• Proceedings of the KIEE Conference
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• 2006.10c
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• pp.211-213
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• 2006

In this study, plasma etching process was modeled by using support vector machine (SVM). The data used in modeling were collected from the etching of silica thin films in inductively coupled plasma. For training and testing neural network, 9 and 6 experiments were used respectively. The performance of SVM was evaluated as a function of kernel type and function type. For the kernel type, Epsilon-SVR and Nu-SVR were included. For the function type, linear, polynomial, and radial basis function (RBF) were included. The performance of SVM was optimized first in terms of kernel type, then as a function of function type. Five film characteristics were modeled by using SVM and the optimized models were compared to statistical regression models. The comparison revealed that statistical regression models yielded better predictions than SVM.

• Journal of International Society for Simulation Surgery
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• v.2 no.1
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• pp.7-9
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• 2015

Purpose In the many face-related application such as head pose estimation, 3D face modeling, facial appearance manipulation, the robust and fast facial feature extraction is necessary. We present the facial feature extraction method based on shape regression and feature selection for real-time facial feature extraction. Materials and Methods The facial features are initialized by statistical shape model and then the shape of facial features are deformed iteratively according to the texture pattern which is selected on the feature pool. Results We obtain fast and robust facial feature extraction result with error less than 4% and processing time less than 12 ms. The alignment error is measured by average of ratio of pixel difference to inter-ocular distance. Conclusion The accuracy and processing time of the method is enough to apply facial feature based application and can be used on the face beautification or 3D face modeling.

• Journal of the Korean Society of Safety
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• v.24 no.1
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• pp.69-77
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• 2009

This paper reports the aging driver traffic accident severity modeling results. For the modeling, Poisson regression approach is applied using the data set obtained from the Korea Transportation Safety Authority's simulator-based driver aptitude test results. The test items include the estimations of moving objects' speed and stopping distance, drivers' multi-task capability, and kinetic depth perception and so on. The resulting model with the response variable of equivalent property damage only(EPDO) indicated that EPDO is significantly influenced by moving objects' speed estimation and drivers' multi-task capabilities. More interestingly, a comparison with the younger driver model revealed that the degradation of such capabilities may result in severer crashes for older drivers as suggested by the higher estimated parameters for the older driver model.

• Transactions on Electrical and Electronic Materials
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• v.6 no.6
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• pp.256-261
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• 2005

This paper presents that the modeling to predict the characteristics with respect to the performance of solenoid embedded inductors manufactured by LTCC process via the nonlinear regression model based on the quasi-Newton method. In order to reduce the runs, the design of experiments (DOE) was used to generate the design space. The nonlinear process models were constructed by the piecewise regression model based on the quasi-Newton method for estimating the model coefficient with the break point on the statistical confidence intervals. Those models were verified by the model accuracy checking based on the assumption statistically.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.20 no.3
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• pp.765-774
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• 1996

Computer Integrated Manufacturing(CIM) requires models of manufacturing processes to be implemented on the computer. These models are typically used for determining optimal process control parameters or designing adaptive control systems. In spite of the progress made in the mechanistic modeling, however, empirical models derived from experimental data play a maior role in manufacturing process modeling. This paper describes the development of a meural metwork medel for injection molding. This paper describes the development of a nueral network model for injection molding process. The model uses the CAE analysis data based on Taguchi method. The developed model is, then, compared with the traditional polynomial regression model to assess the applicabilit in practice.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.11
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• pp.831-836
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• 2010

In this paper, Plasma Enhanced Chemical Vapor Deposition (PECVD) $SiO_2$ film properties are modeled using statistical analysis and neural networks. For systemic analysis, Box-Behnken's 3 factor design of experiments (DOE) with response surface method are used. For characterization, deposited film thickness and film stress are considered as film properties and three process input factors including plasma RF power, flow rate of $N_2O$ gas, and flow rate of 5% $SiH_4$ gas contained at $N_2$ gas are considered for modeling. For film thickness characterization, regression based model showed only 0.71% of root mean squared (RMS) error. Also, for film stress model case, both regression model and neural prediction model showed acceptable RMS error. For sensitivity analysis, compare to conventional fixed mid point based analysis, proposed sensitivity analysis for entire range of interest support more process information to optimize process recipes to satisfy specific film characteristic requirements.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.65 no.2
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• pp.108-113
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• 2016

