• Title/Summary/Keyword: reaction-bonded SiC

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Optimization of Binder Burnout for Reaction Bonded Si3N4 Substrate Fabrication by Tape Casting Method

  • Park, Ji Sook;Lee, Hwa Jun;Ryu, Sung Soo;Lee, Sung Min;Hwang, Hae Jin;Han, Yoon Soo
    • Journal of the Korean Ceramic Society
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    • v.52 no.6
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    • pp.435-440
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    • 2015
  • It is a challenge from an industrial point of view to fabricate silicon nitride substrates with high thermal conductivity and good mechanical properties for power devices from high-purity Si scrap powder by means of thick film processes such as tape casting. We characterize the residual carbon and oxygen content after the binder burnout followed by nitridation as a function of the temperature in the temperature range of $300^{\circ}C-700^{\circ}C$ and the atmosphere in a green tape sample which consists of high-purity Si powder and polymer binders such as polyvinyl butyral and dioctyl phthalate. The optimum condition of binder burnout is suggested in terms of the binder removal temperature and atmosphere. If considering nitridation, the burnout of the organic binder in air compared to that in a nitrogen atmosphere could offer an advantage when fabricating reaction-bonded $Si_3N_4$ substrates for power devices to enable low carbon and oxygen contents in green tape samples.

Effect of Green Microstructure on Sintered Microstructure and Mechanical Properties of Reaction-Bonded Silicon Carbide (성형미세구조가 반응소결 탄화규소체의 소결미세구조 및 기계적 특성에 미치는 영향)

  • 박현철;김재원;백운규;최성철
    • Journal of the Korean Ceramic Society
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    • v.36 no.1
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    • pp.97-105
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    • 1999
  • In the binary system of SiC and carbon, porosity and pore size distribution of green body was controlled by varying pH, by the addition of polyelectrolyte dispersants, and by using different particle size of starting powders. The preforms having different green microstructure were fabricated by slip casting from suspensions having different dispersion condition. The reaction bonding process was carried out for these preforms. The condition of reaction bonding was 1600$^{\circ}C$ and 20 min. under vacuum atmosphere. The analyses of optical and SEM were studied to investigate the effect of green microstructure on that of reaction bonded silicon carbide and subsequently the mechanical properties of sintered body was investigated. Different green microstructures were obtained from suspensions having different dispersion condition. It was found that the pore size could be remarkably reduced for a fine SiC(0.5$\mu\textrm{m}$). The bimodal microstructure was not found in the present study, which is frequently observed in the typical reaction bonded silicon carbide. It is considered that the ratio between SiC and C was responsible for the formation of bimodal microstructure. For the preform fabricated from the well dispersed suspension, the 3-point bending strength of reaction-bonded silicon carbide was 310${\pm}$40 MPa compared to the specimen fabricated from relatively agglomerated particles having lower value 260${\pm}$MPa.

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Fabrication of CVD SiC Double Layer Structure from the Microstructural Change Through Input Gas Ratio (입력기체비를 이용한 미세구조 변화로부터 화학증착 탄화규소의 복층구조 제작)

  • 오정환;왕채현;최두진;송휴섭
    • Journal of the Korean Ceramic Society
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    • v.36 no.9
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    • pp.937-945
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    • 1999
  • In an effort to protect a RBSC(reaction -bonded SiC) tube SiC films from methyltrichlorosilane(MTS) by low pressure chemical vapor deposition were deposited in hydrogen atmosphere on the RBSC(reaction-bonded SiC) substrates over a range of input gas ratio(${\alpha}=P_{H2}/P_{MTS}=Q_{H2}/Q_{MTS}$=1 to 10) and deposition temperatures(T=1050~1300$^{\circ}C$). At the temper-ature of 1250$^{\circ}C$ the growth rate of SiC films increased and then decreased with decreasing the input gas ratio. The microstructure of SiC films was changed from granular type structure exhibiting (111) preferred orientation in the high input gas ratios to faceted columnar grain structure showing (220) in the low input gas ratios. The similar microstructure change was obtained by increasing the deposition temperature. These results were closely related to a change of deposition mechanism. Double layer structure having granular type and faceted ciolumnar grain structure from the manipulation of mechanism. Double layer structure having granular type and faceted columnar grain structure from the manipulation of the input gas ratio without changing the deposition temperatue was successfully fabricated through in -site process.

