breeze layer was 900m at 1500LST April 26. Thereafter, it become to be lowered with time A low level jet was measured near 900m at 0300LST on April 27 from a pibal measurement. Early morning sharp increase of surface ozone concentration at the Busan coastal area was caused by vertical downward mixing of ozone concentration rather than by photochemical reaction In the atmospheric boundary layer.

• Proceedings of the Korean Magnestics Society Conference
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• 2000.09a
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• pp.369-376
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• 2000

Change of magnetic properties in CoCrPt/Ti perpendicular media with varying CoCrPt films thickness has been studied. As CoCrPt films thickness increase, the Ms(magnetization saturation) drastically increases at thinner thickness and gradually increases with further increase in thickness from 25nm. This Ms behaviour is associated with primarily the formation of "amorphous-like" reacted layer by intermixing of CoCrPt and Ti at CoCrPt/Ti interface and secondarily change of Cr segregation mode with varying the CoCrPt films thickness. Magnetic domain structure distinctively changes with increasing CoCrPt magnetic layer(ML) thickness. Also the strength of exchange coupling measured from the slope in demagnetizing region in M-H loop changes with ML thickness. Details of the above magnetic properties will be discussed. The expansion of lattice parameters a and c at thinner thickness suggests that Cr segregation mode may be connected with the residual stress of the films. Finally, negative nucleation field(Hn) behaviour with the exchange slope will be reported.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2001.04a
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• pp.352-357
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• 2001

In this study, residual stress was investigated to evaluate damaged layer in high speed machining through simulation. In machining steel(STDll), residual stress remaining in machined surface was mainly appeared as compressive stress. The scale of this damaged layer more depends on feed per tooth and radial depth than spindle speed. Damaged layer was measured by optical microscope and hardness method. The micro-structure of damaged layer was a martensite because of cutting force and cutting temperature. Thickness of damaged layer is increased with incresing of feed per tooth and radial depth.

• Journal of Magnetics
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• v.6 no.1
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• pp.19-22
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• 2001

Change of magnetic properties in CoCrPt/Ti perpendicular media with varying CoCrPt film thickness has been studied. As the CoCrPt film thickness increases from 25 nm, the Ms (saturation magnetization) increases rapidly at first and then more gradually. This Ms behavior is associated primarily with the formation of an "amorphous-like"reacted layer created by intermixing of CoCrPt and Ti at the CoCrPt/Ti interface and secondarily with a change of the Cr segregation mode with varying CoCrPt film thickness. Magnetic domain structure distinctively changes with increasing CsCrPt magnetic layer (ML) thickness. Also the strength of exchange coupling measured from the slope in the demagnetizing region of the M-H loop changes with ML thickness. The expansion of lattice parameters a and c at smaller film thickness suggests that the Cr segregation mode may be connected with the residual stress of the films. Finally, the negative nucleation field (Hn) shows a unique behavior with the change of strength of the exchange interaction.teraction.

• Journal of the Korean Ceramic Society
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• v.32 no.12
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• pp.1337-1348
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• 1995

TZP/SUS- and ZT/SUS-functionally gradient materials (FGM) were fabricated by pressureless sintering in Ar-atmosphere. The sintering defects such as warping, frustrum formation, splitting and cracking which originated from shrinkage and sintering behaviors of metal and ceramics different from each other could be controlled by the adjustment with respect to the particle size and phase type of zirconia. The residual stresses generated on the metal and ceramic regions in FGM were characterized with X-ray diffraction method, and relaxed as the thickness and number of compositional gradient layer were increased. The residual stress states in TZP/SUS-FGM have irregular patterns by means of the different sintering behavior and cracking at ceramic-monolith. While in ZT/SUS-FGM, compressive stress is induced on ceramic-monolith by the volume expansion of monoclinic ZrO2 at phase transformation. Also, compressive stress is induced on metal-monolith by the constraint of warping which may be created to the metal direction by the difference of coefficient of thermal expansions. As a consequence, it has been verified that the residual stress generated on FGM is dominantly influenced by the thickness and number of compositional gradient layer, and the sintering defects and residual stress can be controlled by the constraint of the difference of shrinkage and sintering behaviors of each component.

• Journal of Mechanical Science and Technology
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• v.20 no.10
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• pp.1646-1652
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• 2006

A model of mechanical behavior of microcantilever due to intrinsic strain during deposition of MEMS structures is derived. A linear ordinary differential equation is derived for the beam deflection as a function of the thickness of the deposited layer. Closed-form solutions are not possible, but numerical solutions are plotted for various dimensionless ratios of the beam stiffness, the intrinsic strain, and the elastic moduli of the substrate and deposited layer. This model predicts the deflection of the cantilever as a function of the deposited layer thickness and the residual stress distribution during deposition. The usefulness of these equations is that they are indicative of the real time behavior of the structures, i.e. it predicts the deflection of the beam continuously during deposition process.