The real-world problems usually show nonlinear and multi-variate characteristics, so it is difficult to establish concrete mathematical models for them. Thus, it is common to practice data-driven modeling techniques in these cases. Among them, most widely adopted techniques are regression model and intelligent model such as neural networks. Regression model has drawback showing lower performance when much non-linearity exists between input and output data. Intelligent model has been shown its superiority to the linear model due to ability capable of effectively estimate desired output in cases of both linear and nonlinear problem. This paper proposes modeling method of daily photovoltaic power systems using ELM(Extreme Learning Machine) based modular networks. The proposed method uses sub-model by fuzzy clustering rather than using a single model. Each sub-model is implemented by ELM. To show the effectiveness of the proposed method, we performed various experiments by dataset acquired during 2014 in real-plant.

• Journal of Ecology and Environment
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• v.29 no.4
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• pp.343-352
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• 2006

This study investigated the relationship between land cover and the water quality variables in the rivers, which are located in the Yamaguchi prefecture of West Japan. The study area included 12 catchments covering $5,809\;Km^2$. pH, dissolved oxygen, suspended solid, E. coli, total nitrogen and total phosphorus were considered as river water quality variables. Satellite data was applied to generate land cover map. For linking alterations in land cover (at whole catchment and buffer zone levels) and the river water quality variables, multiple regression modeling was applied. The results indicated that non-spatial attribute (%) of land cover types (at whole catchment level) consistently explained high amounts of variation in biological oxygen demand (72%), suspended solid (72%) and total nitrogen (87%). At buffer zone-scale, multiple regression models that were developed to represent the linkage between the alterations of land cover and the river water quality variables could also explain high level of total variations in suspended solid (86%) and total nitrogen (91%).

• YAKHAK HOEJI
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• v.57 no.1
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• pp.32-36
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• 2013

The purpose of this study was to determine the influence of assay error for improved pharmacokinetic modeling and simulation of vancomycin on the Bayesian and nonlinear least squares regression analysis in 24 Korean gastric cancer patients. Vancomycin 1.0 g was administered intravenously over 1 hr every 12 hr. Three specimens were collected at 72 hr after the first dose from all patients at the following times, at 0.5 hr before regularly scheduled infusion, at 0.5 hr and 2 hr after the end of 1 hr infusion. Serum vancomycin levels were analyzed by fluorescence polarization immunoassay technique with TDX-FLX. The standard deviation (SD) of the assay over its working range had been determined at the serum vancomycin concentrations of 0, 20, 40, 60, 80 and $120{\mu}g/ml$ in quadruplicate. The polynomial equation of vancomycin assay error was found to be SD $({\mu}g/ml)=0.0224+0.0540C+0.00173C^2$ ($R^2=0.935$). There were differences in the influence of weight with vancomycin assay error on pharmacokinetic parameters of vancomycin using the nonlinear least squares regression analysis but there were no differences on the Bayesian analysis. This polynomial equation can be used to improve the precision of fitting of pharmacokinetic models to optimize the process of model simulation both for population and for individualized pharmacokinetic models. The result suggests the improvement of dosage regimens for the better and safer care of patients receiving vancomycin.

• Journal of the Semiconductor & Display Technology
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• v.18 no.2
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• pp.48-52
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• 2019

Virtual metrology, which is one of APC techniques, is a method to predict characteristics of manufactured films using machine learning with saving time and resources. As the photoresist is no longer a mask material for use in high aspect ratios as the CD is reduced, hard mask is introduced to solve such problems. Among many types of hard mask materials, amorphous carbon layer(ACL) is widely investigated due to its advantages of high etch selectivity than conventional photoresist, high optical transmittance, easy deposition process, and removability by oxygen plasma. In this study, VM using different machine learning algorithms is applied to predict the thickness of ACL and trained models are evaluated which model shows best prediction performance. ACL specimens are deposited by plasma enhanced chemical vapor deposition(PECVD) with four different process parameters(Pressure, RF power, $C_3H_6$ gas flow, $N_2$ gas flow). Gradient boosting regression(GBR) algorithm, random forest regression(RFR) algorithm, and neural network(NN) are selected for modeling. The model using gradient boosting algorithm shows most proper performance with higher R-squared value. A model for predicting the thickness of the ACL film within the abovementioned conditions has been successfully constructed.