• 제목/요약/키워드: relative velocity

검색결과 1,072건 처리시간 0.024초

패턴 웨이퍼의 화학기계적 연마시 패턴 밀도의 영향과 모델링에 관한 연구 (A Study on the Effect of Pattern Density and it`s Modeling for ILD CMP)

  • 홍기식;김형재;정해도
    • 한국정밀공학회지
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    • 제19권1호
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    • pp.196-203
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    • 2002
  • Generally, non-uniformity and removal rate are important factors on measurements of both wafer and die scale. In this study, we verify the effects of the pressure and relative velocity on the results of the chemical mechanical polishing and the effect of pattern density on inter layer dielectric chemical mechanical polishing of patterned wafer. We suggest an appropriate modeling equation, transformed from Preston\`s equations which was used in glass polishing, and simulate the removal rate of patterned wafer in chemical mechanical polishing. Results indicate that the pressure and relative velocity are dominant factors for the chemical mechanical polishing and pattern density effects on removal rate of pattern wafers in die scale. The modeling is well agreed to middle and low density structures of the die. Actually, the die used in Fab. was designed to have an appropriate density, therefore the modeling will be suitable for estimating the results of ILD CMP.

온실환경변화(溫室環境變化)에 대(對)한 실험적(實驗的) 분석(分析)(II) -온습도(溫濕度)·조도(照度)·탄산(炭酸)가스·풍속(風速)의 변화(變化) 및 분포(分布)- (Experimental Analysis for Environments Variations of Greenhouses -Distributions and Variations of Temperature, Relative humidity, Illumination, Carbon dioxide and Wind velocity-)

  • 김영복;박중춘;백이
    • Journal of Biosystems Engineering
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    • 제18권1호
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    • pp.60-70
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    • 1993
  • 농업(農業)을 둘러싼 주위(周圍)의 여건변화(與件變化)에 따라 시설농업(施設農業)을 위한 온실면적(溫室面積)은 나날이 증가(增加)하고 있고 이에 따라 그 환경조절(環境調節)과 관리(管理)에 관한 기술개발(技術開發)과 연구(硏究)에 대한 관심(關心)이 가일층 증가(增加)하고 있다. 본 연구(硏究)에서는 농촌진흥청보급형연동온실(農村振興廳普及型連棟溫室)과 일반연동온실(一般連棟溫室), 그리고 단동온실(單棟溫室)에서의 온도(溫度), 습도(濕度), 조도(照度), $CO_2$, 풍속(風速)에 대한 하루 중의 狀態變化(상태변화)를 측정(測定), 분석(分析)하였으며, 이를 통하여 시설(施設)과 설비(設備)의 효과(效果)를 비교분석(比較分析)하고 그 합리적(合理的) 설치(設置)와 운용(運用)을 기하는데 이용(利用)하고자 하였다.

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소결법에 의한 $ZrO_2/Metal$계 경사기능재료에 관한 연구(1) (A Study on Zirconia/Metal.Functionally Gradient Materials by Sintering Method(1))

  • 정연길;최성철
    • 한국세라믹학회지
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    • 제31권3호
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    • pp.321-329
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    • 1994
  • Functionally gradient materials(FGM), which have the continuous or stepwise variation in a composition and microstructure, are being noticed as the material that solves problems caused by heterogeneous interface of coating or joining. And these materials also expect new functions occured by gradient composition itself. Therefore, to examine possibility of thermal barrier materials, TZP/Mo·FGM and TZP/Ni·FGM were fabricated by sintering method. As to the sintered specimens, sintering shrinkage, relative density and Vicker's hardness in each composition were examined. The phenomena due to the difference of sintering shrinkage velocity during sintering process and the thermal stress induced through differences of thermal expansion coefficient in FGM were discussed. And the structure changes at interface and microsturcture of FGM were investigated. As a results, the difference of shrinkage between ceramic and metal was about 14% in TZP/Mo and 7% in TZP/Ni. The relative density and hardness were considerably influenced by metal content changes. Owing to unbalance of sintering shrinkage velocity between ceramic and metal, various sintering defects were occured. To control these sintering defects and thermal stress, gradient composition of FGM should be narrow. The microstructure changes of FGM depended on the ceramic or metal volume percents and were analogous to the theoretical design.