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Densification Behavior of Reaction-Bonded Silicon Nitride Prepared by Using Coarse Si Powders (조대 Si입자분말을 사용한 질화반응 Si3N4의 치밀화 거동)

  • 이주신;문지훈;한병동;박동수;김해두
    • Journal of the Korean Ceramic Society
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    • v.39 no.1
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    • pp.45-50
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    • 2002
  • Effect of sintering additives on the densification behavior of reaction-bonded silicon nitride prepared by using coarse Si powders is discussed. Sintering additives such as 6 wt% $Y_2O_3$+1wt% $A1_2O_3$ (6YlA) did not give rise to full densification, while full densification was obtained by using the sintering additives such as 6wt% $Y_2O_3$+3 wt% $A1_2O_3$+ 2wt% $SiO_2$ (6Y3A2S) and 9wt% $Y_2O_3$+ 1.5wt% $A1_2O_3$+ 3wt% $SiO_2$ (9Yl.5A3S). In the case of 6Y3A2S addition, high fracture strength of 960 MPa and the fracture toughness of $6.5 MPa.m^{1/2}$ were obtained.

Synthesis of Si-Al Carbonates from Kaolin and Sintering Characteristics by Reaction Bonding Si3N4 (카올린으로부터 Si-Al 탄화물의 합성 및 Si$_3$N$_4$ 결합 소결 특성)

  • Baik, Yong-Hyuck;Kim, Young-ku;Han, Chang;Kwon, Yang-Ho
    • Journal of the Korean Ceramic Society
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    • v.28 no.9
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    • pp.667-674
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    • 1991
  • In this study, Kaolin was carbonized at 1300~175$0^{\circ}C$ and its constituent mineral change was investigated. Carbonized kaolin at 1$650^{\circ}C$ was mixed with metallic silicon, formed and nitrified at 135$0^{\circ}C$ in N2-NH3 atmosphere. Properties of this product such as porosity, bulk density, MOR, nitrization rate and oxidation resistence were measured, and its mineralogical changes were investigated by XRD. The results were as follows; 1) $\beta$-SiC was initially synthesized at 150$0^{\circ}C$, and its amount was continuously increased with reaction temperature to 1$700^{\circ}C$. 2) At 1$600^{\circ}C$, mullite was rapidly decomposed and the amounts of $\beta$-SiC and $\alpha$-Al2O3 were increased simultaneously. 3) By adding alkali to kaolin, the decomposition temperature of mullite was dropped approximately 10$0^{\circ}C$, but the amount of $\alpha$-SiC was increased. 4) The highest values of their nitrization rate and MOR were obtained at the specimen of 35 wt% metallic silicon in nitrization reaction. 5) It seems that increment of $\alpha$-Si3N4 and $\alpha$-Al2O3 phase during nitrization was due to the decomposition of Al4SiC4 existed in carbonized kaolin. 6) Si3N4 bonded SiC-Al2O3 composite were fabricated from kaolin at relatively low temperature (135$0^{\circ}C$).

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Effect of Si Addition on Resistivity of Porous SiC-Si Composite for Heating Element Application (다공성 SiC-Si 복합체의 전기비저항에 미치는 Si 첨가량의 영향)

  • Jun, Shinhee;Lee, Wonjoo;Kong, Young-Min
    • Korean Journal of Materials Research
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    • v.25 no.5
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    • pp.258-263
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    • 2015
  • To fabricate porous SiC-Si composites for heating element applications, both SiC powders and Si powders were mixed and sintered together. The properties of the sintered SiC-Si body were investigated as a function of SiC particle size and/or Si particle contents from 10 wt% to 40 wt%, respectively. Porous SiC-Si composites were fabricated by Si bonded reaction at a sintering temperature of $1650^{\circ}C$ for 80 min. The microstructure and phase analysis of SiC-Si composites that depend on Si particle contents were characterized using scanning electron microscope and X-ray diffraction. The electrical resistivity of SiC-Si composites was also evaluated using a 4-point probe resistivity method. The electrical resistivity of the sintered SiC-Si body sharply decreased as the amount of Si addition increased. We found that the electrical resistivity of porous SiC-Si composites is closely related to the amount of Si added and at least 20 wt% Si are needed in order to apply the SiCSi composites to the heating element.

Magnetic Property and Chemical Reaction in the Interface of Ferrite and Glass (페라이트와 유리의 접합계면반응의 자기적 특성)

  • 제해준;박병원;홍성현;홍국선
    • Journal of the Korean Ceramic Society
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    • v.30 no.5
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    • pp.357-364
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    • 1993
  • Chemical reaction occurred in the interface of Mn-Zn ferrite and glass after bonding. Effects of the formation of reaction layer on the magnetic properties were investigated. The composition of glass was 23PbO-61SiO2-6ZnO-8Na2O-2K2O and the ferrite was chosen to have a high permeability. Toroid samples of ferrites bonded with glasses, were heat-treated at $700^{\circ}C$, 80$0^{\circ}C$ and 90$0^{\circ}C$ for 1h. The reaction was observed to increase with bonding temperature, resulting in the development of reaction layer. Subsequently the initial permeability was found to be decreased. The permeabilities decreased by 25% with increasing bonding temperature from $700^{\circ}C$ to 80$0^{\circ}C$. At the bonding temperature of 90$0^{\circ}C$, the permeability was decreased by 45%, compared to that of 80$0^{\circ}C$.

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