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철도 전동차내의 쾌적성 평가에 관한 연구 - 온도 및 습도를 중심으로 - (Evaluation of Comfortableness in Railroad Electric Rolling Stock - Focused on Temperature and Humidity -)

  • 박덕신;배상호;정병철;이주열
    • 한국철도학회논문집
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    • 제6권1호
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    • pp.41-48
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    • 2003
  • Most of people spends their times in indoor about 85% of a day. Thus, indoor is more serious than outdoor concerned with the health. We discussed comfortableness in a railroad electric rolling stock, and focused on temperature and humidity. Electric rolling stock is one of major public transportation system because of an increasing in population and heavy traffic problems. The passengers are under the influence of indoor air quality such as air temperature, relative humidity and air velocity. Ventilation system in electric rolling stock should be designed for the health and comfort. One of the main aims is to create an acceptable thermal environment without draught problem. The draught sensation increases when the air temperature decreases and the air velocity increases. Airflow in electric rolling stork is turbulent. Temperature and humidity gradients in electric rolling stock have been studied. And, the difference between mean temperature and rotative humidity measured at 0.7, 0.9, 1.2, 1.7m above the floor. It has been found that temperature and relative humidity with large fluctuations caused more draught complaints.

Characterization of odourous compounds in air, leachate, stream and well in and around Taju-Bello Dumpsite, Lagos, Nigeria

  • Azeez, L.;Oyedeji, O.A.;Abdulsalami, I.O.;Adewuyi, S.O.
    • Advances in environmental research
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    • 제2권2호
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    • pp.143-153
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    • 2013
  • This study investigated the concentrations of odourous compounds in air, leachate, stream and well in and around Taju-Bello dumpsite. Meteorological parameters (temperature, relative humidity, wind velocity) and six odour families comprising sulphur ($H_2S$), ammonia ($NH_3$), aromatic (benzene, toluene, ethylbenzene, styrene, p-xylene, m-xylene), aliphatic (hexane), oxygenated (formaldehyde, acetaldehyde) and halogenated (tetrachloroethene, trichloroethene, carbontetrachloride) compounds were measured. Meteorological parameters suggested low dispersal of pollutants at L1 with possible perspiration and suffocation from exposure to high temperature, relative humidity and low wind velocity. The trend of abundance of odourous compounds at studied locations is of the order dumpsite (L1) > leachate (L4) > 100 m away from dumpsite (L2) > 200 m away from dumpsite (L3) > stream (L5) > well (L6). $H_2S$, Oxygenated and aromatic compounds were the major contributors to odour strength in these locations. Correlation, factor and cluster analyses of the data revealed similarities of sources as biogenics and xenobiotics inherent in the wastes as the main sources of these odourous compounds.

에너지보행과 일반보행에서 몸통운동의 특성 비교 (The Comparison of Characteristics of Trunk Motion between Energy Walking and Normal Walking)

  • 신제민
    • 한국운동역학회지
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    • 제17권3호
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    • pp.133-145
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    • 2007
  • The purpose of this paper was to compare of difference between energy walking and normal walking. Subjects were selected 8 male undergraduates. The kinematic variables of a pelvis and a thorax were analysed at the take off and contact with 3d cinematography. In addition to the variables, the phase plot angle was calculated in order to definite characteristics in the phase space. The pelvic angle and angular velocity showed significant differences in the flexion/extension between two walking patterns. The pelvic angle and angular velocity were increasing when walking speed was increasing and magnitude of the variables of energy walking was larger than corresponding values for normal walking. On the other hand, the thoracic angle demonstrated significant differences in the flexion/extension and rotation between two walking patterns. The angles of energy walking were smaller in the flexion/extension and were larger in the rotation than the angle of normal walking. The kinematic characteristics of energy walking were also showed clearly significant differences in the range of motion and the relative angle of the trunk. The angle of phase plot only showed demonstrated a significant difference in the rotation at contact between the two walking patterns.

탐색 과정시 2단 액츄에이터의 상호 작용 분석 및 트랙 끌어들임 성능 향상을 위한 제어 (Interaction Analysis of Dual-stage System during Seek Motion, and Control for Track Pull-in Enhancement)

  • 최진영;박태욱;양현석;박노철;박영필
    • 한국소음진동공학회:학술대회논문집
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    • 한국소음진동공학회 2004년도 추계학술대회논문집
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    • pp.236-241
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    • 2004
  • In this paper, the dual stage interaction between the coarse actuator and the fine actuator of an optical disk drive and the control method to enhance the track pull-in performance are discussed. First, the interaction analyses for the dual stage, and the experiments to find the each actuator dynamics are studied. From the experiments results, some physical parameters was derived, then, some simulations are performed to find the residual vibration effect of the fine actuator during seek motion. Second, the fine actuator control method to reduce the relative velocity, which is a key factor in track pull-in performance, between the target track and beam spot is proposed. From simulations, we show that fine actuator control which has same frequency and same phase of the disturbance is effective to reduce the relative velocity, hence, the control method is good approach in the track pull-in enhancement. Finally, the some comments are discussed briefly.

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Wind-induced vibration fragility of outer-attached tower crane to super-tall buildings: A case study

  • Lu, Yi;Zhang, Luo;He, Zheng;Feng, Fan;Pan, Feng
    • Wind and Structures
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    • 제32권5호
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    • pp.405-421
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    • 2021
  • To gain insight into the wind-induced safety concerns associated with attached tower cranes during the construction of super-tall buildings, a 606 m level frame-core tube super-tall building is selected to investigate the wind-induced vibration response and fragility of an outer-attached tower crane at all stages of construction. The wind velocity time history samples are artificially generated and used to perform dynamic response analyses of the crane to observe the effects of wind velocity and wind direction under its working and non-working resting state. The adverse effects of the relative displacement response at different connection supports are also identified. The wind-resistant fragility curves of the crane are obtained by introducing the concept of incremental dynamic analysis. The results from the investigation indicate that a large relative displacement between the supports can substantially amplify the response of the crane at high levels. Such an effect becomes more serious when the lifting arm is perpendicular to the plane of the connection supports. The flexibility of super-tall buildings should be considered in the design of outer-attached tower cranes, especially for anchorage systems. Fragility analysis can be used to specify the maximum appropriate height of the tower crane for each performance level.

낙동강 모래와 건설재료간의 직접전단시험에 의한 마찰각 특성 (Characteristics of Friction Angles between the Nak-dong River Sand and Construction Materials by Direct Shear Test)

  • 김영수;김대만
    • 한국지반공학회논문집
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    • 제25권4호
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    • pp.105-112
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    • 2009
  • 본 연구에서는 낙동강 모래의 내부마찰각과 모래와 건설재료들과의 접촉면에서 발생되는 표면마찰각의 특성을 파악하기 위하여 모래의 상대밀도와 전단속도를 변화시켜 목재, 강재, 몰탈, 그리고 역청재와 일련의 직접전단시험을 실시하였다. 시험결과 모든 경우에서 모래의 내부마찰각이 건설재료와의 표면마찰각보다 항상 크게 나타났고, 전단속도가 빠를수록 마찰각이 조금 증가되었다. 모래의 간극비가 작아짐에 의한 조밀화에 따라 마찰각은 선형적으로 증가하였으며, 간극비와 상대밀도의 변화에 따라 마찰각을 산정할 수 있는 식을 제시하였다. 또한 건설재료의 표면거칠기는 표면마찰각에 있어 중요한 인자임을 알 수 있었다.

소형 쉘앤튜브형 열교환기의 운전 조건에 따른 열유동 거동 특성 해석 (Analysis on Characteristics of Behavior of Thermal Flow According to Operation Conditions of Small-sized Shell and Tube-type Heat Exchanger)

  • 양영준
    • 한국산업융합학회 논문집
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    • 제26권6_2호
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    • pp.1109-1115
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    • 2023
  • The shell and tube-type heat exchanger was the most utilized in industrial field because of its simple structure and wide operation conditions and so on. This study was performed to investigate the characteristics of behavior of thermal flow according to operation condition of small-sized shell and tube-type heat exchanger. The operation conditions, here, were set up to flow rate of hot air with temperature of 100℃, number of baffle and cut rate of baffle(BCR) using numerical analysis. As the results, both mean relative pressure and relative pressure drop was increased with quadratic curve in case of less than BCR 25%, however, decreased linearly in case of more than BCR 25%. The collision with first baffle by flow velocity and temperature, of hot air, respectively, was depended on BCR. Further it showed that the behaviors between flow velocity and temperature were almost similar.